Abstract: The purpose of the present invention is to provide a charged particle radiation device capable of performing appropriate vibration suppression control in accordance with a device condition. To achieve the purpose, proposed is a charged particle radiation device provided with: a sample stage for supporting a sample irradiated with a charged particle beam emitted from a charged particle source; and a vacuum chamber for placing the atmosphere in which the sample is disposed in a vacuum state.

Abstract: A mass and/or ion mobility spectrometer 100 comprises a sample plate 102 that supports a target sample 104. The spectrometer 100 further comprises a laser source 110 that generates a series of laser pulses 112 and a control system 118 that moves a focal point of the laser source 110 substantially continuously across the sample plate 102 such that respective packets of ions are generated by respective laser pulses 112 impinging upon respective locations on the target sample 104. The control system 118 performs plural cycles of ion analysis that each produce a set of spectral data corresponding to one or more of the packets of ions. The spectrometer 100 can provide mass and/or ion mobility spectrometry having increased speed and efficiency.

Abstract: A measurement device includes a plurality of slits, a beam current measurement unit provided at a position away from the slits in a beam traveling direction, and a measurement control unit. The beam current measurement unit is configured to be capable of measuring a beam current at a plurality of measurement positions to be different positions in a first direction perpendicular to the beam traveling direction. The slits are disposed to be spaced apart in the first direction such that the first direction coincides with a slit width direction and are configured to be movable in the first direction. The measurement control unit acquires a plurality of beam current values measured at the plurality of measurement positions to be the different positions in the first direction with the beam current measurement unit while moving the slits in the first direction.

Abstract: Methods and systems are provided for reducing the occurrence of unwanted electrical discharge when operating an electrospray ion source to generate ions for mass spectrometric analysis. In accordance with various aspects of the applicant's teachings, the methods and systems described herein can provide for controlling the ion emission current so as to limit the onset of avalanche of electrical discharge between the electrospray electrode and the counter electrode under ionization conditions that typically tend to increase the likelihood of such discharge (arcing), while nonetheless providing for maximal ionization efficiency.

Abstract: A method for automatically aligning a scanning tunneling electron microscope (STEM) for acquiring precession electron diffraction (PED) mapping data includes the generation of an incident electron beam aligned with a STEM optic axis and focused on a sample region. A non-inclined signal is acquired of the spatial distribution from the sample region, by scanning the aligned incident beam across multiple discrete locations and acquiring a signal associated with each location. The method can further include the inclination of the incident electron beam to a fixed inclination angle relative to the optic axis and then acquiring an inclined signal spatial distribution from the sample region by scanning the inclined incident beam across the multiple discrete locations while applying a cyclic azimuthal scanning protocol to the inclined beam and acquiring a signal associated with each location.

Abstract: A large radius probe for a surface analysis instrument such as an atomic force microscope (AFM). The probe is microfabricated to have a tip with a hemispherical distal end or apex. The radius of the apex is the range of about a micron making the probes particularly useful for nanoindentation analyses. The processes of the preferred embodiments allow such large radius probes to be batch fabricated to facilitate cost and robustness.

Abstract: An analysis device for a gaseous sample includes a mass spectrometer (6) having a measurement chamber and an inlet (5) leading into the measurement chamber, and a laser irradiation unit (30, 3). The analysis device is designed to convey the gaseous sample to the inlet by a flow including the gaseous sample. The laser irradiation unit (30, 3) is designed to ignite a plasma (1) by a laser beam (2?) in the flow (4).

Abstract: In a vacuum apparatus including an ultrahigh vacuum evacuation pump, the ultrahigh vacuum evacuation pump is provided with a rod-shaped cathode including a non-evaporable getter alloy, a cylindrical anode disposed so as to surround the cathode, and a coil or a ring-shaped permanent magnet disposed so as to sandwich upper and lower openings of the cylindrical anode and surround the rod-shaped cathode. As a result, it is possible to reduce the size and weight of the ultrahigh vacuum evacuation pump and to dispose the vacuum evacuation pump at a desired location in the vacuum apparatus.

Abstract: The focused ion beam apparatus includes: a vacuum container; an emitter tip disposed in the vacuum container and having a pointed front end; a gas field ion source; a focusing lens; a first deflector; a first aperture; an objective lens focusing the ion beam passing through the first deflector; and a sample stage. A signal generator responding to the ion beam in a point-shaped area is formed between the sample stage and an optical system including at least the focusing lens, the first aperture, the first deflector, and the objective lens, and a scanning field ion microscope image of the emitter tip is produced by matching a signal output from the signal generator and scanning of the ion beam by the first deflector with each other.

Abstract: A charged particle beam device for inspection of a specimen with an array of primary charged particle beamlets is described. The charged particle beam device includes a charged particle beam source to generate a primary charged particle beam; a multi-aperture plate having at least two openings to generate an array of charged particle beamlets having at least a first beamlet having a first resolution on the specimen and a second beamlet having a second resolution on the specimen; an aberration correction element to correct at least one of spherical aberrations and chromatic aberrations of rotational symmetric charged particle lenses; and an objective lens assembly for focusing each primary charged particle beamlet of the array of primary charged particle beamlets onto a separate location on the specimen.

Abstract: The present disclosure describes a compact and lightweight, radial-flow DMA designed to operate at low aerosol and sheath flowrates (on the order of 0.3 L/min aerosol flow, and 0.6-1.2 L/min sheath flow) and so as to classify aerosols including particles having sizes in the 10-500 nm range. Thus, the DMA is capable of operating at relatively low resolution (RND=2-4) to minimize both instrument volume and pumping/power requirements, while enabling size distribution measurement with the precision required for desired applications.

