Patents Examined by Eva Y Montalvo
  • Patent number: 10461128
    Abstract: A method of forming an array of memory cells, where the array comprises an elevationally-inner tier of memory cells comprising spaced-inner-tier-lower-first-conductive lines and inner-tier-programmable material directly there-above, an elevationally-outer tier of memory cells comprising spaced-outer-tier-lower-first-conductive lines and outer-tier-programmable material directly there-above, and spaced-upper-second-conductive lines that are electrically shared by the outer-tier memory cells and the inner-tier memory cells, comprises depositing conductor material for all of the shared-spaced-upper-second-conductive lines. All of the conductor material for all of the shared-spaced-upper-second-conductive lines is patterned using only a single masking step. Other method embodiments and arrays of memory cells independent of method of manufacture are disclosed.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: October 29, 2019
    Assignee: Micron Technology, Inc.
    Inventors: Anna Maria Conti, Agostino Pirovano, Andrea Redaelli
  • Patent number: 10361282
    Abstract: The present disclosure is directed to formation of a low-k spacer. For example, the present disclosure includes an exemplary method of forming the low-k spacer. The method includes depositing the low-k spacer and subsequently treating the low-k spacer with a plasma and/or a thermal anneal. The low-k spacer can be deposited on a structure protruding from the substrate. The plasma and/or thermal anneal treatment on the low-k spacer can reduce the etch rates of the spacer so that the spacer is etched less in subsequent etching or cleaning processes.
    Type: Grant
    Filed: May 8, 2017
    Date of Patent: July 23, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hsiu-Yu Kang, Hong-Wei Chen
  • Patent number: 10359760
    Abstract: A method for adaptable machining includes (a) capturing one or more images, with a digital imaging system, of each of a series of work pieces that may or may not be of common design geometry, (b) for each of the work pieces, selectively modifying a preprogrammed cutting tool path with regard to the image of the respective work piece, and (c) for each of the work pieces, performing a machining operation according to the respective selectively modified preprogrammed cutting tool path.
    Type: Grant
    Filed: March 3, 2016
    Date of Patent: July 23, 2019
    Inventor: Michael Scott, Jr.
  • Patent number: 10319582
    Abstract: Thin layer of silicon oxide is deposited on a substrate having an exposed layer of metal (e.g., W, Cu, Ti, Co, Ta) without causing substantial oxidation of the metal. The method involves: (a) contacting the substrate having an exposed metal layer with a silicon-containing precursor and adsorbing the precursor on the substrate; (b) removing the unadsorbed precursor from a process chamber; and (c) contacting the adsorbed precursor with a plasma formed in a process gas comprising an oxygen source (e.g., O2, CO2, N2O, O3) and H2, to form silicon oxide from the silicon-containing precursor while suppressing metal oxidation. These steps can be repeated until a silicon oxide film of a desired thickness is formed. In some embodiments, the silicon oxide film is used to improve nucleation of subsequently deposited silicon carbide.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: June 11, 2019
    Assignee: Lam Research Corporation
    Inventors: Bhadri N. Varadarajan, Zhe Gui, Bo Gong, Andrew John McKerrow
  • Patent number: 10312206
    Abstract: An array substrate includes a device array, a bonding pad, and at least one support structure. The bonding pad is located in a bonding area and is electrically connected to the device array. A horizontal distance between the at least one support structure and the bonding pad is between 5 ?m and 1000 ?m.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: June 4, 2019
    Assignee: Au Optronics Corporation
    Inventors: Jia-Hong Ye, Pin-Fan Wang
  • Patent number: 10304729
    Abstract: A method includes forming a first conductive feature in a first dielectric layer. An etch stop layer is formed over the first dielectric layer. A second dielectric layer is formed over the etch stop layer. The second dielectric layer and the etch stop layer are patterned to form an opening, where a portion of the etch stop layer is interposed between a bottom of the opening and the first conductive feature. The portion of the etch stop layer is sputtered to extend the opening toward the first conductive feature and form an extended opening, where the extended opening exposes the first conductive feature. The extended opening is filled with a conductive material to form a second conductive feature in the second dielectric layer.
    Type: Grant
    Filed: May 4, 2017
    Date of Patent: May 28, 2019
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chia-Ching Tsai, Yi-Wei Chiu, Li-Te Hsu
  • Patent number: 10290733
    Abstract: A semiconductor device (A1) includes a semiconductor layer having a first face with a trench (3) formed thereon and a second face opposite to the first face, a gate electrode (41), and a gate insulating layer (5). The semiconductor layer includes a first n-type semiconductor layer (11), a second n-type semiconductor layer (12), a p-type semiconductor layer (13), and an n-type semiconductor region (14). The trench (3) is formed so as to penetrate through the p-type semiconductor layer (13) and to reach the second n-type semiconductor layer (12). The p-type semiconductor layer (13) includes an extended portion extending to a position closer to the second face of the semiconductor layer than the trench (3) is. Such structure allows suppressing dielectric breakdown in the gate insulating layer (5).
