Patents Examined by Michael G Miller
  • Patent number: 11047044
    Abstract: A film forming apparatus includes: a substrate holding member for vertically holding target substrates at predetermined intervals in multiple stages; a process vessel for accommodating the substrate holding member; a processing gas introduction member each having gas discharge holes which discharge a processing gas for film formation in a direction parallel to each target substrate and introduce the processing gas into the process vessel; an exhaust mechanism for exhausting the interior of the process vessel; and a plurality of gas flow adjustment members installed to face the target substrates, respectively. Each of the gas flow adjustment members adjusts a gas flow of the processing gas discharged horizontally above each of the target substrates from the gas discharge holes of the processing gas introduction member, to be directed from above the respective target substrate located below the respective gas flow adjustment member toward the surface of the respective target substrate.
    Type: Grant
    Filed: December 13, 2017
    Date of Patent: June 29, 2021
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Yoshihiro Takezawa, Kuniyasu Sakashita, Shigeru Nakajima
  • Patent number: 11021789
    Abstract: A conical supply tube is provided, along with deposition systems using such a tube and methods of its use. The conical supply tube includes a conical head formed from a hollow structure defining a having a fitting end and an opposite, shower end, with the fitting end has an initial diameter that is less than a diameter at the shower end. A MOCVD chamber is also generally provided that includes such a conical supply tube and a susceptor configured to hold a substrate facing the shower end of the conical supply tube. Methods are provided for growing a group III nitride layer on a surface of a substrate.
    Type: Grant
    Filed: June 22, 2016
    Date of Patent: June 1, 2021
    Assignee: University of South Carolina
    Inventor: Asif Khan
  • Patent number: 11021793
    Abstract: Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.
    Type: Grant
    Filed: May 31, 2018
    Date of Patent: June 1, 2021
    Assignee: L'Air Liquide, Société Anonyme pour I'Etude et I'Exploitation des Procédés Georges Claude
    Inventors: Rocio Arteaga, Raphael Rochat, Antonio Sanchez, Jean-Marc Girard, Nicolas Blasco, Santiago Marques-Gonzalez, Clément Lansalot-Matras, Jooho Lee, Zhiwen Wan
  • Patent number: 10988842
    Abstract: A two-dimensional transition-metal dichalcogenide layer is grown by reacting a non- or low-volatile source material with a volatilized halogen or halide compound to produce a volatilized composition comprising at least one reaction product. The volatilized composition is flowed through an open chamber of a tube furnace with a temperature gradient, wherein the temperature changes along a path through which the volatilized composition flows through the open chamber of the tube furnace. Where the temperature along the path in the open chamber is in a reaction-temperature range, the volatilized composition is deposited as a two-dimensional crystalline transition-metal dichalcogenide layer.
    Type: Grant
    Filed: April 17, 2018
    Date of Patent: April 27, 2021
    Assignee: Massachusetts Institute of Technology
    Inventors: Brian J. Modtland, Jing Kong, Marc A. Baldo, Efren Navarro-Moratalla, Xiang Ji
  • Patent number: 10988844
    Abstract: Processes for producing flexible organic-inorganic laminates by atomic layer deposition are described, as well as barrier films comprising flexible organic-inorganic laminates. In particular, a process for producing a laminate including (a) depositing an inorganic layer by an atomic layer deposition process, and (b) depositing an organic layer comprising selenium by a molecular layer deposition process is provided.
    Type: Grant
    Filed: December 22, 2015
    Date of Patent: April 27, 2021
    Assignee: BASF Coatings GmbH
    Inventors: Maraike Ahlf, Juergen Frank, Torben Adermann, Stephan Klotz
  • Patent number: 10981372
    Abstract: A three-dimensional inkjet printer and method for printing an aperture mask on a multi-spectral filter array. A custom tray is used by the printer allowing for printing on a prefabricated filter array. Photopolymer resin is deposited on the prefabricated filter array to form the aperture mask of dark mirror coating. An ultraviolet lamp illuminates the deposited photopolymer resin on the surface of the prefabricated multi-spectral optical filter array to cure the resin, thereby forming the mask. The prefabricated multi-spectral optical filter array includes an optical coating on at least one side, the aperture mask being formed on the optical coating, without the use of heat, chemical etching, or deformation of the optical coating.
