Patents Examined by Sean M Luck
  • Patent number: 10832886
    Abstract: The present disclosure aims at proposing a multi-beam irradiation device capable of correcting off-axis aberrations. In order to achieve the above object, a beam irradiation device is proposed, which includes a beam source which emits a plurality of beams; an objective lens (17) which focuses a beam on a sample; a first lens (16) which is arranged such that a lens main surface is positioned at an object point of the objective lens and deflects a plurality of incident beams toward an intersection point of a lens main surface of the objective lens and an optical axis; a second lens (15) which is arranged closer to a beam source side than the first lens and focuses the plurality of beams on a lens main surface of the first lens; and a third lens (14) which is arranged closer to the beam source side than the second lens and deflects the plurality of beams toward an intersection point of a lens main surface of the second lens and the optical axis.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: November 10, 2020
    Assignee: Hitachi High-Tech Corporation
    Inventors: Akira Ikegami, Yuta Kawamoto, Naomasa Suzuki, Manabu Yano, Yasushi Ebizuka, Naoma Ban
  • Patent number: 10804066
    Abstract: A method for routing data for an e-beam writer includes, with a switching device of the e-beam writer, receiving a packet. The method further includes, with a scheduling engine of the switching device, routing the packet to one of a plurality of output buffers, wherein the routing is based on availabilities of the plurality of output buffers and vacancy levels of memory devices associated with the plurality of output buffers. The method further includes, with the switching device, outputting the packet from an output port associated with a memory device to which the packet is routed.
    Type: Grant
    Filed: October 14, 2019
    Date of Patent: October 13, 2020
    Inventors: Jensen Yang, Shy-Jay Lin, Yen-Hao Huang
  • Patent number: 10804088
    Abstract: A mass spectrometry method comprises: generating ions; directing the ions through an ion optical component within a first chamber having a first vacuum pressure, the ion optical component maintained at a first electrical potential; transferring the ions through an ion guide within a second chamber having a second vacuum pressure less than the first vacuum pressure, the ion guide maintained at a second electrical potential, wherein a difference between the first and second potentials imparts kinetic energy that causes collision-induced ion fragmentation within the second chamber that removes adduct species; and transferring the ions into another ion guide within a third chamber having a third vacuum pressure less than the second vacuum pressure, the other ion guide maintained at a third electrical potential, wherein a difference between the third and second potentials reduces a portion of the imparted kinetic energy of the ions passing into the third chamber.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: October 13, 2020
    Assignee: Thermo Finnigan LLC
    Inventors: Michael P. Goodwin, Michael W. Senko, Graeme C. McAlister
  • Patent number: 10779388
    Abstract: An extreme ultraviolet (EUV) generation device includes a housing module including a housing body whose inside is maintained in a vacuum state and an exit window formed on one side of the housing body, a laser source which emits lasers toward the inside of the housing body through the exit window, a plasma generation module which is located inside the housing body and generates plasma by allowing the lasers to be emitted toward a plasma gas, which flows into a laser focal area, and a radio frequency (RF) power supply module which preionizes the plasma gas before the plasma gas flows into the laser focal area.
    Type: Grant
    Filed: December 20, 2018
    Date of Patent: September 15, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Byeong Hwan Jeon
  • Patent number: 10777399
    Abstract: A method of analysis is disclosed comprising providing a sample on an insulating substrate such as a petri dish (4) and contacting e.g. the rear surface of the insulating substrate with a first electrode (9). The method further comprises contacting the sample with a second electrode (2) and applying an AC or RF voltage to the first and second electrodes (9,2) in order to generate an aerosol from the sample.
