Patents Examined by Mark V. Prenty
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Patent number: 11961933Abstract: In at least one embodiment, a Geiger-mode avalanche photodiode, including a semiconductor body, is provided. The semiconductor body includes a semiconductive structure and a front epitaxial layer on the semiconductive structure. The front epitaxial layer has a first conductivity type. An anode region having a second conductivity type that is different from the first conductivity type extends into the front epitaxial layer. The photodiode further includes a plurality of gettering regions in the semiconductive structure.Type: GrantFiled: November 23, 2021Date of Patent: April 16, 2024Assignee: STMICROELECTRONICS S.r.l.Inventors: Massimo Cataldo Mazzillo, Valeria Cinnera Martino
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Patent number: 11957004Abstract: An OLED display panel and fabrication method thereof are provided by the present application. The OLED display panel includes a substrate, a transparent conductive layer, a buffer layer, a metal oxide semiconductor layer, a gate insulating layer, a gate layer, an interlayer insulating layer, a source-drain layer, and an OLED device layer that are stacked. A light emitting direction of the OLED device layer faces the substrate. In the present application, a conductive electrode and a first electrode plate of a transparent capacitor are both patterned and formed with the transparent conductive layer, and only one process is required. Therefore, a mask is saved and fabrication cost is reduced.Type: GrantFiled: August 5, 2020Date of Patent: April 9, 2024Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.Inventor: Xingyu Zhou
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Patent number: 11942547Abstract: The present disclosure describes a method that mitigates the formation of facets in source/drain silicon germanium (SiGe) epitaxial layers. The method includes forming an isolation region around a semiconductor layer and a gate structure partially over the semiconductor layer and the isolation region. Disposing first photoresist structures over the gate structure, a portion of the isolation region, and a portion of the semiconductor layer and doping, with germanium (Ge), exposed portions of the semiconductor layer and exposed portions of the isolation region to form Ge-doped regions that extend from the semiconductor layer to the isolation region. The method further includes disposing second photoresist structures over the isolation region and etching exposed Ge-doped regions in the semiconductor layer to form openings, where the openings include at least one common sidewall with the Ge-doped regions in the isolation region. Finally the method includes growing a SiGe epitaxial stack in the openings.Type: GrantFiled: July 26, 2022Date of Patent: March 26, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Gulbagh Singh, Hsin-Chi Chen, Kun-Tsang Chuang
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Patent number: 11908733Abstract: Provided are a substrate processing method and a device manufactured by using the same, which may improve etch selectivity of an insulating layer deposited on a stepped structure. The substrate processing method includes: forming a first layer on a stepped structure having an upper surface, a lower surface, and a side surface connecting the upper surface and the lower surface; weakening at least a portion of the first layer; forming a second layer on the first layer; and performing an isotropic etching process on the first layer and the second layer.Type: GrantFiled: May 10, 2022Date of Patent: February 20, 2024Assignee: ASM IP Holding B.V.Inventor: Yoon Ki Min
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Patent number: 11908923Abstract: A semiconductor includes a semiconductor substrate having a bottom source/drain region and a vertical semiconductor fin having a bottom end that contacts the semiconductor substrate. The semiconductor device further includes a top source/drain region on a top end of the vertical semiconductor. The top source/drain region is separated from the semiconductor substrate by the vertical semiconductor fin. The semiconductor device further includes an electrically conductive cap on an outer surface of the top source/drain region.Type: GrantFiled: September 21, 2020Date of Patent: February 20, 2024Assignee: International Business Machines CorporationInventors: Christopher J. Waskiewicz, Su Chen Fan, Hari Prasad Amanapu, Hemanth Jagannathan
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Patent number: 11882776Abstract: Methods are provided herein for improving oxygen content control in a Metal-Insulator-Metal (MIM) stack of an RERAM cell, while also maintaining throughput. More specifically, a single chamber solution is provided herein for etching and encapsulating the MIM stack of an RERAM cell to control the oxygen content in the memory cell dielectric of the RERAM cell. According to one embodiment, a non-oxygen-containing dielectric encapsulation layer is deposited onto the MIM stack in-situ while the substrate remains within the processing chamber used to etch the MIM stack. By etching the MIM stack and depositing the encapsulation layer within the same processing chamber, the techniques described herein minimize the exposure of the memory cell dielectric to oxygen, while maintaining throughput.Type: GrantFiled: March 24, 2021Date of Patent: January 23, 2024Assignee: Tokyo Electron LimitedInventors: Katie Lutker-Lee, Angelique Raley, Dina Triyoso
