Abstract: An apparatus to receive a response signal sent from a device under test. The apparatus includes pin electronics to identify a response signal contained in a composite signal. The composite signal is a composite, or sum, of the response signal and a test signal. The pin electronics has a driver to send the test signal to the device under test, and a receiver to receive the composite signal and to separate the response signal from the composite signal.

Abstract: Analyzing a swept spectrum signal formed by mixing a ramping local oscillator and an input signal to generate an IF signal, the resulting IF signal having a phase change with respect to the input signal, the phase change including a quadratic portion. For analysis, the IF signal is processed such that the quadratic component of the phase change is removed. The quadratic component of the phase change is removed with a complex filter.

Abstract: A distance measuring system (1) is provided with a capacitive sensor (7a, 7b), designed in the form of a differential capacitor (18), for which the partial capacitors (C1, C2 have capacitances that depend on the position to be determined. The system also includes a processing device (5) for determining the desired distance that contains, for example, a sigma/delta demodulator. The partial capacitors (C1, C2) are triggered periodically with binary signals, wherein the trigger signals from the one partial capacitor (C1) are transmitted with a phase offset to the signals from the other partial capacitor (C2). The processing device (5) determines which trigger signals must be used for the evaluation. Within time windows that are synchronized with the edges of the trigger signals, a switch unit (22) allows the associated receiving signals to pass through to the processing unit (5) and blanks out all other signals.

Abstract: A circuit and system for sensing and measuring the mutual capacitance between a sensor capacitor having one grounded lead and a target and providing a direct digital output of the measured capacitance is disclosed. The circuit and system includes a relaxation oscillator coupled to a sensor capacitor and a fixed resistor. The fixed resistor and the sensor capacitor in conjunction with the relaxation oscillator provide a time varying output signal that has a period that is proportional to the mutual capacitance of the sensor capacitor and a target and resistance of the fixed resistor. The circuit and system can also include circuitry to compensate for the input capacitance of one or more amplifiers used in the relaxation oscillator. The circuit and system can also include circuitry to effectively increase the resistance of the fixed resistor by a predetermined constant.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: A detecting device (1) is provided to detect signals from a sensing mat (2) including a plurality of sensing cells (R) electrically interconnected to each other in a matrix. Each sensing cell (R) is changeable in resistance with a change in a load to be applied. The detecting device (1) comprises a detecting circuit (Rp) and voltage applying means (5). The detecting circuit (Rp) detects a signal through a conversion of changes in the resistance to changes in voltage. When detecting a sensing cell (R11) connected to a specified line path (2a), the voltage applying means (5) applies a particular voltage to the remaining line paths (2a). The particular voltage is for example voltage of which potential is the same as a voltage detected from the selected sensing cell (R11). Applying the particular voltage prevents current from bypassing the other line paths irrelevant to the detection.

Abstract: The electromagnetic-wave-generating-source search method includes the steps of calculating a first electric field strength at a measuring point based on a current distribution belonging to an object to be measured; calculating a second electric field strength at said measuring point by employing the current distribution at a preselected position on said measuring object, the preselected position corresponding to a portion of the current distribution of said measuring object; and calculating a relative ratio of said first electric field strength with respect to said second electric field strength, thereby determining the source generating a remote electric field.

Abstract: A configuration for identifying contact faults during the testing of integrated circuits with a multiplicity of pins which protrude from a housing and are connected to respective pads on a semiconductor body of the integrated circuit. Pull-up or pull-down devices are connected between respective pads and input buffers and in each case hold the pads at a high or low potential by impressing a holding current, if contact has not been made with a pin associated with the pad during testing, the result being that activation of the circuit section connected to the pin is avoided.

Abstract: In a flame ionization sensor type gas combustion control apparatus, the sensor tip, or probe, exposed to the flame is constructed and arranged according to materials and shapes which promote mechanical deformation of the sensor due to thermal expansion and contraction. The mechanical deformation will cause cracks to open in the contaminant layers surrounding the probe, enabling the sensor to perform as intended even though insulative contaminant build up is present.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device includes sensors for detecting the parameters and converting them to sensor outputs and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also include an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: An apparatus for monitoring integrity of a wire is provided, which includes a TDR instrument for generating a pulse waveform for transmission through the wire. The apparatus also includes a function generator for generating a forcing waveform for transmission through the wire. The pulse waveform is transmitted through the wire by itself, and then in combination with the forcing waveform.

