Patents Examined by Chuong A Luu
  • Patent number: 11004850
    Abstract: A method of forming a fin field effect transistor complementary metal oxide semiconductor (CMOS) device is provided. The method includes forming a plurality of multilayer fin templates and vertical fins on a substrate, wherein one multilayer fin template is on each of the plurality of vertical fins. The method further includes forming a dummy gate layer on the substrate, the plurality of vertical fins, and the multilayer fin templates, and removing a portion of the dummy gate layer from the substrate from between adjacent pairs of the vertical fins. The method further includes forming a fill layer between adjacent pairs of the vertical fins. The method further includes removing a portion of the dummy gate layer from between the fill layer and the vertical fins, and forming a sidewall spacer layer on the fill layer and between the fill layer and the vertical fins.
    Type: Grant
    Filed: April 13, 2020
    Date of Patent: May 11, 2021
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Ruqiang Bao, Junli Wang, Michael P. Belyansky
  • Patent number: 11004823
    Abstract: A chip assembly includes a carrier and a metal grid array having an opening. The metal grid array is attached to the carrier by an attachment material. The metal grid array and the carrier define a cavity which is formed by the opening and the carrier. The chip assembly further includes an electronic chip mounted in the cavity.
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: May 11, 2021
    Assignee: Infineon Technologies AG
    Inventors: Alexander Heinrich, Frank Daeche
  • Patent number: 11004853
    Abstract: The present disclosure relates to a bulk complementary-metal-oxide-semiconductor (CMOS) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the thinned device die. Herein, a silicon material with a resistivity between 5 Ohm-cm and 30000 Ohm-cm does not exist between the second mold compound and the thinned device die.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: May 11, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll, Dirk Robert Walter Leipold, George Maxim, Baker Scott
  • Patent number: 10998398
    Abstract: A semiconductor device includes a plurality of broad buffer layers provided in a drift layer. Each of the plurality of the broad buffer layers has an impurity concentration exceeding that of a portion of the drift layer excluding the broad buffer layers, and has a mountain-shaped impurity concentration distribution in which a local maximum value is less than the impurity concentration of an anode layer and a cathode layer. The plurality of broad buffer layers are disposed at different depths from a first main surface of the drift layer, respectively, the number of broad buffer layers close to the first main surface from the intermediate position of the drift layer is at least one, and number of broad buffer layers close to a second main surface of the drift layer from the intermediate position of the drift layer is at least two. The broad buffer layer includes a hydrogen-related donor.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: May 4, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Michio Nemoto, Takashi Yoshimura
  • Patent number: 10991820
    Abstract: A method of forming an insulating structure of a high electron mobility transistor (HEMT) is provided, the method including: forming a gallium nitride layer, forming an aluminum gallium nitride layer on the gallium nitride layer, performing an ion doping step to dope a plurality of ions in the gallium nitride layer and the aluminum gallium nitride layer, forming an insulating doped region in the gallium nitride layer and the aluminum gallium nitride layer, forming two grooves on both sides of the insulating doped region, and filling an insulating layer in the two grooves and forming two sidewall insulating structures respectively positioned at two sides of the insulating doped region.
    Type: Grant
    Filed: November 19, 2020
    Date of Patent: April 27, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chun-Ming Chang, Wen-Jung Liao
  • Patent number: 10985048
    Abstract: A method for fabricating semiconductor device includes the steps of: providing a substrate having a fin-shaped structure thereon; forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion; forming a first gate structure on the SDB structure; forming an interlayer dielectric (ILD) layer on the first gate structure; removing the first gate structure to form a first recess; and forming a dielectric layer in the first recess.
    Type: Grant
    Filed: January 2, 2020
    Date of Patent: April 20, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chih-Kai Hsu, Ssu-I Fu, Chun-Ya Chiu, Chi-Ting Wu, Chin-Hung Chen, Yu-Hsiang Lin
  • Patent number: 10985281
    Abstract: A transistor may include a semiconductor, a source electrode, a drain electrode, and a gate electrode. The semiconductor may include a first doped region, a second doped region, a source region, a drain region, and a channel region. The channel region is positioned between the source region and the drain region. The first doped region is positioned between the channel region and the source region. The second doped region is positioned between the channel region and the drain region. A doping concentration of the first doped region is lower than a doping concentration of the source region. A doping concentration of the second doped region is lower than a doping concentration of the drain region. The source electrode is electrically connected to the source region. The drain electrode is electrically connected to the drain region. The gate electrode overlaps the channel region.
