Abstract: Semiconductor devices and methods of forming semiconductor devices are provided. A method includes forming a first mask layer over a target layer, forming a second mask layer over the first mask layer, patterning the second mask layer, forming a third mask layer over the patterned second mask layer, patterning the third mask layer, etching the first mask layer using both the patterned second mask layer and the patterned third mask layer as a combined etch mask, removing the patterned third mask layer to expose a portion of the first mask layer, performing a trim process on the exposed portion of the first mask layer, and etching the target layer using the first mask layer to form openings in the target layer.

Abstract: A semiconductor device structure includes a region of semiconductor material comprising a first conductivity type, an active region, and a termination region. A first active trench structure is disposed in the active region, and a second active trench structure is disposed in the active region and laterally separated from the first active trench by an active mesa region having a first width. A first termination trench structure is disposed in the termination region and separated from the second active trench by a transition mesa region having a second width and a higher carrier charge than that of the active mesa region. In one example, the second width is greater than the first width to provide the higher carrier charge. In another example, the dopant concentration in the transition mesa region is higher than that in the active mesa region to provide the higher carrier charge.

Abstract: An example device includes a doped absorption region to receive optical energy and generate free electrons from the received optical energy. The example device also includes a doped charge region to increase an electric field. The example device also includes an intrinsic multiplication region to generate additional free electrons from impact ionization of the generated free electrons. The example device includes a doped contact region to conduct the free electrons and the additional free electrons.

Abstract: FinFET devices with source/drain contacts with reduced resistance/capacitance power loss and with an enhanced processing window between the source/drain contacts and a gate via and methods of manufacture are described herein. A metal riser may be formed in a first recess of a source/drain contact of a first material. The metal riser and a contact via may be formed from a second material and the contact via may be formed over the metal riser to provide a hybrid source/drain contact of a finFET with a wide surface contact area at an interface between the source/drain contact and the metal riser. A dielectric fill material and/or a conformal contact etch stop layer may be used to form an isolation region in a second recess of the source/drain contact to extend a processing window disposed between the isolation region and a gate contact of the finFET.

Abstract: A transparent display device includes: a substrate including an emission area and a first transparent area; first, second, and third pixel regions on the substrate and including the emission area and the first transparent area; a first bank on the substrate; a first opening surrounded by the first bank and corresponding to the first pixel region; a second opening surrounded by the first bank and corresponding to the second pixel region; a third opening surrounded by the first bank and corresponding to the third pixel region; a plurality of second banks overlapping at least one of the first, second, and third openings, and overlapping the first bank; and a light-emitting diode on the first, second, and third openings on the substrate.

Abstract: Radio-frequency (RF) switching devices having improved voltage handling capability. In some embodiments, a switching device can include a first terminal and a second terminal, and a plurality of switching elements connected in series to form a stack between the first terminal and the second terminal. The switching elements can have a non-uniform distribution of a parameter that results in the stack having a first voltage handling capacity that is greater than a second voltage handling capacity corresponding to a similar stack having a substantially uniform distribution of the parameter.

Abstract: Semiconductor devices and methods are provided. For example, a semiconductor device includes a plurality of semiconductor fins patterned in a starting semiconductor substrate; a set of gate structures formed on the starting semiconductor substrate; a set of spacers formed around each of the set of gate structures; a source and drain region grown around the plurality of semiconductor fins; a conductive metal material on the source and drain region, an insulating material disposed over an upper surface of the conductive metal material and the gate structure; and a plurality of metal contacts in the insulator material. The bottom surface of the plurality of metal contacts is in contact with at least a portion of an upper surface of the gate structure and at least a portion of an upper surface of the conductive metal material.

Abstract: Described herein is a technology related to a method for generating a high density plasma ionization on a plasma processing system. Particularly, the high density plasma ionization may include an electron cyclotron resonant (ECR) plasma that is utilized for semiconductor fabrication such as an etching of a substrate. The ECR plasma may be generated by a combination of electromagnetic fields from a resonant structure, radiated microwave energy from a radio frequency (RF) microwave source, and presence of a low-pressure plasma region (e.g., about 1 mTorr or less) on the plasma processing system.

Abstract: A chip package includes a chip, a sidewall structure that has a first light-shielding layer, a second light-shielding layer, and a cover. The chip has a light emitter and a light receiver that are located on a top surface of the chip. The sidewall structure is located on the top surface of the chip and has two aperture areas. The light emitter and the light receiver are respectively located in the two aperture areas. The sidewall structure surrounds the light emitter and the light receiver, and at least one surface of the sidewall structure has the first light-shielding layer. The second light-shielding layer is located between the chip and the sidewall structure. The cover is located on a surface of the sidewall structure facing away from the chip, and at least covers the light receiver and the sidewall structure that surrounds the light receiver.

Abstract: A display panel and a display apparatus are provided. The display panel includes a display region and a non-display region surrounding the display region. The non-display region includes a step region, a left border and a right border that are adjacent to the step region, and an upper border arranged opposite to the step region. The left border, the right border, the upper border, and the step region surround the display region. The left border and the right border each include an encapsulation region. The encapsulation region includes a sealant and a reflective metal layer that are at least partially overlapped with each other. The step region includes a ground metal line, and the ground metal line is connected to the reflective metal layer through an electrostatic consumption resistance portion.

