Patents Examined by Mounir Amer
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Patent number: 9396781Abstract: The present invention is directed to an STT-MRAM device including a plurality of magnetic tunnel junction (MTJ) memory elements. Each of the memory elements comprises a magnetic free layer structure and a magnetic reference layer structure with an insulating tunnel junction layer interposed therebetween; and a magnetic fixed layer separated from the magnetic reference layer structure by an anti-ferromagnetic coupling layer.Type: GrantFiled: February 5, 2014Date of Patent: July 19, 2016Assignee: Avalanche Technology, Inc.Inventors: Yuchen Zhou, Zihui Wang, Huadong Gan, Yiming Huai
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Patent number: 9397138Abstract: A manufacturing method of a semiconductor structure includes the following steps. A carrier and a dam element are provided, and the dam element is adhered to the carrier by a temporary bonding layer. The dam element is bonded on the wafer. A first isolation layer, a redistribution layer, a second isolation layer, and a conductive structure are formed on the wafer in sequence. The carrier, the dam element and the wafer are diced to form a semiconductor element. The semiconductor element is disposed on a printed circuit board, such that the conductive structure is electrically connected to the printed circuit board. An adhesion force of the temporary bonding layer is eliminated to remove the carrier. A lens assembly is disposed on the printed circuit board, such that the semiconductor element without the carrier is located in the lens assembly.Type: GrantFiled: February 3, 2015Date of Patent: July 19, 2016Assignee: XINTEC INC.Inventor: Chien-Hung Liu
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Patent number: 9386642Abstract: A semiconductor device (300a) comprising: a substrate (302) having a first surface (303); an n-type well (304) extending from the first surface (303) into the substrate (302) and configured to form a depletion region (306) in the substrate (302) around the n-type well (304); an insulating layer (340) extending over the first surface (303) of the substrate (302) from the n-type well (304), the insulating layer (340) configured to form an inversion layer (342) in the substrate (302) extending from the n-type well (304) adjacent to the first surface (303); wherein a p-type floating channel stopper (370a) is provided, configured to extend through the inversion layer (342) to reduce electrical coupling between the n-type well (304) and at least part of the inversion layer (342), and is electrically disconnected from a remainder of the substrate (320) outside of the depletion region (306).Type: GrantFiled: May 5, 2015Date of Patent: July 5, 2016Assignee: NXP B.V.Inventors: Godfried Henricus Josephus Notermans, Hans-Martin Ritter
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Patent number: 9385238Abstract: Stable electrical characteristics and high reliability are provided for a semiconductor device including an oxide semiconductor. In a transistor including an oxide semiconductor layer, a buffer layer containing a constituent similar to that of the oxide semiconductor layer is provided in contact with a top surface and a bottom surface of the oxide semiconductor layer. Such a transistor and a semiconductor device including the transistor are provided. As the buffer layer in contact with the oxide semiconductor layer, a film containing an oxide of one or more elements selected from aluminum, gallium, zirconium, hafnium, and a rare earth element can be used.Type: GrantFiled: June 29, 2012Date of Patent: July 5, 2016Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 9385004Abstract: Embodiments of the disclosure generally relate to a support cylinder used in a thermal process chamber. In one embodiment, the support cylinder comprises a ring body having an inner peripheral surface and an outer peripheral surface, wherein the ring body comprises an opaque quartz glass material and wherein the ring body is coated with an optical transparent layer. The optical transparent layer has a coefficient of thermal expansion that is substantially matched or similar to the opaque quartz glass material to reduce thermal expansion mismatch that may cause thermal stress under high thermal loads. In one example, the opaque quartz glass material is synthetic black quartz and the optical transparent layer comprises a clear fused quartz material.Type: GrantFiled: June 6, 2014Date of Patent: July 5, 2016Assignee: APPLIED MATERIALS, INC.Inventors: Mehran Behdjat, Aaron Muir Hunter, Joseph M. Ranish, Norman Tam, Jeffrey Tobin, Jiping Li, Martin Tran
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Patent number: 9373784Abstract: A semiconductor memory device includes a first insulating portion. The semiconductor memory device further includes a phase-change material element that contacts the first insulating portion. The semiconductor memory device further includes an electrode that contacts a side surface of the phase-change material element, the side surface of the phase-change material element being not parallel to a top surface of the electrode. The semiconductor memory device further includes a second insulating portion surrounding the phase-change material element.Type: GrantFiled: March 26, 2015Date of Patent: June 21, 2016Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATIONInventors: Jia Xu, GuanPing Wu, Chao Zhang, Daisy Liu
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Patent number: 9349623Abstract: Disclosed are a method and a system for processing wafers in fabricating a semiconductor device where disposing chemicals and wafer heating are needed for chemical reaction. A wafer is placed above a wafer heater such that a second surface faces the wafer heater, and heated from the second surface. A chemical layer is formed on an opposing first surface. The wafer heater is sized and configured to be capable of heating the entire second surface, and adapted to produce a locally differential temperature profile if needed. During heating, an actual temperature profile on the wafer may be monitored and transmitted to a computing system, which may generate a target temperature profile and control the wafer heater to adjust local temperatures on the wafer according to the target temperature profile. A supplemental heater for heating the chemicals may be used for finer control of the wafer temperature.Type: GrantFiled: January 31, 2014Date of Patent: May 24, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ying-Hsueh Chang Chien, Chi-Ming Yang
