Patents Examined by Maria Ligai
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Patent number: 9276144Abstract: A quantum cascade detector includes a semiconductor substrate, and an active layer formed by laminating unit laminate structures each having an absorption region with a first barrier layer to a second well layer and a transport region with a third barrier layer to an n-th well layer. A second absorption well layer has a layer thickness ½ or less of that of a first absorption well layer thickest in one period, and a coupling barrier layer has a layer thickness smaller than that of an exit barrier layer thickest in one period. The unit laminate structure has a detection lower level arising from a ground level in the first well layer, a detection upper level generated by coupling an excitation level in the first well layer and a ground level in the second well layer, and a transport level structure for electrons.Type: GrantFiled: October 28, 2014Date of Patent: March 1, 2016Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Kazuue Fujita, Toru Hirohata, Tadataka Edamura, Tatsuo Dougakiuchi
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Patent number: 9275996Abstract: A semiconductor device may include a substrate, and a plurality of fins spaced apart on the substrate. Each of the fins may include a lower semiconductor fin portion extending vertically upward from the substrate, and at least one superlattice punch-through layer on the lower fin portion. The superlattice punch-through layer may include a plurality of stacked groups of layers, with each group of layers of the superlattice punch-through layer comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions. Each fin may also include an upper semiconductor fin portion on the at least one superlattice punch-through layer and extending vertically upward therefrom. The semiconductor device may also include source and drain regions at opposing ends of the fins, and a gate overlying the fins.Type: GrantFiled: November 21, 2014Date of Patent: March 1, 2016Assignee: MEARS TECHNOLOGIES, INC.Inventors: Robert Mears, Hideki Takeuchi, Erwin Trautmann
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Patent number: 9269584Abstract: Provided are methods of depositing N-Metals onto a substrate. Methods include first depositing an initiation layer. The initiation layer may comprise or consist of cobalt, tantalum, nickel, titanium or TaAlC. These initiation layers can be used to deposit TaCx.Type: GrantFiled: June 18, 2012Date of Patent: February 23, 2016Assignee: Applied Materials, Inc.Inventors: Seshadri Ganguli, Xinliang Lu, Atif Noori, Maitreyee Mahajani, Shih Chung Chen, Mei Chang
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Patent number: 9263634Abstract: A method for fabrication a light emitting diode (LED) includes forming alternating material layers on an LED structure, formed on a substrate, to form a reflector on a back side opposite the substrate. A handle substrate is adhered to a stressor layer deposited on the reflector. The LED structure is separated from the substrate using a spalling process to expose a front side of the LED structure.Type: GrantFiled: September 19, 2014Date of Patent: February 16, 2016Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Stephen W. Bedell, Bahman Hekmatshoartabari, Devendra K. Sadana, Davood Shahrjerdi
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Patent number: 9245954Abstract: An aluminum material can be used on a surface of the electrode of a semiconductor element, this aluminum layer need not be formed thick unnecessarily, a copper wire is bonded strongly to the semiconductor element irrespective of a diameter of the wire, and high heat resistance can be achieved. Silicon carbide (SiC) is used as a substrate of the semiconductor element 10, the titanium layer 20 and the aluminum layer 21 are formed as the electrode 15 on the silicon carbide substrate, and by a ball bonding or a wedge bonding of the copper wire 16 to the aluminum layer 21 of the electrode 15 while applying ultrasonic wave, the copper-aluminum compound layer 23 (Al4Cu9, AlCu or the like) is formed between the copper wire 16 and the titanium layer 20.Type: GrantFiled: December 3, 2012Date of Patent: January 26, 2016Assignee: NEW JAPAN RADIO CO., LTD.Inventor: Yoshio Fujii