    Type: Grant
    Filed: December 11, 2018
    Date of Patent: April 20, 2021
    Assignee: Materion Corporation
    Inventor: Kevin R. Downing
  • Patent number: 10927446
    Abstract: This method for producing a transparent optical film includes a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer formed of a high standard electrode potential metal having a higher standard electrode potential than that of silver by vacuum deposition, and an alloying step of forming a silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50° C. or higher and 400° C. or lower.
    Type: Grant
    Filed: September 12, 2019
    Date of Patent: February 23, 2021
    Assignee: FUJIFILM Corporation
    Inventors: Seigo Nakamura, Kenichi Umeda, Yuichiro Itai, Shinichiro Sonoda
  • Patent number: 10928552
    Abstract: As described above, one or more aspects of the present disclosure provide articles having structural color, and methods of making articles having structural color. The articles incorporate a primer layer having a percent transmittance of about 40% or less in conjunction with an optical element. The optical element and primer layer impart a structural color to the article.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: February 23, 2021
    Assignee: NIKE, Inc.
    Inventors: Jennifer Bee, Jeremy Gantz, Kim Kovel
  • Patent number: 10914006
    Abstract: A nanoparticle continuous-coating device based on spatial atomic layer deposition. A first-stage pipeline unit, a second-stage pipeline unit, a third-stage pipeline unit and a fourth-stage pipeline unit which are connected sequentially. The first-stage pipeline unit is used for providing a first precursor and enabling the first precursor to be adsorbed on surfaces of nanoparticles. The third-stage pipeline unit is used for providing a second precursor and enabling the second precursor to react with the first precursor on the surfaces of the nanoparticles, so that a monomolecular thin film layer is generated on the surfaces of the nanoparticles. The second-stage and fourth-stage pipeline units are used for cleaning the nanoparticles and discharging the redundant first precursor, the redundant second precursor or reaction by-products.
    Type: Grant
    Filed: May 14, 2018
    Date of Patent: February 9, 2021
    Assignee: Huazhong University of Science and Technology
    Inventors: Rong Chen, Weiming Ba, Kai Qu, Yun Li, Kun Cao, Wei Dan
  • Patent number: 10914863
    Abstract: Techniques include receiving a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex refractive indices, complex refractive indices of adjacent layers being different from each other, and a notional ICE fabricated in accordance with the ICE design being related to a characteristic of a sample; forming at least some of the layers of a plurality of ICEs in accordance with the ICE design using a deposition source, where the layers of the ICEs being formed are supported on a support that is periodically moved relative to the deposition source during the forming; monitoring characteristics of the layers of the ICEs during the forming, the monitoring of the characteristics being performed using a timing of the periodic motion of the support relative to the deposition source; and adjusting the forming based on results of the monitoring.
    Type: Grant
    Filed: December 24, 2013
    Date of Patent: February 9, 2021
    Assignee: Halliburton Energy Services, Inc.
    Inventors: James M. Price, Aditya B. Nayak, David L. Perkins
  • Patent number: 10907038
    Abstract: Methods are provided for fabricating functional nanostructures (e.g., nanowires/nanofibers) via chemical vapor deposition polymerization of paracyclophanes or substituted paracyclophanes onto and through a structured fluid, such as a film of liquid crystals, on a substrate. A one-step process is provided that does not require the use of any solid templates, nor does it require any volatile solvents, additives or catalysts. The resulting nanowires/nanofibers can be in the form of aligned nanowires/nanofibers arrays supported on any solid material, in the form of nanofibers mats supported on porous materials, or as individual free-standing nanowires/nanofibers. By using chiral liquid crystals, chiral nanofibers can be fabricated. The functional nanowires/nanofibers can contain one or more type of surface reactive groups that allows for post surface chemical modifications on the nanowires/nanofibers. Such nanostructures can be used in a range of different applications, including in biomedical applications.
