Patents Assigned to United Microelectronics Corporation
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Publication number: 20130234252Abstract: An integrated circuit includes a substrate, a first semiconductor device, a second semiconductor device and an interlayer dielectric layer. At least one isolation structure has been formed in the he substrate so as to separate the substrate into a first active region and a second active region. The first semiconductor device disposed on the first active region of the substrate includes a first gate insulating layer and a poly-silicon gate stacked on the substrate sequentially. The second semiconductor device disposed on the second active region of the substrate includes a second gate insulating layer and a metal gate stacked on the substrate sequentially. The material of the second gate insulating layer is different from that of the first gate insulating layer. The thickness of the metal gate is greater than that of the poly-silicon gate. The interlayer dielectric layer is disposed on the substrate and covering the first semiconductor device.Type: ApplicationFiled: March 6, 2012Publication date: September 12, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Hsiang-Chen LEE, Ping-Chia Shih, Ke-Chi Chen, Chih-Ming Wang, Chi-Cheng Huang
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Patent number: 8530969Abstract: A semiconductor device includes a substrate, a gate structure, a source structure and a drain structure. The substrate includes a deep well region, and the gate structure is disposed on the deep well region. The source structure is formed within the deep well and located at a first side of the gate structure. The drain structure is formed within the deep well region and located at a second side of the gate structure. The drain structure includes a first doped region of a first conductivity type, a first electrode and a second doped region of a second conductivity type. The first doped region is located in the deep well region; the first electrode is electrically connected to the first doped region. The second doped region is disposed within the first doped region and between the first electrode and the gate structure.Type: GrantFiled: February 9, 2012Date of Patent: September 10, 2013Assignee: United Microelectronics CorporationInventors: Lu-An Chen, Tai-Hsiang Lai, Tien-Hao Tang
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Publication number: 20130230989Abstract: A method for fabricating a semiconductor device is provided, wherein the method comprises steps as follows: A first conductive-type metal-oxide-semiconductor transistor and a second conductive-type metal-oxide-semiconductor transistor are firstly formed on a substrate. Subsequently, a first stress-inducing dielectric layer and a first capping layer are formed in sequence on the first conductive-type metal-oxide-semiconductor transistor; and then a second stress-inducing dielectric layer and a second capping layer are formed in sequence on the second conductive-type metal-oxide-semiconductor transistor. Next, the fist capping layer is removed.Type: ApplicationFiled: March 5, 2012Publication date: September 5, 2013Applicant: United Microelectronics CorporationInventors: An-Chi LIU, Chih-Wen Teng, Tzu-Yu Tseng, Chi-Heng Lin
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Patent number: 8525354Abstract: A bond pad structure comprises an interconnection structure and an isolation layer. The dielectric layer has an opening and a metal pad. The isolation layer is disposed on the interconnection structure and extends into the opening until it is in contact with the metal pad, whereby the sidewalls of the opening is blanketed by the isolation layer, and a portion of the metal pad is exposed from the opening.Type: GrantFiled: October 13, 2011Date of Patent: September 3, 2013Assignee: United Microelectronics CorporationInventors: Hui-Min Wu, Ming-I Wang, Kuan-Yu Wang, Kun-Che Hsieh, Chien-Hsin Huang
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Patent number: 8524603Abstract: A fabricating method of a semiconductor device is provided. First, a substrate having a first surface and a second surface opposite to each other is provided. A shallow trench is formed on the first surface, and a first nitride layer is formed on the second surface. A dielectric layer is formed on the first surface of the substrate to cover the shallow trench. Then, the first nitride layer is removed, and a first protective layer is formed on the second surface of the substrate. After that, a planarization process is performed to remove a portion of the dielectric layer outside the shallow trench. The fabricating method is capable of improving the fabricating yield of semiconductor device.Type: GrantFiled: May 16, 2012Date of Patent: September 3, 2013Assignee: United Microelectronics CorporationInventor: Ting-Chen Shih
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Publication number: 20130217234Abstract: A cleaning solution is provided. The cleaning solution includes an aliphatic polycarboxylic acid, a chain sulfonic acid substantially less than 4 wt % and an amine containing buffer agent.Type: ApplicationFiled: March 21, 2013Publication date: August 22, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventor: UNITED MICROELECTRONICS CORPORATION
