Patents Examined by Jason L McCormack
  • Patent number: 11898975
    Abstract: The electron spectrometer includes an excitation part 100 irradiating a sample with an energy beam, an orbiting part 10 causing electrons emitted from the sample irradiated with the energy beam to orbit, and a detection part 120 detecting the electrons released from the orbiting part 10, in which the orbiting part 10 includes a plurality of pairs of electrodes, the plurality of pairs of electrodes cause the electrons to orbit when an applied voltage is controlled, a part of the plurality of pairs of electrodes are pairs of electrodes to catch which catch the electrons into the orbiting part 10 when an applied voltage is controlled, and a part of the plurality of pairs of electrodes are pairs of electrodes to release which release the electrons from the orbiting part 10 when an applied voltage is controlled.
    Type: Grant
    Filed: February 23, 2022
    Date of Patent: February 13, 2024
    Assignee: TOHOKU UNIVERSITY
    Inventors: Masahiko Takahashi, Isao Nakajima, Yuuki Onitsuka
  • Patent number: 11901155
    Abstract: The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.
    Type: Grant
    Filed: August 3, 2021
    Date of Patent: February 13, 2024
    Assignee: FEI Company
    Inventors: Mykola Kaplenko, Remco Schoenmakers, Oleksii Kaplenko, Ondrej Machek
  • Patent number: 11896726
    Abstract: Provided herein are various enhanced techniques for ultraviolet decontamination via emission of ultraviolet radiation and tracking emission exposure. An example method includes obtaining an emission characteristic for a radiation source. The method also includes capturing a depth map of a scene comprised of one or more objects and processing the depth map and an emission characteristic to determine an indication of exposure levels of the one or more objects to radiation emitted by the radiation source. An exposure visualization is generated based at least on the indication of exposure levels and displaying the exposure visualization.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: February 13, 2024
    Assignee: Lockheed Martin Corporation
    Inventors: Nicolas James Deshler, James G. Hawley, Donald George Polensky
  • Patent number: 11898022
    Abstract: Aerogel can be coated with a polymerizable resin, which cures to form a polymer-coated aerogel. The coated aerogels can be used structural or thermal insulating component, such as in analytical and scientific devices. Coated aerogels can be further coated with conductive material, a semi-conductive material, a non-conductive material, a resistive material, or a combination thereof.
    Type: Grant
    Filed: November 8, 2019
    Date of Patent: February 13, 2024
    Assignee: Viken Detection Corporation
    Inventors: Hanh Lai, Brandon Chiou
  • Patent number: 11896991
    Abstract: Systems and methods are described for automatically adjusting the composition of a spray chamber matrix gas flow coordinated with an analysis of a particular chemical element or groups of elements. A system can include a spray chamber configured to be coupled to an analytical system, the spray chamber having a nebulizer gas port configured to receive a nebulizer gas; and an inlet for receiving a gas from at least one gas source. The system also includes a controller operably coupled to the spray chamber, the controller configured to adjust a gas flow rate of the gas from the at least one gas source in coordination with analysis of a particular chemical element by the analytical system.
    Type: Grant
    Filed: September 3, 2019
    Date of Patent: February 13, 2024
    Assignee: Elemental Scientific, Inc.
    Inventors: Daniel R. Wiederin, Kevin Wiederin
  • Patent number: 11887809
    Abstract: Computer-implemented methods for controlling a charged particle microscopy system include estimating a drift of a stage of the charged particle microscopy system based on an image sequence, and automatically adjusting a stage settling wait duration based on the drift estimate. Charged particle microscopy systems include an imaging system, a movement stage, and a processor and memory configured with computer-executable instructions that, when executed, cause the processor to estimate a stage settling duration of the movement stage based on an image sequence obtained with the imaging system, and automatically adjust a stage settling wait duration for the movement stage based on the stage settling duration.
    Type: Grant
    Filed: January 24, 2022
    Date of Patent: January 30, 2024
    Assignee: FEI Company
    Inventors: Yuchen Deng, Erik Franken, Bart van Knippenberg, Holger Kohr
  • Patent number: 11874251
    Abstract: An ion mass spectrometer that has an ion channel shaped to modify the speed of a carrier gas as the carrier gas traverses the ion channel. In one case, the ion channel has a tapered shape, which continuously varies the gas flow rate. This arrangement is made using conductors located in the drift tube. This controlled variation in speed together with the control of the axial electric field in the ion channel, provide greater control on the separation of ions in the ion channel. A method of analyzing ions based on a variation of at least one of axial electric field and of the speed of the flowing gas in the ion channel is also disclosed.