    Type: Grant
    Filed: April 14, 2017
    Date of Patent: February 2, 2021
    Assignees: THE REGENTS OF THE UNIVERSITY OF MICHIGAN, Wisconsin Alumni Research Foundation
    Inventors: Marco A. Bedolla Pantoja, Nicholas L. Abbott, Kenneth Cheng, Joerg Lahann
  • Patent number: 10892143
    Abstract: Implementations of the present disclosure provide methods for treating a processing chamber. In one implementation, the method includes purging a 300 mm substrate processing chamber, without the presence of a substrate, by flowing a purging gas into the substrate processing chamber at a flow rate of about 0.14 sccm/mm2 to about 0.33 sccm/mm2 and a chamber pressure of about 1 Torr to about 30 Torr, with a throttle valve of a vacuum pump system of the substrate processing chamber in a fully opened position, wherein the purging gas is chemically reactive with deposition residue on exposed surfaces of the substrate processing chamber.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: January 12, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Vivek Bharat Shah, Bhaskar Kumar, Anup Kumar Singh, Ganesh Balasubramanian
  • Patent number: 10888894
    Abstract: A method of applying a coating liquid to an optical fiber is described. An optical fiber is drawn through a guide die into a pressurized coating chamber and through the pressurized coating chamber to a sizing die. The pressurized coating chamber contains a coating liquid. The method includes directing coating liquid in a direction transverse to the processing pathway of the optical fiber in the pressurized coating chamber. The transverse flow of coating liquid counteracts detrimental effects associated with gyres that form in the pressurized coating chamber during the draw process. Benefits of the transverse flow include removal of bubbles, reduction in the temperature of the gyre, improved wetting, homogenization of the properties of the coating liquid in the pressurized coating chamber, and stabilization of the meniscus.
    Type: Grant
    Filed: April 11, 2018
    Date of Patent: January 12, 2021
    Assignee: Corning Incorporated
    Inventors: Robert Clark Moore, Douglas Gregg Neilson, Johnnie Edward Watson
  • Patent number: 10852222
    Abstract: A method of inspecting a degree of air bubbles which are mixed into an ultraviolet curable resin for an optical fiber having viscosity of 1.2 Pa·s to 6.2 Pa·s at a temperature of 25±5° C., is performed in such a manner that the ultraviolet curable resin for an optical fiber which is an inspecting target is put into a sealed apparatus, then the inside of the sealed apparatus is decompressed to be a predetermined pressure, and then the sealed apparatus is left to stand as it is for a predetermined time. If a ratio of the volume expansion of the ultraviolet curable resin for an optical fiber is equal to or less than a predetermined threshold, the ultraviolet curable resin for an optical fiber is recognized as an accepted product.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: December 1, 2020
    Assignee: SUMITOMO ELECTRIC INDUSTRIES, LTD.
    Inventors: Akihisa Yamaguchi, Masayuki Kato, Hitoshi Tsubakiyama
  • Patent number: 10837108
    Abstract: A CVD process for depositing a silica coating is provided. The process includes providing a float glass ribbon in a float glass manufacturing process. The process also includes forming a gaseous mixture including a silane compound, oxygen, a fluorine-containing compound, and a radical scavenger. The gaseous mixture is directed toward and along the float glass ribbon and is reacted over the float glass ribbon to form the silica coating thereon. The silica coating comprises silicon dioxide.
