Abstract: An apparatus and associated method for deposition of metal ions contained in an electrolyte solution to form a metal film primarily on a seed layer formed on at least a first side of a substrate. The substrate has a second side that is opposed the first side and an edge joining the first side and the second side. The apparatus comprises a substrate holder system and an electric contact element. The electric contact element physically contacts one of the second side or the edge of the substrate. In one aspect, the substrate is rotated about its vertical axis when the seed layer of substrate is immersed in the electrolyte solution during the metal film deposition. In another aspect, the substrate is not rotated about its vertical axis when the seed layer on the substrate is immersed in the electrolyte solution during the metal film deposition.
Abstract: A method and associated apparatus of electroplating an object and filling small features. The method comprises immersing the plating surface into an electrolyte solution and mechanically enhancing the concentration of metal ions in the electrolyte solution in the features. In one embodiment, the mechanical enhancement comprises mechanically vibrating the plating surface. In another embodiment, the mechanical enhancement comprises mechanically vibrating the electrolyte solution. In a further embodiment, the mechanical enhancement comprises increasing the pressure applied to the electrolyte solution.
Type:
Grant
Filed:
January 3, 2001
Date of Patent:
August 26, 2003
Assignee:
Applied Materials, Inc.
Inventors:
Hougong Wang, Bo Zheng, Girish Dixit, Fusen Chen
Abstract: This invention is directed to an integrated onboard hydrogen (H2) production and utilization system for all watercraft, which yields environmentally benign vessel power production without new infrastructure requirements. Water (H2O) is supplied to a vessel, whether ashore, docked or underway, and is systematically converted into hydrogen and oxygen. The energy required for this process may be provided by any renewable or non-renewable source. The H2 produced is either utilized at once or stored. Energy is released from the H2 by one or more power plants.
Abstract: The present invention is directed to methods for preheating a molten salt electrolysis cell having inert anodes (24) using recuperative gas heating by combusting a first gas outside the cell chamber (20) in a combustion chamber (2) and using to heat a second gas in recuperator (8) which second gas us passed to the cell chamber (20). The inert anode can be a cermet inert anode.
Abstract: A method and apparatus for electropolishing a workpiece without immersing the workpiece in a bath of electrolytic solution. The workpiece is held in an atmospheric environment, while electrolytic solution is discharged from a reservoir in the form of a plurality of jet streams onto the surface of the workpiece. A voltage difference is applied across the workpiece and the jet streams, thereby inducing a current to flow, between the workpiece acting as anode and the jet streams acting as cathode. The workpiece may be rotated about an axis and moved linearly along the same axis while the jet streams of electrolytic solution are discharged onto the workpiece. Anodic dissolution causes polishing of the workpiece surface. The electrolytic solution may be collected after discharge and recycled back into the reservoir, after being filtered and cooled.
Abstract: A method and apparatus for adding a metal, for example sodium, to a melt of a material, for example aluminum, in a vessel, in which a molten compound of the metal or a solution of a compound of the metal is provided in a container (12), the container being positioned outside the vessel, the compound is electrolytically decomposed and ions of the metal are caused to pass through a wall of a solid-state electrolyte (14) which is a conductor therefor, from a first side of the wall to an opposite second side thereof, and to combine with electrons at the second side of the wall and then to flow as molten metal from the container into the melt in the vessel.
Type:
Grant
Filed:
February 6, 2001
Date of Patent:
July 29, 2003
Assignee:
Foseco International Limited
Inventors:
Jacky Dekeyser, Derek John Fray, Robert Charles Copcutt, Gregory Doughty
Abstract: A production apparatus of hypochlorite solution includes an electrolytic cell having a housing the interior of which is subdivided by a partition membrane to form therein anode and cathode chambers, and positive and negative electrodes respectively disposed within the anode and cathode chambers and opposed to each other through the partition membrane, wherein the positive and negative electrodes are applied with DC voltage to effect electrolysis of chloride solution such as sodium chloride solution or potassium chloride solution supplied into both the anode and cathode chambers, and wherein acid water and alkaline water respectively produced in the anode and cathode chambers are mixed to produce hypochlorite solution.
Abstract: An automated chemical management system for managing the chemical content of an electrochemical bath used to deposit a material on the surface of a microelectronic workpiece is set forth. The automated chemical management system includes a dosing system that is adapted to dose an amount of one or more chemicals to replenish a given electrochemical bath constituent in accordance with a predetermined dosing equation. The chemical management system also includes an analytical measurement system that is adapted to provide a measurement result indicative of the amount of the given constituent in the electrochemical bath at predetermined time intervals. The chemical management system uses the measurement results to modify the dosing equation of the dosing system. In this manner, the replenishment operations executed by the chemical management system are effectively refined over time thereby providing more accurate control of the amount of the target constituent in the electrochemical bath.