    Type: Grant
    Filed: October 24, 2016
    Date of Patent: May 14, 2019
    Assignee: ROHM CO., LTD.
    Inventor: Yuki Nakano
  • Patent number: 10290662
    Abstract: A substrate for a display device, includes: an insulation substrate; an insulation film, which is formed on the insulation substrate and is primarily made of one of silicon oxide and oxidized metal; an inorganic film, which is formed to be in direct contact with the insulation film and has an insulator part that is formed by changing oxide semiconductor into insulator; and a wiring film, which is formed to be in direct contact with the insulator part.
    Type: Grant
    Filed: November 29, 2016
    Date of Patent: May 14, 2019
    Assignee: Mitsubishi Electric Corporation
    Inventors: Toshihiko Iwasaka, Yusuke Yamagata, Kazunori Inoue
  • Patent number: 10276589
    Abstract: A method of manufacturing a semiconductor device includes forming a mold structure including alternately stacked mold insulating and sacrificial layers on a substrate, forming a vertical structure through the mold structure, forming side openings by removing the sacrificial, forming a preliminary dielectric layer in the side openings, forming a dielectric layer by heat-treating the preliminary dielectric layer, removing a surface layer of the dielectric layer, forming a first conductive layer covering the dielectric layer in the side openings, and forming a second conductive layer covering the first conductive layer and filling the side openings.
    Type: Grant
    Filed: April 27, 2017
    Date of Patent: April 30, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyung Joon Kim, Yong Seok Cho, BiO Kim, Jung Ho Kim, Joong Yun Ra, Sung Hae Lee
  • Patent number: 10269954
    Abstract: A semiconductor device and the method of manufacturing the same are provided. The semiconductor device comprises a substrate, a source region, a drain region, a filed plate and a gate electrode. The source region is of a first conductivity type located at a first side within the substrate. The drain region is of the first conductive type located at a second side within the substrate opposite to the first side. The field plate is located over the substrate and between the source region and the drain region. A portion of the gate electrode is located over the field plate.
    Type: Grant
    Filed: January 5, 2018
    Date of Patent: April 23, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yogendra Yadav, Chi-Chih Chen, Ruey-Hsin Liu, Chih-Wen Yao
  • Patent number: 10256425
    Abstract: The present disclosure provides a display substrate, comprising: a bending resistant region; the region comprises a base and a metal wire layer, wherein the metal wire layer is directly formed on the base, or the region further comprises an organic buffer layer located between the base and the metal wire layer, and the metal wire layer is directly formed on the organic buffer layer. The present disclosure provides a method for manufacturing the display substrate above-described. The present disclosure further provides a display device, comprising the display substrate above-described. The present disclosure further provides a method for manufacturing the display device, comprising the method for manufacturing the display substrate above-described. The present disclosure forms a bending resistant structure in a predetermined bending resistant region on the bezel portions of the display substrate, which can enhance the bend resistance thereof and improve the quality of the flexible display.
    Type: Grant
    Filed: March 9, 2016
    Date of Patent: April 9, 2019
    Assignee: BOE Technology Group Co., Ltd.
    Inventor: Peng Cai
  • Patent number: 10256252
    Abstract: A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, a memory opening extending through the alternating stack, a semiconductor pedestal channel portion located at a bottom portion of the memory opening, and a memory stack structure located in the memory opening and contacting a top surface of the pedestal channel portion. The memory stack structure includes a memory film and a vertical semiconductor channel located inside the memory film. A bottommost insulating layer among the insulating layers comprises a first silicon oxide material, and at least some of the insulating layers other than the bottommost insulating layer include a second silicon oxide material having a greater density than the first silicon oxide material.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: April 9, 2019
    Assignee: SANDISK TECHNOLOGIES LLC
    Inventor: Junpei Kanazawa
  • Patent number: 10242935
    Abstract: A packaged semiconductor device includes a die attached to a die flag of a lead frame wherein the die includes a first, second, third, and fourth minor side, wherein the first and second minor sides are opposite each other and the third and fourth minor sides are opposite each other. The device includes an outer-most lead of the lead frame extending outwardly from the first minor side of the die and closest to the third minor side, wherein the outer-most lead includes a thinned region located between the die and a full thickness portion of the outer-most lead. The device includes an electrical connection between the die and the outer-most lead, and an encapsulant surrounding the die, the electrical connection, and surrounding at least a portion of an outer edge of the thinned portion of the outer-most lead such that the full thickness portion of the outer-most lead extends beyond the encapsulant.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: March 26, 2019
    Assignee: NXP USA, Inc.
    Inventors: Burton Jesse Carpenter, Leo M. Higgins, III
  • Patent number: 10228575
    Abstract: The present application discloses a separating apparatus for separating an object to be separated including two plate-shaped structures stacked on each other. The separating apparatus includes: an electrical signal generating unit and an acoustic wave signal output unit connected to each other, the electrical signal generating unit is configured to generate a target electrical signal; and the acoustic wave signal output unit is configured to convert the target electrical signal into a target acoustic wave, and output the target acoustic wave to the object to be separated, wherein a frequency of the target acoustic wave is different from a natural frequency of any one of the two plate-shaped structures.
