Abstract: The present invention provides a method for optimizing a critical dimension for double patterning for NAND flash, forming a core oxide layer on amorphous silicon layer on substrate; densifying the core oxide layer and etching it to form a core pattern; measuring CD values of the bottom and top of the core pattern; providing etching rates of a non-densified core oxide layer and a densified core oxide layer under the same etching condition; calculating the thickness of the core oxide layer required to be densified according to the CD values of the bottom and top of the core pattern and the etching rates to determine the densifying time. The present invention precisely controls the morphology and CD, and obtains a double-patterned target pattern with consistent CD sizes of a top and a bottom and a consistent bottom height, so as to improve a product yield.

Abstract: A process of forming a field transistor (FET) and a FET are disclosed. The FET includes a nitride semiconductor stack on a substrate. A pair of n+-regions made of oxide semiconductor material are provided within respective recesses in the semiconductor stack. Protecting layers, each made of oxide material, cover peripheries of the n+-regions. Electrodes are provided in openings in the protecting layers to be in direct contact with the n+-regions.

Abstract: An electronic device module includes a substrate, a first component disposed on a first surface of the substrate, a second component disposed on the first surface of the substrate, a first sealing portion to seal the first component, a second sealing portion to seal the second component, a shielding wall disposed between the first component and the second component. The shielding wall includes a bobbin disposed between the first sealing portion and the second sealing portion and a conductive portion to seal the bobbin. A shielding layer of a conductive material is disposed along a surface formed by the first sealing portion, the second sealing portion, and the shielding wall.

Abstract: A method for manufacturing a semiconductor structure including forming a first type semiconductor layer. The method also includes forming a semiconductor interlayer over the first type semiconductor layer. The method further includes forming a second type semiconductor layer over the semiconductor interlayer. The method further includes etching the first type semiconductor layer, the semiconductor interlayer, and the second type semiconductor layer to form a fin structure. The method further includes oxidizing the semiconductor interlayer.

Abstract: A package structure and method for forming the same are provided. The method includes forming a through substrate via structure in a substrate, and forming a first trench in the substrate. The method includes stacking a first stacked die package structure over the substrate using a plurality of first bonding structures. The first bonding structures are between the substrate and the first stacked die package structure, and a there is plurality of cavities between two adjacent first bonding structures. The method also includes forming an underfill layer over the first stacked die package structure and in the cavities, and the underfill layer is formed in a portion of the first trench. The method further includes forming a package layer over the underfill layer.

Abstract: A semiconductor device includes a substrate, an isolation structure, a first gate structure, a second gate structure, a first slot contact structure, a first gate contact structure, and a second gate contact structure. The substrate includes a first active region and a second active region elongated in a first direction respectively. The first gate structure, the second gate structure, and the first slot contact structure are elongated in a second direction respectively. The first gate contact structure and the second gate contact structure are disposed at two opposite sides of the first slot contact structure in the first direction respectively and disposed between the first active region and the second active region in the second direction. A length of the first gate contact structure and a length of the second gate contact structure in the second direction are less than a length of the isolation structure in the second direction.

Abstract: A shallow trench isolation layer is formed on a structure comprising semiconductor fins. Portions of the fins are recessed to a level below the shallow trench isolation layer. Epitaxial stressor regions are then formed on the recessed fin areas. A bottom portion of the epitaxial stressor regions are contained by the shallow trench isolation layer, which delays formation of the diamond shape as the epitaxial region is grown. Once the epitaxial stressor regions exceed the level of the shallow trench isolation layer, the diamond shape starts to form. The result of delaying the start of the diamond growth pattern is that the epitaxial regions are narrower for a given fin height. This allows for taller fins, which provide more current handling capacity, while the narrower epitaxial stressor regions enable a smaller fin pitch, allowing for increased circuit density.

Abstract: A method of forming a memory device including forming a stack of silicon nitride layers and polysilicon layers that are alternating arranged, etching a serpentine trench in the stack of silicon nitride layers and polysilicon layers, forming a first isolation layer in the serpentine trench, removing one of the silicon nitride layers to form a recess between neighboring two of the polysilicon layers, and forming in sequence a doped polysilicon layer, a gate dielectric layer, and a conductive layer in the recess.

Abstract: An image sensor is disclosed. The image sensor may include a semiconductor substrate including a first pixel group region and a second pixel group region, the first pixel group region including first pixel regions to sense a first light, the second pixel group region including second pixel regions to sense a second light, each of the first and second pixel regions arranged in n columns and m rows, a pixel isolation structure disposed in the semiconductor substrate to separate the first and second pixel regions from each other, first and second photoelectric conversion regions disposed in each of the first and second pixel regions of the semiconductor substrate, and a first separation structure disposed in each of the first pixel regions and in the semiconductor substrate between the first and second photoelectric conversion regions. The first separation structure may be spaced apart from the pixel isolation structure.