Abstract: In an electrolytic apparatus that passes a strip between paired members of a liquid throttle unit provided on at least one of an inlet side and an outlet side of a treatment cell through which the strip is continuously passed, an electrolytic apparatus with strip non-contacting liquid throttle unit is provided which is characterized in that the spacing between the paired members of the liquid throttle unit is set very slightly larger than the thickness of the passed strip to maintain the surfaces of the strip and the liquid throttle unit members, e.g. a seal roll, nozzle device or wedge-shaped block, in a non-contacting state.
Abstract: An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connected to the electrolyte cell and extends across the electrolyte cell. The diffuser is positioned between a location that the substrate is to be positioned when the metal film is deposited thereon and the anode.
Type:
Grant
Filed:
December 5, 2000
Date of Patent:
July 1, 2003
Assignee:
Applied Materials Inc.
Inventors:
Yezdi N. Dordi, Joseph J. Stevens, H. Peter W. Hey, Donald J. K. Olgado
Abstract: The present invention relates to a unique electrochemical cell stack which employs an electrically conductive pressure pad. The pressure pad is composed of material compatible with the electrochemical cell environment and is disposed on the high pressure side of the membrane assembly, in intimate contact with the high pressure side screen pack.
Type:
Grant
Filed:
April 16, 2001
Date of Patent:
July 1, 2003
Assignee:
Proton Energy Systems, Inc.
Inventors:
Jason K. Shiepe, Mark E. Dristy, Trent M. Molter, Lawrence C. Moulthrop, Jr.
Abstract: An electro-chemical plating system is described. A method is performed by the electro-chemical plating system in which a seed layer formed on a substrate is immersed into an electrolyte solution. In one aspect, a substrate is immersed in the electrochemical plating system by tilting the substrate as it enters the electrolyte solution to limit the trapping or formation of air bubbles in the electrolyte solution between the substrate and the substrate holder. In another aspect, an apparatus is provided for electroplating that comprises a cell, a substrate holder, and an actuator. The actuator can displace the substrate holder assembly in the x and z directions and also tilt the substrate. In another aspect, a method is provided of driving a meniscus formed by electrolyte solution across a surface of a substrate. The method comprises enhancing the interaction between the electrolyte solution meniscus and the surface as the substrate is immersed into the electrolyte solution.
Type:
Grant
Filed:
October 3, 2000
Date of Patent:
June 24, 2003
Assignee:
Applied Materials, Inc.
Inventors:
Yezdi N. Dordi, Joseph J. Stevens, Michael N. Sugarman
Abstract: An electrolysis cell (10) for producing a molten metal having a density less than a density of a molten electrolyte used for producing the metal in the cell. The cell includes a section (14) for the electrolysis of a salt of the the metal contained in a molten electrolyte to form droplets of the metal in molten form contained in the electroylte; electrodes (18) within the electrolysis section for effecting the electrolysis; a metal recovery section (15) for separation of the metal from the electrolyte to form a molten metal layer, having an upper suface, floating on an upper surface of the molten electrolyte; a tapping device for periodically removing molten metal from the cell; and a reservoir (25) for withdrawal and temporary holding of molten metal separated from the electrolyte in the metal recovery section. The reservoir has a means to remove liquid from the reservoir without permanently removing the liquid from the cell.
Type:
Grant
Filed:
June 12, 2001
Date of Patent:
June 17, 2003
Assignee:
Alcan International Limited
Inventors:
David K. Creber, Jorgen Christensen, Meine Vandermeulen, Pasquale Ficara, George C. Holywell
Abstract: A reactant source for an electrolysis cell includes a vessel configured to contain water, a funnel disposed in integrated communication with the vessel, and a door disposed over the funnel. The door may be slidably or pivotally mounted over the funnel and is configured to prevent the introduction of an object into the funnel.
Type:
Grant
Filed:
July 18, 2001
Date of Patent:
June 10, 2003
Assignee:
Proton Energy Systems, Inc.
