Patents Examined by Erica Smith-Hicks
  • Patent number: 6322673
    Abstract: Apparatus for use in a continuous electrochemical treating line and a method for electrochemically treating at least one surface of a continuous web moving through an electrolyte solution contained within a tank. The apparatus includes at least one electrode extending across the surface of the continuous web in combination with at least two rigid, non-conductive, and non-polar bumper devices also extending the continuous web surface. The bumper devices include a slick contact surface positioned against the continuous web surface at spaced apart locations that prevent the continuous web from moving outside a pass-line through the electrolyte solution and arcing against the electrode. The bumper devices may comprise either a bumper strip or a conduit.
    Type: Grant
    Filed: December 18, 1999
    Date of Patent: November 27, 2001
    Assignee: Electroplating Technologies, Ltd.
    Inventor: James L. Forand
  • Patent number: 6322674
    Abstract: A cathode current control system employing a current thief for use in electroplating a wafer is set forth. The current thief comprises a plurality of conductive segments disposed to substantially surround a peripheral region of the wafer. A first plurality of resistance devices are used, each associated with a respective one of the plurality of conductive segments. The resistance devices are used to regulate current through the respective conductive finger during electroplating of the wafer. Various constructions are used for the current thief and further conductive elements, such as fingers, may also be employed in the system. As with the conductive segments, current through the fingers may also be individually controlled. In accordance with one embodiment of the overall system, selection of the resistance of each respective resistance devices is automatically controlled in accordance with predetermined programming.
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: November 27, 2001
    Assignee: Semitool, Inc.
    Inventors: Robert W. Berner, Joseph J. Fatula, Jr., Robert Hitzfeld, Richard Contreras, Andrew Chiu
  • Patent number: 6322684
    Abstract: An apparatus is disclosed having at least one cathode adapted to maintain a line of contact with at least one substrate surface during relative movement therebetween. There is at least one anode located in a spaced relationship to the cathode and an electronically insulating member located between the at least one anode and the at least one cathode adapted to provide a gap between the substrate surface and the insulating member. When placed in a plating bath, the electric field is directed toward conducting patterns on a substrate to uniformly plate the patterns while minimizing plating on the electrode. The same device may also be used for electroetching by reversing the polarity of the electrodes.
    Type: Grant
    Filed: September 7, 1999
    Date of Patent: November 27, 2001
    Assignee: Lynntech, INC
    Inventors: Dalibor Hodko, Jeffrey Dillon, Waheguru Pal Singh, Oliver J. Murphy
  • Patent number: 6309520
    Abstract: A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: October 30, 2001
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, LinLin Chen, John M. Pedersen, Vladimir Zila
  • Patent number: 6309524
    Abstract: A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith. The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: October 30, 2001
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, LinLin Chen, John M. Pedersen, Vladimir Zila
  • Patent number: 6309518
    Abstract: A surface-treatment plant, particularly for galvanic treatments, includes at least one tank (3) for holding a bath (B) for treating pieces (P) to be treated by immersion therein, and a continuous conveyor device (5) having an active pass at least a portion of which is immersed in the tank (3) in order to move the pieces being treated from an end at which the pieces enter the bath to an end at which the pieces leave the bath.
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: October 30, 2001
    Assignee: C.V.G. Centro Veneto Galvanico S.R.L.
    Inventor: Fervino Schievano
  • Patent number: 6306276
    Abstract: The present invention relates to the electrodeposition of transition metal and rare earth alloys from aqueous solutions to form thin films. The present invention which comprises the preparation of suitable mixtures of water soluble compounds containing the desired transition metal (TM) and rare earth (RE) elements, establishing appropriate bath conditions and applying specific current densities across the bath solution to cause a film with the desired properties to be deposited on a target substrate.
    Type: Grant
    Filed: December 10, 1999
    Date of Patent: October 23, 2001
    Inventors: Ken Nobe, Morton Schwartz, Linlin Chen, No Sang Myung
  • Patent number: 6303010
    Abstract: A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts execute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: October 16, 2001
    Assignee: Semitool, Inc.
    Inventors: Daniel J. Woodruff, Kyle M. Hanson, Thomas H. Oberlitner, LinLin Chen, John M. Pedersen, Vladimir Zila
  • Patent number: 6299749
    Abstract: A method of fabricating an electrical component includes the steps of providing a three-dimensional metal electrical component having multiple sides. A coating material is applied simultaneously to a plurality of the sides of the multi-sided component over a predetermined first portion thereof. A highly conductive plating material is applied to a second portion of the component not covered by the coating material. The coating material then is removed from the plurality of sides of the first portion of the component.
