Abstract: An apparatus for detecting an edge of a transparent substrate includes a light source provided on a rear side of the edge of the transparent substrate, a first polarizer provided between the transparent substrate and the light source and arranged to convert light from the light source to linearly polarized light, a light receiving unit provided on a front side of the edge of the transparent substrate, and a second polarizer provided between the transparent substrate and the light receiving unit, and having a polarization axis that is perpendicular or substantially perpendicular to a polarization axis of the first polarizer.

Abstract: Provided is an unevenness detecting apparatus comprising a determining section that determines a polarization state of returned light obtained from radiated light; an uneven portion judging section that judges whether an uneven portion is present based on the polarization state determined by the determining section; a convex/concave identifying section that identifies whether the uneven portion is convex or concave based on image data, captured by an image capturing element, of the uneven portion; and an output section that outputs information identifying whether the uneven portion is convex or concave.

Abstract: An optical emission spectroscopic system contains multiple distinct light paths that provide increased light to a spectrometer, thereby increasing sensitivity and signal-to-noise of the system.

Abstract: In a Raman spectroscopy apparatus, exciting light is focussed on a sample (26) as a line focus 38. Spectra from points in the line focus are dispersed in rows 46 on a CCD detector 34, having a two-dimensional array of pixels. The line focus moves longitudinally in a direction Y (arrow 48) relative to the sample. Simultaneously and synchronously, charge is shifted in a parallel direction Y? (arrow 50) within the CCD, so that data from a given point in the sample continues to accumulate. This ensures that the data from each sample point arises from illumination which is integrated along the line focus, and makes it easier to stitch the data together subsequently to form an image of the sample. In order to provide averaging in the X direction during fast, low resolution scanning, the line focus is swept across the sample in a zig-zag fashion, between boundary lines 60.

Abstract: In a modular measuring head system comprising a central module having the shape of a parallelepiped block with six sides, the central module encloses an interior space and is provided on at least five sides with attachment sites, each having at least one opening leading to the interior space. Together with additional modules, the central module forms a modular building structure based on a highly diverse optical measuring head including at least several of an illumination module, a lens module, a mirror module and a camera module. Each of these optional modules can be at least indirectly attached to at least one of the attachment sites.

Abstract: A device is provided for detection and analysis of a component of interest in a sample comprising a small sample cell used with an ultra violet laser. The energy of the laser is spread over an area such that energy density is above desorption threshold, but the sample not ablated. The device provides for rapid and reliable detection of a component of interest, and a method of using the same. The sample cell provides decreased dispersion of the sample.

Abstract: A polarizing device may be used with sample inspection system having one or more collection systems that receive scattered radiation from a region on a sample surface and direct it to a detector. The polarizing device disposed between the collection system(s) and the detector. The polarizing device may include a plurality of polarizing sections. The sections may be characterized by different polarization characteristics. The polarizing device is configured to transmit scattered radiation from defects to the detector and to block noise from background sources that do not share characteristics with scattered radiation from the defects from reaching the detector while, maximizing a capture rate for the defects the detector at a less than optimal signal-to-noise ratio.

Abstract: An exemplary alignment apparatus can align a first layer with a second layer. The first layer has a first alignment pattern. The second layer has a second alignment pattern. The alignment apparatus includes a supporting device for supporting the first layer and the second layer, a light pervious reference plate, and a viewing and adjusting mechanism. The light pervious reference plate has a first reference pattern spatially corresponding to the first alignment pattern on the first layer, and a second reference pattern spatially corresponding to the second alignment pattern on the second layer. The viewing and adjusting mechanism is adapted for assisting a human operator to align the first reference pattern with the first alignment pattern and the second reference pattern with the second alignment pattern.

Abstract: A miniaturized spectrometer/spectrophotometer system and methods are disclosed. A probe tip including one or more light sources and a plurality of light receivers is provided. A first spectrometer system receives light from a first set of the plurality of light receivers. A second spectrometer system receives light from a second set of the plurality of light receivers. A processor, wherein the processor receives data generated by the first spectrometer system and the second spectrometer system, wherein an optical measurement of a sample under test is produced based on the data generated by the first and second spectrometer systems.

Abstract: An imaging microoptics, which is compact and robust, includes at least one aspherical member and has a folded beam path. The imaging microoptics provides a magnification |??| of >800 by magnitude. Furthermore, a system for positioning a wafer with respect to a projection optics includes the imaging microoptics, an image sensor positionable in the image plane of the imaging microoptics, for measuring a position of an aerial image of the projection optics, and a wafer stage with an actuator and a controller for positioning the wafer in dependence of an output signal of the image sensor.

Abstract: An exposure method capable of performing accurate exposure without using a large photomask. The exposure method performs exposure while relatively moving a photomask above a substrate and includes a step of performing position correction of the photomask by performing, on a front side of the photomask relatively moved in a moving direction, image recognition of a pattern prearranged on the substrate such as a line and a black matrix and by correcting deviation of the photomask with respect to the pattern, and a step of checking the position correction of the photomask by performing image recognition of a reference mark arranged on the photomask and by determining whether or not the position correction of the photomask is accurately performed in the step of performing the position correction of the photomask.

