Patents Examined by Brigitte A Paterson
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Patent number: 11367691Abstract: An electronic semiconductor component with a housing structure and a cavity introduced into the housing structure is specified. The cavity comprises a base surface. Furthermore, the electronic semiconductor component comprises an auxiliary layer arranged on the base surface of the cavity and a marking penetrating the auxiliary layer at least as far as the base surface of the cavity. The marking comprises an optical contrast that depends on both an optical property of the housing structure and an optical property of the auxiliary layer. Furthermore, a method for producing an electronic semiconductor component is given.Type: GrantFiled: July 8, 2019Date of Patent: June 21, 2022Assignee: OSRAM OLED GmbHInventors: Matthias Kiessling, Andreas Reith
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Patent number: 11367690Abstract: A semiconductor device has a substrate with a first opening and second opening formed in the substrate. A first semiconductor component is disposed on the substrate. The substrate is disposed on a carrier. A second semiconductor component is disposed on the carrier in the first opening of the substrate. A third semiconductor component is disposed in the second opening. The third semiconductor component is a semiconductor package in some embodiments. A first shielding layer may be formed over the semiconductor package. An encapsulant is deposited over the substrate, first semiconductor component, and second semiconductor component. A shielding layer may be formed over the encapsulant.Type: GrantFiled: May 21, 2020Date of Patent: June 21, 2022Assignee: STATS ChipPAC Pte. Ltd.Inventors: DeokKyung Yang, Woonjae Beak, YiSu Park, OhHan Kim, HunTeak Lee, HeeSoo Lee
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Patent number: 11361991Abstract: Embodiments of the present disclosure relate to processes for filling trenches. The process includes depositing a first amorphous silicon layer on a surface of a layer and a second amorphous silicon layer in a portion of a trench formed in the layer, and portions of side walls of the trench are exposed. The first amorphous silicon layer is removed. The process further includes depositing a third amorphous silicon layer on the surface of the layer and a fourth amorphous silicon layer on the second amorphous silicon layer. The third amorphous silicon layer is removed. The deposition/removal cyclic processes may be repeated until the trench is filled with amorphous silicon layers. The amorphous silicon layers form a seamless amorphous silicon gap fill in the trench since the amorphous silicon layers are formed from bottom up.Type: GrantFiled: March 7, 2019Date of Patent: June 14, 2022Assignee: Applied Materials, Inc.Inventors: Xin Liu, Fei Wang, Rui Cheng, Abhijit Basu Mallick, Robert Jan Visser
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Patent number: 11362064Abstract: A package structure includes a first die, a second die, an insulation structure, a through via, a dielectric layer and a redistribution layer. The second die is electrically bonded to the first die. The insulation structure is disposed on the first die and laterally surrounds the second die. The through via penetrates through the insulation structure to electrically connect to the first die. The through via includes a first barrier layer and a conductive post on the first barrier layer. The dielectric layer is on the second die and the insulation structure. The redistribution layer is embedded in the dielectric layer and electrically connected to the through via. The redistribution layer includes a second barrier layer and a conductive layer on the second barrier layer. The conductive layer of the redistribution layer is in contact with the conductive post of the through via.Type: GrantFiled: January 8, 2020Date of Patent: June 14, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Wei Chen, Ching-Jung Yang, Ming-Fa Chen, Sung-Feng Yeh, Ying-Ju Chen
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Patent number: 11355633Abstract: A semiconductor device, and method of fabricating the device. The device including a plurality of vertical transistors, each vertical transistor having a raised semiconductor island having a first cross-sectional profile, a source-drain region disposed above the raised semiconductor island, the source-drain region having a second cross-sectional profile, and a semiconductor channel disposed above the source-drain region, the semiconductor channel having a third cross-sectional profile. The second cross-sectional profile is asymmetric.Type: GrantFiled: January 3, 2020Date of Patent: June 7, 2022Assignee: International Business Machines CorporationInventors: Alexander Reznicek, Ruilong Xie, Chun-Chen Yeh, Balasubramanian S Pranatharthi Haran
