Patents Examined by John M. Parker
  • Patent number: 11515254
    Abstract: A semiconductor chip may include: a body portion including a front surface and a back surface; penetrating electrodes penetrating the body portion; and back connection electrodes disposed over the back surface of the body portion and connected to the penetrating electrodes, wherein the penetrating electrodes include a power penetrating electrode for transmitting a power voltage and a ground penetrating electrode for transmitting a ground voltage, the back connection electrodes include a power back connection electrode connected to the power penetrating electrode and a ground back connection electrode connected to the ground penetrating electrode, and one power back connection electrode is connected with two or more power penetrating electrodes, and one ground back connection electrode is connected with two or more ground penetrating electrodes.
    Type: Grant
    Filed: November 3, 2020
    Date of Patent: November 29, 2022
    Assignee: SK hynix Inc.
    Inventors: Ki Bum Kim, Bok Kyu Choi
  • Patent number: 11508615
    Abstract: A semiconductor device structure, along with methods of forming such, are described. The semiconductor device structure includes a device, a conductive structure disposed over the device, and the conductive structure includes a sidewall having a first portion and a second portion. The semiconductor device structure further includes a first spacer layer including a third portion and a fourth portion, the third portion surrounds the first portion of the sidewall, and the fourth portion is disposed on the conductive structure. The semiconductor device structure further includes a first dielectric material surrounding the third portion, and an air gap is formed between the first dielectric material and the third portion of the first spacer layer. The first dielectric material includes a first material different than a second material of the first spacer layer, and the first dielectric material is substantially coplanar with the fourth portion of the first spacer layer.
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: November 22, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Lin-Yu Huang, Li-Zhen Yu, Chia-Hao Chang, Cheng-Chi Chuang, Kuan-Lun Cheng, Chih-Hao Wang
  • Patent number: 11508813
    Abstract: Techniques are disclosed for forming column IV transistor devices having source/drain regions with high concentrations of germanium, and exhibiting reduced parasitic resistance relative to conventional devices. In some example embodiments, the source/drain regions each includes a thin p-type silicon or germanium or SiGe deposition with the remainder of the source/drain material deposition being p-type germanium or a germanium alloy (e.g., germanium:tin or other suitable strain inducer, and having a germanium content of at least 80 atomic % and 20 atomic % or less other components). In some cases, evidence of strain relaxation may be observed in the germanium rich cap layer, including misfit dislocations and/or threading dislocations and/or twins. Numerous transistor configurations can be used, including both planar and non-planar transistor structures (e.g., FinFETs and nanowire transistors), as well as strained and unstrained channel structures.
    Type: Grant
    Filed: September 18, 2020
    Date of Patent: November 22, 2022
    Assignee: Daedalus Prime LLC
    Inventors: Glenn A. Glass, Anand S. Murthy
  • Patent number: 11502058
    Abstract: A hybrid wafer bonding method includes providing a first semiconductor structure and providing a second semiconductor structure. The first semiconductor structure includes a first substrate, a first dielectric, and a first via structure. The first via structure includes a first contact via and first metal impurities doped in the first contact via. The second semiconductor structure includes a second substrate, a second dielectric layer, and a second via structure. The second via structure includes a second contact via and second metal impurities doped in the second contact via. The method further includes bonding the first semiconductor structure with the second semiconductor and forming a self-barrier layer by an alloying process. The self-barrier layer is formed by a multi-component oxide corresponding to the first and second metal impurities.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: November 15, 2022
    Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
    Inventor: Meng Yan
  • Patent number: 11502031
    Abstract: An apparatus is provided, which includes a stack of a first plurality of layers interleaved with a second plurality of layers. In an example, the first plurality of layers includes conductive material, and the second plurality of layers includes insulating material. In an example, the first plurality of layers includes an upper layer and lower layer. A first via may extend through at least a portion of the stack, where the first via may be in contact with the upper layer and the lower layer. A second via may extend through at least a portion of the stack, where the second via may be isolated from the upper layer and lower layer.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: November 15, 2022
    Assignee: Intel Corporation
    Inventor: Kevin Lin
  • Patent number: 11495773
    Abstract: A display device includes a bending area at which the display device is bendable; an organic light emitting element disposed on the substrate; an encapsulation layer covering an upper surface and a side surface of the organic light emitting element; and a bending area protection layer covering the bending area of the substrate. The upper surface of the encapsulation layer includes a nano structure defined by nano sized protrusions and depressions of the upper surface, and along the substrate, and the bending area is disposed separated from the encapsulation layer.
    Type: Grant
    Filed: September 14, 2020
    Date of Patent: November 8, 2022
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Seung Wook Kwon, Woo Yong Sung, Hyoung Sub Lee
  • Patent number: 11488907
    Abstract: The present application discloses a semiconductor device and a method for fabricating the semiconductor device. The semiconductor device includes a substrate, a first conductive layer positioned above the substrate, a bottom conductive layer positioned above the first conductive layer and electrically coupled to the first conductive layer, a programmable insulating layer positioned on the bottom conductive layer, a top conductive layer positioned on the programmable insulating layer, and a redistribution structure positioned above the first conductive layer and electrically coupled to the first conductive layer. The bottom conductive layer, the programmable insulating layer, and the top conductive layer together configure a programmable unit.
