Patents Examined by Adams S Bowen
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Patent number: 11749677Abstract: A semiconductor structure includes a first semiconductor device formed over a substrate and a second semiconductor device formed over the substrate. The first semiconductor device includes a first source/drain feature over the substrate, a first gate structure over the substrate, a first conductive feature over the first source/drain feature, and a first insulation layer between the first gate structure and the first conductive feature. The second semiconductor device includes a second source/drain feature over the substrate, a second gate structure over the substrate, a second conductive feature over the second source/drain feature, and a second insulation layer between the second gate structure and the second conductive feature. A width of the first conductive feature and a width of the second conductive feature are different, and a width of the first insulation layer is less than a width of the second insulation layer.Type: GrantFiled: July 21, 2021Date of Patent: September 5, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ta-Chun Lin, Kuo-Hua Pan, Jhon Jhy Liaw
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Patent number: 11749683Abstract: A semiconductor device includes a first active region and a second active region disposed over a substrate. A first source/drain component is grown on the first active region. A second source/drain component is grown on the second active region. An interlayer dielectric (ILD) is disposed around the first source/drain component and the second source/drain component. An isolation structure extends vertically through the ILD. The isolation structure separates the first source/drain component from the second source/drain component.Type: GrantFiled: April 25, 2022Date of Patent: September 5, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.Inventors: Ta-Chun Lin, Kuan-Lin Yeh, Chun-Jun Lin, Kuo-Hua Pan, Mu-Chi Chiang
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Patent number: 11749524Abstract: A method of forming a semiconductor structure includes forming a first top electrode (TE) layer over a magnetic tunnel junction (MTJ) layer and performing a smoothing treatment on the first TE layer. The smoothing treatment is performed in situ after the forming first TE layer. The smoothing treatment removes spike point defects from the first TE layer. Additional TE layers may be formed over the first TE layer.Type: GrantFiled: June 4, 2021Date of Patent: September 5, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Jung-Tang Wu, Yu-Jen Chien, Szu-Hua Wu, Chin-Szu Lee, Yao-Shien Huang
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Patent number: 11742266Abstract: A method comprises removing a portion of molding compound from a side of a package structure by a laser ablation process to create an opening that exposes a portion of a conductive clip, depositing solder paste on the exposed portion of the conductive clip, and reflowing the solder paste. The laser ablation process in one example is a pulsed laser ablation process that includes raster scanning a laser along a portion of the side of the package structure to create the opening. Depositing the solder paste in one example includes performing a dispense process or a screening process that deposits solder paste in the opening onto the exposed portion of the conductive clip.Type: GrantFiled: December 12, 2019Date of Patent: August 29, 2023Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Laura May Antoinette Dela Paz Clemente, James Raymond Maliclic Baello
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Patent number: 11744131Abstract: Embodiments of the present disclosure provide an OLED device, a method of manufacturing the OLED device, and a display panel. The OLED device comprises: a substrate, a first electrode layer, a color filter layer, a light emitting layer and a second electrode layer. The first electrode layer is one of an anode layer or a cathode layer and comprises: a first sub-electrode layer disposed on the substrate; and a second sub-electrode layer electrically connected with the first sub-electrode layer. The color filter layer is disposed on the first sub-electrode layer and the second sub-electrode layer is disposed on the color filter layer. The second electrode layer is the other of the anode layer or the cathode layer and the light emitting layer is disposed between the second electrode layer and the second sub-electrode layer of the first electrode layer.Type: GrantFiled: June 14, 2022Date of Patent: August 29, 2023Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Xiaohu Li, Huajie Yan, Hongsheng Zhan, Tun Liu, Zhiqiang Jiao
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Patent number: 11742229Abstract: A method for calibration including determining a temperature induced offset in a pedestal of a process module under a temperature condition for a process. The method includes delivering a wafer to the pedestal of the process module by a robot, and detecting an entry offset. The method includes rotating the wafer over the pedestal by an angle. The method includes removing the wafer from the pedestal by the robot and measuring an exit offset. The method includes determining a magnitude and direction of the temperature induced offset using the entry offset and exit offset.Type: GrantFiled: December 16, 2021Date of Patent: August 29, 2023Assignee: Lam Research CorporationInventors: Jacob L. Hiester, Richard Blank, Peter Thaulad, Paul Konkola
