Patents Examined by Mary Wilczewski
  • Patent number: 11961789
    Abstract: A semiconductor package includes a chip, a redistribution structure, and first under-ball metallurgies patterns. The chip includes conductive posts exposed at an active surface. The redistribution structure is disposed on the active surface. The redistribution structure includes a first dielectric layer, a topmost metallization layer, and a second dielectric layer. The first dielectric layer includes first openings exposing the conductive posts of the chip. The topmost metallization layer is disposed over the first dielectric layer and is electrically connected to the conductive posts. The topmost metallization layer comprises first contact pads and routing traces connected to the first contact pads. The second dielectric layer is disposed on the topmost metallization layer and includes second openings exposing the first contact pads. The first under-ball metallurgies patterns are disposed on the first contact pads, extending on and contacting sidewalls and top surfaces of the first contact pads.
    Type: Grant
    Filed: October 20, 2020
    Date of Patent: April 16, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chen-Hua Yu, Chun-Hui Yu, Kuo-Chung Yee
  • Patent number: 11956964
    Abstract: A semiconductor memory device according to the present embodiment includes a semiconductor substrate, a structure including a plurality of insulating films and a plurality of conductive films alternately stacked on the semiconductor substrate, and a pillar penetrating the structure. The plurality of conductive films include a plurality of first conductive films and a second conductive film arranged closer to the semiconductor substrate than the plurality of first conductive films. The pillar has a first epitaxial growth layer doped with boron and carbon in a part in contact with the semiconductor substrate, and configured to functions as a part of a source side select gate transistor together with the second conductive film. The plurality of first conductive films configured to functions as a part of a plurality of non-volatile memory cells.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: April 9, 2024
    Assignee: Kioxia Corporation
    Inventor: Ken Komiya
  • Patent number: 11950417
    Abstract: A semiconductor device including a stack structure including gate layers and interlayer insulating layers spaced apart in a vertical direction, a channel hole penetrating the stack structure in the vertical direction, a core region extending within the channel hole, a channel layer disposed on a side surface of the core region, a first dielectric layer, a data storage layer and a second dielectric layer, which are disposed between the channel layer and the gate layers, and a pad pattern disposed on the core region, in the channel hole, and in contact with the channel layer. A first horizontal distance between a side surface of a first portion of an uppermost gate layer and an outer side surface of the channel layer is greater than a second horizontal distance between a side surface of a second portion of the uppermost gate layer and an outer side surface of the pad pattern.
    Type: Grant
    Filed: February 10, 2021
    Date of Patent: April 2, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Wukang Kim, Sejun Park, Hyoje Bang, Jaeduk Lee, Junghoon Lee
  • Patent number: 11948890
    Abstract: In an embodiment, a device includes: an integrated circuit die; a through via adjacent the integrated circuit die; a molding compound encapsulating the integrated circuit die and the through via; and a redistribution structure including: a first conductive via extending through a first dielectric layer, the first conductive via electrically connected to the integrated circuit die, the first dielectric layer being over the integrated circuit die, the through via, and the molding compound; and a first conductive line over the first dielectric layer and the first conductive via, the first conductive via extending into the first conductive line.
    Type: Grant
    Filed: June 7, 2021
    Date of Patent: April 2, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shih-Hao Tseng, Hung-Jui Kuo, Ming-Che Ho
  • Patent number: 11942425
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes a semiconductor substrate, a contact structure, a first conductive element, and a first dielectric spacer structure. The semiconductor substrate includes an active region and an isolation structure. The contact structure is on the active region of the semiconductor substrate. The first conductive element is on the isolation structure of the semiconductor substrate. The first dielectric spacer structure is between the contact structure and the first to conductive element. The first dielectric spacer structure has a first concave surface facing the first conductive element.
    Type: Grant
    Filed: April 19, 2022
    Date of Patent: March 26, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Chih-Ying Tsai, Jui-Seng Wang, Yi-Yi Chen
  • Patent number: 11942343
    Abstract: The present disclosure relates generally to ion implantation, and more particularly, to systems and processes for measuring the temperature of a wafer within an ion implantation system. An exemplary ion implantation system may include a robotic arm, one or more load lock chambers, a pre-implantation station, an ion implanter, a post-implantation station, and a controller. The pre-implantation station is configured to heat or cool a wafer prior to the wafer being implanted with ions by the ion implanter. The post-implantation station is configured to heat or cool a wafer after the wafer is implanted with ions by the ion implanter. The pre-implantation station and/or post-implantation station are further configured to measure a current temperature of a wafer. The controller is configured to control the various components and processes described above, and to determine a current temperature of a wafer based on information received from the pre-implantation station and/or post-implantation station.
    Type: Grant
    Filed: January 29, 2021
    Date of Patent: March 26, 2024
    Assignee: Advanced Ion Beam Technology, Inc.