    Type: Grant
    Filed: November 30, 2020
    Date of Patent: November 1, 2022
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Te-Yin Chen
  • Patent number: 11462477
    Abstract: An interconnect structure and an electronic apparatus including the interconnect structure are provided. The interconnect structure includes a conductive layer; a dielectric layer configured to surround at least a part of the conductive layer; and a diffusion barrier layer disposed between the conductive layer and the dielectric layer and configured to limit and/or prevent a conductive material of the conductive layer from diffusing into the dielectric layer, and at least one of the dielectric layer and the diffusion barrier layer includes a boron nitride layer of a low dielectric constant.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: October 4, 2022
    Assignees: Samsung Electronics Co., Ltd., UNIST (Ulsan National Institute of Science and Technology)
    Inventors: Hyeonjin Shin, Minhyun Lee, Changseok Lee, Hyeonsuk Shin, Seokmo Hong
  • Patent number: 11456262
    Abstract: An integrated circuit and method of making an integrated circuit is provided. The integrated circuit includes a substrate having an electronic component. A substrate-based coil is on the substrate and the substrate-based coil is electrically coupled to the electronic component. A magnetic mold compound encapsulates the substrate-based coil and the electronic component.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: September 27, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Yuki Sato, Kenji Otake, Takafumi Ando, Jeffrey Morroni, Charles Allen Devries, Jr., Kristen Nguyen Parrish
  • Patent number: 11450602
    Abstract: The present disclosure provides a method for forming semiconductor structures. The method includes providing a device having a substrate, a first dielectric layer over the substrate, and a first conductive feature over the first dielectric layer, the first conductive feature comprising a first metal, the first metal being a noble metal. The method also includes depositing a second dielectric layer over the first dielectric layer and covering at least sidewalls of the first conductive feature; etching the second dielectric layer to form a trench; and forming a second conductive feature in the trench. The second conductive feature comprises a second metal different from the first metal.
    Type: Grant
    Filed: April 1, 2020
    Date of Patent: September 20, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Kang Fu, Ming-Han Lee, Shau-Lin Shue
  • Patent number: 11443958
    Abstract: A leadframe includes a die pad and a set of electrically conductive leads. A semiconductor die, having a front surface and a back surface opposed to the front surface, is arranged on the die pad with the front surface facing away from the die pad. The semiconductor die is electrically coupled to the electrically conductive leads. A package molding material is molded over the semiconductor die arranged on the die pad. A stress absorbing material contained within a cavity delimited by a peripheral wall on the front surface of the semiconductor die is positioned intermediate at least one selected portion of the front surface of the semiconductor die and the package molding material.
    Type: Grant
    Filed: December 1, 2020
    Date of Patent: September 13, 2022
    Assignees: STMicroelectronics S.r.l., STMicroelectronics (Malta) Ltd
    Inventors: Roseanne Duca, Dario Paci, Pierpaolo Recanatini
  • Patent number: 11437313
    Abstract: A method of forming a semiconductor device includes forming a conductive feature and a first punch stop layer, where the conductive feature has a first top surface, and where the first punch stop layer has a second top surface that is substantially level with the first top surface. The method further includes forming a resistive element over the first punch stop layer. The method further includes etching through a first portion of the resistive element to form a first trench that exposes both the second top surface of the first punch stop layer and a first sidewall surface of the resistive element. The method further includes forming a first conductive via within the first trench, where the first conductive via contacts the first sidewall surface of the resistive element.
    Type: Grant
    Filed: December 3, 2020
    Date of Patent: September 6, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hong-Wei Chan, Yung-Shih Cheng, Wen-Sheh Huang
  • Patent number: 11437435
    Abstract: Semiconductor devices with on-pitch vias, and associated systems and methods, are disclosed herein. In one embodiment, the semiconductor device may include a 3-dimensional (3D) cross-point memory array. The semiconductor device also includes access lines for the memory array, which couple with on-pitch vias connected to CMOS circuitry disposed underneath the memory array. In some embodiments, a first access line may be coupled with a first via outside a boundary of the memory array, where the first via is separated from the boundary by a first distance and has a first length longitudinal to the first access line. Further, a second access line may be coupled with a second via outside the boundary, where the second via is separated from the boundary by a second distance greater than the first distance and has a second length longitudinal to the second access line, the second length different from the first length.
    Type: Grant
    Filed: August 3, 2020
    Date of Patent: September 6, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Hongqi Li, James A. Cultra
  • Patent number: 11430708
    Abstract: A package structure and a circuit layer structure are provided in the present disclosure. The package structure includes a wiring structure, a first electronic device, a second electronic device and at least one dummy trace. The wiring structure includes a plurality of interconnection traces. The first electronic device and the second electronic device are disposed on the wiring structure, and electrically connected to each other through the interconnection traces. The dummy trace is adjacent to the interconnection traces. A mechanical strength of the at least one dummy trace is less than a mechanical strength of one of the interconnection traces.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: August 30, 2022
    Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.