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Patent number: 11742354Abstract: A semiconductor device includes first and second vertical transport field-effect transistor (VTFET) devices. Each of the first and second VTFET devices includes a bottom epitaxial layer, a plurality of channel fins formed on the bottom epitaxial layer, a first interlayer dielectric (ILD) layer formed between the channel fins, a high-? metal gate formed between the channel fins and the first ILD layer, a top epitaxial layer formed discretely on each of the channel fins, and a trench epitaxial layer formed continuously across the top epitaxial layer, a portion of the first ILD layer also being formed between the first and second VTFET device. The semiconductor device also includes a second ILD layer formed on the portion of the first ILD layer that is between the first and second VTFET devices, the second ILD layer separating the top epitaxial layers of the first and second VTFET devices.Type: GrantFiled: September 23, 2021Date of Patent: August 29, 2023Assignee: International Business Machines CorporationInventors: Ruilong Xie, Christopher J Waskiewicz, Alexander Reznicek, Su Chen Fan, Heng Wu
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Patent number: 11742353Abstract: A device includes a substrate, a channel layer, a gate structure, a source/drain epitaxial structure, and a bottom dielectric structure. The channel layer is over the substrate. The gate structure is over the substrate and surrounds the channel layer. The source/drain epitaxial structure is over the substrate and is connected to the channel layer. The bottom dielectric structure is between the source/drain epitaxial structure and the substrate.Type: GrantFiled: April 14, 2021Date of Patent: August 29, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Kuo-Pi Tseng, De-Fang Chen, Chao-Cheng Chen
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Patent number: 11742350Abstract: Embodiments of the present invention are directed to fabrication methods and resulting structures that provide metal gate N/P boundary control in an integrated circuit (IC) using an active gate cut and recess processing scheme. In a non-limiting embodiment of the invention, a gate cut is formed in an N/P boundary between an n-type field effect transistor (FET) and a p-type FET. A first portion of a first work function metal is removed over a channel region of the n-type FET. The gate cut prevents etching a second portion of the first work function metal. The first portion of the first work function metal is replaced with a second work function metal. The gate cut is recessed, and a conductive region is formed on the recessed surface of the gate cut. The conductive region provides electrical continuity across the N/P boundary.Type: GrantFiled: September 23, 2021Date of Patent: August 29, 2023Assignee: International Business Machines CorporationInventors: Andrew Gaul, Chanro Park, Julien Frougier, Ruilong Xie, Andrew M. Greene, Christopher J. Waskiewicz
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Patent number: 11744060Abstract: A memory device is provided. The memory device includes a plurality of memory cells. Each memory cell includes a latch circuit formed of N-type field effect transistors (NFETs) and P-type field effect transistors (PFETs). The NFETs are formed at a surface of a semiconductor substrate, and the PFETs are disposed at an elevated level over the NFETs.Type: GrantFiled: August 12, 2021Date of Patent: August 29, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Huai-Ying Huang, Yu-Ming Lin
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Patent number: 11737284Abstract: A magnetoresistive random access memory (MRAM) cell includes a bottom electrode, a magnetic tunnel junction structure, a bipolar tunnel junction selector; and a top electrode. The tunnel junction selector includes a MgO tunnel barrier layer and provides a bipolar function for putting the MTJ structure in parallel or anti-parallel mode.Type: GrantFiled: December 27, 2021Date of Patent: August 22, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Mauricio Manfrini, Hon-Sum Philip Wong
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Patent number: 11735550Abstract: Various embodiments of the present disclosure are directed towards a semiconductor structure including a bond bump disposed on an upper surface of an upper conductive structure. The upper conductive structure overlies a substrate. A buffer layer is disposed along the upper surface of the upper conductive structure. The bond bump comprises a sidewall having a straight sidewall segment overlying a curved sidewall segment.Type: GrantFiled: December 20, 2021Date of Patent: August 22, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ching-Sheng Chu, Chern-Yow Hsu
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Patent number: 11737255Abstract: A semiconductor device includes a first memory cell and a dummy region adjacent to the first memory cell. The first memory cell includes a first transistor. The dummy region includes a cut-off transistor. The cut-off transistor has a first terminal electrically coupled to a second terminal of the first transistor. The cut-off transistor has a third terminal electrically coupled to ground.Type: GrantFiled: February 21, 2022Date of Patent: August 22, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventor: Chih-Chuan Yang
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Patent number: 11735521Abstract: Embodiments herein may describe techniques for an integrated circuit including a MOSFET having a source area, a channel area, a gate electrode, and a drain area. The channel area may include a first channel region with a dopant of a first concentration next to the source area, and a second channel region with the dopant of a second concentration higher than the first concentration next to the drain area. A source electrode may be in contact with the source area, a gate oxide layer above the channel area, and the gate electrode above the gate oxide layer. A first resistance exists between the source electrode and the gate electrode. A second resistance exists between the source electrode, the gate electrode, and a path through the gate oxide layer to couple the source electrode and the gate electrode after a programming operation is performed. Other embodiments may be described and/or claimed.Type: GrantFiled: October 25, 2021Date of Patent: August 22, 2023Assignee: Intel CorporationInventors: Yu-Lin Chao, Sarvesh H. Kulkarni, Vincent E. Dorgan, Uddalak Bhattacharya
