Patents Examined by Dmitriy Yemelyanov
  • Patent number: 11152379
    Abstract: A Static Random-Access Memory (SRAM) device and its manufacturing method are presented, relating to semiconductor techniques. The SRAM device includes: a substrate; a first semiconductor column for Pull-Up (PU) transistors and a second semiconductor column for Pull-Down (PD) transistors, with both the first and the second semiconductor columns on the substrate; a first separation region, and a gate stack structure. The first separation region is between the first and the second semiconductor columns and comprises a first region and a second region, the gate stack structure comprises a gate dielectric layer comprising a first part and a second part; a P-type work function regulation layer comprising a first area and a second area adjacent to each other; a N-type work function regulation layer comprising a third area and a fourth area adjacent to each other; and a gate on both the P-type and N-type work function regulation layers.
    Type: Grant
    Filed: September 13, 2019
    Date of Patent: October 19, 2021
    Inventor: Yong Li
  • Patent number: 11145667
    Abstract: In a memory device, a lower memory cell string is formed over a substrate to include a first channel structure, a plurality of first word line layers and first insulating layers. The first channel structure protrudes from the substrate and passes through the first word line layers and first insulating layers. An inter deck contact is formed over the lower memory cell string and connected with the first channel structure. An upper memory cell string is formed over the inter deck contact. The upper memory cell string includes a second channel structure, a plurality of second word lines and second insulating layers. The second channel structure passes through the second word lines and second insulating layers, and extends to the inter deck contact, and further extends laterally into the second insulating layers. A channel dielectric region of the second channel structure is above the inter deck contact.
    Type: Grant
    Filed: March 28, 2019
    Date of Patent: October 12, 2021
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventors: Ruo Fang Zhang, Enbo Wang, Haohao Yang, Qianbing Xu, Yushi Hu, Fushan Zhang
  • Patent number: 11139198
    Abstract: A semiconductor on insulator multilayer structure is provided. The multilayer comprises a high resistivity single crystal semiconductor handle substrate, an optionally relaxed semiconductor layer comprising silicon, germanium, or silicon germanium, an optional polycrystalline silicon layer, a dielectric layer, and a single crystal semiconductor device layer.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: October 5, 2021
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Igor Peidous, Lu Fei, Jeffrey L. Libbert, Andrew M. Jones, Alex Usenko, Gang Wang, Shawn George Thomas, Srikanth Kommu
  • Patent number: 11114559
    Abstract: A semiconductor device includes a first group of trench-like structures and a second group of trench-like structures. Each trench-like structure in the first group includes a gate electrode contacted to gate metal and a source electrode contacted to source metal. Each of the trench-like structures in the second group is disabled. The second group of disabled trench-like structures is interleaved with the first group of trench-like structures.
    Type: Grant
    Filed: May 18, 2012
    Date of Patent: September 7, 2021
    Assignee: Vishay-Siliconix, LLC
    Inventors: Chanho Park, Kyle Terrill
  • Patent number: 11094591
    Abstract: Semiconductor structures and fabrication methods are provided. An exemplary semiconductor structure includes a semiconductor substrate having a plurality of cell regions. Each of the cell regions includes a device region, a protection region surrounding the device region and an isolation region surrounding the device region and the protection region. The semiconductor structure also includes a device structure on the semiconductor substrate in the device region; a protection ring structure on the semiconductor substrate in the protection region; an isolation structure on the semiconductor substrate in the isolation region; a passivation layer on the protection ring structure, the device structure and the isolation structure; and a trench passing through the passivation layer in the isolation region.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: August 17, 2021
    Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation ]
    Inventor: Chun Song
  • Patent number: 11075300
    Abstract: The semiconductor device includes a first insulating layer; a first oxide semiconductor; a first insulator containing indium, an element M (M is gallium, aluminum, titanium, yttrium, or tin), and zinc; a second oxide semiconductor; a source electrode layer; a drain electrode layer; a second insulator containing indium, the element M, and zinc; a gate insulating layer; and a gate electrode layer. The first and second oxide semiconductors each include a region with c-axis alignment. In the first and second oxide semiconductors, the number of indium atoms divided by sum of numbers of the indium atoms, element M atoms, and zinc atoms is ? or more. In the first insulator, the number of zinc atoms divided by sum of the numbers of indium atoms, element M atoms, and zinc atoms is ? or less.