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Patent number: 11877458Abstract: A Resistive Random-Access Memory (RRAM) has an internal electrode; a high k dielectric layer surrounding and in contact with the internal electrode; a lower substrate; and a trench having three or more trench sides disposed within the lower substrate; and one or more interconnects each with an interconnect side. The interconnect side forms part of one of the trench sides. The internal electrode and the high k dielectric layer are disposed within the trench with the interconnect side in contact with the high k dielectric layer. In some embodiments, an external electrode is between and electrically connected to the high k dielectric layer and the internal electrode. The external electrode then forms the electrical connection between the high k dielectric and the interconnect side. Multiple embodiments are disclosed including RRAMs created in multiple substrates; different RRAM configurations; and dual, three-wire RRAMs with two interconnects. Arrays of RRAMs and methods of making are also disclosed.Type: GrantFiled: March 9, 2020Date of Patent: January 16, 2024Assignee: International Business Machines CorporationInventors: Baozhen Li, Chih-Chao Yang, Barry Linder, Vijay Narayanan
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Patent number: 11876124Abstract: Embodiments of the invention are directed to a semiconductor device that includes a channel fin; a trench adjacent to an upper region of the channel fin; and an oxygen-blocking layer within the trench. The oxygen-blocking layer includes an oxygen gettering material configured to remove oxygen from an environment to which the oxygen-blocking layer is exposed.Type: GrantFiled: July 7, 2022Date of Patent: January 16, 2024Assignee: International Business Machines CorporationInventors: Chen Zhang, Christopher J. Waskiewicz, Shahab Siddiqui, Ruilong Xie
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Patent number: 11856872Abstract: A variable resistance memory device includes first conductive lines extending in a first direction, second conductive lines extending in a second direction and crossing the first conductive lines in a plan view, and cell structures respectively provided at crossing points of the first conductive lines and the second conductive lines in the plan view. Each of the cell structures includes a switching pattern, a variable resistance pattern, and a first electrode provided between the switching pattern and the first conductive line, the first electrode including carbon. Each of the first conductive lines includes an upper pattern including a metal nitride in an upper portion thereof. The upper pattern is in contact with a bottom surface of the first electrode.Type: GrantFiled: March 17, 2021Date of Patent: December 26, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jaeho Jung, Kwangmin Park, Jonguk Kim, Dongsung Choi
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Patent number: 11856877Abstract: A lithographically fabricated electrode comprises a continuous metal film; and a discontinuous metal film. The discontinuous metal film has a first edge proximal to the continuous metal film, and a second edge distal the continuous metal film.Type: GrantFiled: December 23, 2020Date of Patent: December 26, 2023Assignee: The University of CanterburyInventors: Simon Anthony Brown, Edoardo Galli, Susant Kumar Acharya
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Patent number: 11855120Abstract: A substrate for a front-side type image sensor includes a supporting semiconductor substrate, an electrically insulating layer, and a silicon-germanium semiconductor layer, known as the active layer. The electrically insulating layer includes a stack of dielectric and metallic layers selected such that the reflectivity of the stack in a wavelength range of between 700 nm and 3 ?m is greater than the reflectivity of a silicon oxide layer having a thickness equal to that of the stack. The substrate also comprises a silicon layer between the electrically insulating layer and the silicon-germanium active layer. The disclosure also relates to a method for the production of such a substrate.Type: GrantFiled: February 4, 2022Date of Patent: December 26, 2023Assignee: SOITECInventors: Walter Schwarzenbach, Oleg Kononchuk, Ludovic Ecarnot, Christelle Michau
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Patent number: 11856875Abstract: A memory device may be provided. The memory device may include a first electrode including a first side surface and a second side surface opposite to the first side surface; a passivation layer arranged laterally alongside the first side surface of the first electrode; a switching layer arranged laterally alongside the passivation layer; and a second electrode arranged along the switching layer.Type: GrantFiled: December 28, 2020Date of Patent: December 26, 2023Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Jianxun Sun, Juan Boon Tan, Eng Huat Toh
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Patent number: 11856799Abstract: Methods of forming a semiconductor device are disclosed. A method comprising forming a hybrid transistor supported by a substrate. Forming the hybrid transistor comprises forming a source including a first low bandgap high mobility material, and forming a channel including a high bandgap low mobility material coupled with the first low bandgap high mobility material. Forming the hybrid transistor further comprises forming a drain including a second low bandgap high mobility material coupled with the a high bandgap low mobility material, and forming a gate separated from the channel via a gate oxide material. Methods of forming a transistor are also disclosed.Type: GrantFiled: February 23, 2021Date of Patent: December 26, 2023Assignee: Micron Technology, Inc.Inventors: Kamal M. Karda, Haitao Liu, Durai Vishak Nirmal Ramaswamy
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Patent number: 11849609Abstract: According to one embodiment, a display device including, a substrate including a first area including a display area, a second area including a mount area, and a third area located between the first area and the second area, a first inorganic insulating layer provided on the substrate in the first area and the second area, a line provided on the first inorganic insulating layer and extending across the first area, the second area, and the third area, and, a second inorganic insulating layer provided on the line, the second inorganic insulating layer extending to an area overlaid on at least the first inorganic insulating layer.Type: GrantFiled: November 20, 2020Date of Patent: December 19, 2023Assignee: Japan Display Inc.Inventor: Yasushi Tomioka
