Patents Examined by Adams S Bowen
  • Patent number: 11908863
    Abstract: A transistor device includes a substrate, a fin structure extending on the substrate in a direction parallel to a top surface of the substrate, a source region and a drain region provided at an upper portion of the fin structure, a constant current generating layer provided at a lower portion of the fin structure, a gate insulating film provided on both side surfaces and a top surface of the upper portion of the fin structure, and a gate electrode provided on the gate insulating film, wherein the gate electrode is provided on the fin structure and between the source region and the drain region, the constant current generating layer generates a constant current between the drain region and the substrate, and the constant current is independent from a gate voltage applied to the gate electrode.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: February 20, 2024
    Assignee: UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
    Inventors: Kyung Rok Kim, Jae Won Jeong, Young Eun Choi, Woo Seok Kim, Jiwon Chang
  • Patent number: 11908751
    Abstract: In an embodiment, a method includes: etching a trench in a substrate; depositing a liner material in the trench with an atomic layer deposition process; depositing a flowable material on the liner material and in the trench with a contouring flowable chemical vapor deposition process; converting the liner material and the flowable material to a solid insulation material, a portion of the trench remaining unfilled by the solid insulation material; and forming a hybrid fin in the portion of the trench unfilled by the solid insulation material.
    Type: Grant
    Filed: July 26, 2021
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Szu-Ying Chen, Sen-Hong Syue, Huicheng Chang, Yee-Chia Yeo
  • Patent number: 11908748
    Abstract: A semiconductor device includes a substrate having a first region and a second region of opposite conductivity types, an isolation feature over the substrate, a first fin protruding from the substrate and through the isolation feature in the first region, a first epitaxial feature over the first fin, a second fin protruding from the substrate and through the isolation feature in the second region, and a second epitaxial feature over the second fin. A portion of the isolation feature located between the first fin and the second fin protrudes from a top surface of the isolation feature.
    Type: Grant
    Filed: November 15, 2022
    Date of Patent: February 20, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Feng-Ching Chu, Wei-Yang Lee, Feng-Cheng Yang, Yen-Ming Chen
  • Patent number: 11908921
    Abstract: The present disclosure is directed to method for the fabrication of spacer structures between source/drain (S/D) epitaxial structures and metal gate structures in nanostructure transistors. The method includes forming a fin structure with alternating first and second nanostructure elements on a substrate. The method also includes etching edge portions of the first nanostructure elements in the fin structure to form cavities. Further, depositing a spacer material on the fin structure to fill the cavities and removing a portion of the spacer material in the cavities to form an opening in the spacer material. In addition, the method includes forming S/D epitaxial structures on the substrate to abut the fin structure and the spacer material so that sidewall portions of the S/D epitaxial structures seal the opening in the spacer material to form an air gap in the spacer material.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Yun Peng, Fu-Ting Yen, Keng-Chu Lin
  • Patent number: 11908865
    Abstract: A semiconductor structure and a fabrication method of the semiconductor structure are provided. The semiconductor structure includes a substrate. The substrate includes a first region, a second region, and an isolation region between the first region and the second region. The semiconductor structure also includes a first fin, a second fin and a third fin disposed over the first region, the second region, and the isolation region, respectively. Further, the semiconductor structure includes a gate structure. The gate structure includes a first work function layer over the first region and a first portion of the isolation region, and a second work function layer over the second region and a second portion of the isolation region. An interface where the first work function layer is in contact with the second work function layer is located over a top surface of the third fin.
    Type: Grant
    Filed: January 14, 2022
    Date of Patent: February 20, 2024
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Da Huang, Yao Qi Dong, Xiaowan Dai, Zhen Tian
  • Patent number: 11901440
    Abstract: A semiconductor device containing a self-aligned contact rail is provided. The self-aligned contact rail can have a reduced critical dimension, CD. The self-aligned contact rail can be obtained utilizing a sacrificial semiconductor fin as a placeholder structure for the contact rail. The used of the sacrificial semiconductor fin enables reduced, and more controllable, CDs.
    Type: Grant
    Filed: September 2, 2021
    Date of Patent: February 13, 2024
    Assignee: International Business Machines Corporation
    Inventors: Yann Mignot, Christopher J. Waskiewicz, Su Chen Fan, Brent Anderson, Junli Wang
  • Patent number: 11901412
    Abstract: The present disclosure describes a semiconductor device having facet-free epitaxial structures with a substantially uniform thickness. The semiconductor device includes a fin structure on a substrate. The fin structure includes a fin bottom portion and a fin top portion. A top surface of the fin bottom portion is wider than a bottom surface of the fin top portion. The semiconductor device further includes a dielectric layer on the fin top portion, an amorphous layer on the dielectric layer, and an epitaxial layer. The epitaxial layer is on a top surface of the amorphous layer, sidewall surfaces of the amorphous layer, the dielectric layer, the fin top portion, and the top surface of the fin bottom portion.
