Abstract: A charged particle beam exposure method deflects a charged particle beam in a deflection system which includes electromagnetic deflection coils and an electromagnetic lens. The charged particle beam exposure method includes controlling the deflection system based on deflection data, and blocking heat radiation from at least the electromagnetic deflection coils by a partition so as to prevent the heat radiation from reaching the electromagnetic lens and to prevent heat conduction to the electromagnetic lens by the partition.

Abstract: Wafer disk holds wafers in position by centrifugal force and its rotating shaft is supported by a bearing capable of magnetic levitation that has a thrust bearing and radial bearings. An annular groove providing a heat radiating zone is formed under the wafer receiving faces of the wafer disk. A cooling plate cooled to a temperature not exceeding the temperature of liquid nitrogen is inserted into the groove in a contactless manner so that the wafer disk is cooled by heat radiation. In the absence of any area of physical contact in the mechanisms for axially supporting and cooling the wafer disk, ions can be implanted in low dose into wafers on the fast rotating disk while improving the quality of wafers after implantation. Further, no triboelectricity will develop, thereby contributing to an improvement in the precision of ion beam current measurement.

Abstract: A reference grid for use in charged particle beam spectroscopes in analyzing an impurity contained in a target sample, which includes a grid composed of a material free of the impurity.

Abstract: A charged particle beam exposure apparatus is provided with a source for irradiating a charged particle beam on an object which has a position detection mark provided thereon and is carried on a movable stage, a deflection part for deflecting the charged particle beam based on deflection signals, a first detection part for detecting the position detection mark of the object, a second detection part for detecting a stage position of the object and for outputting a position detection signal, a moving part for moving the stage which carries the object, and a control unit for controlling inputs and outputs of the source, the deflection part, the first and second detection parts and the moving part.

Abstract: An optical information recording and reproducing apparatus for recording information pits on an information track by irradiating a light beam focused into a fine spot onto the information track of an optical information recording and reproducing medium, includes a device for forming a plurality of recording light spots on the information track transversely to the information track.

Abstract: There is disclosed an electron shower apparatus which eliminates the adverse effect of a magnetic field on electrons and which provides electrons in sufficient quantity when primary electrons having low energy are employed. In the apparatus, the magnetic field generated by a filament current is decreased or eliminated by pulsing the filament current or by passing a current opposite in direction to the filament current in the vicinity of the filament current.

Abstract: An optical pickup device includes an optical isolator provided in a beam path of an optical system for modulating the laser beam radiated from an end face of a semiconductor laser device and returning it to an end face of the semiconductor laser device, and a detector for detecting changes in an output of the return beam from the other face of the semiconductor laser device. The optical isolator transmits a beam component having the same plane of polarization as that of the laser beam. The magneto-optical recording medium may be reproduced by an optical system without employing a differential optical system.

Abstract: A bending, and position, sensor is composed of a fiber optic or light wave guide, for attachment to the member which is to be bent, or displaced. Light is injected at one end and detected at the other end. Bending of the fiber results in light loss through a surface strip or band, along one side of the fiber, this loss being detected. The loss of light detection is used to produce indication of bending or displacement. Two or more light guides can be oriented to give indication of direction of bending, or displacement.

Abstract: Primary molecules are formed by sublimation in a sublimation chamber (2), they are then transferred at a transfer flow-rate to a decomposition head (10) at a higher temperature, and they are transformed therein into secondary molecules that are lighter in weight to form molecular beams (16). In accordance with the invention, the transfer flow-rate is adjusted by adjusting an effective vector flow-rate which is the vector flow-rate of a vector gas inserted into the sublimation chamber via a feed tube (26) and sucked out via a suction tube (30). The invention applies, in particular, to making III-V type semiconductor components by molecular beam epitaxy.

Abstract: A low pass filter for use in an image band pass filter of a photoelectron spectromicroscope incorporating a virtual potential surface for reflecting electrons below a particular energy and a special charged particle trap or super dump for unwanted electrons. The filter construction with the super dump reduces the proportion of elastically and inelastically scattered high energy electron escaping the filter.