    Inventors: Chien-Li Chen, Steven R. Walther
  • Patent number: 11937420
    Abstract: The present application provides a memory device having a word line with an improved adhesion between a work function member and a conductive layer. The memory device includes a semiconductor substrate defined with an active area and including a recess extending into the semiconductor substrate, and a word line disposed within the recess, wherein the word line includes a first insulating layer disposed within and conformal to the recess, a conductive layer surrounded by the first insulating layer, a conductive member enclosed by the conductive layer, and a second insulating layer disposed over the conductive layer and conformal to the first insulating layer. A method of manufacturing the memory device is also disclosed.
    Type: Grant
    Filed: January 19, 2022
    Date of Patent: March 19, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Yueh Hsu, Wei-Tong Chen
  • Patent number: 11935793
    Abstract: A method includes forming a source/drain region in a semiconductor fin; after forming the source/drain region, implanting first impurities into the source/drain region; and after implanting the first impurities, implanting second impurities into the source/drain region. The first impurities have a lower formation enthalpy than the second impurities. The method further includes after implanting the second impurities, annealing the source/drain region.
    Type: Grant
    Filed: May 29, 2020
    Date of Patent: March 19, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Chang Lin, Tien-Shun Chang, Chun-Feng Nieh, Huicheng Chang, Yee-Chia Yeo
  • Patent number: 11915968
    Abstract: The present disclosure relates to a semiconductor structure and a method for manufacturing the same. The method includes: providing a base, at least one shallow trench isolating structure being formed in the base and several active regions arranged at an interval being isolated by the shallow trench isolating structure in the base; forming a first trench in the base, a part of the active regions being exposed in the first trench; forming a first conducting structure in the first trench; forming a first dielectric layer on the base; forming a second trench in the first dielectric layer, the first conducting structure being exposed in the second trench and a width of a top of the second trench being greater than a width of a top of the first trench; and forming a second conducting structure in the second trench.
    Type: Grant
    Filed: February 15, 2022
    Date of Patent: February 27, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventor: Wenli Chen
  • Patent number: 11917816
    Abstract: A semiconductor device includes a substrate including a memory cell region and a peripheral circuit region, the peripheral circuit region including a first peripheral circuit region including a first transistor and a second peripheral circuit region including a second transistor; a storage node contact plug positioned in an upper portion of the substrate in the memory cell region; a landing pad over the storage node contact plug; a first metal wire coupled to the first transistor; and a second metal wire coupled to the second transistor, wherein a thickness of the landing pad and a thickness of the first metal wire are smaller than a thickness of the second metal wire.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: February 27, 2024
    Assignee: SK hynix Inc.
    Inventor: Se Han Kwon
  • Patent number: 11915967
    Abstract: The present disclosure discloses a semiconductor device manufacturing method and a semiconductor device, relating to the technical field of semiconductors. The method includes: providing a semiconductor substrate, the semiconductor substrate comprising a shallow trench and active areas isolated from the shallow trench; forming an oxygen-containing layer on exposed outer surfaces of the shallow trench and the active areas; filling a first sacrificial layer of a set height in the shallow trench comprising the oxygen-containing layer on its surface; forming an etch stop layer on an upper surface of the first sacrificial layer; removing the first sacrificial layer below the etch stop layer to form an air gap; filling an isolation layer on the etch stop layer in the shallow trench to form a shallow trench isolation(STI) structure containing the air gap; and etching the active areas and the (STI) structure to form wordline trenches.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: February 27, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Kui Zhang, Zhan Ying
  • Patent number: 11916011
    Abstract: Memory devices are implemented within a vertical memory structure, comprising a stack of alternating layers of insulator material and word line material, with a series of alternating conductive pillars and insulating pillars disposed through stack. Data storage structures are disposed on inside surfaces of the layers of word line material at cross-points of the insulating pillars and the layers of word line material. Semiconductor channel material is disposed between the insulating pillars and the data storage structures at cross-points of the insulating pillars with the layers of word line material. The semiconductor channel material extends around an outside surface of the insulating pillars, contacting the adjacent conductive pillars on both sides to provide source/drain terminals.
    Type: Grant
    Filed: April 14, 2021
    Date of Patent: February 27, 2024
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Erh-Kun Lai, Hsiang-Lan Lung
  • Patent number: 11917813
    Abstract: The present disclosure provides a dynamic random access memory (DRAM) array. The memory array includes a semiconductor substrate, an isolation structure and contact enhancement sidewall spacers. The semiconductor substrate has a trench defining laterally separate active areas formed of surface regions of the semiconductor substrate. Top surfaces of a first group of the active areas are recessed with respect to top surfaces of a second group of the active areas. The isolation structure is filled in the trench and in lateral contact with bottom portions of the active areas. The contact enhancement sidewall spacers laterally surround top portions of the active areas, respectively.
