Patents Examined by Elizabeth Burkhart
  • Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facility
    Patent number: 11136670
    Abstract: A gas spraying apparatus according to the embodiment of the present invention includes a spray part disposed and aligned on one side outside a substrate in the width direction of the substrate, and having a plurality of nozzles for spraying gas toward the substrate, and a spray control unit for automatically controlling whether or not each of a plurality of nozzles sprays gas such that a gas density distribution type in the width direction of the substrate becomes a targeted gas density distribution type by the gas sprayed through the plurality of nozzles. Therefore, according to the embodiment of the present invention, it is easy to carry out the process with a plurality of types of process types or a plurality of types of gas density distribution types, and a time for adjusting the open or close operation of the plurality of nozzles can be shortened.
    Type: Grant
    Filed: January 12, 2018
    Date of Patent: October 5, 2021
    Inventors: Sang Hyun Ji, Chang Kyo Kim
  • Fabrication method for dye polarizer and display panel
    Patent number: 11131877
    Abstract: A fabrication method of a dye polarizer and a display panel are provided. The fabrication method includes: dissolving a dye mixture and a reactive monomer in a solvent to form a polarization film solution, in which the dye mixture is formed by mixing multiple dichroic dyes and the dye mixture functions to absorb visible light of all wave band; coating the polarization film solution one a base, followed by alignment, to allow the reactive monomer to cure on the base; and repeating the step of forming the dye polarization film for n times to form a dye polarizer including n+1 stacked layers of the dye polarization, where n is a nature number greater than or equal to 2. The display panel includes the dye polarizer that is formed with the fabrication method described above.
    Type: Grant
    Filed: January 31, 2018
    Date of Patent: September 28, 2021
    Assignee: TCL CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Chunqiu Yan, Lixuan Chen, Zhenxia Chen
  • Methods of diffractive lens and mirror fabrication
    Patent number: 11119257
    Abstract: Methods of fabricating optical lenses and mirrors, systems and composite structures based on diffractive waveplates, and fields of application of said lenses and mirrors that include imaging systems, astronomy, displays, polarizers, optical communication and other areas of laser and photonics technology. Diffractive lenses and mirrors of shorter focal length and larger size, with more closely spaced grating lines, and with more exacting tolerances on the optical characteristics, can be fabricated than could be fabricated by previous methods.
    Type: Grant
    Filed: December 7, 2018
    Date of Patent: September 14, 2021
    Assignees: Beam Engineering for Advanced Measurements Co, U.S. Government as Represented by the Secretary of the Army
    Inventors: Nelson V. Tabirian, Svetlana Serak, David E. Roberts, Diane Steeves, Brian Kimball
  • System and method for 3D printing with metal filament materials
    Patent number: 11104058
    Abstract: An additive manufacturing system configured to a 3D print using a metal wire material includes a drive mechanism configured to feed the metal feedstock into an inlet tube and a liquefier. The liquefier has a chamber configured to accept the metal feedstock from the inlet tube. The metal feed stock is heated in the chamber such that a melt pool is formed in the chamber. The liquefier has an extrusion tube in fluid communication with the chamber, the extrusion tube having a length (L) and a diameter (D) wherein the ratio of length to diameter (L/D) ranges from about 4:1 to about 20:1. The system has a platen with a surface configured to accept melted material from the liquefier, wherein the platen and the liquefier move in at least three dimensions relative to each other.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: August 31, 2021
    Assignee: Stratasys, Inc.
    Inventors: Robert L. Zinniel, S. Scott Crump, Dominic F. Mannella
  • Modular tray ampoule
    Patent number: 11104993
    Abstract: The invention is directed to a configurable vaporizer or ampoule assembly that uses a configurable vessel body, assembled from one or more support tray modules with their own individual heating assemblies or heater members, bounded by a base member and a lid member to form the whole ampoule. This eliminates the need for the prior art ampoule body that normally holds the support trays and was used to heat each of the support trays from the exterior surface using heating jackets or the like.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: August 31, 2021
    Assignee: ENTEGRIS, INC.
    Inventors: Jordan Hodges, Jacob Thomas
  • Film forming apparatus and film forming method
    Patent number: 11098405
    Abstract: A shower head includes a face plate having an outer peripheral portion and a plurality of gas injection holes disposed inside the outer peripheral portion, a movable portion facing the face plate and having a gas introduction passage, and a seal interposed between the outer peripheral portion of the face plate and the movable portion. The movable portion is arranged to move, in the first direction, between a first position in which the movable portion is coupled to the face plate by interposing the seal between the movable portion and the face plate, and the gas introduction passage communicates with the inside of the chamber via the gas injection holes, and a second position in which the movable portion is separated from the face plate, and the gas introduction passage communicates with the inside of the chamber via a gap between the movable portion and the face plate.
