Abstract: Disclosed is tilt-sensing means that employs a point source of alternate 1st or 2nd divergent light beams which, after passing through collimating lenses of the Half-Field Dyson projection optics of the stepper, are separately incident on and reflected from a reflective pattern disposed on the surface of a reticle and from a reflective surface of a wafer, together with two-dimensional position detection means responsive to the position of each of the reflected alternate 1st or 2nd divergent light beams, for independently sensing the angular position of the surface of the reticle and the angular position of the surface of the wafer to determine thereby whether or not the surface of the reticle and the surface of the wafer are substantially parallel to one another.

Abstract: Disclosed are a projection exposure method which comprises the steps of projecting patterns of first and second photo mask elements by a light including a coherent component, each photo mask element having a pattern of a single-layer structure of one of the phase shift film and the light shielding film on a substrate disposed at a predetermined position such that an optically synthesized pattern of the two patterns is formed on the substrate, and controlling a phase of at least one of a first light portion which projects the pattern of the first photo mask element on the substrate and a second light portion which projects the pattern of the second photo mask element on the substrate, such that said first and second light portions have a predetermined phase difference therebetween and a projection exposure apparatus for carrying out the abovementioned method.

Abstract: An exposure apparatus includesan illumination optical system (10, 1, 4) for radiating illumination light (L2) onto a mask (R) so as to expose a mask pattern (5) onto a photosensitive substrate (W),photoelectric detection means (7) for photoelectrically detecting at least some components of the illumination light for illuminating the mask (R) or the photosensitive substrate (W),input means (34) for inputting information associated with an incident angle range of the illumination light incident on a light-receiving surface of the photoelectric detection means (7), andmeasurement means (24) for correcting a level of an output signal from the photoelectric detection means (7) in accordance with the input information, and measuring the intensity of the illumination light incident on the photoelectric detection means (7).

Abstract: An exposure apparatus and method wherein a mask is illuminated with light and light one of transmitted through and reflected from the illuminated mask is imaged onto a substrate. At least during imaging, transmission of light one of transmitted and reflected from the illuminated mask is partially inhibited. More particularly, a spatial filter is utilized for inhibiting at least a portion of O-order diffraction light.

Abstract: A zoom lens barrel includes a code plate and brushes which selectively come into contact with the code plate to detect focal length variance during zooming, so that focal length data thus detected can be transmitted to a camera body through a flexible printed circuit (FPC) board, one of the code plate land brushes being secured to a mounting member and the other of the brushes or code plate being secured to a linearly movable member. The brushes are provided with elastically deformable lengths which can be connected to the FPC board, and a connecting portion thereof connected to the code plate. The mounting member or linearly movable member to which the brush assembly is secured is provided with an FPC board inserting groove with which the elastically deformable legs of the brushes can come into contact. The FPC board is provided with an insertion portion which is inserted between the FPC board inserting groove and the elastically deformable legs.

Abstract: A transilluminator including a housing with a top wall having a UV-transmissible window and an upwardly extending projection. A UV light source is supported within the housing for transmitting UV light through the window and a UV-blocking cover with a hinge assembly is provided for movement of the cover between a blocking position and a non-blocking position. The hinge assembly has an undercut, and the protector plate includes a rearward portion which extends into the undercut when the plate is positioned over the window. The plate also includes a forward portion having an aperture through which the projection extends when the plate is positioned over the window. The plate is secured to the top wall by sliding the rearward portion of the plate into the undercut and then lowering the forward portion of the plate so that the projection extends into the aperture.

Abstract: A lithographic printing plate printer includes: an original-film loading section; a lithographic printing plate loading section; a printing surface plate on which an original film is brought into close contact with a lithographic printing plate; a light source for printing an image on the original film onto the lithographic printing plate on the printing surface plate; a punch-hole punching unit for punching a punch hole in the original film; an original film transporting unit for taking out the original film in the original-film loading section and transporting it onto the printing surface plate via the punch-hole punching means; and a lithographic printing plate transporting unit for taking out the lithographic printing plate in the lithographic printing plate loading section and transporting it onto the printing surface plate.

Abstract: Film scanner apparatus for a photographic printer system in which the film scanner is provided with reflection and transmission densitometry capability using a single light source for film scanning as well as both transmission and reflection densitometry.

Abstract: An alignment system for aligning the print plates of a two-sided contact printing station includes expanding pin assemblies each having an expanding collet and a mandrel for engaging and aligning match drilled holes in each of the print plates. An expansion cylinder moves the mandrel into and out of engagement with the expanding collet to cause the collet to expand into engagement with the match drilled holes. The outside profile of the expanding collet forms a straight-pin diameter which corresponds to the diameter of the match drilled holes when expanded. The expanding pin assemblies may be contracted to facilitate moving the print plates apart for advancing the working material.

Abstract: Tractor drives of a high speed printer move a length of continuous-form paper longitudinally up from a box of fanfold stacked paper, through a print mechanism, across paper directing means, and downward to refold onto a fanfold stack. A misfold detector is positioned at the paper directing means to sense the jumble of paper caused by misfolding prior to jamming of paper movement through the tractor drive to prevent damage to the paper, complex restarting procedures, or data loss.

Abstract: A projection television set in which a seamless image may be obtained on a screen. A screen plate of a screen assembly is held under a suspended state by a frame in a state wherein the left and right parts are centered in the frame. A cruciform light-shielding frame is mounted on the frame. A light-shielding plate is swingably mounted on a horizontal light-shielding frame of the frame. The position of the light shielding plate is adjusted in response to the vertical movement of a horizontal joint. Also, the horizontal joint line adjusting mechanism is provided independently of a centering mechanism for a vertical joint line.