    Type: Grant
    Filed: November 17, 2021
    Date of Patent: February 27, 2024
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventor: Ping Hsu
  • Patent number: 11908703
    Abstract: Heating treatment is performed on multiple dummy wafers to preheat in-chamber structures including a susceptor and the like prior to the treatment of a semiconductor wafer to be treated. The first few ones of the multiple dummy wafers are heated to a first heating temperature by light irradiation from halogen lamps, and are thereafter irradiated with a flash of light. The subsequent few ones of the multiple dummy wafers are heated to a second heating temperature lower than the first heating temperature by light irradiation from the halogen lamps, and are thereafter irradiated with a flash of light. This stabilizes the temperature of the in-chamber structures in a shorter time with fewer dummy wafers because the dummy wafers are heated to the high temperature and thereafter heated to the low temperature.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: February 20, 2024
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Mao Omori, Kazuhiko Fuse
  • Patent number: 11910595
    Abstract: The invention discloses a semiconductor memory device, which is characterized by comprising a substrate defining a cell region and an adjacent periphery region, a plurality of bit lines are arranged on the substrate and arranged along a first direction, each bit line comprises a conductive part, and the bit line comprises four sidewalls, and a spacer surrounds the four sidewalls of the bit line, the spacer comprises two short spacers covering two ends of the conductive part, two long spacers covering the two long sides of the conductive part, and a plurality of storage node contact isolations located between any two adjacent bit lines, at least a part of the storage node contact isolations cover directly above the spacers. The structure of the invention can improve the electrical isolation effect, preferably avoid leakage current and improve the quality of components.
    Type: Grant
    Filed: August 23, 2021
    Date of Patent: February 20, 2024
    Assignee: Fujian Jinhua Integrated Circuit Co., Ltd.
    Inventors: Yu-Cheng Tung, Janbo Zhang, Shih-Han Hung, Li-Wei Feng
  • Patent number: 11901210
    Abstract: A 3D semiconductor device including: a first level including a plurality of first single-crystal transistors; a plurality of memory control circuits formed from at least a portion of the plurality of first single-crystal transistors; a first metal layer disposed atop the plurality of first single-crystal transistors; a second metal layer disposed atop the first metal layer; a second level disposed atop the second metal layer, the second level including a plurality of second transistors; a third level including a plurality of third transistors, where the third level is disposed above the second level; a third metal layer disposed above the third level; and a fourth metal layer disposed above the third metal layer, where the plurality of second transistors are aligned to the plurality of first single crystal transistors with less than 140 nm alignment error, the second level includes first memory cells, the third level includes second memory cells.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: February 13, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11895844
    Abstract: A semiconductor memory device according to an embodiment includes a substrate including block areas, members, conductive layers, and pillars. Each of the members is respectively disposed at a boundary portion between the block areas. At least one member of the members includes first portions and a second portion. The first portions are arranged in a first direction. The second portion is disposed between any two adjacent ones of the first portions. Either one of one of the first portions and the second portion of the member is referred to as a third portion. The other one of the one of the first portions and the second portion of the member is referred to as a fourth portion. The third portion has a width in a second direction greater than a width of the fourth portion in the second direction.
    Type: Grant
    Filed: March 12, 2021
    Date of Patent: February 6, 2024
    Assignee: Kioxia Corporation
    Inventor: Genki Kawaguchi
  • Patent number: 11895875
    Abstract: A display device includes: a substrate including a curved portion and a flat portion; an insulating layer disposed on the substrate; a first organic light emitting diode disposed on the insulating layer and having a first projection; and a second organic light emitting diode having a second projection, wherein a light emission portion is disposed in the curved portion and the flat portion, the first projection overlaps the light emission portion disposed in the curved portion and is asymmetric in the light emission portion, and the second projection overlaps the light emission portion in the flat portion and is symmetric in the light emission portion.
    Type: Grant
    Filed: November 19, 2021
    Date of Patent: February 6, 2024
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Won Ju Kwon, Hee Seong Jeong
  • Patent number: 11889683
    Abstract: A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. A channel-material string is in individual channel openings in the vertically-alternating first tiers and second tiers. A conductor-material contact is in the individual channel openings directly against the channel material of individual of the channel-material strings. The conductor-material contacts are vertically recessed in the individual channel openings. A conductive via is formed in the individual channel openings directly against the vertically-recessed conductor-material contact in that individual channel opening. Other aspects, including structure independent of method, are disclosed.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: January 30, 2024
    Assignee: Micron Technology, Inc.
    Inventors: John D. Hopkins, Darwin A. Clampitt, Michael J. Puett, Christopher R. Ritchie
  • Patent number: 11876006
    Abstract: Film information about a thin film formed on the front surface of a semiconductor wafer, substrate information about the semiconductor wafer, and an installation angle of an upper radiation thermometer are set and input. Emissivity of the front surface of the semiconductor wafer formed with a multilayer film is calculated based on the various kinds of information. Further, a weighted average efficiency of the emissivity of the front surface of the semiconductor wafer is determined based on a sensitivity distribution of the upper radiation thermometer. Front surface temperature of the semiconductor wafer at the time of heat treatment is measured using the determined weighted average efficiency of the emissivity. The emissivity is determined based on the film information and the like, so that the front surface temperature of the semiconductor wafer can be accurately measured even when thin films are formed in multiple layers.
    Type: Grant
    Filed: July 1, 2020
    Date of Patent: January 16, 2024
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Tomohiro Ueno, Takahiro Kitazawa, Yoshihide Nozaki