    Type: Grant
    Filed: February 22, 2018
    Date of Patent: August 24, 2021
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Hideaki Masuda, Nobuhide Yamada, Rikyu Ikariyama
  • Systems and methods for a narrow band high transmittance interference filter
    Patent number: 11092898
    Abstract: The present disclosure provides an interference filter, a lithography system incorporating an interference filter, and a method of fabricating an interference filter. The interference filter includes a transparent substrate having a front surface and a back surface, a plurality of alternating material layers formed over the front surface of the transparent substrate that form a bandpass filter, and an anti-reflective structure formed over the back surface of the transparent substrate. The alternating material layers alternate between a relatively high refractive index material and a relatively low refractive index material.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: August 17, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wolf Hung, Chung-Nan Chen, Hong-Hsing Chou, Jaw-Lih Shih, Yeh-Chieh Wang
  • Method for preparing an optical element which colors in a non-uniform linear pattern
    Patent number: 11084236
    Abstract: A method for preparing an optical element which colors in a non-uniform linear pattern is provided.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: August 10, 2021
    Assignee: Transitions Optical, Inc.
    Inventors: Joseph D. Turpen, Jennine M. Frease, William D. Carpenter, Kevin J. Stewart
  • Selective atomic layer deposition of ruthenium
    Patent number: 11066743
    Abstract: Methods of selectively depositing ruthenium are described. The preferred deposition surface changes based on the substrate temperature during processing. At high temperatures, ruthenium is deposited on a first surface of a conductive material over a second surface of an insulating material. At lower temperatures, ruthenium is deposited on an insulating surface over a conducting surface.
    Type: Grant
    Filed: December 14, 2018
    Date of Patent: July 20, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Yihong Chen, Yong Wu, Srinivas Gandikota, Abhijit Basu Mallick
  • Near infrared reflective coating composition, coating and methods of forming the same
    Patent number: 11059979
    Abstract: A near infrared reflective coating composition comprising a polymer resin, a polyamide resin and a suitable solvent. Preferred embodiments for the polymer resin include epoxy resins, acrylic resins, polyester resins or polyisocyanate resins. The composition further comprises additives such as a hardener, surfactant, fumed silica, metal oxide or mixed metal oxide pigments such as titanium oxide, chromium oxide, iron oxide or aluminium oxide. A method for forming the coating is also provided.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: July 13, 2021
    Assignee: Agency for Science, Technology and Research
    Inventors: Yongzheng Pan, Yew Wei Leong, Shengqin Wang
  • Manufacturing method of anti-glare film
    Patent number: 11061172
    Abstract: A manufacturing method of an anti-glare film is provided. The manufacturing method includes spraying a solution on a substrate to form a plurality of droplets on the substrate, wherein the solution includes a curable resin, a plurality of particles, and a solvent; and curing the plurality of droplets to form an anti-glare film.
    Type: Grant
    Filed: December 26, 2018
    Date of Patent: July 13, 2021
    Assignee: E Ink Holdings Inc.
    Inventors: Ching-Huan Liao, Hsin-Tao Huang, Franklin Chau-Nan Hong, Cyun-Jhe Yan, Wen-De Zheng, Yu-Lun Hsiao
  • Programmable deposition apparatus
    Patent number: 11053588
    Abstract: A deposition apparatus including a frame and a cylindrical drum with a cylindrical surface that extends along a central axis. The drum has a first and a second end surface, which extend perpendicularly to the central axis. The drum is rotatably mounted in the frame and includes a plurality of gas zones positioned on the cylindrical surface. The included gas channels extend within the drum. At least a number of the gas zones are in gas connection with at least two channels. The deposition apparatus includes closing elements for closing off all but one of the at least two channels with which a said gas zone is in gas connection so that the type of gas supplied to the various gas zones along the drum surface is programmable.
    Type: Grant
    Filed: July 25, 2016
    Date of Patent: July 6, 2021
    Assignee: BASF Coatings GmbH
    Inventors: Pieter Jan De Roij, Ernst Dullemeijer, Eduard Renier Francisca Clerkx
  • Reflective coating and coating process therefor
    Patent number: 11053855
    Abstract: A process for coating a component includes applying a bond coat on a substrate of a component; applying a thermal barrier material to the bond coat; and applying a conforming reflective layer to the thermal barrier material, the conforming reflective layer conforming to porous microstructure of the ceramic coating.