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Patent number: 11844290Abstract: Embodiments of process flows and methods are provided for forming a resistive switching random access memory (ReRAM). More specifically, process flows and methods are provided for reducing the forming voltage needed to form a conductive path in the ReRAM cells. A wide variety of plasma doping processes are used to introduce a plurality of different dopants into a metal-oxide dielectric film. By utilizing at least two different dopants, the plasma doping processes described herein reduce the forming voltage of the subsequently formed ReRAM cell compared to conventional processes that use only one dopant. In some embodiments, the forming voltage may be further reduced by applying a bias power during the plasma doping process, wherein the bias power is preselected to increase the number of ions introduced into the metal-oxide dielectric film during the plasma doping process.Type: GrantFiled: June 3, 2021Date of Patent: December 12, 2023Assignees: Tokyo Electron Limited, International Business Machines CorporationInventors: Devi Koty, Qingyun Yang, Hongwen Yan, Hiroyuki Miyazoe, Takashi Ando, Marinus Johannes Petrus Hopstaken
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Patent number: 11837611Abstract: Disclosed herein, in some embodiments, is a memory device. The memory device includes a bottom electrode disposed over a substrate and a top electrode disposed over the bottom electrode. An upper surface of the bottom electrode faces away from the substrate. A bottom surface of the top electrode faces the substrate. A data storage layer is arranged between the bottom electrode and the top electrode. At least a portion of the bottom surface of the top electrode does not overlap with any portion of the top surface of the bottom electrode along a first direction parallel to the bottom surface of the top electrode. Furthermore, at least a portion of the top surface of the bottom electrode does not overlap with any portion of the bottom surface of the top electrode along the first direction.Type: GrantFiled: August 24, 2020Date of Patent: December 5, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hung-Li Chiang, Chao-Ching Cheng, Jung-Piao Chiu, Tzu-Chiang Chen, Yu-Sheng Chen
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Patent number: 11825716Abstract: An OLED display panel is provided which can control the problem of shedding even in high definition panels. Metal wiring 5 which conducts with an earth line of a flexible printed substrate 15 is provided on a substrate 1. A display area 2 comprised from a plurality of OLED elements is provided at the center of the substrate 1 and four low resistance metal films 3 are provided along each of four edges of the display area 2 on a surface of insulation films 8, 10 at the periphery of the display area 2. Among these, one low resistance metal film 3 conducts with the metal wiring 5 via a contact 3a.Type: GrantFiled: April 4, 2022Date of Patent: November 21, 2023Assignee: Japan Display Inc.Inventors: Kouhei Takahashi, Hirotsugu Sakamoto, Takeshi Ookawara, Toshihiro Sato
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Patent number: 11825660Abstract: A semiconductor device is provided. The semiconductor device includes a substrate, an electrode stack disposed on the substrate, the electrode stack including an interlayer insulation layer and a gate electrode structure that are alternately stacked in a direction perpendicular to the substrate, a trench penetrating the electrode stack to expose sidewall surfaces of the interlayer insulation layer and the gate electrode structure, a gate dielectric layer disposed along a sidewall surface of the trench, the gate dielectric layer including a ferroelectric portion and a non-ferroelectric portion, and a channel layer disposed to adjacent to the gate dielectric layer. The ferroelectric portion is in contact with the gate electrode structure, and the non-ferroelectric portion is in contact with the interlayer insulation layer.Type: GrantFiled: December 22, 2021Date of Patent: November 21, 2023Assignee: SK HYNIX INC.Inventors: Hyangkeun Yoo, Jae Gil Lee, Se Ho Lee
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Patent number: 11818969Abstract: The disclosed subject matter relates generally to memory devices and a method of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices. The present disclosure provides a memory device including a first electrode having tapered sides that converge at a top of the first electrode, a dielectric layer disposed on and conforming to the tapered sides of the first electrode, a resistive layer in contact with the top of the first electrode and the dielectric layer, and a second electrode disposed on the resistive layer.Type: GrantFiled: November 13, 2020Date of Patent: November 14, 2023Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.Inventors: Jianxun Sun, Juan Boon Tan, Tupei Chen
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Patent number: 11810947Abstract: A semiconductor device includes a substrate, a bottom electrode on the substrate, a first support layer on the substrate next to a sidewall of the bottom electrode, a dielectric layer covering the sidewall and a top surface of the bottom electrode, and a top electrode on the dielectric layer. The bottom electrode includes a first part having a plurality of protrusions that protrude from a sidewall of the first part. The first part of the bottom electrode may be on the first support layer.Type: GrantFiled: November 29, 2021Date of Patent: November 7, 2023Assignee: Samsung Electronics Co., Ltd.Inventors: Hyukwoo Kwon, Ha-young Yi, Byoungdeog Choi, Seongmin Choo