Abstract: A projection aligner includes a light source for emitting light, a mask including a focusing pattern and a condensing lens for condensing the light on the mask. Light-intercepting members and light-transmitting portions are alternatingly arranged in the focusing pattern. The projecting aligner includes a projecting lens for condensing the light on a surface of a wafer and a sensor for measuring the amount of the light transmitted through the focusing pattern after the light has passed through the focusing pattern on the mask and been reflected from the surface of the wafer.

Abstract: The present invention provides an improved device for transporting photographic negatives mounted on carrying cards to the optical stage of a photographic printer. A storage bin houses a plurality of the carrying cards prior to being transported to the optical stage of the printer. A first vacuum member releasably engages one of the carrying cards and transports that carrying card to a predetermined intermediate location. A second vacuum member operates to transport the carrying card between the intermediate position and the optical stage of the photographic printer. A third vacuum member operates to transport the carrying card from the predetermined intermediate position to a discharge bin. A secondary carrying card transport assembly is adapted to transport at least one carrying card having a secondary photographic negative mounted thereon to the same predetermined location to simultaneously transport multiple negatives to the optical stage of the printer.

Abstract: A duplicating camera, especially, a diffusion transfer type duplicating camera including an exposure box in which a scanner for scanning across the surface of an original in the form of a slit is incorporated and a transfer box in which a sheet of photosensitive material is exposed to light so that a set of slit images from the exposure box can be formed on the photosensitive material, and in which the image recorded on the photosensitive material is transferred to an image receiving material. These exposure and transfer boxes are arranged in an adjustable manner so that the scan axis of the scanning unit can be aligned with the transfer axis of the photosensitive material. In the exposure stage, an exposure table on which the photosensitive material is transferred is positioned above conveyor rollers disposed on both sides of the exposure table, so that a nominal rise occurs in the photosensitive material traveling above the exposure table.

Abstract: A projection exposure apparatus includes a light source, a condenser lens for illuminating an illumination light emanating from the light source onto a mask on which a circuit pattern has been formed, a projection lens for condensing the illumination light which has passed through the mask onto a surface of a wafer, and an aperture member disposed between the light source and the condenser lens and having both a transmission area for shaping the light emanating from the light source and a light blocking area formed at a central portion of the transmission area. An outer diameter of the transmission area of the aperture member is set such that a ratio .sigma. of an outer diameter of an effective light source to a diameter of a pupil of the projection lens is 0.6.+-.0.3, while a light blocking rate of the light blocking area is set to 60.+-.35%.

Abstract: A method of operating a photographic printer to provide for automatic setup for a plurality of film types and conditions in which film term data for film types encountered by the printer is automatically created and periodically updated to reflect current experience using accumulated historical density data derived from scanning of film strips and in which exposure of image frames from a current film strip to a photosensitive medium is adjusted either by average density information stored for one or more film types from the historical data or by average density information derived from the current film strip with determination of which average density information to use being made automatically by comparison of either or both of film type or average minimum density information of the film strip with the corresponding stored information. Automatic adjustment of tungsten illumination exposure and automatic updating of slope compensation factors for under- and over-exposed negatives are also described.

Abstract: A method of proximity imaging photolithographic structures for the fabrication of high resolution ink jet orifice plates is used in ink jet printers. The method comprises the step of providing a positive-acting photoresist coating onto an electrically conducting plating substrate. A clear glass photomask is brought into planar proximity and a planar gap is established by means of screen shims permanently bonded to the glass photomask. It is desirable to ensure that the shims are uniformly distributed about the mask with at least one shim in the center. An atmospheric pressure sufficient to ensure that the shims are settled against the resist-coated substrate is then applied, before exposing the surface with an ultraviolet light source and developing to produce a non-conductive peg pattern corresponding to the desired orifice pattern.

Abstract: A control area is imaged on photo-sensitive graphic arts material to be evaluated for the sharpness of images printed on the material through the various stages of the reproduction process. The control area includes a light transmitting image divided into a plurality of segments where the image is a sharp-edged line element of a fixed preselected width. The line element is repeated from segment to segment in a preselected pattern of line elements separated a preselected distance apart by a space. The first segment of a control area has a solid optical density. At the opposite end of the control area is positioned a second segment having a substrate optical density. An intermediate segment includes a plurality of sections in which the line elements in each section are spaced apart the same distance, and the spacing between line elements varies from one section to the next. Thus, a range of spatial frequencies of repeating line elements is provided in the control area.

Abstract: Process for the production of photographic copies from photographic copy masters in a photographic copy apparatus, wherein initially in a measuring station of the photographic copy master an exposed photographic master material, on which photographic copy masters are exposed, is analyzed master by master. In the process, the measuring data necessary for the exposure of each master is determined, together with the size and the position of the center of each copy master on the film. A number is assigned unambiguously to each master, the number being determined by scanning an expanded DX code provided in periodic intervals in a border area of the master material by a single bar code detector used in the measuring station to read the expanded DX code. The number is determined by reading the expanded DX code. The numbers assigned to the copy masters, together with the associated measured data, are passed on to a computer and control unit.

Abstract: A light exposure system is for exposure of a pattern on a first object to form an image thereof on a second object, which comprises an illumination optical system for illuminating the first object, a projection optical system for projecting the pattern on the first object onto the second object, a stage device for two-dimensionally moving the second object while holding the second object, a reference member mounted on the stage device, a detecting device for detecting light from the reference member, and a measuring device for carrying out a predetermined measurement, based on an output of the detecting device.