    Type: Grant
    Filed: January 24, 2020
    Date of Patent: April 20, 2021
    Inventors: Ji Hun Lim, Joon Seok Park, Jay Bum Kim, Jun Hyung Lim, Kyoung Seok Son
  • Patent number: 10985243
    Abstract: A transistor is provided that comprises a source region overlying a base structure, a drain region overlying the base structure, and a block of semiconducting material overlying the base structure and being disposed between the source region and the drain region. The block of semiconducting material comprises a gate controlled region adjacent the source region, and a drain access region disposed between the gate controlled region and the drain region. The drain access region is formed of a plurality of semiconducting material ridges spaced apart from one another by non-channel trench openings, wherein at least a portion of the non-channel trench openings being filled with a doped material to provide a depletion region to improve breakdown voltage of the transistor.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: April 20, 2021
    Assignee: NORTHROP GRUMMAN SYSTEMS CORPORATION
    Inventors: Josephine Bea Chang, Eric J. Stewart, Ken Alfred Nagamatsu, Robert S. Howell, Shalini Gupta
  • Patent number: 10985299
    Abstract: Light emitting devices (LEDs) are described herein. An LED includes a light emitting semiconductor structure, a wavelength converting material and an off state white material. The light emitting semiconductor structure includes a light-emitting active layer disposed between an n-layer and a p-layer. The wavelength converting material has a first surface adjacent the light emitting semiconductor structure and a second surface opposite the first surface. The off state white material is in direct contact with the second surface of the wavelength converting material and includes multiple core-shell particles disposed in an optically functional material. Each of the core-shell particles includes a core material encased in a polymer or inorganic shell. The core material includes a phase change material.
    Type: Grant
    Filed: March 1, 2019
    Date of Patent: April 20, 2021
    Assignee: Lumileds LLC
    Inventors: Daniel Estrada, Kentaro Shimizu, Daniel Roitman, Marcel Rene Bohmer, Edward Kang
  • Patent number: 10978566
    Abstract: The present disclosure generally relates to semiconductor structures and, more particularly, to middle of line structures and methods of manufacture. The structure includes: a plurality of gate structures comprising source and/or drain metallization features; spacers on sidewalls of the gate structures and composed of a first material and a second material; and contacts in electrical contact with the source and/or drain metallization features, and separated from the gate structures by the spacers.
    Type: Grant
    Filed: January 15, 2020
    Date of Patent: April 13, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Hui Zang, Guowei Xu, Keith Tabakman, Viraj Sardesai
  • Patent number: 10971359
    Abstract: Modified silicon-on-insulator (SOI) substrates having a trap rich layer, and methods for making such modifications. The modified regions eliminate or manage accumulated charge that would otherwise arise because of the interaction of the underlying trap rich layer and active layer devices undergoing transient changes of state, thereby eliminating or mitigating the effects of such accumulated charge on non-RF integrated circuitry fabricated on such substrates. Embodiments retain the beneficial characteristics of SOI substrates with a trap rich layer for RF circuitry requiring high linearity, such as RF switches, while avoiding the problems of a trap rich layer for circuitry that is sensitive to accumulated charge effects caused by the presence of the trap rich layer, such as non-RF analog circuitry and amplifiers (including power amplifiers and low noise amplifiers).
    Type: Grant
    Filed: November 20, 2019
    Date of Patent: April 6, 2021
    Assignee: pSemi Corporation
    Inventors: Robert Mark Englekirk, Keith Bargroff, Christopher C. Murphy, Tero Tapio Ranta, Simon Edward Willard
  • Patent number: 10964907
    Abstract: The present disclosure relates to the field of display technology, in particular to a display panel, a manufacturing method thereof, and a display device. The display panel includes a display substrate and an encapsulation layer for encapsulating the display substrate. The encapsulation layer includes at least one inorganic composite film layer, and each inorganic composite film layer includes an inorganic matrix and an inorganic filler. The inorganic matrix includes a plurality of grains spaced apart by gaps, and the inorganic filler is capable of enclosing each grain and being filled in a gap between every two adjacent grains.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: March 30, 2021
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Jianfeng Liu, Ni Yang, Zhongfei Dong, Zhijian Qi, Yunze Li, Xin Liu
  • Patent number: 10957773
    Abstract: According to one embodiment, a semiconductor device includes a first electrode, a first semiconductor region, a second semiconductor region, a third semiconductor region, a first ring-shaped region, a second ring-shaped region, a second electrode, a third electrode, a first conductive layer, and a semi-insulating layer. The first ring-shaped region surrounds the second semiconductor region, and is provided between the second and third semiconductor regions. The second ring-shaped region surrounds the first ring-shaped region, and is provided between the first ring-shaped region and the third semiconductor region. The first conductive layer surrounds the second electrode, and is provided on the first ring-shaped region, the second ring-shaped region, and a first region of the first semiconductor region with an insulating layer interposed. The first region is positioned between the first and second ring-shaped regions.
