Patents Examined by Gordon J. Stock, Jr.
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Patent number: 11060950Abstract: A device may receive, from a sensor device, cable distance data identifying cable distances along a fiber cable to vibrations experienced by the fiber cable, and may receive location data identifying locations associated with the vibrations. The device may correlate the cable distance data and the location data to generate correlated location data, and may store the correlated location data in a data structure. The device may receive, from the sensor device, data identifying a cable distance along the fiber cable to an alarm condition associated with the fiber cable, and may determine a location of the alarm condition based on the correlated location data and the data identifying the cable distance along the fiber cable to the alarm condition. The device may perform actions based on the alarm location.Type: GrantFiled: March 9, 2020Date of Patent: July 13, 2021Assignees: Verizon Patent and Licensing Inc., NEC Laboratories America, Inc.Inventors: Tiejun J. Xia, Glenn A Wellbrock, Ting Wang, Ming-Fang Huang
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Patent number: 11060983Abstract: An evaluation method of a silicon wafer allows non-destructive and non-contact inspection of a slip that affects the electrical properties of semiconductor devices, without being subjected to restrictions of the surface condition of silicon wafers or processing contents as much as possible. The evaluation method of a silicon wafer includes a step of section analysis where a surface of a single crystal silicon wafer after thermal processing is divided by equally-spaced lines into sections with an area of 1 mm2 or more and 25 mm2 or less and the existence of strain in each of the sections is determined based on a depolarization value of polarized infrared light, and a screening step where the wafer is evaluated as non-defective when the number of adjacent sections being determined to have strain by the section analysis step does not exceed a predetermined threshold value.Type: GrantFiled: July 23, 2018Date of Patent: July 13, 2021Assignee: GLOBALWAFERS JAPAN CO., LTD.Inventors: Haruo Sudo, Nobue Araki, Kazuki Okabe, Koji Araki
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Patent number: 11047795Abstract: Calibration chucks for optical probe systems, optical probe systems including the calibration chucks, and methods of utilizing the optical probe systems. The calibration chucks include a calibration chuck body that defines a calibration chuck support surface. The calibration chucks also include at least one optical calibration structure that is supported by the calibration chuck body. The at least one optical calibration structure includes a horizontal viewing structure. The horizontal viewing structure is configured to facilitate viewing of a horizontally viewed region from a horizontal viewing direction that is at least substantially parallel to the calibration chuck support surface. The horizontal viewing structure also is configured to facilitate viewing of the horizontally viewed region via an imaging device of the optical probe system that is positioned vertically above the calibration chuck support surface.Type: GrantFiled: May 27, 2020Date of Patent: June 29, 2021Assignee: FormFactor, Inc.Inventors: Kazuki Negishi, Michael E. Simmons, Christopher Anthony Storm, Joseph George Frankel, Eric Robert Christenson, Mario René Berg
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Patent number: 11035753Abstract: There is provided a test device and a test method that combine both tunable OTDR and WDM power meter functionalities into the same integrated optoelectronic test hardware, such that the tunable OTDR and the WDM power meter functions share optoelectronic components, thereby reducing the hardware cost and the overall form factor and weight of the test device. With the proposed configuration, both tunable OTDR and WDM power meter functionalities may be provided via a single test port to be connected to the optical fiber link under test. By connecting the fiber to a single test port, the number of manipulations to be performed by technicians is reduced and two tests can be performed in a single connection operation out of the same test port.Type: GrantFiled: March 11, 2020Date of Patent: June 15, 2021Assignee: EXFO Inc.Inventors: Jimmy Gagnon, Michel Leclerc, Stephane Perron
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Patent number: 11022899Abstract: Disclosed is a method of measuring a focus parameter relating to formation of a structure using a lithographic process, and associated metrology device. The method comprises obtaining measurement data relating to a cross-polarized measurement of said structure; and determining a value for said focus parameter based on the measurement data.Type: GrantFiled: November 25, 2019Date of Patent: June 1, 2021Assignee: ASML Netherlands B.V.Inventors: Fahong Li, Sergei Sokolov