    Type: Grant
    Filed: September 18, 2018
    Date of Patent: July 27, 2021
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Shinpei Matsuda
  • Patent number: 11069511
    Abstract: A system having an auxiliary plasma source, disposed proximate the workpiece, for use with an ion beam is disclosed. The auxiliary plasma source is used to create ions and radicals which drift toward the workpiece and may form a film. The ion beam is then used to provide energy so that the ions and radicals can process the workpiece. Further, various applications of the system are also disclosed. For example, the system can be used for various processes including deposition, implantation, etching, pre-treatment and post-treatment. By locating an auxiliary plasma source close to the workpiece, processes that were previously not possible may be performed. Further, two dissimilar processes, such as cleaning and implanting or implanting and passivating can be performed without removing the workpiece from the end station.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: July 20, 2021
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Christopher Hatem, Peter F. Kurunczi, Christopher A. Rowland, Joseph C. Olson, Anthony Renau
  • Patent number: 11049965
    Abstract: A semiconductor device includes a first external electrode with a first electrode surface portion; a second external electrode with a second electrode surface portion; a MOSFET chip with a built-in Zener diode which includes an active region and a peripheral region; a control IC chip which drives the MOSFET chip based on voltage or current between a drain electrode and a source electrode of the MOSFET chip; and a capacitor which supplies power to the MOSFET chip and the control IC chip. The first electrode surface portion is connected to either the drain electrode or the source, the second electrode surface portion is connected to either the source electrode or the drain electrode, a plurality of unit cells of the MOSFET with the built-in Zener diode are provided in the active region, and the breakdown voltage of the Zener diode is set to be lower than that of the peripheral region.
    Type: Grant
    Filed: August 6, 2018
    Date of Patent: June 29, 2021
    Assignee: HITACHI POWER SEMICONDUCTOR DEVICE, LTD.
    Inventors: Masaki Shiraishi, Tetsuya Ishimaru, Junichi Sakano, Mutsuhiro Mori, Shinichi Kurita
  • Patent number: 10998248
    Abstract: A semiconductor wafer contains a plurality of semiconductor die each having a plurality of contact pads. A sacrificial adhesive is deposited over the contact pads. Alternatively, the sacrificial adhesive is deposited over the carrier. An underfill material can be formed between the contact pads. The semiconductor wafer is singulated to separate the semiconductor die. The semiconductor die is mounted to a temporary carrier such that the sacrificial adhesive is disposed between the contact pads and temporary carrier. An encapsulant is deposited over the semiconductor die and carrier. The carrier and sacrificial adhesive is removed to leave a via over the contact pads. An interconnect structure is formed over the encapsulant. The interconnect structure includes a conductive layer which extends into the via for electrical connection to the contact pads. The semiconductor die is offset from the interconnect structure by a height of the sacrificial adhesive.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: May 4, 2021
    Inventors: Reza A. Pagaila, Yaojian Lin, Jun Mo Koo
  • Patent number: 10991812
    Abstract: Disclosed is a transistor device. The transistor device includes: in a semiconductor body, a drift region, a body region adjoining the drift region, and a source region separated from the drift region by the body region; a gate electrode dielectrically insulated from the body region by a gate dielectric; a source electrode electrically connected to the source region; at least one field electrode dielectrically insulated from the drift region by a field electrode dielectric; and a rectifier element coupled between the source electrode and the field electrode. The field electrode and the field electrode dielectric are arranged in a first trench that extends from a first surface of the semiconductor body into the semiconductor body. The rectifier element is integrated in the first trench in a rectifier region that is adjacent at least one of the source region and the body region.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: April 27, 2021
    Assignee: Infineon Technologies Austria AG
    Inventors: Ralf Siemieniec, Robert Haase, Gerhard Noebauer, Martin Poelzl
  • Patent number: 10943841
