Patents Examined by Christine Enad
  • Patent number: 11776938
    Abstract: At least one array of LEDs (e.g., in a flip chip configuration) is supported by a substrate having a light extraction surface overlaid with at least one lumiphoric material. Light segregation elements registered with gaps between LEDs are configured to reduce interaction between emissions of different LEDs and/or lumiphoric material regions to reduce scattering and/or optical crosstalk, thereby preserving pixel-like resolution of the resulting emissions. Light segregation elements may be formed by mechanical sawing or etching to define grooves or recesses in a substrate, and filling the grooves or recesses with light-reflective or light-absorptive material. Light segregation elements external to a substrate may be defined by photolithographic patterning and etching of a sacrificial material, and/or by 3D printing.
    Type: Grant
    Filed: May 10, 2022
    Date of Patent: October 3, 2023
    Assignee: CREELED, INC.
    Inventors: John Edmond, Matthew Donofrio, Jesse Reiherzer, Peter Scott Andrews, Joseph G. Clark, Kevin Haberern
  • Patent number: 11764292
    Abstract: Circuit devices and methods of forming the same are provided. In one embodiment, a method includes receiving a workpiece that includes a substrate and a fin extending from the substrate, forming a first ferroelectric layer on the fin, forming a dummy gate structure over a channel region of the fin, forming a gate spacer over sidewalls of the dummy gate structure, forming an inter-level dielectric layer over the workpiece, removing the dummy gate structure to expose the first ferroelectric layer over the channel region of the fin, and forming a gate electrode over the exposed first ferroelectric layer over the channel region of the fin.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Bo-Feng Young, Chih-Yu Chang, Sai-Hooi Yeong, Chi On Chui, Chih-Hao Wang
  • Patent number: 11764223
    Abstract: The present application discloses a method for fabricating a semiconductor device. The method includes forming a fin on a substrate; forming a gate structure on the fin; forming impurity regions on two sides of the fin; forming contacts correspondingly on the impurity regions; and forming conductive covering layers correspondingly on the contacts. Forming the contacts includes forming lower portions correspondingly on the impurity regions and below the first dielectric layer; forming middle portions correspondingly on the lower portions; and forming upper portions correspondingly on the middle portions, and protruding from the top surface of the second dielectric layer.
    Type: Grant
    Filed: May 31, 2022
    Date of Patent: September 19, 2023
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Chun-Chi Lai
  • Patent number: 11764190
    Abstract: Described is a packaging technology to improve performance of an AI processing system. An IC package is provided which comprises: a substrate; a first die on the substrate, and a second die stacked over the first die. The first die includes memory and the second die includes computational logic. The first die comprises a ferroelectric RAM (FeRAM) having bit-cells. Each bit-cell comprises an access transistor and a capacitor including ferroelectric material. The access transistor is coupled to the ferroelectric material. The FeRAM can be FeDRAM or FeSRAM. The memory of the first die may store input data and weight factors. The computational logic of the second die is coupled to the memory of the first die. The second die is an inference die that applies fixed weights for a trained model to an input data to generate an output. In one example, the second die is a training die that enables learning of the weights.
    Type: Grant
    Filed: September 10, 2021
    Date of Patent: September 19, 2023
    Assignee: KEPLER COMPUTING INC.
    Inventors: Sasikanth Manipatruni, Rajeev Kumar Dokania, Amrita Mathuriya, Ramamoorthy Ramesh
  • Patent number: 11764221
    Abstract: A semiconductor device and method of manufacture are provided. In embodiments a dielectric fin is formed in order to help isolate adjacent semiconductor fins. The dielectric fin is formed using a deposition process in which deposition times and temperatures are utilized to increase the resistance of the dielectric fin to subsequent etching processes.