Abstract: A magneto-optical disk has a recording layer whereon recorded bits are formed by the magnetic field modulation method and a readout layer whose axis of easy magnetization is parallel to the recording layer at room temperature, and varies to be perpendicular to the recording layer within a predetermined temperature range between room temperature and the Curie temperature. During reproduction of the recorded bits the first semiconductor laser emits a heating-use light beam to form the first light spot on the readout layer Thus, a ring-shaped region corresponding to the predetermined temperature range exhibits perpendicular magnetic anisotropy and the recorded bits are copied from the recording layer onto the ring-shaped region. As the first light spot is shifted, the ring-shaped region as a readout window of recorded bits is also shifted.

Abstract: A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on opposite sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on outer surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer protrude outward more than each end of the second and third electrode layers. A scanning tunneling microscope comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen.

Abstract: An optical recording/ reproducing method which is characterized by irradiating a magnetic material having a perpendicular anisotropy with a laser beam to cause a change in the perpendicular anisotropy in the magnetic material to a non-perpendicular anisotropy thereby to record information; and by reproducing the information by detecting a change in a magneto-optic effect such as the Kerr effect. Also disclosed are an optical recording material and an optical recording device for use in the optical recording/reproducing method.

Abstract: A method and apparatus for making predistorted masks or reticles which compensate for lens field errors for use in the fabrication of integrated circuit devices. The lens error is first expressed as distortion data. The data is used to produce correction terms which are applied to an interferometrically controlled stage which positions the mask or reticle beneath a writing tool. When the predistorted mask or reticle is used in conjunction with the lens for which the distortion data was obtained, an integrated circuit device is produced which does not incorporate the lens field errors.

Abstract: The invention is directed to an optical instrument comprising a housing and at least one optical assembly enclosed by said housing and mounted on a stage plate. The stage plate is supported on the base plate with the aid of supporting means which guarantees on the one hand a precise fixing of the stage plate compared to the base plate and thus the housing, and on the other hand allows the base plate to distort by whatever attacks without a transfer to the stage plate. There are three supporting structures of different kinds which fix three different points in a special way. Upon the disconnection of the third supporting structure the stage plate can be lifted like a lid around an axis which is the middle axis of the first and second supporting structure.

Abstract: An optical recording system having a laser for generating a light beam to write data to and read data from a storage medium, an RF modulator for modulating the laser to improve its stability, and an apparatus for driving the laser. The apparatus is comprised of a transistor coupled to the laser for supplying current to the laser. An amplifier is implemented to drive the base of the transistor according to a microprocessor. Thereby, the microprocessor effectively controls the power level of the laser. The transistor and the RF modulator are enclosed within shielding to contain the RF energy being generated by the modulator. In addition, the collector-base separation of the transistor reduces the RF energy being transmitted through the line driving the base of the transistor.

Abstract: Electric discharge gas is made into auxiliary plasma in an electron generating chamber and electrons in the generated auxiliary plasma are introduced into an ion generating chamber. Electrons collide with molecules of material gas in the ion generating chamber to generate primary plasma. Ions in the ion generating chamber are drawn out of the primary plasma through an opening of the ion generating chamber. A magnetic field is formed by electromagnets in order to bring the plasma in the ion generating chamber into a concentrated state. A control unit is provided to store data representing optimum magnetic field intensities for ions of different types involved. The control unit so controls current applied by the power supply for the electromagnets as to produce an optimum magnetic field intensity for the type of ions to be drawn.

Abstract: Before a signal is recorded on an optical disk, irradiations are made with plural light irradiation conditions of variable irradiation power or pulse width, optical conditions of irradiated portions are detected by detecting changes in the reflectivity or transmissivity or errors, and the optimum irradiation conditions are determined by comparing the detected results and the light irradiation conditions. In particular, by determining the optimum irradiation conditions in reference to the point where the change in reflectivity or transmissivity is greatest with respect to changes in the irradiation power, the optimum light irradiation conditions can be determined in a short time.

Abstract: A housing is provided for converting an electrospray into a desolvated ion stream for analysis. The housing is positioned between an electrospray device and an ion stream analytical device. The housing is heated and includes a passageway within which a moving electrospray is converted to the ion stream.

Abstract: The present invention provides a method of analyzing a gas sample for trace impurity concentration by atmospheric pressure ionization mass spectroscopy. In accordance with the present invention, moisture is removed from the gas sample before analysis by passing the gas sample through a dried bed of silica gel. The bed of silica gel is sufficiently dried so that remaining moisture present in the gas sample after passage through the bed is at a sufficiently low concentration such that the trace impurity concentration as analyzed by atmospheric ionization mass spectroscopy will not be effected by the remaining moisture.