Abstract: The present technology relates to a transistor and a manufacturing method that make it possible to reduce noise. The transistor includes a gate electrode, a source region, and a drain region. The gate electrode is formed on a semiconductor substrate. The source region is formed on a surface of the semiconductor substrate and extended from the gate electrode. The drain region is positioned to oppose the source region and formed on the surface of the semiconductor substrate without being brought into contact with the gate electrode. The source region and the drain region are asymmetrical. The drain region is formed at a position deeper than the source region. At a gate end of the gate electrode, the drain region is formed at a distance from the surface of the semiconductor substrate. The present technology is applicable, for example, to an amplifying transistor.

Abstract: The present disclosure relates to a method and system for performing aging process on the transistor in the display panel. A method for performing aging process on a transistor in a display panel, comprising: obtaining an initial characteristic curve of the transistor; determining an initial cutoff voltage range of the transistor according to the obtained initial characteristic curve; determining a gate-source voltage and a drain-source voltage required by the transistor according to the initial cutoff voltage range, so as to increase an cutoff voltage range of the transistor; and performing aging process on the transistor according to the determined required gate-source voltage and drain-source voltage.

Abstract: A semiconductor device structure is disclosed. The semiconductor device structure includes a mesa extending above a substrate. The mesa has a channel region between a first side and second side of the mesa. A first gate is on a first side of the mesa, the first gate comprising a first gate insulator and a first gate conductor comprising graphene overlying the first gate insulator. The gate conductor may comprise graphene in one or more monolayers. Also disclosed are a method for fabricating the semiconductor device structure; an array of vertical transistor devices, including semiconductor devices having the structure disclosed; and a method for fabricating the array of vertical transistor devices.

Abstract: In a thin film transistor, an increase in off current or negative shift of the threshold voltage is prevented. In the thin film transistor, a buffer layer is provided between an oxide semiconductor layer and each of a source electrode layer and a drain electrode layer. The buffer layer includes a metal oxide layer which is an insulator or a semiconductor over a middle portion of the oxide semiconductor layer. The metal oxide layer functions as a protective layer for suppressing incorporation of impurities into the oxide semiconductor layer. Therefore, in the thin film transistor, an increase in off current or negative shift of the threshold voltage can be prevented.

Abstract: A semiconductor device has a silicide source/drain region is fabricated by growing silicon on an epitaxial region including silicon and either germanium or carbon. In the method, a gate electrode is formed on a semiconductor substrate with a gate insulating layer interposed therebetween. An epitaxial layer is formed in the semiconductor substrate at both sides of the gate electrodes. A silicon layer is formed to cap the epitaxial layer. The silicon layer and a metal material are reacted to form a silicide layer. In a PMOS, the epitaxial layer has a top surface and inclined side surfaces that are exposed above the upper surface of the active region. The silicon layer is grown on the epitaxial layer in such a way as to cap the top and inclined surfaces.

Abstract: The present disclosure provides a light-emitting device and manufacturing method thereof. The light-emitting device comprising: a light-emitting stack; and a semiconductor layer having a first surface connecting to the light-emitting stack, a second surface opposite to the first surface, and a void; wherein the void comprises a bottom part near the first surface and an opening on the second surface, and a dimension of the bottom part is larger than the dimension of the opening.

Abstract: Cooling devices, packaged semiconductor devices, and methods of packaging semiconductor devices are disclosed. In some embodiments, a cooling device for a semiconductor device includes a reservoir having a first plate and a second plate coupled to the first plate. A cavity is between the first plate and the second plate. A phase change material (PCM) is in the cavity. The cooling device is adapted to dissipate heat from a packaged semiconductor device.

Abstract: Disclosed are a source drive integrated circuit (IC), a method of manufacturing the same, and a display apparatus including the source drive IC. The source drive IC includes a core portion, a first channel portion disposed outside one side of the core portion, a second channel portion disposed outside the other side of the core portion, a first resistor string provided inward from the one side of the core portion to generate a plurality of gamma voltages, a first resistance corrector provided between the first resistor string and the first channel portion, and a first connection line extending from the first resistor string to each of the first channel portion and the second channel portion and transferring the plurality of gamma voltages to the first channel portion and the second channel portion. The first connection line extends to the first channel portion via the first resistance corrector.

Abstract: A system and method are provided for repairing an emissive display. Following assembly, the emissive substrate is inspected to determine defective array sites, and defect items are removed using a pick-and-remove process. In one aspect, the emissive substrate includes an array of wells, with emissive elements located in the wells, but not electrically connected to the emissive substrate. If the emissive elements are light emitting diodes (LEDs), then the emissive substrate is exposed to ultraviolet illumination to photoexcite the array of LED, so that LED illumination can be measured to determine defective array sites. The defect items may be determined to be misaligned, mis-located, or non-functional emissive elements, or debris. Subsequent to determining these defect items, the robotic pick-and-remove process is used to remove them. The pick-and-remove process can also be repurposed to populate empty wells with replacement emissive elements.

Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.