    Type: Grant
    Filed: June 29, 2016
    Date of Patent: November 17, 2020
    Assignee: Pilkington Group Limited
    Inventors: Douglas Martin Nelson, Michael Martin Radtke, Steven Edward Phillips
  • Patent number: 10837107
    Abstract: A method of contactlessly advancing a substrate (140), comprising: —providing a process tunnel (102), extending in a longitudinal direction and bounded by at least a first (120) and a second (134) wall; —providing first and second gas bearings (124, 134) by providing substantially laterally flowing gas alongside the first and second walls respectively; —bringing about a first longitudinal division of the process tunnel into a plurality of pressure segments (116), wherein the gas bearings (124, 34) in a pressure segment have an average gas pressure that is different from an average gas pressure of the gas bearings in an adjacent pressure segment; —providing a substrate (140) in between the first wall (120) and the second wall (130); and 1—allowing differences in average gas pressure between adjacent pressure segments (116) to drive the substrate along the longitudinal direction of the process tunnel.
    Type: Grant
    Filed: July 6, 2011
    Date of Patent: November 17, 2020
    Assignee: ASM INTERNATIONAL N.V.
    Inventors: Ernst Hendrik August Granneman, Vladimir Kuznetsov
  • Patent number: 10815357
    Abstract: In one embodiment, a coating is provided that includes a deposition surface, and a coating on the deposition surface. The coating may include particles of a metal chalcogenide comprising a fullerene-like geometry, a tubular-like geometry or a combination of fullerene-like geometries and tubular-like geometries. The metal chalcogenide composition has a molecular formula of MX2.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: October 27, 2020
    Assignee: NANOTECH INDUSTRIAL SOLUTIONS, INC
    Inventors: Eugene Kverel, Ronen Kreizman, George Diloyan, Alon Shapira
  • Patent number: 10801105
    Abstract: The present invention is in the field of processes for the generation of thin inorganic films on substrates, in particular atomic layer deposition processes. The present invention relates to a process comprising bringing a compound of general formula (I) into the gaseous or aerosol state and depositing the compound of general formula (I) from the gaseous or aerosol state onto a solid substrate, wherein R1, R2, R3, and R4 are independent of each other an alkyl group, an aryl group or a trialkylsilyl group, M is Mn, Ni or Co, X is a ligand which coordinates M, wherein at least one X is a neutrally charged ligand, m is 1, 2 or 3 and n is at least 1 wherein the molecular weight of the compound of general formula (I) is up to 1000 g/mol.
    Type: Grant
    Filed: November 18, 2016
    Date of Patent: October 13, 2020
    Assignee: BASF SE
    Inventors: Torben Adermann, Daniel Loeffler, Carolin Limburg, Falko Abels, Hagen Wilmer, Monica Gill, Matthew Griffiths, Sean Barry
  • Patent number: 10796902
    Abstract: A method performed by a film deposition apparatus includes supplying a first reaction gas, which is adsorbable to hydroxyl groups, to a surface of a substrate and causing the first reaction gas to be adsorbed onto the surface of the substrate; supplying a second reaction gas to the substrate and causing the second reaction gas to react with the first reaction gas adsorbed onto the surface of the substrate to form a reaction product on the substrate; supplying an activated third reaction gas to the substrate to modify a surface of the reaction product; and supplying a fourth reaction gas including a hydrogen-containing gas to at least a partial area of the modified surface of the reaction product to form hydroxyl groups on at least the partial area.
    Type: Grant
    Filed: May 11, 2017
    Date of Patent: October 6, 2020
    Assignee: Tokyo Electron Limited
    Inventor: Shigehiro Miura
  • Patent number: 10774418
    Abstract: Systems and methods are disclosed for improving optical spectrum fidelity of an integrated computational element fabricated on a substrate. The integrated computational element is configured, upon completion, to process an optical spectrum representing a chemical constituent of a production fluid from a wellbore. The systems and methods measure in situ a thickness, a complex index of refraction, or both of a film formed during fabrication to generate a predicted optical spectrum. The predicted optical spectrum is compared to a target optical spectrum. Revisions to a design of the integrated computational element are conducted in situ to improve optical spectrum fidelity relative to the target optical spectrum. Other systems and methods are presented.
    Type: Grant
    Filed: December 23, 2013
    Date of Patent: September 15, 2020
    Assignee: Halliburton Energy Services, Inc.
    Inventors: Aditya B. Nayak, James M. Price, David L. Perkins