    Type: Grant
    Filed: January 25, 2021
    Date of Patent: September 19, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wan-Yi Kao, Hung Cheng Lin, Chunyao Wang, Yung-Cheng Lu, Chi On Chui
  • Patent number: 11757045
    Abstract: A semiconductor device includes a substrate, a first poly-material pattern, a first conductive element, a first semiconductor layer, and a first gate structure. The first poly-material pattern is over and protrudes outward from the substrate, wherein the first poly-material pattern includes a first active portion and a first poly-material portion joined to the first active portion. The first conductive element is over the substrate, wherein the first conductive element includes the first poly-material portion and a first metallic conductive portion covering at least one of a top surface and a sidewall of the first poly-material portion. The first semiconductor layer is over the substrate and covers the first active portion of the first poly-material pattern and the first conductive element. The first gate structure is over the first semiconductor layer located within the first active portion.
    Type: Grant
    Filed: January 10, 2022
    Date of Patent: September 12, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chao-Ching Cheng, Chun-Chieh Lu, Hung-Li Chiang, Tzu-Chiang Chen
  • Patent number: 11756984
    Abstract: A display device including a substrate, a light emitting stacked structure disposed on the substrate and including a plurality of epitaxial sub-units disposed one over another, a first adhesive layer bonding the epitaxial sub-units to the substrate; and a line part disposed on the substrate and configured to apply a light emitting signal to each of the epitaxial sub-units, in which the light emitting stacked structure is configured to provide light having various colors by a combination of light emitted from each of the epitaxial sub-units, the first adhesive layer includes a conductive and non-transparent material, and the substrate includes a non-transparent material.
    Type: Grant
    Filed: June 22, 2022
    Date of Patent: September 12, 2023
    Assignee: Seoul Viosys Co., Ltd.
    Inventors: Chung Hoon Lee, Jong Hyeon Chae, Seong Gyu Jang, Ho Joon Lee
  • Patent number: 11757024
    Abstract: A semiconductor device and method for fabricating a semiconductor device includes etch selectivity tuning to enlarge epitaxy process windows. Through modification of etching processes and careful selection of materials, improvements in semiconductor device yield and performance can be delivered. Etch selectivity is controlled by using dilute gas, using assistive etch chemicals, controlling a magnitude of bias power used in the etching process, and controlling an amount of passivation gas used in the etching process, among other approaches. A recess is formed in a dummy fin in a region of the semiconductor where epitaxial growth occurs to further enlarge the epitaxy process window.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Shih-Yao Lin, Te-Yung Liu, Chih-Han Lin
  • Patent number: 11757019
    Abstract: A method includes forming a dummy gate stack, etching the dummy gate stack to form an opening, depositing a first dielectric layer extending into the opening, and depositing a second dielectric layer on the first dielectric layer and extending into the opening. A planarization process is then performed to form a gate isolation region including the first dielectric layer and the second dielectric layer. The dummy gate stack is then removed to form trenches on opposing sides of the gate isolation region. The method further includes performing a first etching process to remove sidewall portions of the first dielectric layer, performing a second etching process to thin the second dielectric layer, and forming replacement gates in the trenches.
    Type: Grant
    Filed: February 14, 2022
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
    Inventors: Shih-Yao Lin, Chih-Han Lin, Shu-Uei Jang, Ya-Yi Tsai, Shu-Yuan Ku
  • Patent number: 11756834
    Abstract: A semiconductor structure includes a first metal gate structure and a second metal gate structure. The first metal gate structure includes a first high-k gate dielectric layer, a first work function metal layer over the first high-k gate dielectric layer, and an N-containing barrier layer between the first high-k gate dielectric layer and the first work function metal layer. The second metal gate structure includes a second high-k gate dielectric layer and a second work function metal layer over the second high-k gate dielectric layer. The first high-k gate dielectric layer and the second high-k gate dielectric layer include a same metal material. The first high-k gate dielectric layer has a first metal concentration, the second high-k gate dielectric layer has a second metal concentration, and the first metal concentration is less than the second metal concentration.