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Publication number: 20130208379Abstract: A semiconductor ESD protection apparatus comprises a substrate; a first doped well disposed in the substrate and having a first conductivity; a first doped area having the first conductivity disposed in the first doped well; a second doped area having a second conductivity disposed in the first doped well; and an epitaxial layer disposed in the substrate, wherein the epitaxial layer has a third doped area with the first conductivity and a fourth doped area with the second conductivity separated from each other. Whereby a first bipolar junction transistor (BJT) equivalent circuit is formed between the first doped area, the first doped well and the third doped area; a second BJT equivalent circuit is formed between the second doped area, the first doped well and the fourth doped area; and the first BJT equivalent circuit and the second BJT equivalent circuit have different majority carriers.Type: ApplicationFiled: February 9, 2012Publication date: August 15, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Chang-Tzu WANG, Tien-Hao TANG, Kuan-Cheng SU
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Publication number: 20130207184Abstract: A semiconductor device includes a substrate, a gate structure, a source structure and a drain structure. The substrate includes a deep well region, and the gate structure is disposed on the deep well region. The source structure is formed within the deep well and located at a first side of the gate structure. The drain structure is formed within the deep well region and located at a second side of the gate structure. The drain structure includes a first doped region of a first conductivity type, a first electrode and a second doped region of a second conductivity type. The first doped region is located in the deep well region; the first electrode is electrically connected to the first doped region. The second doped region is disposed within the first doped region and between the first electrode and the gate structure.Type: ApplicationFiled: February 9, 2012Publication date: August 15, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Lu-An CHEN, Tai-Hsiang LAI, Tien-Hao TANG
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Patent number: 8507350Abstract: A fabricating method of a semiconductor element includes the following steps. First, a substrate is provided. A metal gate structure and source/drain electrodes are already formed on the substrate. An amorphization process is performed in the source/drain electrodes to form an amorphous portion. An interlayer dielectric layer is formed on surfaces of the source/drain electrodes and a through hole contact is formed within the interlayer dielectric layer. A silicidation process is performed with the through hole contact and the amorphous portion of the source/drain electrodes to form a metal silicide layer. The fabricating method is capable of finishing the formation of the metal silicide layer in the condition that diameters of the through hole contact is becoming smaller and smaller.Type: GrantFiled: September 21, 2011Date of Patent: August 13, 2013Assignee: United Microelectronics CorporationInventors: Chien-Chung Huang, Nien-Ting Ho
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Publication number: 20130187225Abstract: A HV MOSFET device includes a substrate, a deep well region, a source/body region, a drain region, a gate structure, and a first doped region. The deep well region includes a boundary site and a middle site. The source/body region is formed in the deep well region and defines a channel region. The first doped region is formed in the deep well region and disposed under the gate structure, and having the first conductivity type. There is a first ratio between a dopant dose of the first doped region and a dopant dose of the boundary site of the deep well region. There is a second ratio between a dopant dose of the first doped region and a dopant dose of the middle site of the deep well region. A percentage difference between the first ratio and the second ratio is smaller than or equal to 5%.Type: ApplicationFiled: January 20, 2012Publication date: July 25, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Chih-Chung WANG, Ming-Tsung Lee, Chung-I Huang, Shan-Shi Huang, Wen-Fang Lee, Te-Yuan Wu
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Patent number: 8492835Abstract: A HV MOSFET device includes a substrate, a deep well region, a source/body region, a drain region, a gate structure, and a first doped region. The deep well region includes a boundary site and a middle site. The source/body region is formed in the deep well region and defines a channel region. The first doped region is formed in the deep well region and disposed under the gate structure, and having the first conductivity type. There is a first ratio between a dopant dose of the first doped region and a dopant dose of the boundary site of the deep well region. There is a second ratio between a dopant dose of the first doped region and a dopant dose of the middle site of the deep well region. A percentage difference between the first ratio and the second ratio is smaller than or equal to 5%.Type: GrantFiled: January 20, 2012Date of Patent: July 23, 2013Assignee: United Microelectronics CorporationInventors: Chih-Chung Wang, Ming-Tsung Lee, Chung-I Huang, Shan-Shi Huang, Wen-Fang Lee, Te-Yuan Wu
