Abstract: A method for improving the beam current for certain ion beams, and particularly germanium and argon, is disclosed. The use of argon as a second gas has been shown to improve the ionization of germane, allowing the formation of a germanium ion beam of sufficient beam current without the use of a halogen. Additionally, the use of germane as a second gas has been shown to improve the beam current of an argon ion beam.

Abstract: A method of operating an atomic force microscope, comprising a probe, the probe being moved forth and back during respective trace and retrace times of a scan line, the method comprising: a) during trace time, oscillating the probe, b) generating a z feedback signal to keep an amplitude of oscillation of the probe constant at a setpoint value, the z feedback signal being generated by a first feedback loop, c) during retrace time, placing the probe in a drift compensation state by changing the setpoint value to a different value so that the z feedback signal being generated by the first feedback loop causes the probe to move away from the sample and oscillate free, d) detecting an amplitude of free oscillation of the probe and adjusting with a second feedback loop its excitation signal to maintain the amplitude of free oscillation of the probe close to a set value.

Abstract: A multi-column scanning electron microscopy (SEM) system includes a column assembly, where the column assembly includes a first substrate array assembly and at least a second substrate array assembly. The system also includes a source assembly, the source assembly including two or more illumination sources configured to generate two or more electron beams and two or more sets of a plurality of positioners configured to adjust a position of a particular illumination source of the two or more illumination sources in a plurality of directions. The system also includes a stage configured to secure a sample, where the column assembly directs at least a portion of the two or more electron beams onto a portion of the sample.

Abstract: A scanning probe microscope includes a position change unit that relatively changes positions of a fixed end of a cantilever and a surface of a sample S in a Z direction, a deflection amount measurement unit that measures a deflection amount of the cantilever, a Z direction movement distance detector that detects a movement distance in the Z direction while the fixed end is relatively moved with respect to the surface of the sample S from a predetermined initial position until a tip of a probe comes into contact with the surface of the sample S and the deflection amount becomes a predetermined value, and an initial position change unit that changes the initial position to a position further away from the surface of the sample S when the movement distance is below a predetermined lower limit.

Abstract: An electron diffraction imaging system for imaging the three-dimensional structure of a single target molecule of a sample uses an electron source that emits a beam of electrons toward the sample, and a two-dimensional detector that detects electrons diffracted by the sample and generates an output indicative of their spatial distribution. A sample support is transparent to electrons in a region in which the sample is located, and is rotatable and translatable in at least two perpendicular directions. The electron beam has an operating energy between 5 keV and 30 keV, and beam optics block highly divergent electrons to limit the beam diameter to no more than three times the size of the sample molecule and provide a lateral coherence length of at least 15 nm. An adjustment system adjusts the sample support position in response to the detector output to center the target molecule in the beam.

Abstract: A method of time-of-flight mass spectrometry is disclosed comprising: providing two ion mirrors (42) that are spaced apart in a first dimension (X-dimension) and that are each elongated in a second dimension (Z-dimension) orthogonal to the first dimension; introducing packets of ions (47) into the space between the mirrors using an ion introduction mechanism (43) such that the ions repeatedly oscillate in the first dimension (X-dimension) between the mirrors (42) as they drift through said space in the second dimension (Z-dimension); oscillating the ions in a third dimension (Y-dimension) orthogonal to both the first and second dimensions as the ions drift through said space in the second dimension (Z-dimension); and receiving the ions in or on an ion receiving mechanism (44) after the ions have oscillated multiple times in the first dimension (X-dimension); wherein at least part of the ion introduction mechanism (43) and/or at least part of the ion receiving mechanism (44) is arranged between the mirrors (42

Abstract: An object of the invention relates to the fact that the alignment of the sample stage and the optical image can be adjusted with high accuracy, good operability, and high throughput by utilizing a low magnification optical image and a high magnification optical image. The invention relates to the fact that an alignment adjustment by a sample table alignment can be performed using a first processed optical image obtained by enlarging or reducing or changing a visual field of the optical image of the sample table holding the sample by digital processing, and that an alignment adjustment by an alignment point designation can be performed using a second processed optical image different from the first processed optical image. According to the invention, it is possible to adjust the alignment of the sample stage and the optical image with reference to the outer shape of the sample table and the feature points on the sample without taking out the sample table holding the sample from the sample chamber.

