Patents Examined by David A. Vanore
  • Patent number: 11954560
    Abstract: Aspects of the present disclosure describe techniques for fast cooling of ion motion in a long chain using local motional modes. For example, a method is described for cooling down ions in a chain of ions that includes performing a cooling down sequence in which phonons are removed from the ions in the chain of ions by exciting and de-exciting local motional modes associated with individual ions, wherein sideband transitions that are part of the cooling down sequence are driven faster for the local motional modes than for collective motional modes for the same chain of ions; and completing the cooling down sequence when the local motional modes reach a ground state. A corresponding system and computer-readable storage medium for fast cooling of ion motion in a long chain using local motional modes are also described.
    Type: Grant
    Filed: October 13, 2020
    Date of Patent: April 9, 2024
    Assignee: IonQ, Inc.
    Inventor: Shantanu Debnath
  • Patent number: 11955312
    Abstract: A physical analysis method, a sample for physical analysis and a preparing method thereof are provided. The preparing method of the sample for physical analysis includes: providing a sample to be inspected; and forming a contrast enhancement layer on a surface of the sample to be inspected. The contrast enhancement layer includes a plurality of first material layers and a plurality of second material layers stacked upon one another. The first material layer and the second material layer are made of different materials. Each one of the first and second material layers has a thickness that does not exceed 0.1 nm. In an image captured by an electron microscope, a difference between an average grayscale value of a surface layer image of the sample to be inspected and an average grayscale value of an image of the contrast enhancement layer is at least 50.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: April 9, 2024
    Assignee: MATERIALS ANALYSIS TECHNOLOGY INC.
    Inventors: Chien-Wei Wu, Keng-Chieh Chu, Yung-Sheng Fang, Chun-Wei Wu, Hung-Jen Chen
  • Patent number: 11948781
    Abstract: A processing system may include a plasma chamber operable to generate a plasma, and an extraction assembly, arranged along a side of the plasma chamber. The extraction assembly may include an extraction plate including an extraction aperture, the extraction plate having a non-planar shape, and generating an extracted ion beam at a high angle of incidence with respect to a perpendicular to a plane of a substrate, when the plane of the substrate is arranged parallel to the side of the plasma chamber.
    Type: Grant
    Filed: January 27, 2021
    Date of Patent: April 2, 2024
    Assignee: Applied Materials, Inc.
    Inventors: Christopher Campbell, Costel Biloiu, Peter F. Kurunczi, Jay R. Wallace, Kevin M. Daniels, Kevin T. Ryan, Minab B. Teferi, Frank Sinclair, Joseph C. Olson
  • Patent number: 11948771
    Abstract: The disclosure relates to a method of determining an energy width of a charged particle beam, comprising the steps of providing a charged particle beam, directing said beam towards a specimen, and forming an energy-dispersed beam from a flux of charged particles transmitted through the specimen. As defined herein, the method comprises the steps of providing a slit element in a slit plane, and using said slit element for blocking a part of said energy-dispersed beam, as well as the step of modifying said energy-dispersed beam at the location of said slit plane in such a way that said energy dispersed beam is partially blocked at said slit element. The unblocked part of said energy-dispersed beam is imaged and an intensity gradient of said imaged energy-dispersed beam is determined, with which the energy width of the charged particle beam can be determined.
    Type: Grant
    Filed: November 10, 2021
    Date of Patent: April 2, 2024
    Assignee: FEI Company
    Inventor: Peter Christiaan Tiemeijer
  • Patent number: 11939239
    Abstract: A sterilization module including a light source configured to irradiate ultraviolet light, a board on which the light source is mounted, a protective tube accommodating the board therein and configured to transmit ultraviolet light irradiated from the light source, a first base coupled to one side of the protective tube, and a second base coupled to the other side of the protective tube, in which at least one of the first base and the second base includes an insertion part to be inserted into the protective tube, the insertion part having a first diameter when viewed in a first cross-section perpendicular to a length direction of the protective tube, and a cover part integrally formed on the insertion part and having a second diameter greater than the first diameter in the first cross-section.
    Type: Grant
    Filed: April 13, 2018
    Date of Patent: March 26, 2024
    Assignee: Seoul Viosys Co., Ltd.
    Inventors: Jae Young Choi, Woong Ki Jeong, Kyu Won Han, Yeo Jin Yoon
  • Patent number: 11933668
    Abstract: A sampling assembly is described. The sampling assembly comprises an input, a light source unit, at least one deflector unit, and a light receiver. The input is configured to receive an electrical input signal. The light source unit is configured to generate and output a light beam in the direction of the deflector unit. The light source unit is configured to adapt an intensity of the light beam based on an amplitude of the input signal. The deflector unit is configured to obtain a deflection command signal. The deflector unit further is configured to deflect the light beam into at least one spatial direction based on the deflection command signal. The light receiver comprises at least two photosensitive pixels. The light receiver is configured to receive the light beam via at least one of the at least two photosensitive pixels, and the light receiver is configured to convert received light into an electrical output signal. Further, a testing instrument is described.