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Patent number: 11735513Abstract: The present disclosure relates to an integrated chip including a semiconductor device. The semiconductor device includes a first source/drain structure, a second source/drain structure, a stack of channel structures, and a gate structure. The stack of channel structures and the gate structure are between the first and second source/drain structures. The gate structure surrounds the stack of channel structures. A first conductive wire overlies and is spaced from the semiconductor device. The first conductive wire includes a first stack of conductive layers. A first conductive contact extends through a dielectric layer from the first conductive wire to the first source/drain structure. The first conductive contact is on a back-side of the first source/drain structure.Type: GrantFiled: August 5, 2021Date of Patent: August 22, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Shin-Yi Yang, Ming-Han Lee, Shau-Lin Shue
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Patent number: 11728294Abstract: A package substrate is disclosed. The package substrate includes a die package in the package substrate located at least partially underneath a location of a power delivery interface in a die that is coupled to the surface of the package substrate. Connection terminals are accessible on a surface of the die package to provide connection to the die that is coupled to the surface of the package substrate. Metal-insulator-metal layers inside the die package are coupled to the connection terminals.Type: GrantFiled: November 3, 2021Date of Patent: August 15, 2023Assignee: Intel CorporationInventors: Andrew Collins, Sujit Sharan, Jianyong Xie
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Patent number: 11721593Abstract: The present disclosure describes a method of forming a semiconductor device having epitaxial structures with optimized dimensions. The method includes forming first and second fin structures on a substrate, forming a spacer layer on the first and second fin structures, forming a first spacer structure adjacent to the first fin structure, and forming a first epitaxial structure adjacent to the first spacer structure. The first and second fin structures are separated by an isolation layer. The first spacer structure has a first height above the isolation layer. The method further includes forming a second spacer structure adjacent to the second fin structure and forming a second epitaxial structure adjacent to the second spacer structure. The second spacer structure has a second height above the isolation layer greater than the first height. The second epitaxial structure includes a type of dopant different from the first epitaxial structure.Type: GrantFiled: March 24, 2021Date of Patent: August 8, 2023Assignee: Tiawan Semiconductor Manufacturing Co., Ltd.Inventor: Shahaji B. More
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Patent number: 11721687Abstract: A semiconductor structure includes a substrate having a first well of a first conductivity type and a second well of a second conductivity type. From a top view, the first well includes first and seconds edges extending along a first direction. The second edge has multiple turns, resulting in the first well having a protruding section and a recessed section. The semiconductor structure further includes a first source/drain feature over the protruding section and a second source/drain feature over a main body of the first well. The first source/drain feature is of the first conductivity type. The second source/drain feature is of the second conductivity type. The first and the second source/drain features are generally aligned along a second direction perpendicular to the first direction from the top view.Type: GrantFiled: July 29, 2022Date of Patent: August 8, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yung Feng Chang, Chun-Chia Hsu, Tung-Heng Hsieh, Bao-Ru Young
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Patent number: 11710740Abstract: A semiconductor structure includes at least two field effect transistors. A gate strip including a plurality of gate dielectrics and a gate electrode strip can be formed over a plurality of semiconductor active regions. Source/drain implantation is conducted using the gate strip as a mask. The gate strip is divided into gate electrodes after the implantation.Type: GrantFiled: October 7, 2021Date of Patent: July 25, 2023Assignee: SANDISK TECHNOLOGIES LLCInventors: Takahito Fujita, Hiroyuki Ogawa, Kiyokazu Shishido
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Patent number: 11710742Abstract: A semiconductor structure includes an isolation structure, a source or drain region over the isolation structure, a channel layer connecting to the source or drain region, a gate structure over the isolation structure and engaging the channel layer, an isolating layer below the channel layer and the gate structure, a dielectric cap below the isolating layer, and a contact structure having a first portion and a second portion. The first portion of the contact structure extends through the isolation structure, and the second portion of the contact structure extends from the first portion of the contact structure, through the dielectric cap and the isolating layer, and to the source or drain region. The first portion of the contact structure is below the second portion and wider than the second portion.Type: GrantFiled: July 26, 2022Date of Patent: July 25, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chun-Yuan Chen, Huan-Chieh Su, Cheng-Chi Chuang, Chih-Hao Wang