    Type: Grant
    Filed: January 28, 2021
    Date of Patent: September 12, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventor: Chien-Hao Chen
  • Patent number: 11757040
    Abstract: An integrated circuit device includes a fin-type active region extending on a substrate in a first horizontal direction, a gate line extending on the fin-type active region in a second horizontal direction, first and second source/drain regions arranged on the fin-type active region; a first source/drain contact pattern connected to the first source/drain region and including a first segment having a first height in a vertical direction, a second source/drain contact pattern connected to the second source/drain region and including a second segment having a second height less than the first height in the vertical direction, and an insulating capping line extending on the gate line in the second horizontal direction and including an asymmetric capping portion between the first segment and the second segment, the asymmetric capping portion having a variable thickness in the first horizontal direction.
    Type: Grant
    Filed: January 6, 2022
    Date of Patent: September 12, 2023
    Inventors: Deokhan Bae, Juhun Park, Myungyoon Um, Kwangyong Jang
  • Patent number: 11749739
    Abstract: A field-effect transistor (FET) device having a modulated threshold voltage (Vt) includes a source electrode, a drain electrode, a channel region extending between the source electrode and the drain electrode, and a gate stack on the channel region. The gate stack includes an ultrathin dielectric dipole layer on the channel region configured to shift the modulated Vt in a first direction, a high-k (HK) insulating layer on the ultrathin dielectric dipole layer, and a doped gate metal layer on the HK insulating layer configured to shift the modulated Vt in a second direction.
    Type: Grant
    Filed: August 6, 2021
    Date of Patent: September 5, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wei-E Wang, Mark S. Rodder
  • Patent number: 11749745
    Abstract: A semiconductor structure and a method for forming the semiconductor structure are provided. The semiconductor structure includes a substrate, and a first dielectric layer, a first gate structure and a plurality of second gate structures over the substrate. A second protection layer is formed on a top of a second gate structure. A first source-drain doped layer is formed between the first gate structure and an adjacent second gate structure. The first dielectric layer covers sidewalls of the first and second gate structures, and exposes a top surface of the second protection layer. The semiconductor structure also includes a first conductive structure in the first dielectric layer over the first source-drain doped layer, and a conductive layer on the first gate structure and the first conductive structure. A top surface of the conductive layer is coplanar with a top surface of the first dielectric layer.
    Type: Grant
    Filed: April 1, 2021
    Date of Patent: September 5, 2023
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventor: Xiang Hu
  • Patent number: 11742281
    Abstract: A semiconductor device may include a multi-level wiring structure comprising a first-level wiring layer, a second-level wiring layer and an insulating layer between the first-level wiring layer and the second-level wiring layer. The device may also include a bond pad, a first wiring extending from the bond pad, and a second wiring overlapping at least in part with the first wiring through the insulating layer to be capacitively coupled to the first wiring. The first wiring and the second wiring may each be formed respectively as the first-level wiring layer and the second-level wiring layer. The device may also include a protection circuit configured to be DC coupled to the second wiring. The first-level wiring layer may include a redistribution layer (RDL).
    Type: Grant
    Filed: January 21, 2021
    Date of Patent: August 29, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Takashi Ishihara, Wataru Nobehara
  • Patent number: 11742416
    Abstract: A semiconductor structure includes: a semiconductor substrate; a first source/drain feature and a second source/drain feature over the semiconductor substrate; and semiconductor layers extending longitudinally in a first direction and connecting the first source/drain feature and the second source/drain feature. The semiconductor layers are spaced apart from each other in a second direction perpendicular to the first direction. The semiconductor structure further includes inner spacers each between two adjacent semiconductor layers; metal oxide layers interposing between the inner spacers and the semiconductor layers; and a gate structure wrapping around the semiconductor layers and the metal oxide layers.