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Patent number: 9245951Abstract: Device structures and fabrication methods for a bipolar junction transistor. A layer is formed on a top surface of a substrate. A trench is formed in the layer and has a plurality of sidewalls with a width between an opposite pair of the sidewalls that varies with increasing distance from the top surface of the substrate. A collector pedestal of the bipolar junction transistor is formed in the trench.Type: GrantFiled: September 16, 2014Date of Patent: January 26, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: Renata Camillo-Castillo, David L. Harame, Vibhor Jain, Vikas K. Kaushal, Marwan H. Khater
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Patent number: 9240448Abstract: Device structures for a bipolar junction transistor. The device structure includes a collector region, an intrinsic base formed on the collector region, an emitter coupled with the intrinsic base and separated from the collector by the intrinsic base, and an isolation region extending through the intrinsic base to the collector region. The isolation region is formed with a first section having first sidewalls that extend through the intrinsic base and a second section with second sidewalls that extend into the collector region. The second sidewalls are inclined relative to the first sidewalls. The isolation region is positioned in a trench that is formed with first and second etching process in which the latter etches different crystallographic directions of a single-crystal semiconductor material at different etch rates.Type: GrantFiled: June 9, 2015Date of Patent: January 19, 2016Assignee: GLOBALFOUNDRIES INC.Inventors: James W. Adkisson, James R. Elliott, David L. Harame, Marwan H. Khater, Robert K. Leidy, Qizhi Liu, John J. Pekarik
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Patent number: 9224988Abstract: A method for manufacturing a display device includes: forming a deformed layer on a support substrate by a silane coupling agent; performing UV treatment on the deformed layer; forming a thin film substrate on the deformed layer; forming a pixel and an encapsulation member on the thin film substrate; and separating the support substrate from the thin film substrate.Type: GrantFiled: November 20, 2013Date of Patent: December 29, 2015Assignee: Samsung Display Co., Ltd.Inventors: Dong-Min Lee, Young-Sik Yoon, Chang-Mo Park
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Patent number: 9209193Abstract: A method of manufacturing a device includes: forming a fifth insulating film on a semiconductor substrate having a peripheral circuit region and a memory cell region in which a contact pad is formed; forming a second sacrifice film in the memory cell region in which the fifth insulating film is formed; forming, after the forming of the second sacrifice, a second insulating film in the peripheral circuit region on the semiconductor substrate to have a sidewall coming into contact with the second sacrifice film; forming a third insulating film to cover an upper surface of the second sacrifice film and an upper surface of the second insulating film; forming a hole penetrating through the third insulating film, the second sacrifice film and the fifth insulating film in the memory cell region; forming a lower electrode in the hole; and removing all of the second sacrifice film.Type: GrantFiled: June 19, 2012Date of Patent: December 8, 2015Assignee: PS4 LUXCO S.A.R.L.Inventor: Yasuhiko Ueda
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Patent number: 9171731Abstract: The invention relates to microelectronic technology and, more specifically, relates to a method of forming a gate with a LELE double pattern. The method adopts an ONO structure (Oxide-SiN-Oxide). The ONO structure is exposed twice, and the advanced patterning film is used as a mask in the processing of polysilicon etching. The ONO structure is used to replace the traditional hardmask of silicon oxide, and the substructure of ODL (Organic Under Layer) which is based on the spin-on, and the middle layer structure of SHB (Si-based hardmask). The method saves cost and improves the process of advanced patterning film as a mask with the nodes in 40 nm and above which is applied to the process with the nodes in 22/20 nm and below. Consequently, the maturity and stability of the process for poly gate with the nodes in 22/20 nm and below are improved.Type: GrantFiled: November 20, 2013Date of Patent: October 27, 2015Assignee: Shanghai Huali Microelectronics CorporationInventors: Jun Huang, ZhiBiao Mao, QuanBo Li, ZhiFeng Gan, RunLing Li
