Abstract: There are provided an element distribution observing method and an element distribution observing apparatus under utilization of core-loss electrons capable of restricting artifact caused by either a thickness or density of a specimen, or an occurrence of the artifact caused by a diffraction contrast. Electron beam intensities in a total three different energy-loss areas of two energy-loss areas not containing any core-loss electrons and one energy-loss area are calculated to attain an element distribution on the basis of the corresponding three energy-loss areas and an electron beam intensity.

Abstract: Collisional cooling of ions in mass spectrometry has been known for sometime. It is known that collisional cooling can promote focusing of ions along the axis of an ion guide. A similar technique has been used to enhance coupling of a pulsed ion source such as a MALDI source to a Time of Flight instrument. It is now realized that it is desirable to provide, immediately adjacent to a MALDI or other ion source, a low-pressure region to promote ionization conditions most favorable for the particular ion source. Then, with the ions released and free, the ions are subjected to relatively rapid collisional cooling in a high pressure region adjacent to the ionization region. This will dissipate excess of internal energy in the ions, so as to substantially reduce the incidence of metastable fragmentation of the ions. The ions can then be subjected to conventional mass analysis steps.

Abstract: The present invention relates to devices and methods for determining the masses of particles by measuring the time between a first event such as a sample (5) being ionized, (or a beam of electromagnetic radiation being scattered by a particle (15) and electromagnetic radiation scattered by said particle being detected by a detection means,) and a second event in which a beam (21) of electromagnetic radiation is scattered by a particle (15) from said ionized sample and electromagnetic radiation (25) from said beam (21) scattered by said particle (15) is detected by a detection means (11).

Abstract: A system for obtaining an image of a cross-sectional surface of a workpiece includes a shaped beam ion projection column oriented along a first axis. The ion projection column projects an image of an aperture on the workpiece surface, thereby excavating a portion of the surface and exposing a cross-sectional surface. Because the ion beam is not focused on the surface, a low brightness ion source can be used. A focused particle beam column, typically a scanning electron microscope, is oriented along a second axis that intersects the first axis at a selected angle. This focused particle beam column generates a particle beam that is used to image the cross-sectional surface exposed by the ion projection column.

Abstract: To prevent the displacement from an optical axis of a charged particle beam from being made independent of the direction (parallel to or perpendicular to the optical axis) of a magnetic field applied to a specimen, a system including an electron microscope and using a charged particle beam optical system is provided with a source of a charged particle beam, a condenser optical system, a specimen to be observed, a system for applying a magnetic field to the specimen, an imaging optical system and an image observation/recording apparatus, is provided with first and second charged particle beam deflection systems in order along a direction in which the charged particle beam travels between the condenser optical system and the specimen, is provided with third and fourth charged particle beam deflection systems in order between the specimen and the imaging lens system, and the quantity and the direction of the deflection of the charged particle beam by each deflection system and the intensity and the bearing of a

Abstract: A method for slowing and controlling a beam of charged particles includes the steps of superimposing at least one magnetic field on a mass and passing the beam through the mass and at least one magnetic field such that the beam and the mass slows but does not stop the particles. An apparatus for slowing and controlling a beam of charged particles includes a bending magnetic field superimposed on a focusing magnetic field within a mass.

Abstract: A portable and modular shielding system having various modular wall components that can be interconnect to form a custom designed wall configuration, wherein the resulting wall provides shielding from radiation at its joints of two adjacent modular wall components as well as along its entire length. The principal modular wall component has a main container being generally rectangular in shape and a connector container being an elongated cylinder having a cross section that is generally circular in shape and being integrally connected to the second end of the main container. The first end of the main container is concave in shape and adapted to correspond to the generally circular shape of the connector container. A shielding wall is formed by interconnecting a connector container of a first modular wall component into a first end of a second modular wall component. The main container and connector container are hollow and are adapted to be filled with a filler material.

Abstract: A mass sensor, in an exemplary embodiment, includes a housing that includes a first plate, a second plate, and a center portion positioned between the first and second plates. The mass analyzer also includes an ionizer a double focusing mass spectrometer, and an ion detector. The ionizer, the double focusing mass spectrometer, and the ion detector are located in a cavity in the housing. The double focusing mass spectrometer includes an electric sector energy analyzer that includes a first element located on an inside surface of the first plate, and a second element located on an inside surface of the second plate. The first and second elements are substantially concentric and congruent and have a circular arc shape. Each first and second element include a first boundary electrode, a second boundary electrode, and a continuous resistive material extending between the first and second boundary electrodes.

Abstract: An electron beam source comprises a source surface illuminated with a photon beam of adjustable intensity. The photon beam assists emission of electrons from the source surface due to a photo effect. An electric extraction field further assists in electron emission. Further, a heater is provided for further assisting in electron emission by a thermionic effect. An electron beam current is measured, and the intensity of the photon beam is adjusted based on the measured electron beam current.

