Patents Assigned to Storage Technology
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Method of forming a device with FinFET split gate non-volatile memory cells and FinFET logic devices
Patent number: 11114451Abstract: A method of forming a device with a silicon substrate having upwardly extending first and second fins. A first implantation forms a first source region in the first silicon fin. A second implantation forms a first drain region in the first silicon fin, and second source and drain regions in the second silicon fin. A first channel region extends between the first source and drain regions. A second channel region extends between the second source and drain regions. A first polysilicon deposition is used to form a floating gate that wraps around a first portion of the first channel region. A second polysilicon deposition is used to form an erase gate wrapping around first source region, a word line gate wrapping around a second portion of the first channel region, and a dummy gate wrapping around the second channel region. The dummy gate is replaced with a metal gate.Type: GrantFiled: February 27, 2020Date of Patent: September 7, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Feng Zhou, Xian Liu, JinHo Kim, Serguei Jourba, Catherine Decobert, Nhan Do -
Patent number: 11081553Abstract: A method of forming a memory device includes forming a second insulation layer on a first conductive layer formed on a first insulation layer formed on semiconductor substrate. A trench is formed into the second insulation layer extending down and exposing a portion of the first conductive layer, which is etched or oxidized to have a concave upper surface. Two insulation spacers are formed along sidewalls of the trench, having inner surfaces facing each other and outer surfaces facing away from each other. A source region is formed in the substrate between the insulation spacers. The second insulation layer and portions of the first conductive layer are removed to form floating gates under the insulation spacers. A third insulation layer is formed on side surfaces of the floating gates. Two conductive spacers are formed along the outer surfaces. Drain regions are formed in the substrate adjacent the conductive spacers.Type: GrantFiled: May 6, 2020Date of Patent: August 3, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Leo Xing, Chunming Wang, Guo Yong Liu, Melvin Diao, Xian Liu, Nhan Do
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Patent number: 11074980Abstract: A memory device that includes a memory array having pluralities of non-volatile memory cells, a plurality of index memory cells each associated with a different one of the pluralities of the non-volatile memory cells, and a controller. The controller is configured to erase the pluralities of non-volatile memory cells, set each of the index memory cells to a first state, and program first data into the memory array by reading the plurality of index memory cells and determining that a first one of the index memory cells is in the first state, programming the first data into the plurality of the non-volatile memory cells associated with the first one of the index memory cells, and setting the first one of the index memory cells to a second state different from the first state.Type: GrantFiled: March 9, 2020Date of Patent: July 27, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Xiaozhou Qian, Xiao Yan Pi, Vipin Tiwari
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Patent number: 11048415Abstract: Aspects of the innovations herein are consistent with a storage system for storing variable sized objects. According to certain implementations, the storage system may be a transaction-based system that uses variable sized objects to store data, and/or may be implemented using data stores, such as arrays disks arranged in ranks. In some exemplary implementations, each rank may include multiple stripes, each stripe may be read and written as a convenient unit for maximum performance, and/or a rank manager may be provided to dynamically configure the ranks. In certain implementations, the storage system may include a stripe space table that contains entries describing the amount of space used in each stripe. Further, an object map may provide entries for each object in the storage system describing the location, the length and/or version of the object.Type: GrantFiled: October 2, 2019Date of Patent: June 29, 2021Assignee: Primos Storage Technology, LLCInventor: Robert E. Cousins
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Patent number: 11031050Abstract: In one aspect, the invention concerns a memory system that compensates for power level variations in sense amplifiers for multilevel memory. For example, a compensation circuit can be employed to compensate for current or voltage variations in the power supplied to multilevel memory sense amplifiers. As another example, compensation can be accomplished by application of a bias voltage to the power supply. Another example is a sense amplifier configured with improved input common mode voltage range. Such sense amplifiers can be two-pair and three-pair sense amplifiers. Further examples of the invention include more simplified sense amplifier configurations, and sense amplifiers having reduced leakage current.Type: GrantFiled: July 30, 2019Date of Patent: June 8, 2021Assignee: Silicon Storage Technology, Inc.Inventor: Hieu Van Tran