    Type: Grant
    Filed: February 7, 2020
    Date of Patent: March 23, 2021
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA ELECTRONIC DEVICES & STORAGE CORPORATION
    Inventor: Kenichi Matsushita
  • Patent number: 10957687
    Abstract: Some embodiments relate to a semiconductor device on a substrate. An interconnect structure is disposed over the semiconductor substrate. A first conductive pad is disposed over the interconnect structure. A second conductive pad is disposed over the interconnect structure and spaced apart from the first conductive pad. A third conductive pad is disposed over the interconnect structure and spaced apart from the first and second conductive pads. A first ESD protection element is electrically coupled between the first and second conductive pads. A first device under test (DUT) is electrically coupled between the first and third conductive pads.
    Type: Grant
    Filed: March 13, 2020
    Date of Patent: March 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Jen-Chou Tseng, Ming-Fu Tsai, Tzu-Heng Chang
  • Patent number: 10957584
    Abstract: A method of forming fully aligned vias in a semiconductor device, the method including forming a first level interconnect line embedded in a first interlevel dielectric (ILD), selectively depositing a dielectric on the first interlevel dielectric, laterally etching the selectively deposited dielectric, depositing a dielectric cap layer and a second level interlevel dielectric on top of the first interlevel dielectric, and forming a via opening.
    Type: Grant
    Filed: December 22, 2017
    Date of Patent: March 23, 2021
    Assignee: Tessera, Inc.
    Inventors: Benjamin David Briggs, Joe Lee, Theodorus Eduardus Standaert
  • Patent number: 10950499
    Abstract: An integrated circuit device includes a fin-type active region extending on a substrate in a first direction parallel to a top surface of the substrate; a gate structure extending on the fin-type active region and extending in a second direction parallel to the top surface of the substrate and different from the first direction; and source/drain regions in a recess region extending from one side of the gate structure into the fin-type active region, the source/drain regions including an upper semiconductor layer on an inner wall of the recess region, having a first impurity concentration, and including a gap; and a gap-fill semiconductor layer, which fills the gap and has a second impurity concentration that is greater than the first impurity concentration.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: March 16, 2021
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-yeong Joe, Seok-hoon Kim, Jeong-ho Yoo, Seung-hun Lee, Geun-hee Jeong
  • Patent number: 10950511
    Abstract: Various embodiments of a die carrier package and a method of forming such package are disclosed. The package includes one or more dies disposed within a cavity of a carrier substrate, where a first die contact of one or more of the dies is electrically connected to a first die pad disposed on a recessed surface of the cavity, and a second die contact of one or more of the dies is electrically connected to a second die pad also disposed on the recessed surface. The first and second die pads are electrically connected to first and second package contacts respectively. The first and second package contacts are disposed on a first major surface of the carrier substrate adjacent the cavity.
    Type: Grant
    Filed: October 30, 2018
    Date of Patent: March 16, 2021
    Assignee: Medtronic, Inc.
    Inventors: Mark R. Boone, Mark E. Henschel
  • Patent number: 10950659
    Abstract: The present invention is directed to a perpendicular magnetic structure including a first seed layer comprising a first transition metal and nitrogen, a second seed layer deposited on top of the first seed layer, and a third seed layer deposited on top of the second seed layer. One of the second and third seed layers comprises cobalt, iron, and boron. The other one of the second and third seed layers comprises chromium. The perpendicular magnetic structure further includes a magnetic fixed layer structure formed on top of the third seed layer and having an invariable magnetization direction substantially perpendicular to a layer plane of the magnetic fixed layer structure. The magnetic fixed layer structure includes layers of a magnetic material interleaved with layers of a second transition metal. The first transition metal is titanium or tantalum. The second transition metal is one of nickel, platinum, palladium, or iridium.
    Type: Grant
    Filed: June 16, 2020
    Date of Patent: March 16, 2021
    Assignee: Avalanche Technology, Inc.
    Inventors: Zihui Wang, Yiming Huai
  • Patent number: 10950580
    Abstract: A semiconductor device package is provided. The semiconductor device package includes a stack of semiconductor dies over a substrate, the substrate including a plurality of electrical contacts, and an annular lower lid disposed over the substrate and surrounding the stack of semiconductor dies. The annular lower lid includes a lower surface coupled to the substrate, an upper surface coupled to an upper lid, and an outer surface in which is formed an opening. The semiconductor device assembly further includes a circuit element disposed in the opening and electrically coupled to at least a first one of the plurality of electrical contacts. The semiconductor device assembly further includes the upper lid disposed over the annular lower lid and the stack of semiconductor dies.
    Type: Grant
    Filed: December 20, 2019
    Date of Patent: March 16, 2021
    Assignee: Micron Technology, Inc.
    Inventor: Thomas H. Kinsley
  • Patent number: 10943905
    Abstract: The present disclosure relates to a bulk complementary-metal-oxide-semiconductor (CMOS) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the thinned device die. Herein, a silicon material with a resistivity between 5 Ohm-cm and 30000 Ohm-cm does not exist between the second mold compound and the thinned device die.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: March 9, 2021
    Assignee: Qorvo US, Inc.
    Inventors: Julio C. Costa, Michael Carroll, Dirk Robert Walter Leipold, George Maxim, Baker Scott