Abstract: A method of storing high level radioactive waste, and specifically a method of adjusting or controlling the temperature of ventilation air flowing through a storage cavity of a ventilated system. The method includes positioning a metal canister containing high level radioactive waste in a storage cavity of the ventilated system. The ventilated system includes a cask body, a cask lid, a plurality of inlet ducts, and at least one outlet duct so that ventilation air can flow from atmosphere into the storage cavity where it is heated and then back out to the atmosphere. The method includes progressively reducing a cross-sectional area of one or more of the inlet ducts and/or the outlet duct over time so that a rate at which the ventilation air is heated within the storage cavity is maintained above a predetermined threshold to mitigate the risk of stress corrosion cracking in the metal canister.

Abstract: An apparatus and method for topographically characterizing a workpiece. The method includes scanning a first surface of a workpiece with a scanning probe at a first resolution to derive a first topographical image, and performing a refining operation on the first topographical image to obtain a true first topographical image. The method also includes scanning, with the scanning probe, a surface of interest of the workpiece, which is a sub-portion of the first surface, at a second resolution that is higher than the first resolution to derive a second topographical image. The second topographical image is scaled down to the first resolution. The method further includes performing a pattern recognition operation to substantially match the scaled-down second topographical image to a corresponding sub-portion of the true first topographical image. The matched sub-portion of the true first topographical image is employed to refine the second topographical image.

Abstract: A charged particle beam apparatus automatically prepares a sample piece from a sample. The apparatus includes a charged particle beam irradiation optical system that emits a charged particle beam. A sample stage with a sample placed thereon is movable relative to the charged particle beam irradiation optical system. A sample piece transferring device holds and transports a sample piece separated and extracted from the sample, and a holder fixing base holds a sample piece holder to which the sample piece is to be transferred. An electrical conduction sensor detects electrical conduction between the sample piece transferring device and an object, and a computer sets a time management mode when electrical conduction between the sample piece transferring device and the sample piece is not detected when the sample piece transferring device and the sample piece are connected to each other.

Abstract: An ionization method for use with mass spectrometry or ion mobility spectrometry is a small molecule compound(s) as a matrix into which is incorporated analyte. The matrix has attributes of sublimation or evaporation when placed in vacuum at or near room temperature and produces both positive and negative charges. Placing the sample into a region of sub-atmospheric pressure, the region being in fluid communication with the vacuum of the mass spectrometer or ion mobility spectrometer, produces gas-phase ions of the analyte for mass-to-charge or drift-time analysis without use of a laser, high voltage, particle bombardment, or a heated ion transfer region. This matrix and vacuum assisted ionization process can operate from atmosphere or vacuum and produces ions from large (e.g. proteins) and small molecules (e.g. drugs) with charge states similar to those observed in electrospray ionization.

Abstract: A method and system to improve asepsis during dental delivery includes a self-contained water delivery apparatus and a vacuum apparatus both of which provide disinfection of biohazards occurring during dental procedures. A UVC LED light emitting unit, with sanitary connections, may be releasably connected to the delivery and vacuum apparatus for improved maintenance and cleaning. A reservoir egress connector provides releasable engagement, fluid agitation, and unrestricted UV light transmission to improve water quality, reduce biofilm water contamination, reduce cross contamination, and reduce the potential spread of pathogens. The mounting system for the UVC LED light unit allows the apparatus to be used to decontaminate portable dental delivery units and vacuum units upon closure. A reflective interior of the cases improves irradiation of the enclosed system, reducing the risk and spread of pathogens.