Abstract: A servo control calibration apparatus and method for correcting repeatable errors in position transducers is described. Unlike prior static direct measurement techniques or prior repetitive control techniques that correct error signals only within a low bandwidth, the present servo control calibration apparatus and method is done in-situ with the position transducer using a dynamic, closed loop servo operation. The present servo control calibration apparatus and method combine an in-situ error measurement and calibration device with a normal operation servo control closed-loop mechanism. In the calibration mode, the present servo control calibration apparatus and method measure the repeatable errors in a position transducer. Correction characteristics are stored and used in the normal operation of the servo control calibration apparatus and method to eliminate error from the control of the associated servo.

Abstract: A sensor device for registering voltage drops on corrosion exposed structures and coupled to a surface area thereof to which a voltage is supplied by electrodes causing an excitation current in that area and having a plurality of cables connected to a plurality of sensors arranged in a matrix defining measurement points with defined distances.

Abstract: A contact-type displacement sensor for detecting a displacement of an object to be detected based on a change in a resistance value includes a resistor having a surface to be slid, a slider which slides on the surface to be slid in a predetermined direction in accordance with a displacement of the object to be detected, and an irregular pattern formed on the surface to be slid and including convex portions and concave portions continuously formed along a direction crossing or perpendicular to a sliding direction of the slider.

Abstract: An apparatus for evaluating an associated semiconductor sample having two electrically distinct regions with a junction region disposed therebetween includes a laser for injecting carriers into a sample region, an electrical bias for impressing electrical fields on the sample, and a detector for detecting luminescence. A second laser is provided for injecting carriers into a second sample region opposite the first region. A method includes the steps of: optically generating carriers in a region, generating a drift field in the region that effectuates carrier drift toward the junction, and measuring the optical radiation generated by carrier recombination in the junction region. Preferably, the method also includes optically generating carriers in a second region and generating a drift field in the second region that effectuates carrier drift toward the junction. Typically, the two drift fields are generated together by applying voltage between the two regions.

Abstract: In an embodiment of the present invention, an automated diagnostic tester system is configured for use with a lighting fixture connected to a power source and including at least one of a ballast connected to the power source, a capacitor connected to the ballast, an ignitor, and a high intensity discharge lamp connected to the ballast. The tester system includes an electrical connector system capable of being interconnected as part of the lighting fixture, providing circuit access at least to the power source and to the high intensity discharge lamp. This enables interruption of at least one of (i) the connection of the ballast to the power source and (ii) the connection of the high intensity discharge lamp to the ballast.

Abstract: An apparatus and method for obtaining a measurement of various qualities of an electrochemical cell. The apparatus includes first and second electrodes and an excitation source for providing a time varying excitation voltage to the first electrode. The excitation voltage is switched between two voltage levels with the first and second voltages alternately applied to the first electrode for predetermined times. An external capacitance is connected between the second electrode and ground. The apparatus is capable of determining the time related rates at which electrical charge is transferred from the first electrode to charge the external capacitance. These rates, here termed Transient Immitivity Response (TIR), may be provided as a digital or analog output.

Abstract: A circuit configuration includes a load transistor having a control terminal, a first load path terminal connected to a first supply potential, and a second load path terminal connected a load. A load current flows between the first load path terminal and the second load path terminal. The circuit configuration further includes a current measuring configuration connected to the load transistor, the current measuring configuration having an output for providing a measuring current between the output of the current measuring configuration and a second supply potential. The current measuring configuration provides the measuring current such that the measuring current and the load current have opposite signs and such that the absolute value of the measuring current is proportional to the absolute value of the load current.

Abstract: A method for determining flow velocities conducts an electromagnetic signal through a fluid flowing in a delivery line and additionally conducts the electromagnetic signal in a spatially delayed manner. A velocity, a velocity profile, and a volumetric fraction of each of the components of the fluid interacting with the electromagnetic wave is determined from a Doppler shift between the original electromagnetic signal and a resulting electromagnetic signal. An apparatus for determining flow velocities is also provided.

Abstract: An integrated circuit includes analog test cells to determine if an analog signal is within a predetermined voltage or current range. The test cell uses one or more analog reference signals to establish boundaries of a test range. Different embodiments of the analog test cells selectively test multiple analog signals provided in an integrated circuit. A test system can be provided to test multiple analog signals of an integrated circuit by scanning multiple analog test cells distributed throughout the integrated circuit and providing the test data for analysis. An analog circuit of an integrated circuit can be tested at different stages in manufacturing, including during a wafer stage prior to separation of individual circuit dice. Further, analog circuitry can be tested and characterized without the need for analog or digital/analog testers. In contrast, a digital only tester can be used to test analog circuitry.