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Patent number: 11329098Abstract: According to various embodiments, a PMUT device may include a wafer, an active layer including a piezoelectric stack, an intermediate layer having a cavity therein where the intermediate layer is disposed between the wafer and the active layer such that the cavity is adjoining the piezoelectric stack. A via may be formed through the active layer and the intermediate layer to the wafer. A metallic layer may be disposed over the active layer and over surfaces of the via. The intermediate layer may include an interposing material surrounding the cavity, and may further include a sacrificial material surrounding the via. The sacrificial material may be different from the interposing material. The metallic layer may include a first member at least substantially overlapping the piezoelectric stack, a second member extending from the first member to the cavity, and a third member extending into the active layer to contact an electrode therein.Type: GrantFiled: November 8, 2018Date of Patent: May 10, 2022Assignee: VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.Inventors: You Qian, Humberto Campanella-Pineda, Rakesh Kumar
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Patent number: 11289422Abstract: Embodiments of bonded semiconductor structures and fabrication methods thereof are disclosed. In an example, a semiconductor device includes a first semiconductor structure, a second semiconductor structure, and a bonding interface between the first semiconductor structure and the second semiconductor structure. The first semiconductor structure includes a substrate, a first device layer disposed on the substrate, and a first bonding layer disposed above the first device layer and including a first bonding contact and a first bonding alignment mark. The second semiconductor structure includes a second device layer, and a second bonding layer disposed below the second device layer and including a second bonding contact and a second bonding alignment mark. The first bonding alignment mark is aligned with the second bonding alignment mark at the bonding interface, such that the first bonding contact is aligned with the second bonding contact at the bonding interface.Type: GrantFiled: December 12, 2018Date of Patent: March 29, 2022Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.Inventors: Meng Yan, Jia Wen Wang, Si Ping Hu, Shun Hu
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Patent number: 11276680Abstract: A temperature protected power semiconductor device has a substrate which includes a power field effect transistor (FET) and a thermosensitive element. The power FET has a gate electrode connected to a gate, a drift region, and first and second terminals for a load current. The load current is controllable during operation by a voltage applied between the gate and the first terminal. The thermosensitive element has a first contact connected to one of the gate electrode and first terminal of the power FET, and a second contact connected to the other one of the gate electrode and first terminal. The thermosensitive element is located close to the power FET and thermally coupled thereto. The thermosensitive element is configured to cause the power FET to reduce the load current in case of an exceedance of a limit temperature of the power FET, by interconnecting the gate and first terminal.Type: GrantFiled: October 22, 2015Date of Patent: March 15, 2022Assignee: Infineon Technologies Austria AGInventors: Daniel Pedone, Hans-Joachim Schulze, Rolf Gerlach, Christian Kasztelan, Anton Mauder, Hubert Rothleitner, Wolfgang Scholz, Philipp Seng, Peter Tuerkes
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Patent number: 11264234Abstract: Disclosed are methods and systems for providing silicon carbide films. A layer of silicon carbide can be provided under process conditions that employ one or more silicon-containing precursors that have one or more silicon-hydrogen bonds and/or silicon-silicon bonds. The silicon-containing precursors may also have one or more silicon-oxygen bonds and/or silicon-carbon bonds. One or more radical species in a substantially low energy state can react with the silicon-containing precursors to form the silicon carbide film. The one or more radical species can be formed in a remote plasma source.Type: GrantFiled: May 1, 2019Date of Patent: March 1, 2022Assignee: NOVELLUS SYSTEMS, INC.Inventors: Bhadri N. Varadarajan, Bo Gong, Zhe Gui
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Patent number: 11217730Abstract: A light emitting apparatus includes: a package substrate; a light emitting device housed in a recess of the package substrate; a window member provided to cover an opening of the recess; and a sealing structure that seals a space between the package substrate and the window member. The window member includes a glass plate having an inner surface that faces the optical semiconductor device and a frame body provided on the inner surface of the glass plate. The sealing structure includes a first metal layer provided on a top surface of the package substrate, a second metal layer provided on a bottom surface and an inner circumferential surface of the frame body, and a metal bonding part provided between the first and second metal layers, at least a portion of the metal bonding part being provided on the inner circumferential surface.Type: GrantFiled: February 25, 2019Date of Patent: January 4, 2022Assignee: NIKKISO CO., LTD.Inventor: Hiroyasu Ichinokura
