Patents Assigned to United Microelectronics
-
Publication number: 20230260585Abstract: A power circuit is adapted for providing a programming voltage to an electronic fuse circuit, and includes a pass transistor of a P-type metal-oxide-semiconductor transistor, a buffer circuit, and a bulk voltage control circuit. The pass transistor includes a bulk electrode, a gate electrode, a first source/drain electrode receiving a system high voltage, and a second source/drain electrode connected to a bit line. The buffer circuit provides a control voltage to the gate electrode of the pass transistor. The pass transistor is turned on during a programming operation and turned off during a reading operation. The bulk voltage control circuit independently provides a bulk voltage to the bulk electrode. A last-stage buffer of the buffer circuit is also activated by the bulk voltage to control the pass transistor during the reading operation of the electronic fuse circuit. A method for providing power to an electronic fuse circuit is also provided.Type: ApplicationFiled: April 24, 2023Publication date: August 17, 2023Applicant: United Microelectronics Corp.Inventors: Chia Wei Ho, Min Chia Wang, Chung Ming Lin, Jin Pany Chi
-
Patent number: 11723295Abstract: A method for fabricating memory device includes: providing a substrate having a bottom electrode layer therein, forming a buffer layer and a mask layer on the buffer layer over the substrate, in contact with the bottom electrode layer, performing an advanced oxidation process on a sidewall of the buffer layer to form a resistive layer, which surrounds the whole sidewall of the buffer layer and extends upward vertically from the substrate, and forming, over the substrate, a noble metal layer and a top electrode layer on the noble metal layer, fully covering the resistive layer and the mask layer.Type: GrantFiled: December 15, 2021Date of Patent: August 8, 2023Assignee: United Microelectronics Corp.Inventors: Hai Tao Liu, Li Li Ding, Yao-Hung Liu, Guoan Du, Qi Lu Li, Chunlei Wan, Yi Yu Lin, Yuchao Chen, Huakai Li, Hung-Yueh Chen
-
Patent number: 11721772Abstract: A varactor structure includes a substrate. A first and second gate structure are disposed on the substrate. The first and second gate structures each include a base portion and a plurality of line portions connected thereto. The line portions of each of the first and second gate structures is alternately arranged. A meander diffusion region is formed in the substrate and surrounds the line portions. A first set of contact plugs is planned with at least two columns or rows and disposed on the base portions of the first and second gate structures. A second set of contact plugs is planned with at least two columns or rows and disposed on the meander diffusion region. A first conductive layer is disposed on a top end of the first set of contact plugs. A second conductive layer is disposed on a top end of the second set of contact plugs.Type: GrantFiled: June 27, 2022Date of Patent: August 8, 2023Assignee: United Microelectronics Corp.Inventors: Purakh Raj Verma, Su Xing
-
Patent number: 11721702Abstract: A fin transistor structure is provided. The fin transistor structure includes a first substrate. An insulation layer is disposed on the first substrate. A plurality of fin structures are disposed on the insulation layer. A supporting dielectric layer fixes the fin structures at the fin structures at waist parts thereof. A gate structure layer is disposed on the supporting dielectric layer and covers a portion of the fin structures.Type: GrantFiled: June 20, 2022Date of Patent: August 8, 2023Assignee: United Microelectronics Corp.Inventors: Sheng-Yao Huang, Yu-Ruei Chen, Chung-Liang Chu, Zen-Jay Tsai, Yu-Hsiang Lin
-
Publication number: 20230246023Abstract: A method for fabricating a semiconductor device is provided, including following steps. Providing a staked layer of a semiconductor layer, a buried oxide layer and a silicon layer. Forming a silicon-based device layer comprising the silicon layer on the buried oxide layer. Forming a first interconnection layer over the silicon-based device layer. Forming a semiconductor-based device layer comprising the semiconductor layer on the buried oxide layer. Forming a second interconnection layer over the semiconductor-based device layer.Type: ApplicationFiled: April 10, 2023Publication date: August 3, 2023Applicant: United Microelectronics Corp.Inventor: Zhi-Biao Zhou
-