    Type: Grant
    Filed: September 22, 2016
    Date of Patent: September 15, 2020
    Assignee: Micromass UK Limited
    Inventors: Steven Derek Pringle, Lajos Godorhazy, Daniel Simon, Daniel Szalay, Zoltan Takats, Tamas Karancsi
  • Patent number: 10770279
    Abstract: An ion transfer apparatus for transferring ions from an ion source at an ion source pressure, which ion source pressure is greater than 500 mbar, along a path towards a mass analyser at a mass analyser pressure that is lower than the ion source pressure. The apparatus includes a plurality of pressure controlled chambers, wherein each pressure controlled chamber in the ion transfer apparatus includes an ion inlet opening for receiving ions from the ion source on the path and an ion outlet opening for outputting the ions on the path. The plurality of pressure controlled chambers are arranged in succession along the path from an initial pressure controlled chamber to a final pressure controlled chamber, wherein an ion outlet opening of each pressure controlled chamber other than the final pressure controlled chamber is in flow communication with the ion inlet opening of a successive adjacent pressure controlled chamber.
    Type: Grant
    Filed: October 20, 2016
    Date of Patent: September 8, 2020
    Inventors: Roger Giles, Alina Giles
  • Patent number: 10770262
    Abstract: A scanning electron microscope (SEM) system includes an SEM objective that emits an electron beam toward a sample, causing emission of charged particles including secondary electrons, Auger electrons, backscattered electrons, anions and cations. The SEM system includes electron optics elements that are configured to establish electric fields around the sample that accelerate charged particles toward a detector. A two-dimensional distribution of locations of incidence of the charged particles on the detector is indicative of energies of the charged particles and their emission angles from the sample. A three-dimensional spatial distribution of charged particles emitted from the sample is recovered by performing an Abel transform over the distribution on the detector. The energies and emission angles of the charged particles are then determined from the three-dimensional spatial distribution.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: September 8, 2020
    Assignee: National Technology & Engineering Solutions of Sandia, LLC
    Inventors: David W. Chandler, Kimberlee Chiyoko Celio
  • Patent number: 10751549
    Abstract: Typically, electron beam radiation therapy aims at delivering a uniform dose to a target volume containing cancer cells. Electron sources typically impinge a spatially uniform flux across the beam onto the patient; however, irregular patient and bolus surfaces, the latter encountered in bolus electron conformal therapy (ECT), scatter electrons unevenly creating non-homogeneous dose distributions in the target. However, spatially-modulated beam intensities can restore target dose homogeneity, as well as enable utilization of other advanced ECT methods. Unfortunately, present methods, which have attempted to spatially-modulate beam intensities, have been either impractical or ineffective. Here, a novel, passive method has been developed to spatially-modulate electron beam intensities by taking advantage of multiple Coulomb scattering. The method utilizes Island Blocks or Island Apertures, strategically located in ‘transparent’ or ‘opaque’ substrates, respectively, which are placed in the beam's path.
    Type: Grant
    Filed: July 18, 2018
    Date of Patent: August 25, 2020
    Inventors: Kenneth Hogstrom, Robert Carver
  • Patent number: 10746759
    Abstract: The disclosed technology relates to a method and apparatus for correctly positioning a probe suitable for scanning probe microscopy (SPM). The probe is positioned relative to the apex region of a needle-shaped sample, such as a sample for atom probe tomography, in order to perform a SPM acquisition of the apex region to obtain an image of the region. In one aspect, the positioning takes place by an iterative process, starting from a position wherein one side plane of the pyramid-shaped SPM probe interacts with the sample tip. By controlled consecutive scans in two orthogonal directions, the SPM probe tip approaches and finally reaches a position wherein a tip area of the probe interacts with the sample tip's apex region.
    Type: Grant
    Filed: March 7, 2019
    Date of Patent: August 18, 2020
    Assignee: IMEC vzw
    Inventors: Kristof Paredis, Claudia Fleischmann, Wilfried Vandervorst
  • Patent number: 10739320
    Abstract: For a sample containing a target component, a product-ion scan measurement in which the m/z value of a known ion originating from the compound is designated as a precursor ion is performed in a measurement unit (1) to acquire profile spectrum data. A peak detector (22) in a data processing unit (2A) detects peaks on the profile spectrum. For each detected peak, a product-ion m/z-value acquirer (23) acquires an m/z value corresponding to the maximum intensity as the m/z value of a product ion. A pseudo MRM measurement data extractor (24) adopts the m/z value of the precursor ion and that of the product ion as an MRM transition, extracts the maximum intensity of the peak originating from the product ion as the signal intensity value on that MRM transition, and stores these data as pseudo MRM measurement data in a memory section (25).