    Type: Grant
    Filed: September 8, 2022
    Date of Patent: January 16, 2024
    Assignee: JP SCIENTIFIC LIMITED
    Inventors: Scott Hopkins, Janusz B. Pawliszyn
  • Patent number: 11869745
    Abstract: An object of the invention is to provide a charged particle beam device capable of increasing the contrast of an observation image of a sample as much as possible in accordance with light absorption characteristics that change for each optical parameter. The charged particle beam device according to the invention changes an optical parameter such as a polarization plane of light emitted to the sample, and generates the observation image having a contrast corresponding to the changed optical parameter. An optical parameter that maximizes a light absorption coefficient of the sample is specified according to a feature amount of a shape pattern of the sample (refer to FIG. 5).
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: January 9, 2024
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Minami Shouji, Natsuki Tsuno, Hiroya Ohta, Daisuke Bizen
  • Patent number: 11854762
    Abstract: The present invention provides a MEMS sample holder comprising an observation section. The observation section includes a first layer, a second layer, and a sample compartment between the first layer and the second layer. The sample compartment is configured for filling a liquid sample and observing the liquid sample filled therewithin. The sample compartment has one, two or more windows through which an electron beam can pass. Each of the windows is formed on two cavities including a first cavity on the first layer and a second cavity on the second layer that is opposite to the first cavity across the sample compartment.
    Type: Grant
    Filed: February 16, 2023
    Date of Patent: December 26, 2023
    Assignee: BORRIES PTE. LTD.
    Inventors: Wei Fang, Xiaoming Chen, Daniel Tang, Liang-Fu Fan, Zhongwei Chen
  • Patent number: 11852598
    Abstract: A material identification system includes one or more data interfaces configured to receive first sensor data generated by a first sensor responsive to a material sample, and receive second sensor data generated by a second sensor responsive to the material sample. The material identification system also includes one or more processors configured to generate a set of predictions of an identification of the material sample and a corresponding set of certainty information.
    Type: Grant
    Filed: October 23, 2019
    Date of Patent: December 26, 2023
    Assignee: Battelle Energy Alliance, LLC
    Inventor: Jeffery A. Aguiar
  • Patent number: 11854763
    Abstract: The present invention provides a backscattered electron (BSE) detector comprising two or more detection components that are electrically isolated from each other. Each of the detection components includes a single continuous top metal layer configured for directly receiving incident backscattered electrons and for backscattered electron to penetrate therethrough. The thickness of one of the top metal layers is different from the thickness of another one of the top metal layers. The BSE detector can be used in an apparatus of charged-particle beam for imaging a sample material. Signals from the detection components having top metal layers of different thicknesses can be inputted into different signal amplifier circuits to get different energy bands of BSE image.
    Type: Grant
    Filed: October 14, 2022
    Date of Patent: December 26, 2023
    Assignee: BORRIES PTE. LTD.
    Inventors: Wei Fang, Xiaoming Chen, Daniel Tang, Liang-Fu Fan, Zhongwei Chen
  • Patent number: 11854778
    Abstract: A method for the identification and localization of small molecule species in a histologic thin tissue section comprises the steps of: a) acquiring a mass/mobility image of the tissue section and generating a mass/mobility map of the small molecule species of interest for each pixel of the image; b) providing a second sample of the same tissue and extracting the small molecules of interest, separating them, and acquiring mass and ion mobility spectra from the separated small molecules; c) identifying the small molecules of interest using corresponding reference databases; and d) assigning identified small molecules to entries in the mass/mobility maps of the first tissue section by comparison of ion masses and mobilities of the identified species to those of the second thin tissue section.
    Type: Grant
    Filed: January 3, 2023
    Date of Patent: December 26, 2023
    Inventor: Michael Easterling
  • Patent number: 11848172
    Abstract: The present invention relates to a method for measuring a sample with a microscope, the method comprising scanning the sample using a focusing plane having a first angle with respect to a top surface of the sample and computing a confidence distance based on the first angle. The method further comprises selecting at least one among a plurality of alignment markers on the sample for performing a lateral alignment of the scanning step and/or for performing a lateral alignment of an output of the scanning step. In particular, the at least one alignment marker selected at the selecting step is chosen among the alignment markers placed within the confidence distance from an intersection of the focusing plane with the top surface.
    Type: Grant
    Filed: November 9, 2021
    Date of Patent: December 19, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Dmitry Klochkov, Chuong Huynh, Thomas Korb, Alex Buxbaum, Amir Avishai
  • Patent number: 11848171
    Abstract: Provided is a charged particle beam device and a charged particle beam device calibration method capable of correcting an influence of characteristic variation and noise with high accuracy. Control units execute a first calibration of correcting a characteristic variation between a plurality of channels in detectors and signal processing circuits by using a setting value of a control parameter for each of the plurality of channels in a state in which a primary electron beam is not emitted. The control units further execute a second calibration of correcting a characteristic variation between the plurality of channels in scintillators or the like by using the setting value of the control parameter for each of the plurality of channels in a state in which the primary electron beam is emitted.
