Patents Examined by Robert Kim
  • Patent number: 9620324
    Abstract: A sealed cold cathode X-ray tube for use in small X-ray source devices is provided. In one embodiment, a sealed cold cathode X-ray tube includes an elongate member, a cathode emitter, and an anode.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: April 11, 2017
    Assignees: Golden Engineering, Inc., Los Alamos National Security, LLC
    Inventors: Phillip Golden, Scott A. Watson, Timothy Knowles
  • Patent number: 9592102
    Abstract: A dental hand tool including a main body having a main body proximate end, a main body distal end, at least one dental utility conduit associated with the main body proximate end, and a dental disinfection system associated with the main body that disinfects dental fluid at a point of use. The dental disinfection system includes a disinfection reactor associated with the main body, a collimated germicidal UV light source end, a disinfection reactor distal end, disinfection reactor walls, a disinfection reactor fluid inlet that receives the dental fluid from a dental fluid source, a disinfection reactor dental fluid outlet that delivers the dental fluid to the point of use, and a disinfection reactor inner chamber.
    Type: Grant
    Filed: August 17, 2009
    Date of Patent: March 14, 2017
    Assignee: KaVo Dental Technologies, LLC
    Inventors: Douglas Gordon Knight, Nathan Hemmer
  • Patent number: 9558980
    Abstract: Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece.
    Type: Grant
    Filed: March 17, 2010
    Date of Patent: January 31, 2017
    Inventors: William D. Lee, Ashwin M. Purohit, Marvin R. LaFontaine
  • Patent number: 9557347
    Abstract: A scanning probe microscope comprising a probe that is mechanically responsive to a driving force. A signal generator provides a drive signal to an actuator that generates the driving force, the drive signal being such as to cause the actuator to move the probe repeatedly towards and away from a sample. A detection system is arranged to output a height signal indicative of a path difference between light reflected from the probe and a height reference beam. Image processing apparatus is arranged to use the height signal to form an image of the sample. Signal processing apparatus is arranged to monitor the probe as the probe approaches a sample and to detect a surface position at which the probe interacts with the sample. In response to detection of the surface position, the signal processing apparatus prompts the signal generator to modify the drive signal.
    Type: Grant
    Filed: January 31, 2012
    Date of Patent: January 31, 2017
    Inventor: Andrew Humphris
  • Patent number: 9552974
    Abstract: An ion mobility separator or spectrometer is disclosed comprising an inner cylinder and an outer cylinder defining an annular volume through which ions are transmitted. Spiral electrodes a-f are arranged on a surface of the inner cylinder and/or on a surface of the outer cylinder. A first device is arranged and adapted to maintain a DC electric field and/or a pseudo-potential force which acts to urge ions from a first end of the ion mobility separator or spectrometer to a second end of the ion mobility separator or spectrometer. A second device is arranged and adapted to apply transient DC voltages to the one or more spiral electrodes in order to urge ions towards the first end of the ion mobility separator or spectrometer. The net effect is to extend the effective path length of the ion mobility separator.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: January 24, 2017
    Inventors: Martin Raymond Green, David J. Langridge, Jason Lee Wildgoose
  • Patent number: 9541510
    Abstract: X-ray inspection of moving cargo based on acquiring multiple image lines at one time or substantially at one time. An X-ray source with multiple-beam electron beam targets creates multiple parallel X-ray fan beams. X-ray inspection systems and methods employ such multiple-beam sources for purposes of inspecting fast moving cargo.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: January 10, 2017
    Assignee: American Science and Engineering, Inc.
    Inventors: Anatoli Arodzero, Martin Rommel
  • Patent number: 9532752
    Abstract: An X-ray imaging system element (3) includes two compression elements (8a, 8b), which are movable relative to one another. An object (10) is introducible and compressible between the compression elements. At least one of the compression elements is adapted to alter its geometrical shape and/or alignment relative to the other during compression. At least one partly X-ray opaque marker element (24) is provided on one of the compression elements, which marker element is adapted to allow detection of an alteration of the geometrical shape of the respective compression element (8a, b).
