Patents Examined by Richard A. Wintercorn
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Patent number: 5396312Abstract: An apparatus for optically forming a pattern on an object using a reticle having an original pattern to be optically projected. The apparatus is equipped with a storage circuit for storing information indicative of an exposure condition for the reticle, the storage circuit being attached to the reticle. An exposure apparatus reads out the information from the storage circuit so as to project the original pattern of the reticle on the object in accordance with the read information so that a pattern corresponding to the original pattern is formed on the object. This arrangement can automatically and accurately set the exposure condition in the exposure apparatus.Type: GrantFiled: October 26, 1992Date of Patent: March 7, 1995Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Kazuhiro Kobushi, Hironao Iwai
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Patent number: 5394220Abstract: A vacuum blanket apparatus for maintaining precise registration between an image forming sheet and a light sensitive sheet when subjected to controlled exposure to light passing through a glass panel includes a vacuum blanket having an upper cover of flexible sheet material adapted to contact the light sensitive sheet for biasing the same and said image sheet toward a planar face of the glass panel when the panel is locked in position parallel to the vacuum blanket. The blanket cover is formed with at least one elongated slot for receiving one or more registration pins for registering the image forming and light sensitive sheets. At least one deformable resilient pressure element in the slot is deformable to bias the sheets toward the glass panel.Type: GrantFiled: October 28, 1993Date of Patent: February 28, 1995Assignee: nuArc Company, Inc.Inventors: Charles J. Leonhart, William R. Walters
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Patent number: 5394218Abstract: A device for assisting a person in focusing a camera on a surface is provided. A mirror at an angle of 45.degree. to the horizontal, and an incandescent filament, are mounted on a device that may rest on the surface to be photographed. The distance from the filament to a point on the mirror equals the distance from that point to the surface. By focusing the camera on the image of the filament that appears in the mirror, the camera will be correctly focused on the surface.Type: GrantFiled: September 14, 1993Date of Patent: February 28, 1995Inventors: Gladys Rabinow, Jacob Rabinow
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Patent number: 5392093Abstract: A photographic printing apparatus having a single light source and a reflecting mirror. The mirror is provided between the light source and the light-modulating device having light-modulating filters, a mirror tunnel and diffusers and has a light-passing portion. Most part of the light from the light source is reflected by the mirror and used for exposing negative films after passing it through the light-modulating device. The remainder of the light from the light source passes through the light-passing portion and is used for scanning.Type: GrantFiled: January 14, 1994Date of Patent: February 21, 1995Assignee: Noritsu Koki Co., Ltd.Inventor: Masayuki Kojima
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Patent number: 5389999Abstract: A device for application to photographic printing machines, by which sheets of light-sensitive paper cut from strip are advanced and positioned at a print station and then transferred to a successive developing machine, wherein the device (5) affording the printing surface is capable of traversing movement in the transverse direction, supported slidably on suitable guides and translated along the guides by drive means activated by means controlled in turn by means capable of sensing and determining an exact selected position, all of which conventional, the alternating transverse movements of the device (5) affording the printing surface being such that sheets of light-sensitive paper (A1, B1, C1, D1) exhibiting width less than half the working width of the maximum print size handled by the machine are transferred after printing directly to the successive developing machine arranged in alternation and in co-ordinated sequence on two or more parallel conveying lanes.Type: GrantFiled: December 14, 1993Date of Patent: February 14, 1995Assignee: San Marco Imaging S.r.l.Inventors: Giosue Franci, Luciano Malisan
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Patent number: 5390001Abstract: A photosensitive material printing apparatus equipped with a printing portion for printing images of an original film onto a photosensitive material. The photosensitive material printing apparatus is equipped with a holding device for holding the original film at a predetermined position of the printing portion, a moving device for moving the holding device along a photosensitive surface of the photosensitive material, an input board for inputting an amount of movement of the holding device, and a control device for controlling the moving device to move the holding device based on the amount of movement inputted by the input board. Accordingly, the amount of movement of the holding device can be adjusted via the input board.Type: GrantFiled: July 16, 1992Date of Patent: February 14, 1995Assignee: Fuji Photo Film Co., Ltd.Inventors: Toshimitsu Ishiwata, Hiroki Sutoh, Shin-ichi Yabe, Hiroshi Kawaguchi
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Patent number: 5387961Abstract: An illumination system for a projection exposing apparatus having an improved fly's eyes lens is disclosed in which an individual lens of a fly's eyes lens includes a pattern portion having a plurality of annuluses with the same center but different diameters, and an etch portion disposed alternately with the pattern portion. The etch portion is formed to have a phase difference of 180 degrees with respect to the pattern portion.Type: GrantFiled: November 22, 1993Date of Patent: February 7, 1995Assignee: Samsung Electronics Co., Ltd.Inventor: Ho-young Kang