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Patent number: 8493806Abstract: A sense-amplifier circuit of a memory, which includes a sense-amplifier unit, a first switch unit and a second switch unit. The sense-amplifier unit is constituted by a plurality of transistor switches and having a first, a second, a third and a fourth connection terminal. The first switch unit is configured to be parallel coupled between the first and second connection terminals of the sense-amplifier unit. The second switch unit is configured to be parallel coupled between the third and fourth connection terminals of the sense-amplifier unit. The first and second switch units each are constituted by a plurality of transistor switches coupled in parallel and are configured to control each of the parallel-coupled transistor switches on or off in the first and second switch units so as to calibrate a sensing range of the sense-amplifier unit. A calibrating method for a sense-amplifier circuit of a memory is also provided.Type: GrantFiled: January 3, 2012Date of Patent: July 23, 2013Assignee: United Microelectronics CorporationInventor: Shi-Wen Chen
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Publication number: 20130182519Abstract: A memory device comprises a memory cell array, a first and a second pre-charging switch circuits, a selecting circuit, an auxiliary memory cell array, a dynamic voltage controller and a sense amplifier. The auxiliary memory cell array comprises an auxiliary read bit line and a plurality of memory cells arranged in a column and electrically connected to the auxiliary read bit line. The second pre-charging switch circuit determines whether or not to supply a reference voltage to each of the aforementioned memory cells according to a pre-charging control signal. The dynamic voltage controller determines whether or not to supply a voltage to the auxiliary read bit line according to the voltage level of the output signal of the selecting circuit. The sense amplifier compares the voltage levels of the output signal of the selecting circuit and the voltage on the auxiliary read bit line to output a sensing result accordingly.Type: ApplicationFiled: January 18, 2012Publication date: July 18, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Shi-Wen CHEN, Tsan-Tang Chen, Chi-Chang Shuai
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Patent number: 8482063Abstract: A high voltage semiconductor device is provided. A first-polarity buried layer is formed in the substrate. A first high voltage second-polarity well region is located over the first-polarity buried layer. A second-polarity base region is disposed within the first high voltage second-polarity well region. A source region is disposed within the second-polarity base region. A high voltage deep first-polarity well region is located over the first-polarity buried layer and closely around the first high voltage second-polarity well region. A first-polarity drift region is disposed within the high voltage deep first-polarity well region. A gate structure is disposed over the substrate. A second high voltage second-polarity well region is located over the first-polarity buried layer and closely around the high voltage deep first-polarity well region. A deep first-polarity well region is located over the first-polarity buried layer and closely around the second high voltage second-polarity well region.Type: GrantFiled: November 18, 2011Date of Patent: July 9, 2013Assignee: United Microelectronics CorporationInventors: An-Hung Lin, Hong-Ze Lin, Bo-Jui Huang, Wei-Shan Liao, Ting-Zhou Yan, Wei-Chun Chang, Chun-Yao Lee, Kun-Yi Chou
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Publication number: 20130168742Abstract: An integrated circuit configuration includes a substrate, a diffusion region, a gate structure, an extension conductor structure, a dielectric layer, a contact structure, and a metal conductor line. The diffusion region is formed in the substrate. The gate structure is formed over the substrate and spanned across the diffusion region. The extension conductor structure is formed over the semiconductor substrate and contacted with the diffusion region. The extension conductor structure is extended externally to a first position along a surface of the substrate, wherein the first position is outside the diffusion region. The dielectric layer is formed over the substrate, the gate structure and the extension conductor structure. The contact structure is penetrated through the dielectric layer to be contacted with the first position of the extension conductor structure. The metal conductor line is formed on the dielectric layer and contacted with the contact structure.Type: ApplicationFiled: December 28, 2011Publication date: July 4, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventor: Chin-Sheng Yang