    Type: Grant
    Filed: February 3, 2020
    Date of Patent: March 19, 2024
    Assignee: Rohde & Schwarz GmbH & Co. KG
    Inventor: Bernhard Sterzbach
  • Patent number: 11932684
    Abstract: Methods and system for protein characterization using online chromatography and electrospray ionization mass spectrometry are provided.
    Type: Grant
    Filed: March 6, 2023
    Date of Patent: March 19, 2024
    Assignee: Regeneron Pharmaceuticals, Inc.
    Inventor: Qian Zhang
  • Patent number: 11925818
    Abstract: The invention comprises a method and apparatus for treating a tumor of a patient with positively charged particles, comprising the steps of: (1) transporting the positively charged particles sequentially from an accelerator, through a beam transport line, through a nozzle, and toward a position of the tumor; (2) treating the tumor with first particles, of the positively charged particles, where at least fifty percent of the first particles pass through a patient position, from the nozzle, to a post-patient position; and (3) detecting a beam position of the first particles in the post-patient position with a detector. The flash treatment preferably delivers the first particles at a rate exceeding one MHz.
    Type: Grant
    Filed: August 11, 2021
    Date of Patent: March 12, 2024
    Inventors: Susan L. Michaud, Daniel J. Raymond
  • Patent number: 11918830
    Abstract: The invention comprises a method and apparatus for tuning a charged particle beam path of a charged particle beam system used to treat a tumor of a patient, comprising the steps of: positioning a two-dimensional charged particle detector in a beam line downstream from a magnet pair; operating windings of the magnet pair at a first power level to generate a first magnetic field; measuring a beam position with the first two-dimensional charged particle detector; adjusting a correction magnetic field by driving voltage of a correction coil at a second power level, the second power level less than five percent of the first power level, where the first magnetic field and the correction magnetic field combine to yield an operational magnetic field; and the steps of measuring and adjusting the correction magnetic field changing the operational magnetic field to adjust a measured beam position toward a target beam position.
    Type: Grant
    Filed: July 21, 2021
    Date of Patent: March 5, 2024
    Inventors: Susan L. Michaud, Daniel J. Raymond, Artur Teymurazyan, Ran Tu
  • Patent number: 11920977
    Abstract: A metrology system includes a first beam analysis system for analyzing at least one first measurement beam that was coupled from the excitation laser beam before a reflection on the target material and a second beam analysis system for analyzing at least one second measurement beam that was coupled from the excitation laser beam after a reflection on the target material. Each of the first beam analysis system and the second beam analysis system has at least one wavefront sensor system.
    Type: Grant
    Filed: March 4, 2021
    Date of Patent: March 5, 2024
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Matthias Manger, Florian Baumer
  • Patent number: 11918831
    Abstract: The invention comprises a method and apparatus for treating a tumor of a patient with positively charged particles, comprising the steps of transporting the positively charged particles along a beam transport path passing sequentially from an accelerator, through a beam transport line, through a nozzle, and toward a position of the patient, the step of transporting further comprising the steps of: (1) terminating a first Bragg peak, of a first set of the positively charged particles, in a position of the tumor and (2) flash treating the tumor with a second Bragg peak, of a second set of the positively charged particles, the second Bragg peak terminating post-patient relative to the nozzle. Optionally the second set of particles are delivered at a rate exceeding one MHz. Optionally, particles in common are used to both treat the tumor and image the tumor.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: March 5, 2024
    Inventors: Susan L. Michaud, Ran Tu, Daniel J. Raymond
  • Patent number: 11913591
    Abstract: Composite materials with adjustable spectral properties comprised of IR-reflecting micro-domains overlaying an IR-transparent elastomeric matrix, and capable of dynamically controlling IR radiation transmission are described, as well as methods of fabrication thereof. Systems with capabilities to regulate IR radiation (including heat) transmission based thereon, and methods of regulating IR radiation transmission (including thermal regulation) using the same are also provided.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: February 27, 2024
    Assignee: The Regents of the University of California
    Inventors: Alon A. Gorodetsky, Steven R. Jim, George Stiubianu, Erica Leung, Kyle Naughton, Priyam Patel, Maurizio Follador, Emil Karshalev
  • Patent number: 11908658
    Abstract: A scanning electron microscope device for a sample to be detected and an electron beam inspection apparatus are provided, the scanning electron microscope device being configured to project electron beam to a surface of the sample to generate backscattered electrons and secondary electrons, and comprising: an electron beam source, a deflection mechanism, and an objective lens assembly. The deflection mechanism comprises a first deflector located downstream the electron beam source and a second deflector located downstream the first deflector.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: February 20, 2024
    Assignee: Zhongke Jingyuan Electron Limited
    Inventors: Qinglang Meng, Weiqiang Sun
  • Patent number: 11908590
    Abstract: A shielding apparatus for a radioisotope production system is provided. The shielding apparatus is capable of being retro-fitted to the housing of preinstalled radioisotope production systems. The shielding apparatus comprises a plurality of shield layers removably stacked on top of a base that is mounted to the top of the housing via spacers defining space or air gap between the base and housing. The shield layers and base are positioned above and extending between the interface between moveable shields and a moveable base of the radioisotope production system, such that the shielding apparatus is positioned within the trajectory of a radioisotope production system beam.