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Patent number: 11211261Abstract: A packaging structure and a method of forming a packaging structure are provided. The packaging structure, such as an interposer, is formed by optionally bonding two carrier substrates together and simultaneously processing two carrier substrates. The processing includes forming a sacrificial layer over the carrier substrates. Openings are formed in the sacrificial layers and pillars are formed in the openings. Substrates are attached to the sacrificial layer. Redistribution lines may be formed on an opposing side of the substrates and vias may be formed to provide electrical contacts to the pillars. A debond process may be performed to separate the carrier substrates. Integrated circuit dies may be attached to one side of the redistribution lines and the sacrificial layer is removed.Type: GrantFiled: August 7, 2018Date of Patent: December 28, 2021Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsien-Liang Meng, Wei-Hung Lin, Yu-min Liang, Ming-Che Ho, Hung-Jui Kuo, Chung-Shi Liu, Mirng-Ji Lii
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Patent number: 11183615Abstract: A semiconductor device includes: a mounting board; and a semiconductor element disposed on the mounting board via metal bumps, wherein the semiconductor element includes a semiconductor stacked structure and first electrodes, the mounting board includes second electrodes, the metal bumps include a first layer in contact with the first electrodes of the semiconductor element and a second layer located on a side opposite to the first electrodes, an average crystal grain size of crystals included in the first layer is larger than an average crystal grain size of crystals included in the second layer, and the second layer is spaced apart from the first electrodes of the semiconductor element.Type: GrantFiled: December 20, 2018Date of Patent: November 23, 2021Assignee: NUVOTON TECHNOLOGY CORPORATION JAPANInventors: Masanori Hiroki, Shigeo Hayashi, Kenji Nakashima, Toshiya Fukuhisa, Keimei Masamoto, Atsushi Yamada
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Patent number: 11139444Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, at least one organic light-emitting layer disposed over the substrate, and at least one down-conversion layer. The at least one down-conversion layer may generate the NIR emission by absorbing at least a portion of the light emitted by the at least one organic light emitting layer, and re-emitting light at a longer NIR wavelength or range of wavelengths having a peak NIR emission that may be greater than 700 nm, greater than 750 nm, or greater than 800 nm. An out-of-plane optical density of the at least one down-conversion layer may be less than 0.1 for all wavelengths of light in a range from 400 nm to 600 nm.Type: GrantFiled: December 12, 2018Date of Patent: October 5, 2021Assignee: Universal Display CorporationInventors: Eric A. Margulies, Nicholas J. Thompson, Michael Stuart Weaver
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Patent number: 11049867Abstract: According to embodiments, a semiconductor memory device includes a plurality of control gate electrodes laminated above a substrate and extend in a first direction and a second direction, and a memory pillar that has one end connected to the substrate, has longitudinally a third direction intersecting with the first direction and the second direction, and is opposed to the plurality of control gate electrodes. The memory pillar includes a core insulating layer and a semiconductor layer arranged around the core insulating layer. The semiconductor layer includes a first portion and a second portion positioned at a substrate side of the first portion. A width in the first direction or the second direction of the semiconductor layer at at least a part of the first portion is larger than a width in the first direction or the second direction of the second portion.Type: GrantFiled: August 4, 2016Date of Patent: June 29, 2021Assignee: Toshiba Memory CorporationInventor: Yasuhiro Shimura
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Patent number: 11031251Abstract: A method of forming a uniform self-aligned low-k layer with a large process window for inserting a memory array with pillar/convex topography and the resulting device are provided. Embodiments include forming a substrate with a first region and a second region; forming a first low-K layer over the substrate; forming an oxide layer over the first low-K layer; forming a spacer over the oxide layer; etching the spacer to expose the oxide layer in the first region; removing the oxide layer and a portion of the first low-K layer in the first region and a portion of the oxide layer and a portion of the spacer in the second region; removing the spacer in the second region; cleaning the first low-K layer and the oxide layer, a triangular-like shaped portion of the oxide layer remaining; and forming a second low-K layer over the substrate.Type: GrantFiled: March 4, 2019Date of Patent: June 8, 2021Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Yi Jiang, Juan Boon Tan, Zhehui Wang