Abstract: A multi-color light emitting pixel unit includes a first type of light emitting transistor formed on a substrate and including a first segment of a first metal layer and a first segment of a first type of light emitting layer in an order from bottom to top, and a second type of light emitting transistor formed on the substrate and including a second segment of the first metal layer, a second segment of the first type of light emitting layer, a first segment of a second metal layer, a first segment of a second type of light emitting layer in an order from bottom to top, and a first electrical connector connecting the second segment of the first metal layer and the first segment of the second metal layer.

Abstract: The present invention provides a method of manufacturing an organic device having a protective film, the method including: providing bonding layers (adhesives) on one surface of a first substrate and one surface of a second substrate; providing an organic device on the other surface of the first substrate; and providing the second substrate on the organic device such that the bonding layer (adhesive) provided on the second substrate is in contact with the organic device. Since the organic device having the protective film according to the present invention may be attached to other materials through the bonding layer (adhesive), it is not necessary to apply heat in order to attach the organic device to other materials, and as a result, it is possible to attach the organic device to various materials having various shapes regardless of types and shapes of materials.

Abstract: A method of fabricating a semiconductor memory device includes etching a substrate that forms a trench that crosses active regions of the substrate, forming a gate insulating layer on bottom and side surfaces of the trench, forming a first gate electrode on the gate insulating layer that fills a lower portion of the trench, oxidizing a top surface of the first gate electrode where a preliminary barrier layer is formed, nitrifying the preliminary barrier layer where a barrier layer is formed, and forming a second gate electrode on the barrier layer that fills an upper portion of the trench.

Abstract: In a method of forming a semiconductor device including a fin field effect transistor (FinFET), a first sacrificial layer is formed over a source/drain structure of a FinFET structure and an isolation insulating layer. The first sacrificial layer is patterned, thereby forming an opening. A first liner layer is formed on the isolation insulating layer in a bottom of opening and at least side faces of the patterned first sacrificial layer. After the first liner layer is formed, a dielectric layer is formed in the opening. After the dielectric layer is formed, the patterned first sacrificial layer is removed, thereby forming a contact opening over the source/drain structure. A conductive layer is formed in the contact opening.

Abstract: According to one embodiment, a semiconductor device includes a first layer, a first electrode, and a first nitride region. The first layer includes a first material and a first partial region. The first material includes at least one selected from the group consisting of silicon carbide, silicon, carbon, and germanium. The first partial region is of a first conductivity type. The first conductivity type is one of an n-type or a p-type. A direction from the first partial region toward the first electrode is aligned with a first direction. The first nitride region includes Alx1Ga1-x1N (0?x1<1), is provided between the first partial region and the first electrode, is of the first conductivity type, and includes a first protrusion protruding in the first direction.

Abstract: A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.

Abstract: A method of forming a semiconductor device includes forming a material layer over a substrate and forming a first trench in the material layer, forming a conformal capping layer along sidewalls of the first trench, forming a second trench in the material layer while the capping layer is disposed along sidewalls of the first trench and forming a conductive feature within the first trench and the second trench.

Abstract: In a gate last metal gate process for forming a transistor, a dielectric layer is formed over an intermediate transistor structure, the intermediate structure including a dummy gate electrode, typically formed of polysilicon. Various processes, such as patterning the polysilicon, planarizing top layers of the structure, and the like can remove top portions of the dielectric layer, which can result in decreased control of gate height when a metal gate is formed in place of the dummy gate electrode, decreased control of fin height for finFETs, and the like. Increasing the resistance of the dielectric layer to attack from these processes, such as by implanting silicon or the like into the dielectric layer before such other processes are performed, results in less removal of the top surface, and hence improved control of the resulting structure dimensions and performance.

Abstract: An interconnection structure includes a first dielectric layer, a bottom conductive feature present in the first dielectric layer, a second dielectric layer present on the first dielectric layer, an aluminum-containing etch stop layer present between the first dielectric layer and the second dielectric layer, an upper conductive via present at least in the second dielectric layer and electrically connected to the bottom conductive feature, and at least one aluminum-containing fragment present at least at a bottom corner of the upper conductive via.

Abstract: An array board 11b includes a display section AA, a source line 20 connected to the display section AA, a test circuit 40 connected to the source line 20 and configured to test the display section AA, a panel-side image input terminal that is disposed such that the test circuit 40 is between the terminal and the display section AA and to which a signal to be supplied to the source line 20 is input, a terminal connection line 51 connecting the source line 20 to the pane-side image input terminal 35A and the terminal connection line 51 including the terminal connection line 51 at least a part of which overlaps the test circuit 40 and a flattening film (insulation film) 28 at least disposed between an overlapping portion of the test circuit 40 and the terminal connection line 51.

Abstract: A 3D memory device, the device including: a first horizontal bit-line; a second horizontal bit-line disposed above the first horizontal bit-line, where the first horizontal bit-line and the second horizontal bit-line function as a source or a drain for a plurality of parallel vertically-oriented memory transistors, where the first horizontal bit-line and the second horizontal bit-line are self-aligned being formed following the same lithography step; and conductive memory control lines, where a first portion of the conductive memory control lines are disposed at least partially directly underneath the plurality of parallel vertically-oriented memory transistors, and where a second portion of the conductive memory control lines are disposed at least partially directly above the plurality of parallel vertically-oriented memory transistors.