Abstract: An ion mobility spectrometer system comprising: an ion mobility detector; a gas/vapor circulating system for the ion mobility detector into which samples of gases and vapors of interest may be drawn for detection by the ion mobility spectrometer; the circulating system comprising an ion mobility cell, means for drying and/or cleaning the circulating gases/vapors in the circulating system, a dopant source, and means for causing circulation of the gases/vapors within the circulating system; in which the dopant source and the means for drying and/or cleaning the circulating gases/vapors are combined, whereby the need for a physically separate dopant source for the system is obviated. The dopant source material may be combined with the material for drying and or cleaning the circulating gases/vapors.

Abstract: A device for guiding a charged particle beam comprising a first superconducting nano-channel. In one embodiment, the device comprises a superconducting nano-channel consisting essentially of a superconducting material in the form of a tube having a proximal end, a distal end, and a bend disposed between said proximal end and said distal end. In another embodiment, the device is formed by a substrate, a first area of superconducting material coated on the substrate and having a first edge, a second area of superconducting material coated on the substrate and having a second edge, the first edge of the first area of superconducting material and the second edge of the second area of superconducting material are substantially parallel. In another embodiment, the device comprises a superconducting nano-channel formed by a plurality of nano-scale superconducting rods disposed around a central region.

Abstract: A material defect evaluation apparatus using positron for evaluating the degree of deterioration of a specimen by measuring a positron lifetime after irradiating positron to the specimen, includes: a positron source, a positron detector and a &ggr;-ray detector, wherein, the positron source and the positron detector are arranged in a container through which a light is not transmitted, and, a positron transmitting window, through which position emanating from the positron source and transmitting through the positron detector is transmitted outward, is arranged to the container.

Abstract: One embodiment disclosed is an electron beam apparatus for examination of a specimen. The apparatus includes a photocathode source, an objective lens, a beam separator, and a projection lens. The photocathode source generates a primary electron beam with reduced energy spread. The low energy spread beam is focused onto the specimen by the objective lens. The beam separator separates a scattered electron beam from the primary electron beam, and the projection lens images the scattered electron beam. Software routines may analyze the image data for purposes of automated inspection or review.

Abstract: In the context of charged-particle-beam (CPB) microlithography systems, robotic manipulators are disclosed for conveying objects such as reticles and substrates simultaneously with performing exposures without causing significant perturbation of the charged particle beam. To such end, the subject manipulators comprise moving members that are made of substantially non-magnetic materials. As the moving members move in the vicinity of a magnetic field controlling exposure-beam trajectory, the beam trajectory is less affected by stray magnetic fields that otherwise would be generated if the moving members were made of magnetic materials. Hence, for better throughput, reticle and/or substrate conveyance can be conducted while exposures are being performed, without adversely affecting exposure accuracy.

Abstract: A field portable mass spectrometer system comprising a sample collector and a sample transporter. The sample transporter interfaces with the sample collector to receive sample deposits thereon. The system further comprises a time of flight (TOF) mass spectrometer. The time of flight mass spectrometer has a sealable opening that receives the sample transported via the sample transporter in an extraction region of the mass spectrometer. The system further comprises a control unit that processes a time series output by the mass spectrometer for a received sample and identifies one or more agents contained in the sample.

Abstract: A continuous time-of-flight mass spectrometer having an evacuated enclosure with means for generating an electric field located in the evacuated enclosure and means for injecting a sample material into the electric field. A source of continuous ionizing radiation injects ionizing radiation into the electric field to ionize atoms or molecules of the sample material, and timing means determine the time elapsed between arrival of a secondary electron out of said ionized atoms or molecules at a first predetermined location and arrival of a sample ion out of said ionized atoms or molecules at a second predetermined location.

Abstract: A hazardous material detection system that can suppress occurrence of contamination due to ionization. When a sensor detects that a test sample has entered an inspection region of an X-ray inspection device as a belt conveyor moves, a corona discharge power supply in a hazardous material detection device is turned on for a constant time, to introduce a gaseous sample containing a substance stuck to the test sample into the hazardous material detection device via a sucking section and gaseous sample introduction piping, in order to ionize the gaseous sample and analyze it at an analyzer, based on a result of which analysis, a data processor decides whether the gaseous sample contains a hazardous material, to display a decision result on a screen. When the test sample is detected by an exit side sensor, the corona discharge power supply is turned off.

Abstract: Disclosed is an apparatus for inspecting a sample. The apparatus includes a first electron beam generator arranged to direct a first electron beam having a first range of energy levels toward a first area of the sample and a second electron beam generator arranged to direct a second electron beam having a second range of energy levels toward a second area of the sample. The second area of the sample at least partly overlaps with the first area, and the second range of energy levels are different from the first range such that charge build up caused by the first electron beam is controlled.

Abstract: An apparatus and method for reducing noise and resonance detractors connected with and E beam tool. The invention provides a plurality of embodiments. In one embodiment, the E beam tool will be calibrated and the results will be then filtered to counter the effects of the noise afterwards. In an alternate embodiment of the present invention, a filter is applied in the actual feedback of the E beam tool for the writing cycle.

Abstract: A method and an apparatus for selectively transmitting ions produced by an inductively coupled plasma ionization technique is disclosed. Ions produced within the plasma source are provided to a FAIMS analyzer within a low pressure chamber of a mass spectrometer and in fluid communication with the plasma source for receiving ions therefrom. The ions are separated in FAIMS and at least some of the ions are provided to the mass spectrometer after separation.