    Type: Grant
    Filed: May 27, 2021
    Date of Patent: August 29, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Shih-Hao Lin, Chia-Hung Chou, Chih-Hsuan Chen, Ping-En Cheng, Hsin-Wen Su, Chien-Chih Lin, Szu-Chi Yang
  • Patent number: 11735665
    Abstract: A semiconductor device according to the present disclosure includes a dielectric fin having a helmet layer, a gate structure disposed over a first portion of the helmet layer and extending along a direction, and a dielectric layer adjacent the gate structure and disposed over a second portion of the helmet layer. A width of the first portion along the direction is greater than a width of the second portion along the direction.
    Type: Grant
    Filed: July 8, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Shan Lu, Chung-I Yang, Kuo-Yi Chao, Wen-Hsing Hsieh, Jiun-Ming Kuo, Chih-Ching Wang, Yuan-Ching Peng
  • Patent number: 11735669
    Abstract: A semiconductor device according to the present disclosure includes a first transistor and a second transistor disposed over the first transistor. The first transistor includes a plurality of channel members vertically stacked over one another, and a first source/drain feature adjoining the plurality of channel members. The second transistor includes a fin structure, and a second source/drain feature adjoining the fin structure. The semiconductor device further includes a conductive feature electrically connecting the first source/drain feature and the second source/drain feature.
    Type: Grant
    Filed: November 11, 2020
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chi-Yi Chuang, Hou-Yu Chen, Kuan-Lun Cheng
  • Patent number: 11735425
    Abstract: A semiconductor device includes a semiconductor fin. The semiconductor device includes a metal gate disposed over the semiconductor fin. The semiconductor device includes a gate dielectric layer disposed between the semiconductor fin and the metal gate. The semiconductor device includes first spacers sandwiching the metal gate. The first spacers have a first top surface and the gate dielectric layer has a second top surface, and the first top surface and a first portion of the second top surface are coplanar with each other. The semiconductor device includes second spacers further sandwiching the first spacers. The second spacers have a third top surface above the first top surface and the second top surface. The semiconductor device includes a gate electrode disposed over the metal gate.
    Type: Grant
    Filed: March 7, 2022
    Date of Patent: August 22, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Tzu Ang Chiang, Ming-Hsi Yeh, Chun-Neng Lin, Jian-Jou Lian, Po-Yuan Wang, Chieh-Wei Chen
  • Patent number: 11728244
    Abstract: A semiconductor device includes a substrate, a semiconductor fin, a source/drain structure, a first buried power line, a contact, a first through substrate via (TSV), and a second TSV. The substrate has a well region extending a frontside surface of the substrate into the substrate. The semiconductor fin is on the well region. The source/drain structure is on the semiconductor fin. The first buried power line is electrically coupled to the source/drain structure on the first semiconductor fin. The first buried power line has a length extending along a lengthwise direction of the first semiconductor fin and a height extending within the well region. The first TSV extends from a backside surface of the substrate through the substrate to the first buried power line. The second TSV extends from the backside surface of the substrate to the well region.
    Type: Grant
    Filed: March 9, 2021
    Date of Patent: August 15, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Marcus Johannes Henricus Van Dal, Gerben Doornbos
  • Patent number: 11728342
    Abstract: Disclosed are a semiconductor device and a method of fabricating the same. The semiconductor device includes first and second gate patterns that are spaced apart from each other in a first direction on a substrate and extend in the first direction, a separation pattern that is disposed between and being in direct contact with the first and second gate patterns and extends in a second direction intersecting the first direction, a third gate pattern that is spaced apart in the second direction from the first gate pattern and extends in the first direction, and an interlayer dielectric layer disposed between the first gate pattern and the third gate pattern. The separation pattern includes a material different from a material of the interlayer dielectric layer. A bottom surface of the separation pattern has an uneven structure.
    Type: Grant
    Filed: April 13, 2022
    Date of Patent: August 15, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jae Hyun Park, Heonjong Shin