Patents Examined by Brigitte A Paterson
  • Patent number: 11688611
    Abstract: A method for manufacturing a capacitor includes: providing a substrate and a multilayer structure; forming a recess in the multilayer structure; forming a first electrode layer on a surface of the recess; performing a selective etching treatment to remove the first and second stack material layers; performing a selective vapor phase etching treatment to the first electrode layer to form a smaller thickness of the first electrode layer; and forming a dielectric layer and a second electrode layer in which the dielectric layer is between the first and second electrode layer.
    Type: Grant
    Filed: July 20, 2020
    Date of Patent: June 27, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Jen-I Lai, Chun-Heng Wu
  • Patent number: 11652074
    Abstract: An apparatus is provided which comprises: a first set of one or more metal pads on a first substrate surface, the first set of one or more metal pads to couple with contacts of an integrated circuit die, a second set of one or more metal pads on the first substrate surface, the second set of one or more metal pads to couple with semiconductor surfaces of the integrated circuit die, one or more thermal regions below the first substrate surface, wherein the one or more thermal regions comprise thermally conductive material and are coupled with the second set of one or more metal pads, dielectric material adjacent the one or more thermal regions, and one or more conductive contacts on a second substrate surface, opposite the first substrate surface, the one or more conductive contacts coupled with the first set of one or more metal pads, and the one or more conductive contacts to couple with contacts of a printed circuit board. Other embodiments are also disclosed and claimed.
    Type: Grant
    Filed: September 29, 2017
    Date of Patent: May 16, 2023
    Assignee: Intel Corporation
    Inventors: Feras Eid, Johanna Swan
  • Patent number: 11637184
    Abstract: A drift layer is formed of silicon carbide and has a first conductivity type. A trench bottom protective layer is provided on a bottom portion of a gate trench and has a second conductivity type. A depletion suppressing layer is provided between a side surface of the gate trench and the drift layer, extends from a lower portion of a body region up to a position deeper than the bottom portion of the gate trench, has the first conductivity type, and has an impurity concentration of the first conductivity type higher than that of the drift layer. The impurity concentration of the first conductivity type of the depletion suppressing layer is reduced as the distance from the side surface of the gate trench becomes larger.
    Type: Grant
    Filed: January 11, 2018
    Date of Patent: April 25, 2023
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Kohei Adachi, Katsutoshi Sugawara, Yutaka Fukui, Hideyuki Hatta, Rina Tanaka
  • Patent number: 11609246
    Abstract: A test and measurement device is described with at least one measurement channel, a measurement input, an analog to digital converter, and an acquisition unit. The test and measurement device has a trigger clock configured to generate repeated trigger clock timings, the trigger clock timings controlling the acquisition unit. In addition, a method for applying a trigger is described.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: March 21, 2023
    Assignee: Rohde & Schwarz GmbH & Co. KG
    Inventor: Markus Freidhof
  • Patent number: 11521982
    Abstract: The present disclosure may provide a semiconductor device having a stable structure and a low manufacturing degree of the difficulty. The device may include conductive layers and insulating layers which are alternately stacked; a plurality of pillars passing through the conductive layers and the insulating layers; and a plurality of deposition inhibiting patterns, each deposition inhibiting pattern being formed along a portion of an interface between a side-wall of each of the pillars and each of the conductive layers and along a portion of an interface between each of the insulating layers and each of the conductive layers.
    Type: Grant
    Filed: May 28, 2019
    Date of Patent: December 6, 2022
    Assignee: SK hynix Inc.
    Inventor: Young Jin Lee
  • Patent number: 11508733
    Abstract: An integrated circuit device includes: a substrate including active regions; a device isolation film defining the active regions; a word line arranged over the active regions and the device isolation film and extending in a first horizontal direction; and a gate dielectric film arranged between the substrate and the word line and between the device isolation film and the word line, in which, in a second horizontal direction orthogonal to the first horizontal direction, a width of a second portion of the word line over the device isolation film is greater than a width of a first portion of the word line over the active regions. To manufacture the integrated circuit device, an impurity region is formed in the substrate and the device isolation film by implanting dopant ions into the substrate and the device isolation film, and a thickness of a portion of the impurity region is reduced.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: November 22, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyungjun Noh, Junsoo Kim, Dongsoo Woo, Namho Jeon
  • Patent number: 11495556
    Abstract: A method for fabricating a semiconductor structure is provided. The method includes: providing a semiconductor chip comprising an active surface; forming a conductive bump over the active surface of the semiconductor chip; and coupling the conductive bump to a substrate. The conductive bump includes a plurality of bump segments including a first group of bump segments and a second group of bump segments. Each bump segment has a same segment thickness in a direction orthogonal to the active surface of the semiconductor chip, and each bump segment has a volume defined by a multiplication of the same segment thickness with an average cross-sectional area of the bump segment in a plane parallel to the active surface of the semiconductor chip. A ratio of a total volume of the first group of bump segments to a total volume of the second group of bump segments is between 0.03 and 0.8.