Publication number: 20230238321Abstract: An interconnect structure is formed on a substrate in a semiconductor device. The interconnect structure includes a dielectric layer and a metal layer. The dielectric layer includes a region and a plurality of protrusions. The metal layer is disposed on the region and between the protrusions, wherein tops of the protrusions are exposed with respect to the metal layer. In a top view of the semiconductor device, the protrusions are distributed in the region. Any straight path crossing through a central region of the region is always intersected with a portion of the protrusions.Type: ApplicationFiled: March 29, 2023Publication date: July 27, 2023Applicant: United Microelectronics Corp.Inventors: To-Wen Tsao, Ching-Chang Hsu
-
Patent number: 11646349Abstract: A structure of semiconductor device is provided, including a substrate. First and second trench isolations are disposed in the substrate. A height of a portion of the substrate is between a top and a bottom of the first and second trench isolations. A gate insulation layer is disposed on the portion of the substrate between the first and second trench isolations. A first germanium (Ge) doped layer region is disposed in the portion of the substrate just under the gate insulation layer. A second Ge doped layer region is in the portion of the substrate, overlapping with the first Ge doped layer region to form a Ge gradient from high to low along a depth direction under the gate insulation layer. A fluorine (F) doped layer region is in the portion of the substrate, lower than and overlapping with the first germanium doped layer region.Type: GrantFiled: October 27, 2021Date of Patent: May 9, 2023Assignee: United Microelectronics Corp.Inventors: Chia-Jung Hsu, Chin-Hung Chen, Chun-Ya Chiu, Chih-Kai Hsu, Ssu-I Fu, Tsai-Yu Wen, Shi You Liu, Yu-Hsiang Lin
-
Publication number: 20230137853Abstract: The invention provides a RRAM structure, which includes a substrate, a high voltage transistor, and a RRAM cell. The high voltage transistor includes a drift region, a gate structure, a source region, a drain region, and an isolation structure. The drift region is located in the substrate. The gate structure is located on the substrate and on a portion of the drift region. The source region and the drain region are located in the substrate on two sides of the gate structure. The drain region is located in the drift region. The isolation structure is located in the drift region and between the gate structure and the drain region. The RRAM cell includes a first electrode, a resistive switching layer, and a second electrode sequentially located on the drain region. The RRAM cell is electrically connected to the high voltage transistor.Type: ApplicationFiled: October 28, 2021Publication date: May 4, 2023Applicant: United Microelectronics Corp.Inventor: Zong-Han Lin
-
Publication number: 20230136978Abstract: A semiconductor structure including a substrate, a dielectric layer, a first conductive layer, and a passivation layer is provided. The dielectric layer is disposed on the substrate. The first conductive layer is disposed on the dielectric layer. The passivation layer is disposed on the first conductive layer and the dielectric layer. The passivation layer includes a first upper surface and a second upper surface. The first upper surface is located above a top surface of the first conductive layer. The second upper surface is located on one side of the first conductive layer. A height of the first upper surface is higher than a height of the second upper surface. The height of the second upper surface is lower than or equal to a height of a lower surface of the first conductive layer located between a top surface of the dielectric layer and the first conductive layer.Type: ApplicationFiled: November 23, 2021Publication date: May 4, 2023Applicant: United Microelectronics Corp.Inventors: Chun-Chi Huang, Hui-Lung Chou, Chuang-Han Hsieh, Yung-Feng Lin, Shin-Chi Chen
-
Publication number: 20230135072Abstract: The invention provides a method for fabricating a fin structure for fin field effect transistor, including following steps. Providing a substrate, including a fin structure having a silicon fin and a single mask layer just on a top of the silicon fin, the single mask layer being as a top portion of the fin structure. Forming a stress buffer layer on the substrate and conformally covering over the fin structure. Performing a nitridation treatment on the stress buffer layer to have a nitride portion. Perform a flowable deposition process to form a flowable dielectric layer to cover over the fin structures. Annealing the flowable dielectric layer. Polishing the flowable dielectric layer, wherein the nitride portion of the stress buffer layer is used as a polishing stop.Type: ApplicationFiled: December 29, 2022Publication date: May 4, 2023Applicant: United Microelectronics Corp.Inventors: Hao Che Feng, Hung Jen Huang, Hsin Min Han, Shih-Wei Su, Ming Shu Chiu, Pi-Hung Chuang, Wei-Hao Huang, Shao-Wei Wang, Ping Wei Huang