Abstract: Disclosed is a suppression filter having a profile defining at least two reflective surface levels, each reflected surface level being separated by a separation distance. The separation distance is such that the reflective suppression filter is operable to substantially prevent specular reflection of radiation at a first wavelength and at a second wavelength incident on said reflective suppression filter. Also disclosed is a radiation collector, radiation source and lithographic apparatus comprising such a suppression filter, and to a method of determining a separation distance between at least two reflective surface levels of a suppression filter.

Abstract: An example particle therapy system may include: a synchrocyclotron to produce a particle beam; a scanner to move the particle beam in one or more dimensions relative to an irradiation target; and an energy degrader that is between the scanner and the irradiation target. The energy degrader may include multiple plates that are movable relative to a path of the particle beam, with the multiple plates each being controllable to move while in the path of the particle beam and during movement of the particle beam. An aperture may be between the energy degrader and the irradiation target. The aperture being may be to trim the particle beam prior to the particle beam reaching the irradiation target.

Abstract: Certain configurations of a stable capacitor are described which comprise electrodes produced from materials comprising a selected coefficient of thermal expansion to enhance stability. The electrodes can be spaced from each other through one of more dielectric layers or portions thereof. In some instances, the electrodes comprise integral materials and do not include any thin films. The capacitors can be used, for example, in feedback circuits, radio frequency generators and other devices used with mass filters and/or mass spectrometry devices.

Abstract: An optical source for a photolithography tool includes a source configured to emit a first beam of light and a second beam of light, the first beam of light having a first wavelength, and the second beam of light having a second wavelength, the first and second wavelengths being different; an amplifier configured to amplify the first beam of light and the second beam of light to produce, respectively, a first amplified light beam and a second amplified light beam; and an optical isolator between the source and the amplifier, the optical isolator including: a plurality of dichroic optical elements, and an optical modulator between two of the dichroic optical elements.

Abstract: A mounting apparatus for a shielding system for customized shielding of a patient or an operator from radiation. The shielding system is mounted on a rail of a table used for interventional medical procedures comprising a longitudinal rail edge. In use, the mounting apparatus is slidably engaged to a rail by mating a t-shaped groove to the rail. Extending from the mounting apparatus is one or more movable rods from which protective radio-opaque curtains are suspended.

Abstract: According to one aspect of the present invention, an optical system adjustment method of an image acquisition apparatus includes: extracting one primary electron beam after another from primary electron beams at a plurality of preset positions among multiple primary electron beams; and adjusting, a first detector being capable of individually detecting multiple secondary electrons emitted due to irradiation of a target with the multiple primary electron beams, a trajectory of the one primary electron beam using a primary electron optics while detecting secondary electrons corresponding to the one primary electron beam for each of the primary electron beams extracted one by one using a movable second detector having an inspection surface of a size capable of detecting the multiple secondary electrons as a whole and arranged on an optical path for guiding the multiple secondary electrons to the first detector.

Abstract: A method of operating a charged particle microscope comprising: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles, and irradiating the specimen with said beam; Using a detector to detect X-ray radiation emanating from the specimen in response to said irradiation, and to produce a spectrum comprising X-ray characteristic peaks on a Bremsstrahlung background, comprising the following additional steps: Using an elemental decomposition algorithm to analyze the characteristic peaks in said spectrum, thereby determining a reference group of major chemical elements contributing to the spectrum; Calculating an average atomic number for said reference group, and using this in a predictive model to generate a calculated Bremsstrahlung profile for the reference group; Fitting said calculated Bremsstrahlung profile to the Bremsstrahlung background in said spectrum, and attributing a discrepancy between the latter and the former to a residual element absent from, or inc

Abstract: A plasma generator and a method for setting an ion ratio. In an embodiment a plasma generator includes a piezoelectric transformer suitable for ionizing a process gas, an ion separation electrode and a drive circuit suitable for applying a potential to the ion separation electrode.