Patents Examined by Hua Qi
  • Patent number: 8585821
    Abstract: In one embodiment of the present invention, a monocrystal SiC epitaxial substrate is produced which includes a monocrystal SiC substrate; a buffer layer made of a first SiC epitaxial film formed on the monocrystal SiC substrate; and an active layer made of a second SiC epitaxial film formed on the buffer layer. The buffer layer is grown by heat-treating a set of the monocrystal SiC substrate, a carbon source plate, and a metal Si melt layer having a predetermined thickness and interposed between the monocrystal SiC substrate and the metal Si melt layer, so as to epitaxially grow monocrystal SiC on the monocrystal SiC substrate. The active layer is grown by epitaxially growing monocrystal SiC on the buffer layer by vapor phase growth method. This allows for production of a monocrystal SiC epitaxial substrate including a high-quality monocrystal SiC active layer being low in defects.
    Type: Grant
    Filed: March 11, 2008
    Date of Patent: November 19, 2013
    Assignees: Ecotron Co., Ltd., Research Institute of Innovative Technology for the Earth
    Inventors: Nobuhiko Nakamura, Toru Matsunami, Kimito Nishikawa
  • Patent number: 8557041
    Abstract: A method for manufacturing a P-I-N microcrystalline silicon structure for thin-film solar cells, includes the steps of: (a) forming a P-type layer; (b) forming an I-type layer including a plurality of sub-layers successively stacked on the P-type layer using gas mixtures including fluoride and hydride that have different gas ratios, respectively; and (c) forming an N-type layer on the I-type layer. First, second, and third I-type sub-layers may be formed on the P-type layer using gas mixtures including fluoride and hydride at a first, second, and third gas ratios, respectively. Then, advantageously, the third gas ratio may be larger than the second gas ratio and the second gas ratio may be larger than the first gas ratio, and the first gas ratio may be 8%, the second gas ratio may range between 15% and 35%, and the third gas ratio may range between 35% and 50%.
    Type: Grant
    Filed: July 13, 2012
    Date of Patent: October 15, 2013
    Assignee: Industrial Technology Research Institute
    Inventors: Yu-Hung Chen, Jun-Chin Liu, Chun-Heng Chen
  • Patent number: 8545626
    Abstract: A method for efficiently producing a plate-like nitride semiconductor crystal having the desired principal plane in a simple method is provided. A raw material gas is fed to a seed crystal in which a ratio (L/W) of length L in a longitudinal direction and maximum width W, of a plane of projection obtained by projecting a crystal growth face on the seed crystal in a growth direction is from 2 to 400, and the maximum width W is 5 mm or less, thereby growing a plate-like semiconductor crystal on the seed crystal.
    Type: Grant
    Filed: March 2, 2009
    Date of Patent: October 1, 2013
    Assignee: Mitsubishi Chemical Corporation
    Inventors: Kenji Fujito, Shuichi Kubo, Yoko Mashige
  • Patent number: 8540817
    Abstract: There are provided a method for manufacturing a Si(1-v-w-x)CwAlxNv substrate having a reduced number of cracks and high processability, a method for manufacturing an epitaxial wafer, a Si(1-v-w-x)CwAlxNv substrate, and an epitaxial wafer. A method for manufacturing a Si(1-v-w-x)CwAlxNv substrate 10a includes the following steps. First, a Si substrate 11 is prepared. A Si(1-v-w-x)CwAlxNv layer (0<v<1, 0<w<1, 0<x<1, and 0<v+w+x<1) is then grown on the Si substrate at a temperature below 550° C.
    Type: Grant
    Filed: April 17, 2009
    Date of Patent: September 24, 2013
    Assignee: Sumitomo Electric Industries, Ltd.
    Inventors: Issei Satoh, Michimasa Miyanaga, Shinsuke Fujiwara, Hideaki Nakahata
  • Patent number: 8500905
    Abstract: Disclosed is a sapphire single crystal growing apparatus using the Kyropoulos method, and more particularly, is a Kyropoulos sapphire single crystal growing apparatus using an elliptic crucible, which can increase the recovery rate by the elliptic crucible and anisotropic heating.
    Type: Grant
    Filed: January 5, 2012
    Date of Patent: August 6, 2013
    Assignee: DK Aztec Co., Ltd.
    Inventor: Jong Kwan Park
  • Patent number: 8460462
    Abstract: Silicon single crystals are grown from the melt by providing the melt in a crucible; imposing a horizontal magnetic field on the melt; directing a gas between the single crystal and a heat shield to a melt free surface, and controlling the gas to flow over a region of the melt free surface extending in a direction substantially perpendicular to the magnetic induction. A suitable apparatus has a crucible for holding the melt; a heat shield surrounding the silicon single crystal having a lower end which is connected to a bottom cover facing a melt free surface and a non-axisymmetric shape with respect to a crucible axis, such that gas which is directed between the crystal and the heat shield to the melt free surface is forced to flow over a region of the melt which extends substantially perpendicular to the magnetic induction.
    Type: Grant
    Filed: April 23, 2010
    Date of Patent: June 11, 2013
    Assignee: Siltronic AG
    Inventor: Piotr Filar
  • Patent number: 8454746
    Abstract: Silicon single crystals are prepared from molten granules, by producing a first volume of molten silicon between a growing single crystal and the lower end of a silicon conical tube which is closed at its lower end, and encloses a central opening of a rotating silicon plate below which the tube extends, by means of a first induction heating coil arranged below the plate; producing a second volume of molten silicon by a second induction heating coil arranged above the plate; melting the lower end of the tube to form a passage for the second volume of molten silicon, the passage produced at a point in time when the second volume is not yet present or is less than double the volume of the first volume; and crystallizing monocrystalline silicon on the growing single crystal with consumption of molten silicon from the first and the second volume.
    Type: Grant
    Filed: January 18, 2011
    Date of Patent: June 4, 2013
    Assignee: Siltronic AG
    Inventors: Wilfried von Ammon, Ludwig Altmannshofer