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Patent number: 9337424Abstract: A Magnetoresistive Tunnel Junction (MTJ) includes a magnetic reference layer disposed between a first electrode and a resistive layer. The junction also includes a magnetic free layer disposed between the resistive layer and a second electrode. The surface area of the free layer is less than the surface area of the reference layer.Type: GrantFiled: November 13, 2012Date of Patent: May 10, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Chwen Yu
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Patent number: 9337104Abstract: A method for manufacturing a semiconductor device includes providing a substrate, a dielectric layer on the substrate, a first hard mask layer on the substrate, and a second hard mask layer on the first hard mask layer. The method also includes removing the first hard mask layer using a reactive gas that does not cause damage to the dielectric layer to improve the performance and yield of the semiconductor device.Type: GrantFiled: May 11, 2015Date of Patent: May 10, 2016Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Jinghua Ni, Jian Zhao, Lei Wu
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Patent number: 9306159Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall. A dielectric material is implanted into the film of the adhesion species to form a sidewall liner.Type: GrantFiled: April 30, 2014Date of Patent: April 5, 2016Assignee: Micron Technology, Inc.Inventors: Tsz W. Chan, Yongjun Jeff Hu, Swapnil Lengade, Shu Qin, Everett Allen McTeer
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Patent number: 9293706Abstract: Methods for encapsulating OLED structures disposed on a substrate using a soft/polymer mask technique are provided. The soft/polymer mask technique can efficiently provide a simple and low cost OLED encapsulation method, as compared to convention hard mask patterning techniques. The soft/polymer mask technique can utilize a single polymer mask to complete the entire encapsulation process with low cost and without alignment issues present when using conventional metal masks. Rather than utilizing a soft/polymer mask, the encapsulation layers may be blanked deposited and then laser ablated such that no masks are utilized during the encapsulation process.Type: GrantFiled: February 3, 2012Date of Patent: March 22, 2016Assignee: APPLIED MATERIALS, INC.Inventors: Dieter Haas, John M. White, Byung-sung Leo Kwak, Soo Young Choi, Jrjyan Jerry Chen, Jose Manuel Dieguez-Campo
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Patent number: 9281201Abstract: A method of manufacturing a semiconductor device having a metal gate is provided. A substrate having a first conductive type transistor and a second conductive type transistor formed thereon is provided. The first conductive type transistor has a first trench and the second conductive type transistor has a second trench. A first work function layer is formed in the first trench. A hardening process is performed for the first work function layer. A softening process is performed for a portion of the first work function layer. A pull back step is performed to remove the portion of the first work function layer. A second work function layer is formed in the second trench. A low resistive metal layer is formed in the first trench and the second trench.Type: GrantFiled: September 18, 2013Date of Patent: March 8, 2016Assignee: UNITED MICROELECTRONICS CORP.Inventors: Ted Ming-Lang Guo, Chiu-Hsien Yeh, Chin-Cheng Chien, Chun-Yuan Wu
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Patent number: 9281471Abstract: Memory devices and methods for fabricating memory devices have been disclosed. One such memory device includes a first electrode material formed on a word line material. A selector device material is formed on the first electrode material. A second electrode material is formed on the selector device material. A phase change material is formed on the second electrode material. A third electrode material is formed on the phase change material. An adhesion species is plasma doped into sidewalls of the memory stack and a liner material is formed on the sidewalls of the memory stack. The adhesion species intermixes with an element of the memory stack and the sidewall liner to terminate unsatisfied atomic bonds of the element and the sidewall liner.Type: GrantFiled: April 30, 2014Date of Patent: March 8, 2016Assignee: Micron Technology, Inc.Inventors: Yongjun Jeff Hu, Tsz W. Chan, Swapnil Lengade, Everett Allen McTeer, Shu Qin
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Patent number: 9276047Abstract: A method for manufacturing a flexible display device includes forming a separation layer on a carrier substrate, laminating a flexible substrate having an area that is larger than an area of the separation layer, to the separation layer; forming a dummy pattern on and along an edge of the flexible substrate; exposing a portion of the separation layer by removing a portion of the flexible substrate at a side of the flexible substrate; and separating the separation layer and the flexible substrate from each other.Type: GrantFiled: January 30, 2014Date of Patent: March 1, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Yo-Sub Ko, Beung-Hwa Jeong, Hong-Ro Lee, Chang-Mo Park, Sung-Hoon Hong