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Patent number: 11022427Abstract: A thickness measuring device includes a laser emitting a laser beam to an object in a semiconductor processing chamber, a quartz glass inside the chamber reflecting part of the laser beam and to transmit a remainder of the laser beam, a first light receiving sensor detecting an intensity of first reflected light reflected from the quartz glass, a second light receiving sensor detecting an intensity of second reflected light transmitted through the quartz glass and reflected from the object, and a controller configured to calculate input intensity of the laser beam based on the intensity of the first reflected light, to calculate reflectivity of the object by comparing the input intensity of the laser beam with the intensity of the second reflected light, and to measure a thickness of the object by comparing the calculated reflectivity with predetermined reflectivity values for a plurality of thicknesses.Type: GrantFiled: March 9, 2020Date of Patent: June 1, 2021Assignees: SK hynix Inc., INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITYInventors: Seung Jae Moon, Jung Ho Yun, Jong Jin Hwang, Cheong Il Ryu, Sung Mook Jung, Mun Hyeong Jegal
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Patent number: 11022435Abstract: Disclosed are a 3D scanning apparatus and a 3D scanning method. The 3D scanning apparatus includes a projector projecting patterns previously set onto a subject that is to be 3D scanned, a photographing unit photographing each of the patterns projected onto the subject at each of exposure levels previously set, a calculating unit calculating a depth value for each pixel of the subject based on the patterns photographed at each of the exposure levels, and a scanning unit 3D scanning the subject, which is photographed, based on the calculated depth value. The calculating unit calculates the depth value for each pixel of the subject by calculating the depth value for each pixel of the subject at each of the exposure levels and combining the depth values for the pixel, which are calculated at each of the exposure levels.Type: GrantFiled: April 5, 2017Date of Patent: June 1, 2021Assignee: KALLION, INC.Inventor: Chul Hee Lee
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Patent number: 11022520Abstract: An optical test instrument, in combination with a removable connector cartridge is provided. A method of replacing a damaged or worn optic fiber interface is also provided. The optical test instrument has casing having a cartridge receiving cavity therein with an inner end provided with a test instrument optical port; and an outer end provided with a cartridge receiving opening. The connector cartridge is sized and configured to be inserted in the cartridge receiving cavity. The connector cartridge has a cartridge inner end for facing the test instrument optical port when in use, and a cartridge outer end for receiving an optic fiber from a device under test (DUT). The connector cartridge houses a fiber optic cable extending between the cartridge inner end and the cartridge outer end. The connector cartridge is removably connectable to the instrument casing to allow replacement of the connector cartridge when the cartridge outer end is worn or damaged.Type: GrantFiled: August 28, 2019Date of Patent: June 1, 2021Assignee: EXFO INC.Inventors: Michael Simard, Kristine Palanjyan, Stephane Perron
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Patent number: 11016036Abstract: To provide a reflected light measurement device capable of efficiently performing disconnection inspection on an optical connector, and a plurality of optical fibers. The reflected light measurement device 1 includes a laser light source 2, a beam splitter 3 that branches measurement laser light L into measurement laser light L1 to be transmitted and reference laser light L2 to be reflected, a reference mirror 4 including an optical path length varying mechanism capable of adjusting an optical path length of the reference laser light L2, an optical path length switching unit 5, and switches the optical path length of the reference laser light L2 to a plurality of fixed lengths, and a photometer 6 that receives measurement laser light L1? reflected at defect sites D1 and D2 such as disconnection inside connectors C1 and C2, and reference laser light L2? reflected by the reference mirror 4.Type: GrantFiled: April 2, 2019Date of Patent: May 25, 2021Assignee: OPT GATE CO., LTD.Inventor: Masayuki Tanaka
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Patent number: 11009658Abstract: Light detectors that combine field emission with light focusing by surface plasmon polaritons. Methods and devices that allow detection and measurement of light at high frequencies in the THz range are described. The disclosed devices include plasmonic metal contacts with a narrow nanometer-sized gap to couple an optical waveguide mode into a plasmonic mode thereby generating filed emission currents by biasing the contacts.Type: GrantFiled: February 27, 2020Date of Patent: May 18, 2021Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGYInventors: William M. Jones, Lucia B. De Rose, Axel Scherer