    Abstract: A substrate comprises a pair of immediately-adjacent integrated-circuit dies having scribe-line area there-between. At least one of the dies comprises insulting material above integrated circuitry. The insulating material has an opening therein that extends elevationally inward to an upper conductive node of integrated circuitry within the one die. The one die comprises a conductive line of an RDL above the insulating material. The RDL-conductive line extends elevationally inward into the opening and is directly electrically coupled to the upper conductive node. The insulating material has a minimum elevational thickness from an uppermost surface of the upper conductive node to an uppermost surface of the insulating material that is immediately-adjacent the insulating-material opening. Insulator material is above a conductive test pad in the scribe-line area. The insulator material has an opening therein that extends elevationally inward to an uppermost surface of the conductive test pad.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: March 9, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Shigeru Sugioka, Kiyonori Oyu, Hiroshi Toyama, Jung Chul Park, Raj K. Bansal
  • Patent number: 10897120
    Abstract: Externally-strained devices such as LED and FET structures as discussed herein may have strain applied before or during their being coupled to a housing or packaging substrate. The packaging substrate may also be strained prior to receiving the structure. The strain on the devices enables modulation of light intensity, color, and electrical currents in some embodiments, and in alternate embodiments, enables a fixed strain to be induced and maintained in the structures.
    Type: Grant
    Filed: September 29, 2018
    Date of Patent: January 19, 2021
    Assignee: UNIVERSITY OF HOUSTON SYSTEM
    Inventors: Jae-Hyun Ryou, Shahab Shervin, Seung Hwan Kim
  • Patent number: 10868030
    Abstract: According to one embodiment, the substrate includes a plurality of protrusions having columnar configurations, and a void being formed below the protrusions. The stacked body is provided on the substrate. The stacked body includes a plurality of electrode layers stacked with an insulator interposed. The semiconductor body contacts the protrusion and extends through the stacked body in a stacking direction of the stacked body. Upper ends of the protrusions are positioned at a height between a lowermost electrode layer and an electrode layer of a second layer from a bottom of the electrode layers.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: December 15, 2020
    Assignee: Toshiba Memory Corporation
    Inventors: Tomonari Shioda, Tatsuo Ishida
  • Patent number: 10811371
    Abstract: A semiconductor device includes: a semiconductor substrate; a semiconductor layer on the semiconductor substrate; a source electrode and a drain electrode spaced apart from each other on the semiconductor layer; a gate electrode on the semiconductor layer between the source electrode and the drain electrode; and an insulating film covering the semiconductor layer, the source electrode, the drain electrode and the gate electrode, the gate electrode has an eaves structure including a lower electrode joined to the semiconductor layer and an upper electrode provided on the lower electrode and wider than the lower electrode, a principal ingredient of the insulating film is an oxide film where atomic layers are alternately arrayed for each monolayer, and a film thickness of the insulating film that covers the lower electrode of the gate electrode is equal to a film thickness of the insulating film that covers the upper electrode.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: October 20, 2020
    Assignee: Mitsubishi Electric Corporation
    Inventor: Naoto Ando
  • Patent number: 10763418
    Abstract: A thermoelectric device having a channel portion which includes at least one channel layer made of a topological insulator material and having a top surface with at least one groove, wherein each side surface of each groove includes a conducting zone with a pair of topologically protected one-dimensional electron channels. Each channel layer includes at least one n-region and at least one p-region which are alternatingly disposed and extend from a first end to a second end of the channel layer, each n-region comprising at least one n-groove running from a first electrode at the first end to a second electrode at the second end and each p-region includes at least one p-groove running from a second electrode to a first electrode, wherein the first and second electrodes are alternatingly disposed to connect the p-grooves and n-grooves of neighboring regions, whereby all p-grooves and n-grooves are connected in series.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: September 1, 2020
    Assignee: IEE INTERNATIONAL ELECTRONICS & ENGINEERING S.A.