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Patent number: 5388000Abstract: Anti-glare fitment with a plurality of elongate light-deflecting slats which are arranged above one another, at a distance from each other, are reflective on their upper surface and preferably have a cross-section which is upwardly curved in a concave manner, whereby the light-deflecting slats are, at least within an area, perforated.Type: GrantFiled: December 14, 1993Date of Patent: February 7, 1995Inventor: Christian Bartenbach
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Patent number: 5386266Abstract: A projection exposure system includes a light source, a parallel-light forming lens and a fly's eyes lens which are sequentially disposed along a light traveling path. Between the parallel-light forming lens and fly's eyes lens is provided a light dispersing device which is composed of a first light dispersing lens with a concave lens or a second light dispersing lens with multiple small convex lenses. The light dispersing device diverges central light incident on the fly's eyes lens, to thereby increase peripheral light intensity. Accordingly, in tilted illumination, which uses peripheral light, light utilizing efficiency is raised.Type: GrantFiled: November 22, 1993Date of Patent: January 31, 1995Assignee: Samsung Electronics Co., Ltd.Inventor: Ho-young Kang
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Patent number: 5386268Abstract: An exposure unit and method for imaging a photosensitive material includes a source of radiation for exposing the photosensitive material to actinic radiation such that the radiation strikes the photosensitive material at a plurality of angles of incidence, and apparatus for moving the radiation source relative to and in a plane parallel to the photosensitive material. The exposure unit also has a reflector for controlling (1) the proportion of (a) radiation having perpendicular angles of incidence to (b) radiation having non-perpendicular angles of incidence, such that the radiation having non-perpendicular angles is increased, and (2) the distribution of non-perpendicular angles of incidence.Type: GrantFiled: July 26, 1993Date of Patent: January 31, 1995Assignee: E. I. Du Pont de Nemours and CompanyInventors: Albert H. Ohlig, Steven W. Nelson, Robert J. Verbiar, Stephen Cushner
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Patent number: 5384618Abstract: This invention is directed to the storing of digital, information, This storage system comprises a number of layers of transparent or translucent material. In each layer there is a chemical or chemicals subject to change by being contacted with different electromagnetic wave lengths. For example, if there be eight layers then the chemical or chemicals in any layer is subject to be changed by an electromagnetic radiation of a wave length different than for any of the other seven layers. In this manner, with eight layers it is possible to have an eight bit byte. Actually, under premutations and combinations it is possible to have as many as eight bit bytes from the eight layers. It is conceivable that there may be more than eight layers such as sixteen layers of thirty-two layers. There is the possibility of storing large amounts of information in a small volumn.Type: GrantFiled: May 20, 1993Date of Patent: January 24, 1995Assignee: Tom SecrestInventors: Richard Schurman, Robert E. Pearson, Steve Reiter, John Schurman, Rick Clark
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Patent number: 5383003Abstract: The device according to the invention includes a chassis (3) comprising a working surface (6) designed to support the photosensitive film (1); a frame (11) connected to the chassis by a hinge pin (19) and comprising a central opening (18); a removable plate (20) capable of being immobilized against the lower face (13) of the frame (11) and comprising a window (21) designed to be blocked by an original (2); an annular seal (36) mounted on the chassis (3) about the working surface (6); a chamber delimited by the seal, as well as by the working surface (6) and the removable plate (20) when the frame (11) presses the latter against the chassis; vacuum-creating means for creating a negative pressure in the chamber; and a light source for printing the film through the original.Type: GrantFiled: December 21, 1993Date of Patent: January 17, 1995Inventor: Albert B. Visage
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Patent number: 5383001Abstract: A rotatable drum for use in a plotter, or similar device, that provides vacuum for holding the film or other media to the drum's surface, so as to easily accommodate films of various sizes. The drum includes first and second journals and a plate mounted on the circumference of the first and second journals. At least one of the journals has defined on its circumference circumferential channels. The plate has interior and exterior sides, and the first and second journals and a portion of the plate's interior side define a chamber. The plate's exterior side has defined thereon a plurality of grooves. In one embodiment, at least one of the grooves, associated with a first film size, is in fluid communication with the chamber, and some of the remaining grooves, associated with the larger film sizes, are in fluid communication with the channels. A vacuum is supplied to the chamber, and a valve is provided for controlling fluid communication between the channels and the chamber.Type: GrantFiled: February 22, 1993Date of Patent: January 17, 1995Assignee: Intergraph CorporationInventor: Brian Bosy
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Patent number: 5381210Abstract: An exposing apparatus which has an alignment apparatus for detecting the relative positional relation between a mask having a pattern for transfer formed thereon and a photosensitive substrate having an alignment mark thereon by applying alignment light to the alignment mark and which exposes the photosensitive substrate to exposure light transmitted through the pattern for transfer, through a projection optical system includes an alignment optical system for causing the alignment light to pass at least once through the projection optical system, the alignment light being of a wavelength in the vicinity of three times the wavelength of the exposure light.Type: GrantFiled: December 3, 1993Date of Patent: January 10, 1995Assignee: Nikon CorporationInventor: Shigeru Hagiwara