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Patent number: 11017866Abstract: A method of improving stability of a memory device having a controller configured to program each of a plurality of non-volatile memory cells within a range of programming states bounded by a minimum program state and a maximum program state. The method includes testing the memory cells to confirm the memory cells are operational, programming each of the memory cells to a mid-program state, and baking the memory device at a high temperature while the memory cells are programmed to the mid-program state. Each memory cell has a first threshold voltage when programmed in the minimum program state, a second threshold voltage when programmed in the maximum program state, and a third threshold voltage when programmed in the mid-program state. The third threshold voltage is substantially at a mid-point between the first and second threshold voltages, and corresponds to a substantially logarithmic mid-point of read currents.Type: GrantFiled: February 27, 2020Date of Patent: May 25, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Viktor Markov, Alexander Kotov
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Patent number: 11018147Abstract: A method of forming a memory device includes forming a floating gate on a memory cell area of a semiconductor substrate, having an upper surface terminating in an edge. An oxide layer is formed having first and second portions extending along the logic and memory cell regions of the substrate surface, respectively, and a third portion extending along the floating gate edge. A non-conformal layer is formed having a first, second and third portions covering the oxide layer first, second and third portions, respectively. An etch removes the non-conformal layer third portion, and thins but does not entirely remove the non-conformal layer first and second portions. An etch reduces the thickness of the oxide layer third portion. After removing the non-conformal layer first and second portions, a control gate is formed on the oxide layer second portion and a logic gate is formed on the oxide layer first portion.Type: GrantFiled: February 4, 2020Date of Patent: May 25, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Jinho Kim, Elizabeth Cuevas, Parviz Ghazavi, Bernard Bertello, Gilles Festes, Catherine Decobert, Yuri Tkachev, Bruno Villard, Nhan Do
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Patent number: 10998325Abstract: A memory device that includes source and drain regions formed in a semiconductor substrate, with a first channel region of the substrate extending there between. A floating gate is disposed over and insulated from the channel region, wherein the conductivity of the channel region is solely controlled by the floating gate. A control gate is disposed over and insulated from the floating gate. An erase gate is disposed over and insulated from the source region, wherein the erase gate includes a notch that faces and is insulated from an edge of the floating gate. Logic devices are formed on the same substrate. Each logic device has source and drain regions with a channel region extending there between, and a logic gate disposed over and controlling the logic device's channel region.Type: GrantFiled: December 3, 2018Date of Patent: May 4, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Catherine Decobert, Hieu Van Tran, Nhan Do
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Patent number: 10991433Abstract: A memory device having non-volatile memory cells and a controller. In response to a first command for erasing and programming a first group of the memory cells, the controller determines the first group can be programmed within substantially 10 seconds of their erasure, erases the first group, and programs the first group within substantially 10 seconds of their erasure. In response to a second command for erasing and programming a second group of the memory cells, the controller determines that the second group cannot be programmed within substantially 10 seconds of their erasure, divides the second group into subgroups of the memory cells each of which can be programmed within substantially 10 seconds of their erasure, and for each of the subgroups, erase the subgroup and program the subgroup within substantially 10 seconds of their erasure.Type: GrantFiled: February 27, 2020Date of Patent: April 27, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Viktor Markov, Alexander Kotov
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Patent number: 10937794Abstract: A memory device having plurality of upwardly extending semiconductor substrate fins, a memory cell formed on a first fin and a logic device formed on a second fin. The memory cell includes source and drain regions in the first fin with a channel region therebetween, a polysilicon floating gate extending along a first portion of the channel region including the side and top surfaces of the first fin, a metal select gate extending along a second portion of the channel region including the side and top surfaces of the first fin, a polysilicon control gate extending along the floating gate, and a polysilicon erase gate extending along the source region. The logic device includes source and drain regions in the second fin with a second channel region therebetween, and a metal logic gate extending along the second channel region including the side and top surfaces of the second fin.Type: GrantFiled: December 3, 2018Date of Patent: March 2, 2021Assignee: Silicon Storage Technology, Inc.Inventors: Feng Zhou, Jinho Kim, Xian Liu, Serguei Jourba, Catherine Decobert, Nhan Do