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Patent number: 9166079Abstract: Methods of forming contacts for solar cells are described. In one embodiment, a method includes forming a silicon layer above a substrate, forming and patterning a solid-state p-type dopant source on the silicon layer, forming an n-type dopant source layer over exposed regions of the silicon layer and over a plurality of regions of the solid-state p-type dopant source, and heating the substrate to provide a plurality of n-type doped silicon regions among a plurality of p-type doped silicon regions.Type: GrantFiled: June 11, 2014Date of Patent: October 20, 2015Assignee: SunPower CorporationInventor: Jane Manning
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Patent number: 9165944Abstract: A semiconductor device comprises first and second gate stacks formed on a semiconductor-on-insulator (SOI) substrate. The SOI substrate includes a dielectric layer interposed between a bulk substrate layer and an active semiconductor layer. A first extension implant portion is disposed adjacent to the first gate stack and a second extension implant portion is disposed adjacent to the second gate stack. A halo implant extends continuously about the trench. A butting implant extends between the trench and the dielectric layer. An epitaxial layer is formed at the exposed region such that the butting implant is interposed between the epitaxial layer and the dielectric layer.Type: GrantFiled: October 7, 2013Date of Patent: October 20, 2015Assignee: GLOBALFOUNDRIES INC.Inventors: Viorel Ontalus, Robert R. Robison, Xin Wang
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Patent number: 9159888Abstract: Methods for fabricating light emitting diode (LED) chips comprising providing a plurality of LEDs typically on a substrate. Pedestals are deposited on the LEDs with each of the pedestals in electrical contact with one of the LEDs. A coating is formed over the LEDs with the coating burying at least some of the pedestals. The coating is then planarized to expose at least some of the buried pedestals while leaving at least some of said coating on said LEDs. The exposed pedestals can then be contacted such as by wire bonds. The present invention discloses similar methods used for fabricating LED chips having LEDs that are flip-chip bonded on a carrier substrate and for fabricating other semiconductor devices. LED chip wafers and LED chips are also disclosed that are fabricated using the disclosed methods.Type: GrantFiled: September 7, 2007Date of Patent: October 13, 2015Assignee: Cree, Inc.Inventors: Ashay Chitnis, James Ibbetson, Bernd Keller, David T. Emerson, John Edmond, Michael J. Bergmann, Jasper S. Cabalu, Jeffrey C. Britt, Arpan Chakraborty, Eric Tarsa, Yankun Fu
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Patent number: 9153500Abstract: The present invention belongs to the technical field of integrated semiconductor circuits, and relates to a method used in a process no greater than 32 nm to improve the electromigration resistance of Cu interconnects. Coating layers on Cu interconnects, such as CuSi3, CuGe, and CuSiN, can be prepared by autoregistration, and with the use of new impervious layer materials, the electromigration resistance of Cu interconnects can be largely improved and the high conductivity thereof can be kept, which provides an ideal solution for interconnection process for process nodes no greater than 32 nm.Type: GrantFiled: June 20, 2012Date of Patent: October 6, 2015Assignee: Fudan UniversityInventors: Qingqing Sun, Lin Chen, Wen Yang, Pengfei Wang, Wei Zhang
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Patent number: 9147682Abstract: An integrated circuit device includes a semiconductor substrate, insulation regions extending into the semiconductor substrate, and a semiconductor fin protruding above the insulation regions. The insulation regions include a first portion and a second portion, with the first portion and second portion on opposite sides of the semiconductor fin. The integrated circuit device further includes a gate stack on a top surface and sidewalls of the semiconductor fin, and a semiconductor region connected to an end of the semiconductor fin. The semiconductor region includes a first semiconductor region formed of a first semiconductor material, wherein the first semiconductor region comprise faceted top surfaces, and a second semiconductor region underlying the first semiconductor region. The second semiconductor region has a higher germanium concentration than the first semiconductor region.Type: GrantFiled: October 17, 2013Date of Patent: September 29, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Cheng Ching, Ting-Hung Hsu, Chao-Hsiung Wang, Chi-Wen Liu