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: January 3, 2017
    Inventors: Andre Goossen, Harald Sepp Heese
  • Patent number: 9530609
    Abstract: An x-ray apparatus includes an x-ray emitter having an x-ray tube, a rotary anode disposed in the x-ray tube, and a drive for the rotary anode. The drive includes a reluctance motor having a stator disposed outside the x-ray tube and a rotor disposed inside the x-ray tube. The rotor is mechanically connected to the rotary anode.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: December 27, 2016
    Assignee: Siemens Aktiengesellschaft
    Inventors: Josef Deuringer, Joerg Freudenberger
  • Patent number: 9520265
    Abstract: A multistage quadrupole lens system in an ion implantation apparatus includes a first quadrupole lens and a third quadrupole lens. A first bore radius of the first quadrupole lens may be smaller than a third bore radius of the third quadrupole lens. The multistage quadrupole lens system may further include a second quadrupole lens placed between the first quadrupole lens and the third quadrupole lens. A second bore radius of the second quadrupole lens may take a value lying between the first bore radius of the first quadrupole lens and the third bore radius of the third quadrupole lens (i.e., an intermediate value between them).
    Type: Grant
    Filed: December 2, 2014
    Date of Patent: December 13, 2016
    Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
    Inventor: Takanori Yagita
  • Patent number: 9512040
    Abstract: A rotary anode for an X-ray tube includes a ceramic base body that carries a focal path for emitting X-rays during electron irradiation. The ceramic base body is made of a mixture of silicon carbide and at least one high temperature-resistant diboride.
    Type: Grant
    Filed: September 20, 2012
    Date of Patent: December 6, 2016
    Assignee: Siemens Aktiengesellschaft
    Inventors: Joerg Freudenberger, Stefan Lampenscherf, Gia Khanh Pham, Steffen Walter
  • Patent number: 9500601
    Abstract: Apparatus, systems, and methods that provide an X-ray interrogation system having a plurality of stationary X-ray point sources arranged to substantially encircle an area or space to be interrogated. A plurality of stationary detectors are arranged to substantially encircle the area or space to be interrogated, A controller is adapted to control the stationary X-ray point sources to emit X-rays one at a time, and to control the stationary detectors to detect the X-rays emitted by the stationary X-ray point sources.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: November 22, 2016
    Assignee: Lawrence Livermore National Security, LLC
    Inventor: Stephen E. Sampayan
  • Patent number: 9488604
    Abstract: A system for the automated serial testing and/or measuring of a plurality of substantially identical components by X-radiation, the system comprising a testing device with a support, a rotor mounted so as to be continuously rotatable on the support, and an X-ray device disposed on the rotor, a protective enclosure surrounding the testing device, a handling device for handling a component during X-ray testing, and a control/evaluation unit configured for automatically controlling the system as well as evaluating the X-ray signals by computer tomography. The handling device is configured for periodically reciprocating between a loading region and a testing region and comprises an end face element on which the component can be disposed on the side of the end face.
    Type: Grant
    Filed: December 18, 2013
    Date of Patent: November 8, 2016
    Assignee: GE Sensing & Inspection Technologies GMBH
    Inventor: Michael Wuestenbecker
  • Patent number: 9490100
    Abstract: The invention relates to a compound objective lens for a Scanning Electron Microscope having a conventional magnetic lens excited by a first lens coil, an immersion magnetic lens excited by a second lens coil, and an immersion electrostatic lens excited by the voltage difference between the sample and the electrostatic lens electrode. For a predetermined excitation of the lens, the electron beam can be focused on the sample using combinations of excitations of the two lens coils. More BSE information can be obtained when the detector distinguishes between BSE's (202) that strike the detector close to the axis and BSE's (204) that strike the detector further removed from the axis. By tuning the ratio of the excitation of the two lens coils, the distance from the axis that the BSE's impinge on the detector can be changed, and the compound lens can be used as an energy selective detector.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: November 8, 2016
    Assignee: FEI COMPANY
    Inventors: Petr Syta{hacek over (r)}, Petr Hlavenka, Lubomír Tůma
  • Patent number: 9490114
    Abstract: In an ion reflector (4) configured from a plurality of electrodes, electrodes 42 disposed in a second stage region (S2) for reflecting ions after deceleration are formed thinner than electrodes (41) disposed in a first stage region (S1) for decelerating the ions. The thin electrodes suppress unevenness of potential, in particular, in a path away from the center axis of the reflector, which results in improvement of isochronism of an ion packet passing on the path. The thick electrodes (41, 43) disposed in the first stage region (S1) prevents stretching of the grid electrodes (G1, G2) from being affected, and unevenness of potential in the first stage region (S1) hardly affects isochronism of the ions. By appropriately adjusting thicknesses and a pitch of the electrodes (41, 42, 43, 44) adjacent to one another so as to align intervals between the electrodes (41, 42, 43, 44), it is possible to use spacers having the same size in common.