    Type: Grant
    Filed: November 30, 2018
    Date of Patent: November 8, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Pei-Haw Tsao, An-Tai Xu, Huang-Ting Hsiao, Kuo-Chin Chang
  • Patent number: 11488983
    Abstract: The present disclosure relates to an array substrate and a method for manufacturing the array substrate. The array substrate includes a substrate having a display region and a peripheral region surrounding the display region, the display region including sub-pixels arranged in an array, and a plurality of thin film transistors located on the substrate, including a plurality of first thin film transistors located within the peripheral region and a second thin film transistor located within each sub-pixel of the display region, wherein there is a first distance in a row and/or column direction between first active layers of the first thin film transistors and second active layers of nearest neighbor second thin film transistors, and there is a second distance in a row and/or column direction between adjacent second active layers, wherein the first distance is substantially equal to the second distance.
    Type: Grant
    Filed: July 22, 2019
    Date of Patent: November 1, 2022
    Assignee: BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
    Inventors: Chen Xu, Hongfei Cheng
  • Patent number: 11482529
    Abstract: Described is a low power, high-density a 1T-1C (one transistor and one capacitor) memory bit-cell, wherein the capacitor comprises a pillar structure having ferroelectric material (perovskite, improper ferroelectric, or hexagonal ferroelectric) and conductive oxides as electrodes. In various embodiments, one layer of the conductive oxide electrode wraps around the pillar capacitor, and forms the outer electrode of the pillar capacitor. The core of the pillar capacitor can take various forms.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: October 25, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Sasikanth Manipatruni, Rajeev Kumar Dokania, Ramamoorthy Ramesh
  • Patent number: 11476260
    Abstract: Described is a low power, high-density a 1T-1C (one transistor and one capacitor) memory bit-cell, wherein the capacitor comprises a pillar structure having ferroelectric material (perovskite, improper ferroelectric, or hexagonal ferroelectric) and conductive oxides as electrodes. In various embodiments, one layer of the conductive oxide electrode wraps around the pillar capacitor, and forms the outer electrode of the pillar capacitor. The core of the pillar capacitor can take various forms.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: October 18, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Sasikanth Manipatruni, Rajeev Kumar Dokania, Ramamoorthy Ramesh
  • Patent number: 11476261
    Abstract: Described is a low power, high-density a 1T-1C (one transistor and one capacitor) memory bit-cell, wherein the capacitor comprises a pillar structure having ferroelectric material (perovskite, improper ferroelectric, or hexagonal ferroelectric) and conductive oxides as electrodes. In various embodiments, one layer of the conductive oxide electrode wraps around the pillar capacitor, and forms the outer electrode of the pillar capacitor. The core of the pillar capacitor can take various forms.
    Type: Grant
    Filed: February 27, 2019
    Date of Patent: October 18, 2022
    Assignee: Kepler Computing Inc.
    Inventors: Sasikanth Manipatruni, Rajeev Kumar Dokania, Ramamoorthy Ramesh
  • Patent number: 11462533
    Abstract: An ESD protection circuit, an array substrate and a display device are disclosed. The ESD protection circuit includes a plurality of first ESD units, each of which includes: a first active layer, a first insulating layer, a first metallic layer, a second insulating layer and a second metallic layer which are disposed on a base substrate; the first active layer includes a plurality of first connection terminals; the first metallic layer includes a plurality of first conductive terminals; the second metallic layer includes a plurality of second conductive terminals an orthographic projection of the first metallic layer and an orthographic projection of the second metallic layer the base substrate are at least partly overlapped with an orthographic projection of the first active layer on the base substrate respectively; and the first conductive terminals and the second conductive terminals are electrically connected with different first connection terminals, respectively.
    Type: Grant
    Filed: February 28, 2019
    Date of Patent: October 4, 2022
    Assignees: ORDOS YUANSHENG OPTOELECTRONICS CO., LTD., BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
    Inventors: Chen Ting Liu, Zhiming Hu, Chunxiang Nan, Xiaodong Pan, Lili Cao, Ping Wang, Xiaochuan Ma
  • Patent number: 11462557
    Abstract: A semiconductor device and a method of manufacturing the semiconductor device are provided. The semiconductor device includes a source structure formed on a base, an etch prevention layer formed on the source structure, bit lines, a stack structure located between the etch prevention layer and the bit lines and including conductive layers and insulating layers that are alternately stacked on each other, and a channel structure passing through the stack structure and the etch prevention layer, wherein a lower portion of the channel structure is located in the source structure and a sidewall of the lower portion of the channel structure is in direct contact with the source structure.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: October 4, 2022
    Assignee: SK hynix Inc.
    Inventor: Nam Jae Lee
  • Patent number: 11456307
    Abstract: A flash memory is provided and includes a substrate including a memory cell region; a memory transistor array including memory transistors and selecting transistors in the memory cell region; a functional layer covering outer surfaces of the memory transistors and selecting transistors, as well as surfaces of the substrate between adjacent memory transistors and selecting transistors; a dielectric layer covering top surfaces of the memory transistors and selecting transistors and fills gaps between each selecting transistor and a corresponding adjacent memory transistor; and air gaps formed between adjacent memory transistors. Each selecting transistor is used for selecting one column of memory transistors in the memory transistor array. The functional layer has a roughened surface capable of absorbing water. The air gaps in the flash memory are water vapor induced air gaps.