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Patent number: 11017999Abstract: A method of a forming semiconductor fin structures that includes forming a plurality of fin structures with a first etch to a first depth in a substrate. The plurality of fin structures have a first width to the first depth. A spacer is formed on sidewalls of the plurality of fin structures. A second etch step can then extend the plurality of fin structures to a second depth with a second etch. The plurality of fin structures have a second width greater than the first width at the second depth portion. At least a portion of the trench separating adjacent fin structures may then be filled with a dielectric formed by an oxidation process. The portion of the fin structures extending above the dielectric fill is the active region of the fin structures which has a uniform height for all of the fin structure in the plurality of fin structures.Type: GrantFiled: October 5, 2016Date of Patent: May 25, 2021Assignee: International Business Machines CorporationInventors: Kangguo Cheng, Juntao Li, Xin Miao
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Patent number: 11018099Abstract: A semiconductor structure and a method for forming the same are provided. The semiconductor structure includes: a semiconductor chip; a substrate facing an active surface of the semiconductor chip; and a conductive bump extending from the active surface of the semiconductor chip toward the substrate, wherein the conductive bump comprises: a plurality of bump segments comprising a first group of bump segments and a second group of bump segments, wherein each bump segment comprises the same segment height in a direction orthogonal to the active surface of the semiconductor chip, and each bump segment comprises a volume defined by the multiplication of the segment height with the average cross-sectional area of the bump segment; wherein the ratio of the total volume of the first group of bump segments to the total volume of the second group of bump segments is between about 0.03 and about 0.8.Type: GrantFiled: November 26, 2014Date of Patent: May 25, 2021Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Pei-Haw Tsao, An-Tai Xu, Huang-Ting Hsiao, Kuo-Chin Chang
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Patent number: 10985065Abstract: A wafer processing method includes a protective member laying step of placing a protective member on a face side of a wafer, a reverse side grinding step of grinding a reverse side of the wafer to thin the wafer, a cut groove forming step of positioning a cutting blade in alignment with projected dicing lines one at a time on the reverse side of the wafer, cutting the wafer with the cutting blade to form cut grooves in the wafer which terminate short of the face side thereof, and a cutting step of applying a laser beam to the wafer from the reverse side thereof along the cut grooves to completely sever the wafer along the projected dicing lines into individual device chips.Type: GrantFiled: October 31, 2017Date of Patent: April 20, 2021Assignee: DISCO CORPORATIONInventors: Yohei Yamashita, Tsubasa Obata, Yuki Ogawa
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Patent number: 10964742Abstract: A circuit that includes: a photodiode configured to absorb photons and to generate photo-carriers from the absorbed photons; a first MOSFET transistor that includes: a first channel terminal coupled to a first terminal of the photodiode and configured to collect a portion of the photo-carriers generated by the photodiode; a second channel terminal; and a gate terminal coupled to a first control voltage source; a first readout circuit configured to output a first readout voltage; a second readout circuit configured to output a second readout voltage; and a current-steering circuit configured to steer the photo-carriers generated by the photodiode to one or both of the first readout circuit and the second readout circuit.Type: GrantFiled: January 24, 2020Date of Patent: March 30, 2021Assignee: Artilux, Inc.Inventors: Yun-Chung Na, Szu-Lin Cheng, Shu-Lu Chen, Han-Din Liu, Hui-Wen Chen, Che-Fu Liang, Yuan-Fu Lyu, Chien-Lung Chen, Chung-Chih Lin, Kuan-Chen Chu
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Patent number: 10950769Abstract: A Light Emitting Diode (LED) component includes a lead frame and an LED that is electrically connected to the lead frame without wire bonds, using a solder layer. The lead frame includes a metal anode pad, a metal cathode pad and a plastic cup. The LED die includes LED die anode and cathode contacts with a solder layer on them. The metal anode pad, metal cathode pad, plastic cup and/or the solder layer are configured to facilitate the direct die attach of the LED die to the lead frame without wire bonds. Related fabrication methods are also described.Type: GrantFiled: February 14, 2017Date of Patent: March 16, 2021Assignee: Cree, Inc.Inventors: Michael John Bergmann, Colin Kelly Blakely, Arthur Fong-Yuen Pun, Jesse Colin Reiherzer