-
Publication number: 20230135098Abstract: Provided are a resistive random access memory and a manufacturing method thereof. The resistive random access memory includes a substrate having a pillar protruding from a surface of the substrate, a gate surrounding a part of a side surface of the pillar, a gate dielectric layer, a first electrode, a second electrode, a variable resistance layer, a first doped region and a second doped region. The gate dielectric layer is disposed between the gate and the pillar. The first electrode is disposed on a top surface of the pillar. The second electrode is disposed on the first electrode. The variable resistance layer is disposed between the first electrode and the second electrode. The first doped region is disposed in the pillar below the gate and in a part of the substrate below the pillar. The second doped region is disposed in the pillar between the gate and the first electrode.Type: ApplicationFiled: December 3, 2021Publication date: May 4, 2023Applicant: United Microelectronics Corp.Inventors: Yi Yu Lin, Po Kai Hsu, Chun-Hao Wang, Yu-Ru Yang, Ju Chun Fan, Chung Yi Chiu
-
Publication number: 20230129579Abstract: A high electron mobility transistor (HEMT) device including a substrate, a channel layer, a barrier layer, a p-type gallium nitride (GaN) spacer, a gate electrode, a source electrode, and a drain electrode is provided. The channel layer is disposed on the substrate. The barrier layer is disposed on the channel layer and has a protruding portion. The P-type GaN spacer is disposed on a side wall of the protruding portion. The gate electrode is disposed on the protruding portion and the P-type GaN spacer. The source electrode and the drain electrode are disposed on two sides of the gate electrode.Type: ApplicationFiled: November 16, 2021Publication date: April 27, 2023Applicant: United Microelectronics Corp.Inventors: Hao-Ming Lee, Ta Kang Lo, Tsai-Fu Chen, Shou-Wei Hsieh
-
Publication number: 20230101900Abstract: A structure of semiconductor device is provided, including a first circuit structure, formed on a first substrate. A first test pad is disposed on the first substrate. A second circuit structure is formed on a second substrate. A second test pad is disposed on the second substrate. A first bonding pad of the first circuit structure is bonded to a second bonding pad of the second circuit structure. One of the first test pad and the second test pad is an inner pad while another one of the first test pad and the second test pad is an outer pad, wherein the outer pad surrounds the inner pad.Type: ApplicationFiled: December 7, 2022Publication date: March 30, 2023Applicant: United Microelectronics Corp.Inventors: Zhirui Sheng, Hui-Ling Chen, Chung-Hsing Kuo, Chun-Ting Yeh, Ming-Tse Lin, Chien En Hsu
-
Publication number: 20230073022Abstract: Provided is a semiconductor device includes a substrate, an isolation structure, an alignment mark, and a dielectric layer. The substrate includes a first region and a second region. The isolation structure is disposed in the substrate in the first region, wherein the isolation structure extends from a first surface of the substrate toward a second surface of the substrate. The alignment mark is disposed in the substrate in the second region. The alignment mark extends from the first surface of the substrate toward the second surface of the substrate and at the same level as the isolation structure. The dielectric layer is buried in the substrate in the second region and overlapping the alignment mark.Type: ApplicationFiled: November 16, 2022Publication date: March 9, 2023Applicant: United Microelectronics Corp.Inventors: Nuo Wei Luo, Huabiao Wu
-
Publication number: 20230047580Abstract: A high voltage transistor structure including a substrate, a first isolation structure, a second isolation structure, a gate structure, a first source and drain region, and a second source and drain region is provided. The first isolation structure and the second isolation structure are disposed in the substrate. The gate structure is disposed on the substrate, at least a portion of the first isolation structure, and at least a portion of the second isolation structure. The first source and drain region and the second source and drain region are located in the substrate on two sides of the first isolation structure and the second isolation structure. The depth of the first isolation structure is greater than the depth of the second isolation structure.Type: ApplicationFiled: August 16, 2021Publication date: February 16, 2023Applicant: United Microelectronics Corp.Inventors: Chin-Hung Chen, Ssu-I Fu, Chih-Kai Hsu, Chun-Ya Chiu, Chia-Jung Hsu, Yu-Hsiang Lin