    Type: Grant
    Filed: July 31, 2019
    Date of Patent: September 27, 2022
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Liang Chen, Shengfen Chiu
  • Patent number: 11447869
    Abstract: A method includes: forming an n-type diffusion layer as a second-conductivity-type semiconductor layer on a first-conductivity-type crystalline semiconductor substrate; and forming an anti-reflective film by a CVD method to extend from a light receiving surface side to a side surface of the semiconductor substrate, by placing the semiconductor substrate on a mount in a film forming chamber with a back surface brought into contact with the mount, evacuating and decompressing the film forming chamber, and supplying source gas into the film forming chamber. In the film formation, a tray has a through hole, and the anti-reflective film is formed on the surface of the semiconductor substrate excluding the contact surface by bringing the semiconductor substrate into close contact with the contact surface by causing the through hole to have a negative pressure relative to the pressure in the film forming chamber by the evacuation.
    Type: Grant
    Filed: September 20, 2016
    Date of Patent: September 20, 2022
    Assignee: MITSUBISHI ELECTRIC CORPORATION
    Inventors: Masahiro Yokogawa, Takahiro Kawasaki
  • Patent number: 11436992
    Abstract: A display system and a method for forming an output buffer of a source driver are provided. The display system includes a plurality of pixels coupled to a plurality of gate lines and a plurality of source lines. A gate driver provides a plurality of gate signals to the plurality of gate lines. A source driver provides a plurality of image signals to the plurality of source lines. The source driver includes an output buffer. The output buffer includes a transistor. The transistor is either a native transistor device, a depletion-mode transistor device or a low-threshold transistor device.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: September 6, 2022
    Assignee: Vanguard International Semiconductor Corporation
    Inventors: Yu-Lung Chin, Ching-Yi Hsu, Chang-He Liu, Chih-Cherng Liao, Jun-Wei Chen, Leuh Fang
  • Patent number: 11437340
    Abstract: An electronic module has a first electronic element 13, a first connector 60 provided in one side of the first electronic element 13, and having a first columnar part 62 extending to another side and a first groove part 64 provided in a one-side surface, and a second electronic element 23 provided in one side of the first connector 60 via a conductive adhesive agent provided inside a circumference of the first groove part 64. The first connector 60 has a first concave part 67 on one side at a position corresponding to the first columnar part 62.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: September 6, 2022
    Assignee: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
    Inventors: Kosuke Ikeda, Osamu Matsuzaki
  • Patent number: 11437245
    Abstract: The present disclosure provides methods of forming semiconductor devices. A method according to the present disclosure includes receiving a workpiece that includes a stack of semiconductor layers, depositing a first pad oxide layer on a germanium-containing top layer of the stack, depositing a second pad oxide layer on the first pad oxide layer, depositing a pad nitride layer on the second pad oxide layer, and patterning the stack using the first pad oxide layer, the second pad oxide layer, and the pad nitride layer as a hard mask layer. The depositing of the first pad oxide layer includes a first oxygen plasma power and the depositing of the second pad oxide layer includes a second oxygen plasma power greater than the first oxygen plasma power.
    Type: Grant
    Filed: September 30, 2020
    Date of Patent: September 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hao Fu, Hung-Ju Chou, Che-Lun Chang, Jiun-Ming Kuo, Yuan-Ching Peng, Sung-En Lin, Nung-Che Cheng, Chunyao Wang
  • Patent number: 11430652
    Abstract: A method includes depositing a first work-function layer and a second work-function layer in a first device region and a second device region, respectively, and depositing a first fluorine-blocking layer and a second fluorine-blocking layer in the first device region and the second device region, respectively. The first fluorine-blocking layer is over the first work-function layer, and the second fluorine-blocking layer is over the second work-function layer. The method further includes removing the second fluorine-blocking layer, and forming a first metal-filling layer over the first fluorine-blocking layer, and a second metal-filling layer over the second work-function layer.
    Type: Grant
    Filed: September 16, 2019
    Date of Patent: August 30, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chia-Ching Lee, Chung-Chiang Wu, Shih-Hang Chiu, Hsuan-Yu Tung, Da-Yuan Lee
  • Patent number: 11424159
    Abstract: A semiconductor device, including: a first semiconductor element formed at a first surface on a substrate, and has a first electrode portion formed thereon a first metal silicide film; a second semiconductor element formed at a second surface at a higher position than the first surface, and has a second electrode portion formed thereon a second metal silicide film and a hydrogen supply film configured to cover a part of an upper portion of the second metal silicide film; an interlayer insulating film formed on the first semiconductor element and the second semiconductor element; a first contact hole formed through the interlayer insulating film until the first metal silicide film; a second contact hole formed through the interlayer insulating film and the hydrogen supply film until the second metal silicide film; and a metal wiring embedded in each of the first contact hole and the second contact hole.
    Type: Grant
    Filed: September 9, 2020
    Date of Patent: August 23, 2022
    Assignee: ABLIC INC.
    Inventor: Hideo Yoshino