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Patent number: 5379090Abstract: An apparatus includes an illumination system for illuminating a pattern formed on a mask with exposure light, a projection optical system for focusing and projecting an image of the mask pattern on a photosensitive substrate, and a stop member located on or near a plane having a Fourier transform relationship with a pattern surface of the mask. The illumination system has a variable optical member for setting variable the size of the exposure light passing through the plane having the Fourier transform relationship with the pattern surface of the mask. The stop member shields or reduces a portion near the central portion of the exposure light.Type: GrantFiled: February 22, 1993Date of Patent: January 3, 1995Assignee: Nikon CorporationInventor: Naomasa Shiraishi
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High speed shuttle for gating a radiation beam, particularly for semiconductor lithography apparatus
Patent number: 5374974Abstract: Fine, sub-micron line features and patterns are created in a sensitized layer on a semiconductor wafer by a beam of low wavelength radiation, such as X-rays or Gamma-rays. A continuous stream of such radiation is gated on and off by a shutter mechanism comprising a distortable-surface device and a beam-blocking device. The distortable-surface device is a surface acoustic wave device, a magnetostrictive device, or the like. The beam-blocking device is a beam stop, such as a knife edge, an aperture, or the like. The distortable-surface device can be selectively caused to reflect an incident beam of radiation past or into the beam-blocking device. In this manner, a continuous stream of radiation, such as from a pellet of Cobalt-60, can be quickly and precisely gated on and off to impact and to not-impact the semiconductor wafer, respectively. By moving either of the reflected beam or the semiconductor wafer, line features can be created in the sensitized layer on the semiconductor wafer.Type: GrantFiled: April 30, 1993Date of Patent: December 20, 1994Assignee: LSI Logic CorporationInventors: Michael D. Rostoker, Nicholas F. Pasch, Joe Zelayeta -
Patent number: 5374975Abstract: A film archival storage holder comprises base and cover sheets in a laminar page configuration including a plurality of pockets formed with bonding lines for holding the film. The pockets have an opening at one end accessed through a slit in the cover sheet for placing the film within the pocket and a smaller opening at the other end for accessing the pocket and maneuvering the film into a desired position. The smaller opening prevents the film from exiting the pocket. A flap is formed between the slit and another bonding line parallel to the slit. Once in the pocket, the film is maneuvered under the flap for locking the film within the pocket. The film can be positioned between the slit and the smaller opening and the film image with unobscured view which is especially useful when making contact prints from negative film placed in the pockets. Negative film in strips of any length can be stored and maneuvered into a predetermined position for storing or exposing.Type: GrantFiled: February 14, 1994Date of Patent: December 20, 1994Inventor: Henry W. Amat
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Patent number: 5369467Abstract: A method for making a plurality of colored sportcards comprising the steps of forming a master panel with a matrix of borders, each associated with a window area; cutting each window area into a border opening; pasting a photograph behind each window opening; making a colored photocopy of the master panel and the colored photographs; pasting a back panel on the rear of the photocopied panel having indicia related to each of the images within the photocopied window openings; and then cutting the photocopied panel and the back panel to as many sub panels as there are photocopied windows to form a plurality of sportscards. The process is repeated so that each individual photograph is made into as many sportscards as desired.Type: GrantFiled: October 12, 1993Date of Patent: November 29, 1994Inventor: Kenneth H. Monroe
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Patent number: 5369464Abstract: An exposure apparatus includes a first reflective type photomask 18a, a first mask stage 180a for mounting the first reflected type photomask 18a, a second reflective type photomask 18b, and a second mask stage 180b for mounting the second reflective type photomask 18b. Light 11a from a light source 11 is directed to the first and second reflective type photomasks 18a and 18b. The first exposure light 110c and the second exposure light 110b reflected by the first and second reflective type photomasks 18a and 18b are merged by a half mirror 30 to form a third exposure light 110e to expose a resist film 21a on a semiconductor substrate 21.Type: GrantFiled: July 14, 1993Date of Patent: November 29, 1994Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Kazuya Kamon
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Patent number: 5367358Abstract: A projection exposing apparatus has a second photo-mask disposed on a blind for determining a region to be exposed to deformed light beams, the circuit pattern of the second photo-mask being the same as or arranged to correspond to the circuit pattern of a first photo-mask to be projected onto a substrate The deformed irradiation light beams are applied to the second photo-mask circuit pattern to image diffracted light beams on the substrate and project the circuit pattern.Type: GrantFiled: October 8, 1993Date of Patent: November 22, 1994Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Kazuya Kamon