    Inventor: Christian Pauly
  • Patent number: 10756089
    Abstract: Present disclosure provides a hybrid semiconductor transistor structure, including a substrate, a first transistor on the substrate, a channel of the first transistor including a fin and having a first channel height, a second transistor adjacent to the first transistor, a channel of the second transistor including a nanowire, and a separation laterally spacing the fin from the nanowire. The first channel height is greater than the separation. Present disclosure also provides a method for manufacturing the hybrid semiconductor transistor structure.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: August 25, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hung-Li Chiang, I-Sheng Chen, Tzu-Chiang Chen
  • Patent number: 10741569
    Abstract: In a method of manufacturing a semiconductor device, a memory cell structure covered by a protective layer is formed in a memory cell area of a substrate. A mask pattern is formed. The mask pattern has an opening over a first circuit area, while the memory cell area and a second circuit area are covered by the mask pattern. The substrate in the first circuit area is recessed, while the memory cell area and the second circuit area are protected. A first field effect transistor (FET) having a first gate dielectric layer is formed in the first circuit area over the recessed substrate and a second FET having a second gate dielectric layer is formed in the second circuit area over the substrate as viewed in cross section.
    Type: Grant
    Filed: October 4, 2017
    Date of Patent: August 11, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chen-Chin Liu, Wei Cheng Wu, Yi Hsien Lu, Yu-Hsiung Wang, Juo-Li Yang
  • Patent number: 10734374
    Abstract: An area of a semiconductor device having a FINFET can be reduced. The drain regions of an n-channel FINFET and a p-channel FINFET are extracted by two second local interconnects from a second Y gird between a gate electrode and a dummy gate adjacent thereto, to a third Y grid adjacent to the second Y gird. These second local interconnects are connected by a first local interconnect extending in the X direction in the third Y grid. According to such a cell layout, although the number of grids is increased by one because of the arrangement of the first local interconnect, the length in the X direction can be reduced. As a result, the cell area of the unit cell can be reduced while a space between the first and second local interconnects is secured.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: August 4, 2020
    Assignee: Renesas Electronics Corporation
    Inventors: Takeshi Okagaki, Koji Shibutani, Makoto Yabuuchi, Nobuhiro Tsuda
  • Patent number: 10727254
    Abstract: A semiconductor device includes a oxide semiconductor layer, a gate electrode arranged above the oxide semiconductor layer, a gate insulation layer between the oxide semiconductor layer and the gate electrode, a first insulation layer arranged above the oxide semiconductor layer and arranged with a first aperture part, wiring including an aluminum layer arranged above the first insulation layer, the wiring being electrically connected to the oxide semiconductor layer via the first aperture part, a barrier layer including aluminum oxide above the first insulation layer, above the wiring and covering a side surface of the wiring, and an organic insulation layer arranged above the barrier layer.
    Type: Grant
    Filed: June 20, 2019
    Date of Patent: July 28, 2020
    Assignee: Japan Display Inc.
    Inventors: Toshinari Sasaki, Hajime Watakabe, Akihiro Hanada, Marina Shiokawa
  • Patent number: 10714433
    Abstract: A method of manufacturing a semiconductor structure includes the following operations. A wafer with an orientation mark at a first crystal orientation represented by a family of Miller indices comprising <ijk> is provided, wherein i2+ j2+ k2=2. A first chip and a second chip are connected to a first surface of the wafer. A first edge of the first chip and a second edge of the second chip are adjacent to each other. A boundary extending in a direction between the first edge and the second edge is formed. The direction is not parallel to the first crystal orientation.
    Type: Grant
    Filed: May 16, 2018
    Date of Patent: July 14, 2020
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Pu-Fang Chen, Shi-Chieh Lin, Victor Y. Lu