    Inventor: Wen-Long Lu
  • Patent number: 11430735
    Abstract: A multi-layer device comprising a barrier or adhesion layer located on a portion of a first top surface of a first layer, a conductive metal layer located on barrier or adhesion layer; and a dielectric layer located on top of the first layer, wherein the dielectric layer is in direct contact with the sidewall of the conductive metal layer.
    Type: Grant
    Filed: February 14, 2020
    Date of Patent: August 30, 2022
    Assignee: International Business Machines Corporation
    Inventors: Brent Alan Anderson, Nicholas Anthony Lanzillo, Christopher J. Penny, Lawrence A. Clevenger, Kisik Choi, Robert Robison
  • Patent number: 11430692
    Abstract: An opening is formed through a dielectric material layer to physically expose a top surface of a conductive material portion in, or over, a substrate. A metallic nitride liner is formed on a sidewall of the opening and on the top surface of the conductive material portion. A metallic adhesion layer including an alloy of copper and at least one transition metal that is not copper is formed on an inner sidewall of the metallic nitride liner. A copper fill material portion may be formed on an inner sidewall of the metallic adhesion layer. The metallic adhesion layer is thermally stable, and remains free of holes during subsequent thermal processes, which may include reflow of the copper fill material portion. An additional copper fill material portion may be optionally deposited after a reflow process.
    Type: Grant
    Filed: July 29, 2020
    Date of Patent: August 30, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Cheng-Lun Tsai, Huei-Wen Hsieh, Chun-Sheng Chen, Kai-Shiang Kuo, Jen-Wei Liu, Cheng-Hui Weng, Chun-Chieh Lin, Hung-Wen Su
  • Patent number: 11424201
    Abstract: A method of forming an aluminum oxide layer is provided. The method includes providing a metal surface including at least one metal of a group of metals, the group of metals consisting of copper, aluminum, palladium, nickel, silver, and alloys thereof. The method further includes depositing an aluminum oxide layer on the metal surface by atomic layer deposition, wherein a maximum processing temperature during the depositing is 280° C., such that the aluminum oxide layer is formed with a surface having a liquid solder contact angle of less than 40°.
    Type: Grant
    Filed: June 19, 2018
    Date of Patent: August 23, 2022
    Assignee: Infineon Technologies AG
    Inventors: Michael Rogalli, Johann Gatterbauer, Wolfgang Lehnert, Kurt Matoy, Evelyn Napetschnig, Manfred Schneegans, Bernhard Weidgans
  • Patent number: 11424186
    Abstract: A semiconductor memory device and a device including the same are provided. The semiconductor memory device includes word lines extending in a first direction on a semiconductor substrate; bit line structures extending across the word lines in a second direction crossing the first direction; contact pad structures between the word lines and between the bit line structures; and spacers between the bit line structures and the contact pad structures. The spacers include a boron nitride layer.
    Type: Grant
    Filed: October 28, 2020
    Date of Patent: August 23, 2022
    Assignees: Samsung Electronics Co., Ltd., UNIST (Ulsan National Institute of Science and Technology)
    Inventors: Hyeonjin Shin, Minhyun Lee, Changseok Lee, Kyung-Eun Byun, Hyeonsuk Shin, Seokmo Hong
  • Patent number: 11417597
    Abstract: Provided is a semiconductor package including a redistribution substrate, a connection substrate on the redistribution substrate, the connection substrate having an opening that penetrates the connection substrate, a semiconductor chip in the opening of the connection substrate, and a molding layer that covers the semiconductor chip and the connection substrate, and fills a space between the semiconductor chip and the connection substrate, the connection substrate includes a base layer, a plurality of vias that vertically penetrate the base layer, a plurality of first patterns on a top surface of the base layer and connected to the plurality of vias, and a plurality of second patterns on a bottom surface of the base layer and connected to the plurality of vias, an extension of the molding layer extends into a plurality of holes that are spaced apart from the plurality of vias and are formed to vertically penetrate the base layer.
    Type: Grant
    Filed: November 27, 2020
    Date of Patent: August 16, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Bong-Soo Kim, Juhyeon Kim
  • Patent number: 11410932
    Abstract: A semiconductor device includes a stacked structure, first conductive terminals and second conductive terminals. The stacked structure includes a first semiconductor component having a first area and a second semiconductor component stacked on the first semiconductor component and having a second area smaller than the first area, wherein an extending direction of the first area and an extending direction of the second area are perpendicular to a stacking direction of the first semiconductor component and the second semiconductor component. The first conductive terminals are located on the stacked structure, electrically coupled to the first semiconductor component and aside of the second semiconductor component. The second conductive terminals are located on the stacked structure and electrically coupled to the second semiconductor component.
    Type: Grant
    Filed: March 30, 2020
    Date of Patent: August 9, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Hung Tseng, Cheng-Chieh Hsieh, Hao-Yi Tsai