    Type: Grant
    Filed: November 14, 2016
    Date of Patent: March 12, 2019
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventor: Qian Jia
  • Patent number: 10224244
    Abstract: Some structures and methods to reduce power consumption in devices can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. Some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors. Additional structures, configurations, and methods presented herein can be used alone or in conjunction with the DDC to yield additional and different benefits.
    Type: Grant
    Filed: August 19, 2016
    Date of Patent: March 5, 2019
    Assignee: MIE FUJITSU SEMICONDUCTOR LIMITED
    Inventors: Scott E. Thompson, Damodar R. Thummalapally
  • Patent number: 10224266
    Abstract: According to example configurations herein, a leadframe includes a first conductive strip, a second conductive strip, and a third conductive strip disposed substantially adjacent and substantially parallel to each other. A semiconductor chip substrate includes a first array of switch circuits disposed adjacent and parallel to a second array of switch circuits. Source nodes in switch circuits of the first array are disposed substantially adjacent and substantially parallel to source nodes in switch circuits of the second array. When the semiconductor chip and the leadframe device are combined to form a circuit package, a connectivity interface between the semiconductor chip and conductive strips in the circuit package couples each of the source nodes in switch circuits of the first array and each of the multiple source nodes in switch circuits of the second array to a common conductive strip in the leadframe device.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: March 5, 2019
    Assignee: Infineon Technologies Americas Corp.
    Inventors: Donald J. Desbiens, Gary D. Polhemus, Robert T. Carroll
  • Patent number: 10217668
    Abstract: Some structures and methods to reduce power consumption in devices can be implemented largely by reusing existing bulk CMOS process flows and manufacturing technology, allowing the semiconductor industry as well as the broader electronics industry to avoid a costly and risky switch to alternative technologies. Some of the structures and methods relate to a Deeply Depleted Channel (DDC) design, allowing CMOS based devices to have a reduced ?VT compared to conventional bulk CMOS and can allow the threshold voltage VT of FETs having dopants in the channel region to be set much more precisely. The DDC design also can have a strong body effect compared to conventional bulk CMOS transistors, which can allow for significant dynamic control of power consumption in DDC transistors. Additional structures, configurations, and methods presented herein can be used alone or in conjunction with the DDC to yield additional and different benefits.
    Type: Grant
    Filed: January 4, 2017
    Date of Patent: February 26, 2019
    Assignee: MIE FUJITSU SEMICONDUCTOR LIMITED
    Inventors: Scott E. Thompson, Damodar R. Thummalapally
  • Patent number: 10217820
    Abstract: Semiconductor devices may include a diffusion prevention insulation pattern, a plurality of conductive patterns, a barrier layer, and an insulating interlayer. The diffusion prevention insulation pattern may be formed on a substrate, and may include a plurality of protrusions protruding upwardly therefrom. Each of the conductive patterns may be formed on each of the protrusions of the diffusion prevention insulation pattern, and may have a sidewall inclined by an angle in a range of about 80 degrees to about 135 degrees to a top surface of the substrate. The barrier layer may cover a top surface and the sidewall of each if the conductive patterns. The insulating interlayer may be formed on the diffusion prevention insulation pattern and the barrier layer, and may have an air gap between neighboring ones of the conductive patterns.
    Type: Grant
    Filed: June 26, 2017
    Date of Patent: February 26, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-Nam Kim, Rak-Hwan Kim, Byung-Hee Kim, Jong-Min Baek, Sang-Hoon Ahn, Nae-In Lee, Jong-Jin Lee, Ho-Yun Jeon, Eun-Ji Jung
  • Patent number: 10199552
    Abstract: A light emitting device includes a wiring substrate, a light emitting element disposed on a front surface of the wiring substrate, and a conductor pattern formed on a rear surface of the wiring substrate. The conductor pattern includes a slit or a hole that fails to separate the conductor pattern into two parts.
    Type: Grant
    Filed: July 12, 2017
    Date of Patent: February 5, 2019
    Assignee: TOYODA GOSEI CO., LTD.
    Inventors: Shigeo Takeda, Shota Shimonishi, Hideaki Kato, Tomohiro Miwa, Daisuke Kato
  • Patent number: 10170414
    Abstract: A semiconductor device includes a dummy fin structure disposed over a substrate, a dummy gate structure disposed over a part of the dummy fin structure, a first interlayer dielectric layer in which the dummy gate structure is embedded, a second interlayer dielectric layer disposed over the first interlayer dielectric layer, and a resistor wire formed of a conductive material and embedded in the second interlayer dielectric layer. The resistor wire overlaps the dummy gate structure in plan view.
    Type: Grant
    Filed: August 31, 2017
    Date of Patent: January 1, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chia-Hsin Hu, Yu-Chiun Lin, Yi-Hsuan Chung, Chung-Peng Hsieh, Chung-Chieh Yang, Po-Nien Chen