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Patent number: 11009345Abstract: Disclosed is a method of, and associated metrology apparatus for, determining a characteristic of a target on a substrate. The method comprises obtaining a plurality of intensity asymmetry measurements, each intensity asymmetry measurement relating to a target formed on the substrate and determining a sensitivity coefficient corresponding to each target, from the plurality of intensity asymmetry measurements. Using these sensitivity coefficients a representative sensitivity coefficient is determined for said plurality of targets or a subset greater than one thereof. The characteristic of the target can then be determined using the representative sensitivity coefficient.Type: GrantFiled: May 21, 2019Date of Patent: May 18, 2021Assignee: ASML Netherlands B.V.Inventors: Alberto Da Costa Assafrao, Mohammadreza Hajiahmadi
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Patent number: 11002631Abstract: According to examples, a fiber-optic testing source for testing a multi-fiber cable may include a laser source communicatively coupled to a plurality of optical fibers connected to a connector. The fiber-optic testing source may include at least one photodiode communicatively coupled to at least one of the plurality of optical fibers by at least one corresponding splitter to implement a communication channel between the fiber-optic testing source and a fiber-optic testing receiver. The communication channel may be operable independently from a polarity associated with the multi-fiber cable. The fiber-optic testing receiver may include a plurality of photodiodes communicatively coupled to a plurality of optical fibers.Type: GrantFiled: November 26, 2019Date of Patent: May 11, 2021Assignee: VIAVI SOLUTIONS INC.Inventor: Joachim Lönne
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Patent number: 10996176Abstract: In the measurement of properties of a wafer substrate, such as Critical Dimension or overlay a sampling plan is produced defined for measuring a property of a substrate, wherein the sampling plan comprises a plurality of sub-sampling plans. The sampling plan may be constrained to a predetermined fixed number of measurement points and is used to control an inspection apparatus to perform a plurality of measurements of the property of a plurality of substrates using different sub-sampling plans for respective substrates, optionally, the results are stacked to at least partially recompose the measurement results according to the sample plan.Type: GrantFiled: June 18, 2020Date of Patent: May 4, 2021Assignee: ASML Netherlands B.V.Inventors: Wouter Lodewijk Elings, Franciscus Bernardus Maria Van Bilsen, Christianus Gerardus Maria De Mol, Everhardus Cornelis Mos, Hoite Pieter Theodoor Tolsma, Peter Ten Berge, Paul Jacques Van Wijnen, Leonardus Henricus Marie Verstappen, Gerald Dicker, Reiner Maria Jungblut, Chung-Hsun Li
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Patent number: 10996138Abstract: In some examples, parallel optics based optical time domain reflectometer acquisition may include a laser array operatively collimated to an optical fiber array to transmit, in parallel, a plurality of laser beams to optical fibers of the optical fiber array. A photodiode array may receive, in parallel, backscattered and reflected light from the optical fiber array. The photodiode array may determine, based on the backscattered and reflected light, properties of the optical fibers of the optical fiber array.Type: GrantFiled: November 13, 2019Date of Patent: May 4, 2021Assignee: VIAVI SOLUTIONS INC.Inventor: Vincent Lecoeuche
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Patent number: 10989625Abstract: A vehicle (9) headlight measurement system instrumentation structure (1) comprises: a support structure (3); a vehicle calibration assistance structure (4), which is carried by the support structure (3) and includes a headlight aiming device (40), configured to facilitate alignment or calibration of a headlight (90) of the vehicle (9), the vehicle (9) being positioned within a service area (8); a processing system (11) configured to receive, from the headlight aiming device (40), data correlated with a light beam emitted by the headlight (90) and to provide, through an interface (10), an informative indication relating to an operating condition of the headlight (90), where the processing system (11) includes a communication port (12) connectable to an electronic control unit (91) of the vehicle (9).Type: GrantFiled: November 14, 2019Date of Patent: April 27, 2021Assignee: NEXION S.P.A.Inventor: Giulio Corghi
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Patent number: 10989526Abstract: The present invention is a device for the complete acquisition of the shape of an object by means of a plurality of image sensors arranged around a space for image capture. Image sensors capture a plurality of images that are carried to a reconstruction system formed from said plurality of images corresponding to different views of the object. Document EP2511653 discloses a system where the object falls through the trap area so that there is no type of fastener or support which hides some part of the object. The present invention is a device for the acquisition and reconstruction of objects characterized by the use of an actuator serving as launcher and configured so that the object is positioned at the point of capture of images at either zero or very close to zero speed to improve the resolution of each image without blurring due to movement, even with relatively long exposure times. Additionally, the actuator is configured so that the fall of the object is such that it prevents damage by the impact effect.Type: GrantFiled: June 20, 2018Date of Patent: April 27, 2021Assignee: INSTITUTO TECHNOLÓGICO DE INFORMÁTICA UPV CIUDAD POLITÉCNICA DE LA INNOVACIÓNInventor: Juan Carlos Pérez Cortés