    Type: Grant
    Filed: August 30, 2021
    Date of Patent: February 13, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Winne Victoria Wei-Ning Chen, Pang-Yen Tsai
  • Patent number: 11887985
    Abstract: A method includes etching a substrate to form a semiconductor fin, forming a gate stack on a top surface and sidewalls of the semiconductor fin, and forming a first recess in the semiconductor fin on a side of the gate stack, wherein forming the first recess comprises, performing a first etching process to form a first portion of the first recess, depositing a first dielectric layer on sidewalls of the gate stack and the first portion of the first recess, performing a second etching process to form a second portion of the first recess using the first dielectric layer as a mask, wherein the second portion of the first recess extends under the gate stack, and performing a third etching process to remove the first dielectric layer.
    Type: Grant
    Filed: June 18, 2021
    Date of Patent: January 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Yu-Rung Hsu
  • Patent number: 11876096
    Abstract: A semiconductor structure includes at least two field effect transistors. A gate strip including a plurality of gate dielectrics and a gate electrode strip can be formed over a plurality of semiconductor active regions. Source/drain implantation is conducted using the gate strip as a mask. The gate strip is divided into gate electrodes after the implantation.
    Type: Grant
    Filed: October 7, 2021
    Date of Patent: January 16, 2024
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventors: Takahito Fujita, Hiroyuki Ogawa, Kiyokazu Shishido
  • Patent number: 11869974
    Abstract: An operation method and an electronic device are provided. A phone call is established while a display of the electronic device is activated. A proximity sensor of the electronic device is turned on. A supply of power to the proximity sensor is controlled to emit light through a plurality of pixels in a portion of the display corresponding to a position of the proximity sensor and the light emitted by the proximity sensor and reflected by an object is received to identify a distance between the electronic device and the object, if the plurality of the pixels in the position corresponding to the proximity sensor are deactivated during the phone call. The supply of power to the proximity sensor is blocked if the plurality of pixels in the portion of the display corresponding to the proximity sensor are activated during the phone call.
    Type: Grant
    Filed: July 7, 2022
    Date of Patent: January 9, 2024
    Inventors: Seunggoo Kang, Jung-Hoon Park, Bokyung Sim, Jeong Gyu Jo, Dong-Il Son
  • Patent number: 11869892
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a first P-type metal oxide semiconductor field effect transistor (p-MOSFET) having a first fin extending along a first direction and comprising a first semiconductor layer, wherein the first fin comprises a first recess formed in a top of the first fin, the first recess having a bottom surface and a sidewall surface extending upwardly from the bottom surface. The semiconductor device structure also includes a first gate structure disposed in the first recess and in contact with the bottom surface and the sidewall surface, the first gate structure extending along a second direction substantially perpendicular to the first direction. The semiconductor device structure further includes a first spacer disposed on opposite sidewalls of the first gate structure and in contact with the first fin and the first gate structure.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: January 9, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventor: Jhon Jhy Liaw
  • Patent number: 11856744
    Abstract: A semiconductor device includes a first semiconductor fin extending along a first direction. The semiconductor device includes a second semiconductor fin also extending along the first direction. The semiconductor device includes a dielectric fin disposed between the first and second semiconductor fins, wherein the dielectric fin also extends along the first direction. The semiconductor device includes a gate structure extending along a second direction perpendicular to the first direction, the gate structure comprising a first portion and a second portion. A top surface of the dielectric fin is vertically above respective top surfaces of the first and second semiconductor fins. The first portion and the second portion are electrically isolated by the dielectric fin. The first portion of the gate structure overlays an edge portion of the first semiconductor fin, and the second portion of the gate structure overlays a non-edge portion of the second semiconductor fin.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Yao Lin, Hsiao Wen Lee, Chih-Han Lin
  • Patent number: 11854907
    Abstract: A method of forming a device includes providing a transistor having a gate structure and a source/drain structure adjacent to the gate structure. A cavity is formed along a sidewall surface of a contact opening over the source/drain structure. After forming the cavity, a sacrificial layer is deposited over a bottom surface and along the sidewall surface of the contact opening including within the cavity. A first portion of the sacrificial layer along the bottom surface of the contact opening is removed to expose a portion of the source/drain structure. A metal plug is then formed over the portion of the exposed source/drain structure. A remaining portion of the sacrificial layer is removed to form an air gap disposed between the metal plug and the gate structure. Thereafter, a seal layer is deposited over the air gap to form an air gap spacer.
    Type: Grant
    Filed: April 5, 2021
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Sai-Hooi Yeong, Kai-Hsuan Lee
  • Patent number: 11855191
    Abstract: An apparatus includes a fin, a gate, and a gate contact. A portion of the fin is disposed in a first layer. The gate is disposed in the first layer and adjacent to the fin. The gate contact is disposed on the gate and in a second layer, wherein the second layer is disposed on the first layer such that the gate contact is above the fin.