    Type: Grant
    Filed: June 6, 2019
    Date of Patent: July 6, 2021
    Assignee: Raytheon Technologies Corporation
    Inventors: Brian T. Hazel, Alan C. Barron, Mary Catherine Gurak
  • Method for manufacturing semiconductor device
    Patent number: 11056345
    Abstract: Examples of a method for manufacturing a semiconductor device include forming an initial film having a film thickness of 1 to 3 nm made of a metal or a metal nitride by applying plasma film formation with plasma power of 0.07 to 0.30 W/cm2 and an RF pulse width within a range of 0.1 to 1 sec, and forming, after forming the initial film, a bulk film made of a metal or metal nitride on the initial film by applying plasma film formation with plasma power higher than the plasma power when the initial film is formed.
    Type: Grant
    Filed: December 19, 2017
    Date of Patent: July 6, 2021
    Assignee: ASM IP Holding B.V.
    Inventor: Atsuki Fukazawa
  • Dual selective deposition
    Patent number: 11047040
    Abstract: Methods are provided for dual selective deposition of a first material on a first surface of a substrate and a second material on a second, different surface of the same substrate. The selectively deposited materials may be, for example, metal, metal oxide, or dielectric materials.
    Type: Grant
    Filed: October 7, 2019
    Date of Patent: June 29, 2021
    Assignee: ASM IP Holding B.V.
    Inventors: Suvi P. Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari, Viljami J. Pore
  • Manufacturing method for metal grating, metal grating and display device
    Patent number: 11048032
    Abstract: The present disclosure relates to a manufacturing method for a metal grating, a metal grating, and a display device. In this manufacturing method, after forming a plurality of parallel grating strips by means of an adhesive film layer, a metal thin film with a uniform thickness is formed over the plurality of grating strips and gaps between the grating strips. Furthermore, a metal grating is formed by performing topping treatments on both of an upper surface and a lower surface of the resulting structure.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: June 29, 2021
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Lianjie Qu
  • Methods for making compositions of materials for forming coatings and layered structures including elements for scattering and passing selectively tunable wavelengths of electromagnetic energy
    Patent number: 11009632
    Abstract: Methods are provided for forming a particular multi-layer micron-sized particle that is substantially transparent, yet that exhibits selectable coloration based on its physical properties. The disclosed physical properties of the particle are controllably selectable refractive indices to provide an opaque-appearing energy transmissive material when pluralities of the particles are suspended in a substantially transparent matrix material. Multiply-layered (up to 30+ constituent layers) particles result in an overall particle diameter of less than 5 microns. The material suspensions render the particles deliverable as aspirated or aerosol compositions onto substrates to form layers that selectively scatter specific wavelengths of electromagnetic energy while allowing remaining wavelengths of the incident energy to pass.
    Type: Grant
    Filed: January 25, 2017
    Date of Patent: May 18, 2021
    Assignee: Face International Corporation
    Inventors: Clark D Boyd, Bradbury R Face, Jeffrey D Shepard
  • Substrate processing apparatus, nozzle base, and manufacturing method for semiconductor device
    Patent number: 11001924
    Abstract: Provided is a processing container formed of a reaction tube and a manifold that supports the reaction tube from below, and adapted to process a substrate inside, a nozzle adapted to supply a processing gas to the substrate, and a connecting portion adapted to erect the nozzle inside the processing container. The connecting portion includes (1) a fixing portion formed of a cylindrical portion inserted into an introduction portion provided at the manifold, and a flange plate formed at an end portion of the cylindrical portion, and (2) a detachable portion formed of an elbow engaged with the flange plate, and an installation portion in which the nozzle is installed.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: May 11, 2021
    Assignee: KOKUSAI ELECTRIC CORPORATION
    Inventor: Hidenari Yoshida
  • Method for coloring an optical element in a non-uniform linear pattern
    Patent number: 10994563
    Abstract: A method for coloring an optical element in a non-uniform linear pattern is provided. The method includes (a) preparing at least one colorant composition containing at least one photochromic material; (b) depositing the colorant composition on at least one surface of the optical element in a controlled, predetermined pattern using an inkjet printing apparatus to provide a linearly gradient color pattern on the optical element when the optical element is exposed to actinic radiation; and (c) drying the colorant composition on the surface of the optical element. An optical element prepared by the method also is provided.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: May 4, 2021
    Assignee: Transitions Optical, Inc.
    Inventors: Jennine M. Frease, William D. Carpenter
  • Homogeneous linear evaporation source
    Patent number: 10982319
    Abstract: Embodiments of the present disclosure generally relate to evaporation sources used for physical vapor deposition of material onto substrates and more particularly for controlled coating of large substrates, such as vacuum deposition of copper, indium, gallium, selenium, tellurium, cadmium, or zinc on flexible substrates. Embodiments disclosed herein are able to control the evaporation rate of the source material during processing so as to obtain a uniform deposition across the width of the substrate as the complete length of a roll-to-roll substrate is moved past the evaporation source during processing.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: April 20, 2021
    Assignee: FLISOM AG
    Inventors: Marta Ruth, Reto Pfeiffer