Abstract: A high speed miniature tera- and gigahertz electromagnetic radiation on-chip spectrometer that comprises a tunable solid state 2D charge carrier layer or a quasi 2D charge carrier layer with incorporated single or multiple defects, at least first and second contacts to the charge carrier layer. Also the device includes an apparatus for measuring the device response between the first and second contacts, and an apparatus for a controllable tuning of at least one of the charge carrier layer parameters. The operation principle is based on the fact that radiation of different wavelengths excites distinct sets of plasma modes in the charge carrier layer.

Abstract: Methods and apparatus provide for a Cart Inspector to create a suspicion level for a transaction when a video image of the transaction portrays an item(s) left in a shopping cart. Specifically, the Cart Inspector obtains video data associated with a time(s) of interest. The video data originates from a video camera that monitors a transaction area. The Cart Inspector analyzes the video data with respect to target image(s) associated with a transaction in the transaction area during the time(s) of interest. The Cart Inspector creates an indication of a suspicion level for the transaction based on analysis of the target image(s). Creation of a high suspicion level for the transaction indicates that the transaction's corresponding video images most likely portray occurrences where the purchase price of an item transported through the transaction area was not included in the total amount paid by the customer.

Abstract: A method of measuring a gadolinia content using inductively coupled plasma-atomic emission spectrometry is provided. The method can include grinding sintered gadolinium using a percussion mortar to obtain a ground sample; warming the ground sample and then dissolving it with an acid solution to obtain dissolved gadolinia; diluting the dissolved gadolinia with distilled water to obtain a diluted gadolinia solution; measuring mass of each of a uranium element and a gadolinium element in the diluted gadolinia solution by a unit of ppm using the inductively coupled plasma-atomic emission spectrometry; and calculating a molar fraction of gadolinium from the diluted gadolinia solution and then calculating the gadolinia content using the molar fraction of gadolinium.

Abstract: A method for reducing handoff inaccuracies in a DIRCM countermeasures system comprising the step of adding a second on-axis camera to the DIRCM countermeasures system.

Abstract: The invention provides a generation method of generating data of a mask, comprising a calculation step of calculating an aerial image formed on an image plane of a projection optical system, an extraction step of extracting a two-dimensional image from the aerial image, a determination step of determining a main pattern of the mask based on the two-dimensional image, an extraction step of extracting, from the aerial image, a peak portion at which a light intensity takes a peak value in a region other than a region in which the main pattern is projected, a determination step of determining an assist pattern based on the light intensity of the peak portion, and a generation step of inserting the assist pattern into a portion of the mask, which corresponds to the peak portion, thereby generating, as the data of the mask, pattern data including the assist pattern and the main pattern.

Abstract: The present invention provides a paper sheet recognizing apparatus for recognizing paper sheets having different sizes and colors for each type, by using a sensing unit including a line sensor that detects a light quantity of reflected light or transmitted light obtained by irradiating a paper sheet being transported with a plurality of lights having different source wavelengths. The apparatus includes a storing unit that stores therein reference size data and reference light quantity data generated beforehand for each type of paper sheets to be recognition candidates; a first determining unit that selects a recognition target type from the recognition candidates based on detected size data of the paper sheet detected by the sensing unit and the reference size data; and a second determining unit that determines a type of the paper sheet by comparing detected light quantity data of the paper sheet detected by the line sensor with the reference light quantity data of the recognition target type.

Abstract: In a spectroscopy module 1, a light passing hole 5b through which a light L1 advancing to a spectroscopic portion 4 passes is formed in a light detecting element 5. Therefore, it is possible to prevent the relative positional relationship between the light passing hole 5b and a light detecting portion 5a of the light detecting element 5 from deviating. Moreover, the light to be measured L1 advancing to the spectroscopic portion 4 via the light passing hole 5b and the diffracted lights L2 advancing to the light detecting portion 5a from the spectroscopic portion 4 pass through a void formed between the light detecting element 5 and the substrate 2 by an opening portion 10a of a wiring substrate 10. Therefore, according to the spectroscopy module 1, it is possible to improve the reliability.

Abstract: There is provided an evaluation object pattern determining apparatus capable of determining local patterns to be evaluated. The apparatus is for use in a pattern evaluating system storing patterns of a LSI chip as CAD data, picking out coordinates of local patterns whose process margin is small from the CAD data by way of simulation and assisting observation of the local patterns produced in a fabrication line. The apparatus includes a risk level map creating section for creating risk level maps in which risk areas are disposed. The risk area is assigned with a risk level obtained by digitizing that the risk area is an area whose process margin is smaller than other areas. The apparatus also includes a superimposition processing section for superimposing the coordinates of the local patterns with the risk level map to pick out the coordinates of the local patterns located within the risk area.

Abstract: An index detection unit (110) detects the image coordinates of indices from a captured image. An index allocation information updating unit (160) calculates the position and orientation of an image capturing apparatus using the image coordinates of the indices and allocation information of each of these indices. Furthermore, the index allocation information updating unit (160) re-calibrates allocation information of an unreliable index having a reliability indicating that the allocation information is unreliable. The index allocation information updating unit (160) updates allocation information held by an allocation information holding unit (140) in association with the unreliable index to the re-calibrated allocation information and a reliability indicating that the allocation information is reliable.