    Type: Grant
    Filed: October 6, 2021
    Date of Patent: December 26, 2023
    Assignee: International Business Machines Corporation
    Inventors: Brent Anderson, Junli Wang, Indira Seshadri, Chen Zhang, Ruilong Xie, Joshua M. Rubin, Hemanth Jagannathan
  • Patent number: 11854970
    Abstract: Circuit devices, such as integrated circuit devices, are constructed with combination circuits that include two or more cascading transistors, and one or more metal layers disposed over the cascading transistors. The cascading transistors include multiple internal nodes (e.g., common source/drain regions). The multiple internal nodes are not connected to a common metal stripe (the same metal stripe) in the one or more metal layers. The absence of the connections between the internal nodes and a common metal stripe reduce or eliminate the load on the internal nodes. The transistors in the cascading transistors are independent of each other.
    Type: Grant
    Filed: July 29, 2022
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chien-Yuan Chen, Cheng-Hung Lee, Hung-Jen Liao, Hau-Tai Shieh, Kao-Cheng Lin, Wei-Min Chan
  • Patent number: 11851343
    Abstract: A preparation method for a metal oxide nanoparticle film and an electrical component, comprising: preparing a halogen ligand-containing metal oxide nanoparticle by performing heated alcoholysis of a metal halide in an organic alcohol; and employing a solution method on the halogen ligand-containing metal oxide nanoparticle to prepare a halogen ligand-containing metal oxide nanoparticle film. The halogen ligand-containing metal oxide nanoparticle is produced by means of performing the alcoholysis of the metal halide, then the halogen ligand-containing metal oxide nanoparticle is prepared into the film, and then a halogen is utilized once again in a passivation processing of the film, this not only further reduces defects on the surface of the metal oxide nanoparticle, but also further improves charge transfer between the metal oxide nanoparticle and an active functional layer and increases transfer efficiency, thus increasing component efficiency.
    Type: Grant
    Filed: March 20, 2018
    Date of Patent: December 26, 2023
    Assignee: TCL TECHNOLOGY GROUP CORPORATION
    Inventors: Luling Cheng, Yixing Yang
  • Patent number: 11848383
    Abstract: Various embodiments of the present invention are to provide a semiconductor device and a method for fabricating the same and, more particularly, to a semiconductor device including isolation layers including an air gap, thereby minimizing stress to a substrate caused by oxide and improving performance of a device, and a method for fabricating the same. The semiconductor device according to the embodiment of the present invention comprises: a plurality of isolation layers each including a trench formed in a substrate and an air gap in a lower portion of the trench; an active region including a fin body disposed between the isolation layers, which are consecutively disposed, and a fin formed on the fin body, the fin having a narrower width than the fin body and extending in a first direction; a gate structure partially covering the active region and the isolation layers, and extending in a second direction; and a source/drain region covering the fin on both sides of the gate structure.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: December 19, 2023
    Assignee: SK hynix Inc.
    Inventor: Young Gwang Yoon
  • Patent number: 11848329
    Abstract: The present disclosure provides a semiconductor structure that includes a substrate having a frontside and a backside; an active region extruded from the substrate and surrounded by an isolation feature; a gate stack formed on the front side of the substrate and disposed on the active region; a first and a second source/drain (S/D) feature formed on the active region and interposed by the gate stack; a frontside contact feature disposed on a top surface of the first S/D feature; a backside contact feature disposed on and electrically connected to a bottom surface of the second S/D feature; and a semiconductor layer disposed on a bottom surface of the first S/D feature with a first thickness and a bottom surface of the gate stack with a second thickness being greater than the first thickness.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: December 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Kuo-Cheng Chiang, Shi Ning Ju, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11837603
    Abstract: A method includes forming a source/drain region for a transistor, forming a first inter-layer dielectric over the source/drain region, and forming a lower source/drain contact plug over and electrically coupling to the source/drain region. The lower source/drain contact plug extends into the first inter-layer dielectric. The method further includes depositing an etch stop layer over the first inter-layer dielectric and the lower source/drain contact plug, depositing a second inter-layer dielectric over the etch stop layer, and performing an etching process to etch the second inter-layer dielectric, the etch stop layer, and an upper portion of the first inter-layer dielectric to form an opening, with a top surface and a sidewall of the lower source/drain contact plug being exposed to the opening, and forming an upper source/drain contact plug in the opening.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: December 5, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ying-Yu Lai, Chih-Hsuan Lin, Hsi Chung Chen, Chih-Teng Liao
  • Patent number: 11830721
    Abstract: An embodiment device includes: an isolation region on a substrate; a first fin extending above a top surface of the isolation region; a gate structure on the first fin; and an epitaxial source/drain region adjacent the gate structure, the epitaxial source/drain region having a first main portion and a first projecting portion, the first main portion disposed in the first fin, the first projecting portion disposed on a first sidewall of the first fin and beneath the top surface of the isolation region.
    Type: Grant
    Filed: July 25, 2022
    Date of Patent: November 28, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventor: Shahaji B. More