    Type: Grant
    Filed: January 28, 2022
    Date of Patent: December 19, 2023
    Assignee: HITACHI HIGH-TECH CORPORATION
    Inventors: Akio Yamamoto, Wen Li, Hiroshi Oinuma, Shunsuke Mizutani
  • Patent number: 11842880
    Abstract: An aberration value estimator has a learned estimation model for estimating an aberration value set based on a Ronchigram. In a machine learning sub-system, a simulation is repeatedly executed while changing a simulation condition, and calculated Ronchigrams are generated in a wide variety and in a large number. By machine learning using the calculated Ronchigrams, the learned estimation model is generated.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: December 12, 2023
    Assignee: JEOL Ltd.
    Inventors: Ryusuke Sagawa, Shigeyuki Morishita, Fuminori Uematsu, Tomohiro Nakamichi, Keito Aibara
  • Patent number: 11842892
    Abstract: Ions are injected into an orbital electrostatic trap. An ejection potential is applied to an ion storage device, to cause ions stored in the ion storage device to be ejected towards the orbital electrostatic trap. Synchronous injection potentials are applied to a central electrode of the orbital electrostatic trap and a deflector electrode associated with the orbital electrostatic trap, to cause the ions ejected from the ion storage device to be captured by the electrostatic trap such that they orbit the central electrode. Application of the ejection potential and application of the synchronous injection potentials are each started at respective different times, the difference in times being selected based on desired values of mass-to-charge ratios of ions to be captured by the orbital electrostatic trap.
    Type: Grant
    Filed: April 19, 2022
    Date of Patent: December 12, 2023
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Mikhail Belov, Eduard Denisov, Gregor Quiring, Dmitry Grinfeld
  • Patent number: 11837432
    Abstract: A portable, compact gas delivery system can support an environmental transmission electron microscope. Environment transmission electron microscopy provides researchers a unique capability of assessing a material's surface conditions at atomic resolution in a variety of reactive and oxidizing environments. The ability to precisely control the analysis chamber's environmental conditions over time is key to the success of a typical surface analysis. The gas delivery system provides the correct balance or pressure delivery precision, contamination control, and gas isolation.
    Type: Grant
    Filed: November 25, 2020
    Date of Patent: December 5, 2023
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventors: John Joseph Nogan, Katherine Leigh Jungjohann, Raymond Vernon Puckett
  • Patent number: 11837455
    Abstract: The invention generally relates to sample analysis systems and methods of use thereof. In certain aspects, the invention provides a system for analyzing a sample that includes an ion generator configured to generate ions from a sample. The system additionally includes an ion separator configured to separate at or above atmospheric pressure the ions received from the ion generator without use of laminar flowing gas, and a detector that receives and detects the separated ions.
    Type: Grant
    Filed: June 3, 2022
    Date of Patent: December 5, 2023
    Assignee: Purdue Research Foundation
    Inventors: Robert Graham Cooks, Zane Baird, Pu Wei
  • Patent number: 11837433
    Abstract: A method of measuring a relative rotational angle includes: shifting an electron beam on a specimen plane by using a deflector; tilting the electron beam with respect to the specimen plane by using the deflector; acquiring a first STEM image including information of a scattering azimuth angle and a second STEM image not including the information of the scattering azimuth angle, before the shifting and the tilting; acquiring a third STEM image including the information of the scattering azimuth angle and a fourth STEM image not including the information of the scattering azimuth angle, after the shifting and the tilting; and obtaining the relative rotational angle based on the first STEM image, the second STEM image, the third STEM image and the fourth STEM image.
    Type: Grant
    Filed: February 11, 2022
    Date of Patent: December 5, 2023
    Assignee: JEOL Ltd.
    Inventor: Akiho Nakamura
  • Patent number: 11823862
    Abstract: The present disclosure is related to a Schottky thermal field emission (TFE) source for emitting an electron beam. Exemplary embodiments can provide the acquisition of high-resolution emission images of Schottky TFE source and compute usable beam current and brightness based on experimentally developed usable current criteria. Advantages of these exemplary embodiments include: (1) obtaining usable beam current and brightness of a Schottky TFE source can be important with reference to Schottky TFE development and quality inspection, and (2) optimizing Schottky TFE operation modes so as to maximize Schottky TFE usable beam current and brightness can enable operation of multi-beam electron optical tools.
    Type: Grant
    Filed: December 29, 2021
    Date of Patent: November 21, 2023
    Assignees: NuFlare Technology, Inc., NuFlare Technology America, Inc.
    Inventors: Victor Katsap, Chising Lai