Abstract: A method and system are disclosed for observing and aligning a beam of light in the sample chamber of a charged particle beam (CPB) system, such as an electron microscope or focused ion beam system. The method comprises providing an imaging aid inside the sample chamber with a calibration surface configured such that when illuminated by light, and simultaneously illuminated by a CPB, the intensity of the secondary radiation induced by the CPB is different in regions also illuminated by light relative to regions with lower light illumination levels, thereby providing an image of the light beam on the calibration surface. The image of the light beam may be used to align the light beam to the charged particle beam.

Abstract: A radiation treatment delivery system, includes a linear accelerator (LINAC) and a multileaf collimator (MLC), coupled with the distal end of the LINAC, wherein the MLC has two banks of leaves, organized into a plurality of opposing leaf pairs. The system further includes a processing device, operatively coupled to the LINAC and the MLC, to control the plurality of leaf pairs of the MLC such that for each of a plurality of radiation beam delivery positional sections corresponds to a range of radiation beam positions over a discrete time interval, wherein each leaf pair of the plurality of opposing leaf pairs is open to a fixed opening for a fraction of time in the discrete time interval and closed for the remaining fraction of time in the discrete time interval, while a radiation beam of the radiation treatment system is active.

Abstract: There is proposed a right angle time-of-flight detector comprising a conductive converter for emitting and accelerating secondary electrons, a magnetic field formed by at least one magnet for deflecting the secondary electrons at a right angle and a sealed photo-multiplier. The detector is expected to provide an extended resource and dynamic range and may be fit into tight assemblies, such as MR-TOF MS.

Abstract: A fluid sterilization device includes: a flow passage tube in which a processing passage where a passing fluid is sterilized is formed; an inflow passage or an outflow passage formed in the flow passage tube; a light source that irradiates the processing passage with ultraviolet light; and a rotating body provided in the processing passage. The rotating body is rotated around a longitudinal direction of the processing passage in response to a flow of the fluid passing through the processing passage and is configured to come into contact with an inner wall of the flow passage tube during rotation.

Abstract: An apparatus may include a housing including an entrance aperture, to receive an ion beam. The apparatus may include an exit aperture, disposed in the housing, downstream to the entrance aperture, the entrance aperture and the exit aperture defining a beam axis, extending therebetween. The apparatus may include an electrodynamic mass analysis assembly disposed in the housing and comprising an upper electrode assembly, disposed above the beam axis, and a lower electrode assembly, disposed below the beam axis. The apparatus may include an AC voltage assembly, electrically coupled to the upper electrode assembly and the lower electrode assembly, wherein the upper electrode assembly is arranged to receive an AC signal from the AC voltage assembly at a first phase angle, and wherein the lower electrode assembly is arranged to receive the AC signal at a second phase angle, the second phase angle 180 degrees shifted from the first phase angle.

Abstract: A system and method of mass spectrometry is provided. Ions from an ion source are stored in a first ion storage device and in a second ion storage device. Ions are ejected from the first ion storage device to a first mass analysis device during a first ejection time period, for analysis during a first analysis time period. Ions are ejected from the second ion storage device to a second mass analysis device during a second ejection time period. The ion storage devices are connected in series such that an ion transport aperture of the first ion storage device is in communication with an ion transport aperture of the second ion storage device. The first analysis time period and the second ejection time period at least partly overlap.

Abstract: An electrostatic trap such as an orbitrap is disclosed, with an electrode structure. An electrostatic trapping field of the form U?(r, ?, z) is generated to trap ions within the trap so that they undergo isochronous oscillations. The trapping field U?(r, ?, z) is the result of a perturbation W to an ideal field U(r, ?, z) which, for example, is hyperlogarithmic in the case of an orbitrap. The perturbation W may be introduced in various ways, such as by distorting the geometry of the trap so that it no longer follows an equipotential of the ideal field U(r, ?, z), or by adding a distortion field (either electric or magnetic). The magnitude of the perturbation is such that at least some of the trapped ions have an absolute phase spread of more than zero but less than 2? radians over an ion detection period Tm.

Abstract: An optical characterization system utilizing a micro-lens array (MLA) is provided. The system may include an electron source and a MLA including a micro-deflection array (MDA). The MDA may include an insulator substrate and a plurality of hexapole electrostatic deflectors disposed on the insulator substrate. The MDA may further include a plurality of voltage connecting lines configured to electrically couple the plurality of hexapole electrostatic deflectors to one or more voltage sources. The MDA may be configured to split a primary electron beam from the electron source into a plurality of primary electron beamlets. The system may be configured to focus the plurality of primary electron beamlets at a wafer plane.

Abstract: A method of operating a charged particle beam device is disclosed, including passing each of a plurality of beamlets through a deflector and a scanner, in that order. Each of the beamlets is focused with an objective lens on a sample to form a plurality of focal spots, forming an array. A first beamlet is focused on a first spot and a second beamlet is focused on a second spot. In a centered configuration of the device, each of the plurality of beamlets is directed by the deflector toward a coma free point. In a beamlet-displaced configuration of the device, the scanner is scanned such that the first beamlet passes through an acceptable aberrations point, the first beamlet scanning a displaced first field of view; and the first spot is displaced from the regular first focal spot to a displaced first focal spot.