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Publication number: 20130168772Abstract: A semiconductor device for an electrostatic discharge (ESD) protecting circuit connected to a pad is provided. The semiconductor device includes a semiconductor substrate of a first conductivity type; a plurality of metal oxide semiconductor transistors (MOSFETs) formed in the semiconductor substrate, and an isolation structure of a second conductivity type formed in the semiconductor substrate. The MOFETS are arranged in parallel. Drain electrodes of the MOSFETs are electrically connected to the pad, gate electrodes and source electrodes of the MOSFETs are connected to a constant voltage, and the gate electrodes extend in a first direction. The isolation structure includes a bottom and at least two side walls, wherein the bottom is located under the MOSFETs and the two side walls are located at two sides of the MOSFETs, and the side walls extend in the first direction.Type: ApplicationFiled: December 28, 2011Publication date: July 4, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventor: Yung-Ju WEN
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Publication number: 20130170309Abstract: A sense-amplifier circuit of a memory, which includes a sense-amplifier unit, a first switch unit and a second switch unit. The sense-amplifier unit is constituted by a plurality of transistor switches and having a first, a second, a third and a fourth connection terminal. The first switch unit is configured to be parallel coupled between the first and second connection terminals of the sense-amplifier unit. The second switch unit is configured to be parallel coupled between the third and fourth connection terminals of the sense-amplifier unit. The first and second switch units each are constituted by a plurality of transistor switches coupled in parallel and are configured to control each of the parallel-coupled transistor switches on or off in the first and second switch units so as to calibrate a sensing range of the sense-amplifier unit. A calibrating method for a sense-amplifier circuit of a memory is also provided.Type: ApplicationFiled: January 3, 2012Publication date: July 4, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventor: Shi-Wen CHEN
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Publication number: 20130154028Abstract: A fin-type field effect transistor including at least one fin-type semiconductor structure, a gate strip and a gate insulating layer is provided. The fin-type semiconductor structure is doped with a first type dopant and has a block region with a first doping concentration and a channel region with a second doping concentration. The first doping concentration is larger than the second doping concentration. The blocking region has a height. The channel region is configured above the blocking region. The gate strip is substantially perpendicular to the fin-type semiconductor structure and covers above the channel region. The gate insulating layer is disposed between the gate strip and the fin-type semiconductor structure.Type: ApplicationFiled: December 15, 2011Publication date: June 20, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Chih-Jung WANG, Tong-Yu CHEN
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Publication number: 20130147510Abstract: A monitoring testkey for a wafer is provided. The monitoring testkey includes a first metal oxide semiconductor (MOS) transistor having a channel extending in a first direction, a second MOS transistor having a channel extending in a second direction, a common gate pad electrically connected to gate electrodes of the first MOS transistor and the second MOS transistor, a first source pad electrically connected to source electrodes of the first MOS transistor and the second MOS transistor, a first drain pad electrically connected to a drain electrode of the first MOS transistor, and a second drain pad electrically connected to a drain electrode of the second MOS transistor. The monitoring testkey helps to improve the critical dimension uniformity and electrical characteristics uniformity of elements in a wafer.Type: ApplicationFiled: December 7, 2011Publication date: June 13, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Chin-Chun HUANG, Ji-Fu Kung, Wei-Po Chiu, Nick Chao
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Publication number: 20130149870Abstract: A substrate carrier for performing a deposition process comprises a supporting element and a cover element. The supporting element having a through hole is used to carry a substrate. The cover element is removably engaged with the supporting element, so as to secure the substrate therebetween and expose a deposition surface of the substrate from the through hole.Type: ApplicationFiled: December 13, 2011Publication date: June 13, 2013Applicant: UNITED MICROELECTRONICS CORPORATIONInventors: Chun-Hsing Tung, Fei-Tzu Lin