    Type: Grant
    Filed: December 15, 2016
    Date of Patent: August 11, 2020
    Inventors: Hideki Yamamoto, Yoshikatsu Umemura
  • Patent number: 10736205
    Abstract: An electron beam transport system for controlling the position of two different electron beams comprises: a main electron beam transport module; a first input electron beam transport module; a second input electron beam transport module; and a controller. The main electron beam transport module comprises a beam monitoring device disposed at a measurement position. The first input electron beam transport module comprises a first actuator for applying a perturbation to a transverse position of a first electron beam at a first actuation point. The second input electron beam transport module comprises a second actuator for applying a perturbation to a transverse position of a second electron beam at a second actuation point. The controller is operable to receive a signal from the beam monitoring device and to send control signals to the first actuator and the second actuator.
    Type: Grant
    Filed: September 18, 2017
    Date of Patent: August 4, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Roelof Harm Klunder, Gijsbertus Geert Poorter, Johannes Aldegonda Theodorus Marie Van Den Homberg
  • Patent number: 10714308
    Abstract: Provided is a measurement method for measuring, in an electron microscope including a segmented detector having a detection plane segmented into a plurality of detection regions, a direction of each of the plurality of detection regions in a scanning transmission electron microscope (STEM) image, the measurement method including: shifting an electron beam EB incident on a sample S under a state where the detection plane is conjugate to a plane shifted from a diffraction plane to shift the electron beam EB on the detection plane, and measuring a shift direction of the electron beam EB on the detection plane with the segmented detector; and obtaining the direction of each of the plurality of detection regions in the STEM image from the shift direction.
    Type: Grant
    Filed: September 14, 2018
    Date of Patent: July 14, 2020
    Assignee: JEOL Ltd.
    Inventor: Yuji Kohno
  • Patent number: 10702710
    Abstract: Systems and methods are proposed for accurate and efficient automatic measurement of jaw and leaf positioning in multi-leaf collimator imaging systems. Specifically, the method enables the automated and objective processing of images to determine characteristics of collimator jaws and MLC leaves. These novel techniques enable verification of collimator component positioning to ensure accurate beam modulation for radiation application procedures.
    Type: Grant
    Filed: October 2, 2017
    Date of Patent: July 7, 2020
    Assignee: Varian Medical Systems, Inc.
    Inventor: Stephen Gaudio
  • Patent number: 10703647
    Abstract: A water purifier that includes: a water storage tank that includes an interior area and a first opening to the interior area; a cover unit that is configured to cover the first opening and that includes: a frame body that includes a second opening, and a water storage tank cover that is coupled to the frame body and that is configured to rotate about an axis such that the water storage tank cover opens or closes the second opening; a sterilizer that is configured to sterilize water in the water storage tank; a switching module that is configured to control electric power supply to the sterilizer; and an operation member that is configured to control the switching module based on the water storage tank cover being opened or closed is disclosed.
    Type: Grant
    Filed: March 15, 2019
    Date of Patent: July 7, 2020
    Assignee: LG Electronics Inc.