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Patent number: 9136211Abstract: Protection of a solder ball joint is disclosed in which the solder ball joint is located below the surface level of the encapsulating buffer layer. The buffering layer is etched to expose one or more electrode posts, each of which may be made up of a single column or multiple columns. A top layer resulting either from a top conductive cap or a plating layer around the electrode posts also lies below the buffer layer. When the solder ball is placed onto the posts, the solder/ball joint is protected in a position below the surface of the buffer layer, while still maintaining an electrical connection between the various solder balls and their associated or capping/plating material, electrode posts, wiring layers, and circuit layers. Therefore, the entire ball joint is protected from direct stress.Type: GrantFiled: July 19, 2013Date of Patent: September 15, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chung Yu Wang, Chien-Hsun Lee, Pei-Haw Tsao, Kuo-Chin Chang, Chung-Yi Lin, Bill Kiang
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Patent number: 9129919Abstract: Processes for the treatment of silicon wafers to form a high density non-uniform distribution of oxygen precipitate nuclei therein such that, upon being subjected to the heat treatment cycles of essentially any arbitrary electronic device manufacturing process, the wafers form oxygen precipitates in the bulk and a precipitate-free zone near the surface are disclosed. The processes involve activation of inactive oxygen precipitate nuclei by performing heat treatments between about 400° C. and about 600° C. for at least about 1 hour.Type: GrantFiled: November 19, 2013Date of Patent: September 8, 2015Assignee: SunEdison Semiconductor LimitedInventors: Robert J. Falster, Vladimir V. Voronkov, Marco Cornara, Daniela Gambaro, Massimiliano Olmo
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Patent number: 9123728Abstract: A semiconductor device includes an insulation film formed above a semiconductor substrate, a conductor containing Cu formed in the insulation film, and a layer film formed between the insulation film and the conductor and formed of a first metal film containing Ti and a second metal film different from the first metal film, a layer containing Ti and Si is formed on the surface of the conductor.Type: GrantFiled: January 22, 2014Date of Patent: September 1, 2015Assignee: FUJITSU SEMICONDUCTOR LIMITEDInventors: Takahiro Kono, Shinichi Akiyama, Hirofumi Watatani, Tamotsu Owada
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Patent number: 9105478Abstract: Devices and methods for forming semiconductor devices with fins at tight fin pitches are provided. One method includes, for instance: obtaining an intermediate semiconductor device; growing an epi layer over the substrate; forming a doped layer below the epi layer; depositing a first oxide layer on the epi layer; applying a dielectric material on the first oxide layer; and depositing a lithography stack on the dielectric material. One intermediate semiconductor device includes, for instance: a substrate with at least one n-well region and at least one p-well region; a doped layer over the substrate; an epi layer over the doped layer; a first oxide layer over the epi layer; a dielectric layer over the first oxide layer; and a lithography stack over the dielectric layer.Type: GrantFiled: October 28, 2013Date of Patent: August 11, 2015Assignee: GLOBALFOUNDRIES Inc.Inventors: Andy Wei, Mariappan Hariharaputhiran, Dae Geun Yang, Dae-Han Choi, Xiang Hu, Richard J. Carter, Akshey Sehgal
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Patent number: 9099324Abstract: A semiconductor device includes a semiconductor substrate and a trench isolation. The trench isolation is located in the semiconductor substrate, and includes an epitaxial layer and a dielectric material. The epitaxial layer is in a trench of the semiconductor and is peripherally enclosed thereby, in which the epitaxial layer is formed by performing etch and epitaxy processes. The etch and epitaxy process includes etching out a portion of a sidewall of the trench and a portion of a bottom surface of the trench and forming the epitaxial layer conformal to the remaining portion of the sidewall and the remaining portion of the bottom surface. The dielectric material is peripherally enclosed by the epitaxial layer.Type: GrantFiled: October 24, 2013Date of Patent: August 4, 2015Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Yeur-Luen Tu, Chia-Shiung Tsai, Ru-Liang Lee, Tung-I Lin, Wei-Li Chen