    Type: Grant
    Filed: October 25, 1999
    Date of Patent: October 9, 2001
    Assignee: Molex Incorporated
    Inventor: Gary Schnayderman
  • Patent number: 6290837
    Abstract: An improved method of machining slots and material feed holes in a molding die such as an extrusion die designed to form a honeycomb structure of ceramics employed as a catalyst carrier of a catalytic converter for automotive vehicles. In one of the preferred embodiments, shallow holes are drilled in a die material and subjected to electrochemical machining to remove material from the bottoms of the shallow holes so that they communicate with the material feed holes without any burrs. In the other embodiment, the slots are cut using a rotary cutter in a given order which will balance reaction forces exerted on the cutter from both side walls of each slot to minimize deformation of the cutter during cutting of the slots, thereby preventing the slots from being curved undesirably.
    Type: Grant
    Filed: June 9, 1998
    Date of Patent: September 18, 2001
    Assignee: Denso Corporation
    Inventors: Naoto Iwata, Nobuhiko Nagai, Mitsutoshi Miyazaki, Kunihiro Kodama
  • Patent number: 6284120
    Abstract: A method of electroplating using a photoresist layer on a conductive seed layer. The photoresist layer defines a column-shaped space. Ridges are formed on the wall surfaces of the photoresist layer surrounding the column-shaped space. The ridges extend from the conductive seed layer to the opening of the column-shaped space. The electrolytic solution drives bubbles out of the column-shaped space, so that the column-shaped space is filled with the electrolytic solution without any cavities. In addition, if hydrogen bubbles are generated in the column-shaped space, the electrolytic solution serves to drive the hydrogen bubbles out of the column-shaped space along the corners of the column-shaped space.
    Type: Grant
    Filed: July 9, 1999
    Date of Patent: September 4, 2001
    Assignee: Fujitsu Limited
    Inventors: Takahiro Imamura, Masaki Katayama
  • Patent number: 6284108
    Abstract: A method and apparatus are provided for momentum plating. A nozzle directs a jet of a plating fluid to a workpiece surface, preferably oriented either below or lateral to the jet. The nozzle is formed surrounding an anode and the plating fluid passes either through or around the anode. The flow vector range of the jet impinges on the surface in a continuous fashion and without interruption at a region to be plated. Optionally, a first seal prevents the plating fluid from flowing across either a non-plated or a previously-plated area of the workpiece. The nozzle can be moved across the surface or, alternatively, the workpiece can be conveyed past a fixed nozzle. A patterned plated coating can be produced by varying the number and orientation of seals, the number of nozzles, the type of plating fluid, the angle of jet flow, and the rate and direction of the jet flow across the surface.
    Type: Grant
    Filed: August 31, 1998
    Date of Patent: September 4, 2001
    Inventor: Louis DiFrancesco
  • Patent number: 6280595
    Abstract: A solid phase synthesis method for the preparation of diverse sequences of separate polymers or nucleic acid sequences using electrochemical placement of monomers or nucleic acids at a specific location on a substrate containing at least one electrode that is preferably in contact with a buffering or scavenging solution to prevent chemical crosstalk between electrodes due to diffusion of electrochemically generated reagents.
    Type: Grant
    Filed: September 10, 1999
    Date of Patent: August 28, 2001
    Assignee: CombiMatrix Corporation
    Inventor: Donald D. Montgomery
  • Patent number: 6280581
    Abstract: An electroplating apparatus includes a cathode structure, an anode structure, a power supply, and a pressurized electrolyte source. The cathode structure is configured to engage a perimeter portion of a workpiece such as a semiconductor wafer, and the anode structure includes an outlet. The power supply is coupled between the cathode structure and the anode structure. The pressurized electrolyte source is coupled to the anode structure to provide an electrically continuous fluid jet of an electrolyte from the outlet to be directed to a surface of the workpiece that is to be electroplated. A method for electroplating a workpiece includes electrically engaging a perimeter portion of the workpiece with a cathode structure, and directing an electrically continuous fluid jet of electrolyte having positively charged ions towards a surface of the workpiece that is to be electroplated.