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Patent number: 10989795Abstract: A system and method for analyzing a surface of an object is provided. The system includes a 3D measurement device operable to acquire a plurality of points on the surface of the object and determine 3D coordinates for each of the points. The system further includes processors operably coupled to the 3D measurement device. The processors are responsive to computer instructions when executed on the processors for performing a method comprising: generating a point cloud from the 3D coordinates of the plurality of points; extracting a first set of points from the plurality of points; defining a first reference geometry through the first set of points; measuring at least one first metric from each of the points in the first set of points to the first reference geometry; and identifying a nonconforming feature based at least in part on the at least one first metric.Type: GrantFiled: November 9, 2018Date of Patent: April 27, 2021Assignee: FARO TECHNOLOGIES, INC.Inventors: Oliver Zweigle, Aleksej Frank, Johannes Buback
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Patent number: 10983445Abstract: An inspection apparatus, method, and system are described herein. An example inspection apparatus includes an optical system and an imaging system. The optical system may be configured to output an illumination beam incident on a target including one or more features, the illumination beam polarized with a first polarization when incident on the target. The imaging system may be configured to obtain intensity data representing at least a portion of the illumination beam scattered by the one or more features, where the portion of the illumination beam has a second polarization orthogonal to the first polarization. The inspection apparatus may be further configured to generate image data representing an image of each of the feature(s) based on the intensity data, and determine a measurement of a parameter of interest associated with the feature(s) based on an amount of the portion of the illumination beam having the second polarization.Type: GrantFiled: February 6, 2019Date of Patent: April 20, 2021Assignee: ASML Netherlands B.V.Inventors: Nitesh Pandey, Zili Zhou, Gerbrand Van Der Zouw, Arie Jeffrey Den Boef, Markus Gerardus Martinus Maria Van Kraaij, Armand Eugene Albert Koolen, Hugo Augustinus Joseph Cramer, Paul Christiaan Hinnen, Martinus Hubertus Maria Van Weert, Anagnostis Tsiatmas, Shu-jin Wang, Bastiaan Onne Fagginger Auer, Alok Verma
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Patent number: 10983044Abstract: In-situ optical spectroscopic monitoring, characterization and feedback control of extraction and purification processes of compounds such as oils, alkaloids, flavonoids, terpenes and cannabinoids derived from plant material are described. Liquids from an extraction or purification process flow down an optically transparent tube, such as one made of glass. An in-situ optical monitoring assembly is configured to be mounted onto the tube to measure optical properties of the liquid extract or liquid condensate as it flows in the tube. Optical properties of the flowing liquid may include optical transmittance, reflectance, photoluminescence, scattering, absorbance, turbidity, nephelometry, polarimetry and colorimetry. The output of the optical monitoring assembly can be used to display spectral and other about the flowing liquid, set alarms to notify an operator of a predetermined condition such as a set point, and used to control extraction or purification process.Type: GrantFiled: June 26, 2018Date of Patent: April 20, 2021Assignee: Arometrix, Inc.Inventors: Christopher J. Metting, Jonathan K. Bunn, Timothy G. Collins, Hasso Von Bredow, George Atanasoff
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Patent number: 10976218Abstract: In some examples, an optical time-domain reflectometer (OTDR) device may include a laser source to emit a plurality of laser beams. Each laser beam may include a different pulse width. A control unit may analyze, for each laser beam, a backscattered signal from a device under test (DUT). The control unit may generate, for each backscattered signal, a trace along the DUT. Further, the control unit may generate, based on an analysis of each trace along the DUT, a combined trace that identifies optical events detected along the DUT.Type: GrantFiled: February 14, 2020Date of Patent: April 13, 2021Assignee: VIAVI SOLUTIONS FRANCE SASInventors: Jean Paul Bonche, Olivier Receveur