    Type: Grant
    Filed: November 19, 2019
    Date of Patent: February 20, 2024
    Assignee: Dana-Farber Cancer Institute, Inc.
    Inventor: Erol Bars
  • Patent number: 11908656
    Abstract: A stage apparatus for a particle-beam apparatus is disclosed. A particle beam apparatus may comprise a conductive object and an object table, the object table being configured to support an object. The object table comprises a table body and a conductive coating, the conductive coating being provided on at least a portion of a surface of the table body. The conductive object is disposed proximate to the conductive coating and the table body is provided with a feature proximate to an edge portion of the conductive coating. Said feature is arranged so as to reduce an electric field strength in the vicinity of the edge portion of the conductive coating when a voltage is applied to both the conductive object and the conductive coating.
    Type: Grant
    Filed: October 8, 2021
    Date of Patent: February 20, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Han Willem Hendrik Severt, Jan-Gerard Cornelis Van Der Toorn, Ronald Van Der Wilk, Allard Eelco Kooiker
  • Patent number: 11899023
    Abstract: Methods and system for identification of dimer species using online chromatography and electrospray ionization mass spectrometry are provided. Also provided are methods and system for quantitation of heterodimer species using immunoprecipitation and liquid chromatography-mass spectrometry.
    Type: Grant
    Filed: November 7, 2022
    Date of Patent: February 13, 2024
    Assignee: Regeneron Pharmaceuticals, Inc.
    Inventors: Yuetian Yan, Shunhai Wang
  • Patent number: 11901157
    Abstract: Embodiments of the present disclosure generally relate to apparatus and methods for controlling an ion energy distribution during plasma processing. In an embodiment, the apparatus includes a substrate support that has a body having a substrate electrode for applying a substrate voltage to a substrate, and an edge ring electrode embedded for applying an edge ring voltage to an edge ring. The apparatus further includes a substrate voltage control circuit coupled to the substrate electrode, and an edge ring voltage control circuit coupled to the edge ring electrode. The substrate electrode, edge ring electrode, or both are coupled to a power module configured to actively control an energy distribution function width of ions reaching the substrate, edge ring, or both. Methods for controlling an energy distribution function width of ions during substrate processing are also described.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: February 13, 2024
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Linying Cui, James Rogers
  • Patent number: 11898974
    Abstract: A charged particle beam device includes a detector 109 converting a photon emitted by a scintillator into an electric signal and a signal processing unit 110 processing the electric signal from the detector 109. The signal processing unit 110 detects a peak position of the electric signal, steepness of a rising section associated with the peak position, and steepness of a falling section associated with the peak position and classifies the peak position based on the steepness of the rising section and the steepness of the falling section.
    Type: Grant
    Filed: December 14, 2021
    Date of Patent: February 13, 2024
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Hiroshi Oinuma, Wen Li, Masashi Wada
  • Patent number: 11890121
    Abstract: An apparatus for shielding radiation emitted during a medical procedure. The apparatus includes a board positionable on top of a procedure table. The board extends laterally between a first board edge and a second board edge, and longitudinally between a third board edge and a fourth board edge. The board includes a plurality of apertures distributed along at least one of the board edges. At least one radiation shield is removably mountable to the board. The at least one radiation shield includes at least one peg engageable with any one of the apertures in the board. The apparatus can include a body shield assembly and/or an adjustable screen assembly.
    Type: Grant
    Filed: June 25, 2021
    Date of Patent: February 6, 2024
    Assignee: ARMERY MEDICAL TECHNOLOGIES INC.
    Inventors: Andrew Barbod Yadegari, Andrew Stephen McLellan, Stephen George McLellan
  • Patent number: 11894162
    Abstract: Described is a method comprising directing an ultra-low voltage electron beam to a surface of a first insulating layer. The first insulating layer is disposed on a second insulating layer. The method includes modifying, by the application of the ultra-low voltage electron beam, the surface of the first insulating layer to selectively switch an interface between a first state having a first electronic property and a second state having a second electronic property.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: February 6, 2024
    Assignee: University of Pittsburgh—Of the Commonwealth System, of Higher Education
    Inventor: Jeremy Levy