    Inventors: Myounggon Kim, Youngjin Kim, Kowoon Baek, Changgeun Lee, Jongho Park
  • Patent number: 10699888
    Abstract: A data independent acquisition method of mass spectrometry for analyzing a sample within a mass range of interest as it elutes from a chromatography system. The method comprises selecting precursor ions within a mass range of interest to be analyzed, performing at least one MS1 scan of the precursor ions using a Fourier Transform mass analyser and performing a set of MS2 scans by segmenting the precursor ions into a plurality of precursor mass segments, each precursor mass segment having a mass range of no greater than 5 amu, and for each precursor mass segment fragmenting the precursor ions within that precursor mass segment and performing an MS2 scan of the fragmented ions.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: June 30, 2020
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Anastassios Giannakopulos, Alexander Makarov, Christian Albrecht Hock, Nicolaie Eugen Damoc, Hamish Stewart
  • Patent number: 10684308
    Abstract: Techniques are disclosed for stabilizing soft specimen traditionally considered too fragile for APT instruments. These specimens include biological samples, polymers and other fragile materials. For this purpose, a protective structure is disclosed that surrounds the sides of the specimen by supporting walls while only exposing the very end or terminus of the specimen to the electrostatic field of the APT instrument. The protective structure may take the form of a nanoscale conical grinder which continually machines the specimen to regenerate the terminus of the specimen in-situ. Alternately, the protective structure may take the form of a nanopipette in which the specimen is first frozen before undergoing field evaporation together with the tip of the nanopipette. Heretofore only routinely possible for rigid and hard materials, the design thus extends APT analysis to produce three-dimensional atomic-scale maps of soft specimens.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: June 16, 2020
    Inventor: Gregory Hirsch
  • Patent number: 10685827
    Abstract: A quadrupole ion trap apparatus includes a main electrode, a first end-cap electrode, a second end-cap electrode, and a phase-controlled waveform synthesizer. The phase-controlled waveform synthesizer generates a main RE waveform for the main electrode. The main RE waveform includes a plurality of sinuous waveform segments each of which is a part of a sine wave, and a plurality of phase conjunction segments each of which is non-sinuous. Each of the sinuous waveform segments is bridged to another sinuous waveform segment via one of the phase conjunction segments, so as to perform ordering of micro motions of sample ions trapped by the electrodes.
    Type: Grant
    Filed: May 8, 2018
    Date of Patent: June 16, 2020
    Inventors: Chun-Yen Cheng, Yao-Hsin Tseng, Szu-Wei Chou, Yi-Kun Lee, Shih-Chieh Yang, Hung-Liang Hsieh
  • Patent number: 10679819
    Abstract: The invention relates to an aberration correcting device for correcting aberrations of focusing lenses in an electron microscope. The device comprises a first and a second electron mirror, each comprising an electron beam reflecting face. Between said mirrors an intermediate space is arranged. The intermediate space comprises an input side and an exit side. The first and second electron mirrors are arranged at opposite sides of the intermediate space, wherein the reflective face of the first and second mirror are arranged facing said intermediate space. The first mirror is arranged at the exit side and the second mirror is arranged at the input side of the intermediate space. In use, the first mirror receives the electron beam coming from the input side and reflects said beam via the intermediate space towards the second mirror. The second mirror receives the electron beam coming from the first mirror, and reflects the electron beam via the intermediate space towards the exit side.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: June 9, 2020
    Assignee: Hitachi High-Tech Corporation
    Inventor: Pieter Kruit
  • Patent number: 10670625
    Abstract: Disclosed here is a scanning probe microscope system and method for operating the same for producing scanning probe microscope images at fast scan rates and reducing oscillation artifacts. In some embodiments, an inverse consistent image registration method is used to align forward and backward scan traces for each line of the scanning microscope image. In some embodiments, the aligned forward and backward scan traces are combined using a weighting factor favoring the scan trace with higher smoothness. In some embodiments, the scanning probe microscope image is a potentiometry map and a method is provided to extract from the potentiometry map a conductivity map.
    Type: Grant
    Filed: July 12, 2017
    Date of Patent: June 2, 2020
    Inventors: Xiaoguang Zhang, Xianqi Li, An-Ping Li, Hao Zhang, Yunmei Chen
  • Patent number: 10661246
    Abstract: A light irradiation device includes a protective tube, which has a wire insertion path therein, a light source unit facing and disposed along an upper part of the protective tube, and a gutter-shaped concave reflection mirror facing the light source unit and provided below the protective tube. The concave reflection mirror is received in a gutter-shaped concave accommodating part provided in a holding body, and has flange portions extending from the outer surface in the horizontal direction. The convex reflection mirror is detachably affixed to the holding body with the flange portions.
    Type: Grant
    Filed: June 2, 2017
    Date of Patent: May 26, 2020
    Inventor: Yasushi Omae