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Patent number: 9275908Abstract: A semiconductor device includes at least one first semiconductor fin formed on an nFET region of a semiconductor device and at least one second semiconductor fin formed on a pFET region. The at least one first semiconductor fin has an nFET channel region interposed between a pair of nFET source/drain regions. The at least one second semiconductor fin has a pFET channel region interposed between a pair of pFET source/drain regions. The an epitaxial liner is formed on only the pFET channel region of the at least one second semiconductor fin such that a first threshold voltage of the nFET channel region is different than a second threshold voltage of the pFET channel.Type: GrantFiled: June 3, 2015Date of Patent: March 1, 2016Assignee: International Business Machines CorporationInventors: Pranita Kerber, Qiqing C. Ouyang, Alexander Reznicek
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Patent number: 9275877Abstract: A semiconductor device has a first insulating layer formed over a carrier. A first conductive layer is formed over the first insulating layer. A second insulating layer is formed over the first conductive layer. Vias are formed through the second insulating layer. A second conductive layer is formed over the second insulating layer and extends into the vias. A semiconductor die is mounted to the second conductive layer. A bond wire is formed between a contact pad on the semiconductor die and the second conductive layer. The second conductive layer extends to a mounting site of the semiconductor die to minimize the bond wire span. An encapsulant is deposited over the semiconductor die. A portion of the first insulating layer is removed to expose the second conductive layer. A portion of the first conductive layer is removed to electrically isolate remaining portions of the first conductive layer.Type: GrantFiled: September 20, 2011Date of Patent: March 1, 2016Assignee: STATS ChipPAC, Ltd.Inventors: Yaojian Lin, Rui Huang, Heap Hoe Kuan, Seng Guan Chow
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Patent number: 9257282Abstract: A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A dielectric layer is formed over a substrate. An interlayer is formed over the dielectric layer. A first photoresist layer with a first opening is formed over the interlayer and a second photoresist layer having a second opening is formed over the first photoresist layer. Spacers are formed along sidewalls of the first opening and the second opening. A first trench is formed in the interlayer by using the spacer along the first opening as an etch mask. A second trench is formed in the interlayer by using the spacer along the second opening as an etch mask. The first trench and the second trench are extended down into the dielectric layer as a lower portion and an upper portion, respectively, of a dielectric trench.Type: GrantFiled: May 2, 2014Date of Patent: February 9, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chih-Tsung Shih, Tsung-Min Huang, Chung-Ju Lee, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen
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Patent number: 9245994Abstract: A metal oxide semiconductor field effect transistor (MOSFET) in and on a semiconductor surface provides a drift region of a first conductivity type. A plurality of active area trenches in the drift region, and first and second termination trenches are each parallel to and together sandwiching the active area trenches. The active area trenches and termination trenches include a trench dielectric liner and electrically conductive filler material filled field plates. A gate is over the drain drift region between active area trenches. A body region of a second conductivity abuts the active region trenches. A source of the first conductivity type is in the body region on opposing sides of the gate. A vertical drain drift region uses the drift region below the body region. A first and second curved trench feature couples the field plate of the first and second termination trench to field plates of active area trenches.Type: GrantFiled: February 7, 2014Date of Patent: January 26, 2016Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Hideaki Kawahara, Christopher Boguslaw Kocon, Simon John Molloy, John Manning Savidge Neilson
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Patent number: 9230992Abstract: A semiconductor device includes at least one first semiconductor fin formed on an nFET region of a semiconductor device and at least one second semiconductor fin formed on a pFET region. The at least one first semiconductor fin has an nFET channel region interposed between a pair of nFET source/drain regions. The at least one second semiconductor fin has a pFET channel region interposed between a pair of pFET source/drain regions. The an epitaxial liner is formed on only the pFET channel region of the at least one second semiconductor fin such that a first threshold voltage of the nFET channel region is different than a second threshold voltage of the pFET channel.Type: GrantFiled: April 30, 2014Date of Patent: January 5, 2016Assignee: International Business Machines CorporationInventors: Pranita Kerber, Qiqing C. Ouyang, Alexander Reznicek
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Patent number: 9231083Abstract: A multi-region (81, 83) lateral-diffused-metal-oxide-semiconductor (LDMOS) device (40) has a semiconductor-on-insulator (SOI) support structure (21) on or over which are formed a substantially symmetrical, laterally internal, first LDMOS region (81) and a substantially asymmetric, laterally edge-proximate, second LDMOS region (83). A deep-trench isolation (DTI) wall (60) substantially laterally terminates the laterally edge-proximate second LDMOS region (83). Electric field enhancement and lower source-drain breakdown voltages (BVDSS) exhibited by the laterally edge-proximate second LDMOS region (83) associated with the DTI wall (60) are avoided by providing a doped SC buried layer region (86) in the SOI support structure (21) proximate the DTI wall (60), underlying a portion of the laterally edge-proximate second LDMOS region (83) and of opposite conductivity type than a drain region (31) of the laterally edge-proximate second LDMOS region (83).Type: GrantFiled: June 29, 2012Date of Patent: January 5, 2016Assignee: FREESCAL SEMICONDUCTOR INC.Inventors: Hongning Yang, Daniel J. Blomberg, Jiang-Kai Zuo