    Type: Grant
    Filed: September 18, 2013
    Date of Patent: November 8, 2016
    Inventor: Osamu Furuhashi
  • Patent number: 9482629
    Abstract: An X-ray CT apparatus includes: an X-ray generating unit configured to generate an X ray; an X-ray detecting unit including a plurality of X-ray detectors, each configured to detect the X ray generated from the X-ray generating unit and transmitted through an object; and an image generating unit configured to correct and reconstruct signals acquired by the X-ray detecting unit. While crosstalk correction of a plurality of the X-ray detectors is performed at the image generating unit, correction of a locally attenuating component is previously performed and correction of a whole component of the crosstalk is performed when the image is reconstructed.
    Type: Grant
    Filed: June 3, 2011
    Date of Patent: November 1, 2016
    Assignee: Hitachi, Ltd.
    Inventors: Shinichi Kojima, Fumito Watanabe, Hironori Ueki, Yasutaka Konno, Yushi Tsubota, Yukiko Ueki
  • Patent number: 9484183
    Abstract: An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber.
    Type: Grant
    Filed: September 10, 2014
    Date of Patent: November 1, 2016
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Eric D. Hermanson, Robert J. Mitchell, Steven Anella, Jeffrey Charles Blahnik, William T. Weaver, Michael Rohrer, James P. Buonodono
  • Patent number: 9480436
    Abstract: A novel probe housing assembly comprises a body, a cap, and a retainer. The retainer is adapted to releasably engage the body and the cap wherein, a second edge of the cap abuts a first edge of the body, and a third threaded portion of the retainer engages, by five complete revolutions, a second threaded portion of the cap, and a third threaded portion of the retainer engages, by five complete revolutions, the first threaded portion of the body whereby the cap is releasably secured to the body by the retainer thus achieving an EX-D compliant seal.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: November 1, 2016
    Assignee: ATG R&D LIMITED
    Inventors: Chris Orritt, Richard Joshi
  • Patent number: 9466460
    Abstract: An electron microscope has a large depth of focus in comparison with an optical microscope. Thus, information is superimposed on one image in the direction of depth. Therefore, it is necessary to accurately specify the three-dimensional position and density of a structure in a specimen so as to observe the three-dimensional structure of the interior of the specimen by using the electron microscope. Furthermore, a specimen that is observed with the optical microscope on a slide glass is not put into a TEM device of the related art. Thus, performing three-dimensional internal structure observation with the electron microscope on a location that is observed with the optical microscope requires very cumbersome preparation of the specimen.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: October 11, 2016
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yusuke Ominami, Taku Sakazume, Sukehiro Ito
  • Patent number: 9460887
    Abstract: A layer of conductive or semi-conductive material is formed on a surface of a sample and then the sample, when being charged particle beam imaged, is electrically coupled with an object having a large charge-receiving or charge-storage capacity (e.g., capacitance). Hence, the charging on the sample surface is removed and released quickly by the layer. The layer is then removed by reacting it with a predefined agent. The reaction forms a gaseous product which does not form a physical or chemical bond to the sample surface.
    Type: Grant
    Filed: May 18, 2009
    Date of Patent: October 4, 2016
    Inventors: You-Jin Wang, Chung-Shih Pan
  • Patent number: 9455124
    Abstract: The present invention provides a drawing apparatus for performing drawing on a substrate with a charged particle beam, including a stage configured to hold the substrate and be moved, a charged particle optical system configured to irradiate a plurality of charged particle beams arrayed along a first axis, and a controller configured to control the drawing so as to perform multiple irradiation of a target portion on the substrate with the plurality of charged particle beams, wherein the controller configured to control the drawing such that the stage is moved in one direction along the first axis with respect to a plurality of regions formed on the substrate along the first axis, and a deflection of charged particle beam for a displacement of charged particle beam along the first axis is performed with respect to drawing on each of the plurality of regions.
    Type: Grant
    Filed: April 23, 2014
    Date of Patent: September 27, 2016
    Inventors: Masato Muraki, Yoshihiro Hirata