Inventors:
Robert H. Byron, Jr., Audrey A. McManus, Ricky S. Scott
Abstract: Design improvements in constructing electrolytic cell receptacles for electrowinning and electrorefining of nonferrous metals are disclosed. Also disclosed are formulations for three-layered polymer composite materials and surface sealing coatings, which are used in monolithic formation of receptacles or containers of electrolytic cells.
Type:
Grant
Filed:
October 13, 2000
Date of Patent:
June 3, 2003
Inventors:
Victor Vidaurre H., Jorge Dufeu L., Ricardo Mena O., Carlos Le Fort G.
Abstract: An electrolytic apparatus, for supporting a lithographic printing plate, including a guide roller for transporting an aluminum web. The guide roller includes a skeleton section formed with a strong material, a liquid contact section on the surface of the skeleton section, and a nonwoven fabric is provided on the liquid contact section and contacts a surface of an aluminum web. The liquid contact section is formed with a fluororesin coating of 100-3000 &mgr;m in thickness, and the insulation resistance value of the fluororesin coating is 105 &OHgr;cm or more in volume resistivity. The nonwoven fabric is formed mainly with polyphenylene sulfite or fluororesin of 5-50 mm in thickness. Additionally, the nonwoven fabric is condensed in the direction of the guide roller axis, and is treated with a surface finish so as to have a surface hardness in the range of 50-95.
Abstract: An electrochemical deposition apparatus and method for depositing a material onto a surface of a workpiece and for polishing the material are disclosed. The apparatus includes a platen and a polishing surface, including a conductive material and conductors embedded therein, disposed proximate the platen. During material deposition, a bias is applied across the conductor and the platen to cause deposition of material onto the workpiece surface.
Type:
Grant
Filed:
April 11, 2001
Date of Patent:
June 3, 2003
Assignee:
SpeedFam-IPEC Corporation
Inventors:
Ismail Emesh, Saket Chadda, Nikolay Korovin, Brian Mueller
Abstract: An improved electrochemical generator is disclosed. The electrochemical generator includes a thin-film electrochemical cell which is maintained in a state of compression through use of an internal or an external pressure apparatus. A thermal conductor, which is connected to at least one of the positive or negative contacts of the cell, conducts current into and out of the cell and also conducts thermal energy between the cell and thermally conductive, electrically resistive material disposed on a vessel wall adjacent the conductor. The thermally conductive, electrically resistive material may include an anodized coating or a thin sheet of a plastic, mineral-based material or conductive polymer material. The thermal conductor is fabricated to include a resilient portion which expands and contracts to maintain mechanical contact between the cell and the thermally conductive material in the presence of relative movement between the cell and the wall structure.
Inventors:
Roger Rouillard, Michael K. Domroese, Joseph A. Hoffman, David D. Lindeman, Joseph-Robert-Gaétan Noël, Vern E. Radewald, Michel Ranger, Anthony Sudano, Jennifer L. Trice, Thomas A. Turgeon
Abstract: A processing container (610) for providing a flow of a processing fluid during immersion processing of at least one surface of a microelectronic workpiece is set forth. The processing container comprises a principal fluid flow chamber (505) providing a flow of processing fluid to at least one surface of the workpiece and a plurality of nozzles (535) disposed to provide a flow of processing fluid to the principal fluid flow chamber. The plurality of nozzles are arranged and directed to provide vertical and radial fluid flow components that combine to generate a substantially uniform normal flow component radially across the surface of the workpiece. An exemplary apparatus using such a processing container is also set forth that is particularly adapted to carry out an electroplating process.
Type:
Grant
Filed:
March 12, 2001
Date of Patent:
May 27, 2003
Assignee:
Semitool, Inc.
Inventors:
Gregory J. Wilson, Paul R. McHugh, Kyle M. Hanson
Abstract: An electrochemical process using current density controlling techniques is disclosed. In the electrochemical process of this invention, a carbon cathode rod activated with a negative voltage and an electrode activated with a positive voltage are sunk into an electrolyte contained in a container, and so the electrode is electrochemically etched while properly controlling both the metal ion dissolving rate and the metal ion diffusing rate of the electrode by controlling the amount of applied current to maintain the two rates at a desired balance. This process thus creates a diffusion effect thickening the tip of the cylindrical electrode, and compensates for a conventional geometric effect sharpening the tip of the electrode. Therefore, this process produces a precise product having a uniform diameter along its length.
Type:
Grant
Filed:
March 26, 2001
Date of Patent:
May 20, 2003
Assignee:
Korea Advanced Institute of Science and Technology
Inventors:
Soo-Hyun Kim, Young-Mo Lim, Hyung-Jun Lim