    Type: Grant
    Filed: December 29, 1998
    Date of Patent: August 28, 2001
    Inventor: David Cheng
  • Patent number: 6274025
    Abstract: A method to form a passivation layer over a MR Sensor so that the passivation layer defines the track width. The passivation layer is formed simultaneously with the development of the lift off structure in a novel developing/oxidizing solution that oxidizes the MR sensor and develops the photoresist. The passivation layer is an electrical insulator that prevents sensor current from shunting through the overspray of the leads and a heat conductor to allow MR heat to dissipate through the overspray. The method comprises: spinning-on and printing a lift-off photoresist structure over the MR sensor. Next, the lift-off photoresist structure is developed. The MR sensor is anodized in a developing/oxidizing solution to: (1) remove portions of the lower photoresist and (2) to form a (e.g., thin NiFeO) passivation layer on the MR layer at least partially under the upper photoresist layer. The passivation layer is etched to remove the passivation layer not covered by the lift-off structure.
    Type: Grant
    Filed: June 14, 1999
    Date of Patent: August 14, 2001
    Assignee: Headway Technologies, Inc.
    Inventors: Jei-Wei Chang, Shou-Chen Kao, Cherng-Chyi Han, Kochan Ju, Mao-Min Chen
  • Patent number: 6264801
    Abstract: The present invention pertains to methods for altering the magnetic properties of materials and the novel materials produced by these methods. The methods of this invention concern the application of high voltage, high frequency sparks to the surface of materials in order to alter the magnetic properties of the materials. Specially, the present invention can be applied to diamagnetic silicon to produce ferromagnetic spark-processed silicon.
    Type: Grant
    Filed: December 7, 1999
    Date of Patent: July 24, 2001
    Assignee: University of Florida
    Inventors: Jonathan A. Hack, Rolf E. Hummel, Matthias H. Ludwig
  • Patent number: 6261432
    Abstract: A water soluble core of an aluminum or magnesium alloy is used for the production of an object with a hollow space. The aluminum or magnesium alloy is rendered water-soluble by flame spraying or by sintering to produce a high oxide content.
    Type: Grant
    Filed: April 20, 1998
    Date of Patent: July 17, 2001
    Assignee: DaimlerChrysler AG
    Inventors: Heinz Huber, Heinz Voggenreiter
  • Patent number: 6261426
    Abstract: An apparatus and method for an electrodeposition or electroetching system. A thin metal film is deposited or etched by electrical current through an electrolytic bath flowing toward and in contact with a target on which the film is disposed. Uniformity of deposition or etching is promoted, particularly at the edge of the target film, by baffle and shield members through which the bath passes as it flows toward the target. The baffle has a plurality of openings disposed to control the localized current flow across the cross section of the workpiece/wafer. Disposed near the edge of the target, the shield member shapes the potential field and the current line so that it is uniform.
    Type: Grant
    Filed: January 22, 1999
    Date of Patent: July 17, 2001
    Assignee: International Business Machines Corporation
    Inventors: Cyprian E. Uzoh, Hariklia Deligianni, John O. Dukovic
  • Patent number: 6258223
    Abstract: The present invention discloses a system that provides for electroless deposition performed in-situ with an electroplating process to minimize oxidation and other contaminants prior to the electroplating process. The system allows the substrate to be transferred from the electroless deposition process to the electroplating process with a protective coating to also minimize oxidation. The system generally includes a mainframe having a mainframe substrate transfer robot, a loading station disposed in connection with the mainframe, one or more processing facilities disposed in connection with the mainframe, an electroless supply fluidly connected to the one or more processing applicators and optionally includes a spin-rinse-dry (SRD) station, a rapid thermal anneal chamber and a system controller for controlling the deposition processes and the components of the electro-chemical deposition system.
    Type: Grant
    Filed: July 9, 1999
    Date of Patent: July 10, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Robin Cheung, Daniel A. Carl, Yezdi Dordi, Peter Hey, Ratson Morad, Liang-Yuh Chen, Paul F. Smith, Ashok K. Sinha
  • Patent number: 6258244
    Abstract: In order to effectively remove gas molecules of a by-product in a chemical reaction in a solution so as to achieve high efficiency, high rate, and uniformity of the chemical reaction in the solution and in order to realize formation of a semiconductor substrate applicable to production of SOI structure and realize formation of a semiconductor substrate in which a light-emitting element or a gas sensor can be formed, on the basis of an inexpensive silicon substrate, the chemical reaction is performed while the concentration of a gas dissolved in a reaction solution in a reaction vessel is always controlled to be not more than the solubility thereof during the reaction.
    Type: Grant
    Filed: May 13, 1998
    Date of Patent: July 10, 2001
    Assignees: Canon Kabushiki Kaisha, Ultraclean Technology Research Institute
    Inventors: Tadahiro Ohmi, Nobuyoshi Tanaka, Takeo Ushiki, Toshikuni Shinohara, Takahisa Nitta