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Patent number: 10883620Abstract: A valve assembly that provides reliable opening and closing valves at specified times despite changing performance characteristics of the valve is disclosed. The valve assembly includes a controllable valve selectively actuatable to control flow of a fluid therethrough, with the controllable valve having a variable valve open/close response time. The valve assembly also includes a plurality of sensors configured to measure current operational parameters of the controllable valve and/or the fluid and a valve controller programmed to process valve timing control instructions generated by an external source, process inputs from the plurality of sensors regarding the measured operational parameters of the controllable valve and/or the fluid, and provide an actuation signal to the controllable valve based on the valve timing control instructions and the inputs from the plurality of sensors, so as to control a timing of an actuation of the controllable valve.Type: GrantFiled: January 11, 2018Date of Patent: January 5, 2021Assignee: Bright Energy Storage Technologies, LLPInventors: Nikola Milivojevic, Yusuf Gurkaynak, Jacob Lee Fitzgerald, Scott Raymond Frazier
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Patent number: 10878897Abstract: A memory device includes memory cells each configured to produce an output current during a read operation. Circuitry is configured to, for each of the memory cells, generate a read value based on the output current of the memory cell. Circuitry is configured to, for each of the memory cells, multiply the read value for the memory cell by a multiplier to generate a multiplied read value, wherein the multiplier for each of the memory cells is different from the multipliers for any others of the memory cells. Circuitry is configured to sum the multiplied read values. The read values can be electrical currents, electrical voltages or numerical values. Alternatively, added constant values can be used instead of multipliers. The multipliers or constants can be applied to read currents from individual cells, or read currents on entire bit lines.Type: GrantFiled: December 7, 2018Date of Patent: December 29, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Vipin Tiwari, Hieu Van Tran, Nhan Do
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Patent number: 10879252Abstract: A pair of memory cells that includes first and second spaced apart trenches formed into the upper surface of a semiconductor substrate, and first and second floating gates disposed in the first and second trenches. First and second word line gates disposed over and insulated from a portion of the upper surface that is adjacent to the first and second floating gates respectively. A source region is formed in the substrate laterally between the first and second floating gates. First and second channel regions extend from the source region, under the first and second trenches respectively, along side walls of the first and second trenches respectively, and along portions of the upper surface disposed under the first and second word line gates respectively. The first and second trenches only contain the first and second floating gates and insulation material respectively.Type: GrantFiled: December 3, 2018Date of Patent: December 29, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Leo Xing, Andy Liu, Xian Liu, Chunming Wang, Melvin Diao, Nhan Do
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Publication number: 20200395370Abstract: A method of forming a semiconductor device where memory cells and some logic devices are formed on bulk silicon while other logic devices are formed on a thin silicon layer over insulation over the bulk silicon of the same substrate. The memory cell stacks, select gate poly, and source regions for the memory devices are formed in the memory area before the logic devices are formed in the logic areas. The various oxide, nitride and poly layers used to form the gate stacks in the memory area are formed in the logic areas as well. Only after the memory cell stacks and select gate poly are formed, and the memory area protected by one or more protective layers, are the oxide, nitride and poly layers used to form the memory cell stacks removed from the logic areas, and the logic devices are then formed.Type: ApplicationFiled: August 27, 2020Publication date: December 17, 2020Applicant: Silicon Storage Technology,Inc.Inventors: Jinho Kim, XIAN LIU, FENG ZHOU, PARVIZ GHAZAVI, STEVEN LEMKE, NHAN DO
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Patent number: 10847227Abstract: Numerous embodiments of an improved charge pump design are disclosed for generating the high voltages necessary to perform erase and program operations in non-volatile flash memory devices. In these embodiments, each boost stage in the charge pump is modified to overcome a deficiency in prior art charge pumps whereby voltage actually would decrease in the final boost stage. These modifications include the addition of one or more of a clock doubling circuit, a local self-precharge circuit, a feed-forward precharge circuit, a feed-backward precharge circuit, and a hybrid circuit comprising NMOS and PMOS transistors and diodes.Type: GrantFiled: December 13, 2018Date of Patent: November 24, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Hieu Van Tran, Anh Ly, Thuan Vu, Kha Nguyen, Hien Pham, Stanley Hong, Stephen T. Trinh