-
Publication number: 20230046058Abstract: A memory structure including a substrate, a first dielectric layer, a second dielectric layer, a charge storage layer, an oxide layer, and a conductive layer is provided. The first dielectric layer is disposed on the substrate. The second dielectric layer is disposed on the first dielectric layer. The charge storage layer is disposed between the first dielectric layer and the second dielectric layer. The oxide layer is located at two ends of the charge storage layer and is disposed between the first dielectric layer and the second dielectric layer. The conductive layer is disposed on the second dielectric layer.Type: ApplicationFiled: November 3, 2022Publication date: February 16, 2023Applicant: United Microelectronics Corp.Inventors: Chia-Hung Chen, Yu-Huang Yeh, Chuan-Fu Wang
-
Publication number: 20230037410Abstract: A high voltage transistor structure including a substrate, a first drift region, a second drift region, a first cap layer, a second cap layer, a gate structure, a first source and drain region, and a second source and drain region is provided. The first and second drift regions are disposed in the substrate. The first and second cap layers are respectively disposed on the first and second drift regions. The gate structure is disposed on the substrate and located over at least a portion of the first drift region and at least a portion of the second drift region. The first and second source and drain regions are respectively disposed in the first and second drift regions and located on two sides of the gate structure. The size of the first drift region and the size of the second drift region are asymmetric.Type: ApplicationFiled: August 18, 2021Publication date: February 9, 2023Applicant: United Microelectronics Corp.Inventors: Chun-Ya Chiu, Ssu-I Fu, Chih-Kai Hsu, Chin-Hung Chen, Chia-Jung Hsu, Yu-Hsiang Lin
-
Publication number: 20230043723Abstract: An electrostatic discharge (ESD) circuit is used to protect an internal circuit. The ESD circuit includes: an ESD clamp, having a first terminal connected to a power and a second terminal connected to a ground voltage; and a first switch, connected between an ESD terminal of the ESD clamp and the internal circuit. A gate of the first switch is controlled by a state signal in the ESD clamp to turn off the first switch when an ESD event occurs on the first terminal of the ESD clamp and turn on the first switch when the ESD event does not occur.Type: ApplicationFiled: October 21, 2022Publication date: February 9, 2023Applicant: United Microelectronics Corp.Inventors: Chih-Yuan Chung, Te-Chang Wu
-
Publication number: 20230027271Abstract: A silicon photonic chip-based LiDAR, comprising a silicon photonic chip (2), a laser module, a beam collimator module (4), and a signal processing module (6), where the laser outputs a frequency modulated continuous laser and transmits the frequency modulated continuous laser to the silicon photonic chip (2), where the laser is split and transmitted in the silicon photonic chip (2) to form a reference interference light and a local oscillation light on the one hand, and the split laser is transmitted to the target (5) via the beam collimator module (4), and then the reflect light of the reference interference light is received to interfere with the local oscillation light to form a measurement interference light on the other hand; and the reference interference light and the measurement interference light are photoelectrically detected in the silicon photonic chip (2) and form an electrical signal being output to the signal processing module (6) to obtain the distance and speed of the target.Type: ApplicationFiled: July 22, 2020Publication date: January 26, 2023Applicant: United Microelectronics Center Co., LtdInventors: Li JIN, Rui CAO, Junbo FENG, Zuwen LIU, Ping JIANG, Jin GUO, Youxi LU, Qixin LIU, Mijie YANG, Tonghui LI
-
Publication number: 20230025541Abstract: A semiconductor structure, including a substrate and multiple chips, is provided. The chips are stacked on the substrate. Each of the chips has a first side and a second side opposite to each other. Each of the chips includes a transistor adjacent to the first side and a storage node adjacent to the second side. Two adjacent chips are bonded to each other. The transistor of one of the two adjacent chips is electrically connected to the storage node of the other one of the two adjacent chips to form a memory cell.Type: ApplicationFiled: August 9, 2021Publication date: January 26, 2023Applicant: United Microelectronics Corp.Inventors: Teng-Chuan Hu, Chun-Hung Chen, Chu-Fu Lin