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Patent number: 10838652Abstract: A memory device with memory cells each including source and drain regions with a channel region there between, a floating gate over a first channel region portion, a select gate over a second channel region portion, a control gate over the floating gate, and an erase gate over the source region. Control circuitry is configured to, for one of the memory cells, apply a first pulse of programming voltages that includes a first voltage applied to the control gate, perform a read operation that includes detecting currents through the channel region for different control gate voltages to determine a target control gate voltage using the detected currents that corresponds to a target current through the channel region, and apply a second pulse of programming voltages that includes a second voltage applied to the control gate that is determined from the first voltage, a nominal read voltage and the target voltage.Type: GrantFiled: December 12, 2018Date of Patent: November 17, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Viktor Markov, Alexander Kotov
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Patent number: 10833179Abstract: A method of forming a non-volatile memory cell on a substrate having memory cell and logic circuit regions by forming a pair of conductive floating gates in the memory cell region, forming a first source region in the substrate between the pair of floating gates, forming a polysilicon layer in both regions, forming an oxide layer over the polysilicon layer in the logic circuit region, performing a chemical-mechanical polish of the polysilicon layer in the memory cell area leaving a first block of the polysilicon layer between the floating gates that is separated from remaining portions of the polysilicon layer, and selectively etching portions of the polysilicon layer to result in: second and third blocks of the polysilicon layer disposed in outer regions of the memory cell area, and a fourth block of the polysilicon layer in the logic circuit region.Type: GrantFiled: September 19, 2019Date of Patent: November 10, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Chunming Wang, Leo Xing, Andy Liu, Melvin Diao, Xian Liu, Nhan Do
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Patent number: 10833178Abstract: A method of forming a non-volatile memory cell on a substrate having memory cell and logic circuit regions by forming a pair of conductive floating gates in the memory cell region, forming a first source region in the substrate between the pair of floating gates, forming a polysilicon layer in both regions, forming an oxide layer over the polysilicon layer in the logic circuit region, performing a chemical-mechanical polish of the polysilicon layer in the memory cell area leaving a first block of the polysilicon layer between the floating gates that is separated from remaining portions of the polysilicon layer, and selectively etching portions of the polysilicon layer to result in: second and third blocks of the polysilicon layer disposed in outer regions of the memory cell area, and a fourth block of the polysilicon layer in the logic circuit region.Type: GrantFiled: September 19, 2019Date of Patent: November 10, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Chunming Wang, Leo Xing, Andy Liu, Melvin Diao, Xian Liu, Nhan Do
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Patent number: 10818680Abstract: A semiconductor substrate having an upper surface with a plurality of upwardly extending fins. A memory cell formed on a first of the fins and including spaced apart source and drain regions in the first fin, with a channel region extending therebetween along top and side surfaces of the first fin, a floating gate that extends along a first portion of the channel region, a select gate that extends along a second portion of the channel region, a control gate that extends along and is insulated from the floating gate, and an erase gate that extends along and is insulated from the source region. A logic device formed on a second of the fins and including spaced apart logic source and logic drain regions in the second fin, with a logic channel region of the second fin extending therebetween, and a logic gate that extends along the logic channel region.Type: GrantFiled: September 20, 2019Date of Patent: October 27, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Feng Zhou, Jinho Kim, Xian Liu, Serguei Jourba, Catherine Decobert, Nhan Do
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Patent number: 10803943Abstract: A neural network device with synapses having memory cells each having a floating gate and a first gate over first and second portions of a channel region, and second and third gates over the floating gate and over the source region. First lines each electrically connect the first gates in one of the memory cell rows, second lines each electrically connect the second gates in one of the memory cell rows, third lines each electrically connect the third gates in one of the memory cell rows, fourth lines each electrically connect the source regions in one of the memory cell rows, and fifth lines each electrically connect the drain regions in one of the memory cell columns. The synapses receive a first plurality of inputs as electrical voltages on the first, second or third lines, and provide a first plurality of outputs as electrical currents on the fifth lines.Type: GrantFiled: April 11, 2019Date of Patent: October 13, 2020Assignee: Silicon Storage Technology, Inc.Inventors: Hieu Van Tran, Steven Lemke, Vipin Tiwari, Nhan Do, Mark Reiten