Patents Examined by Sean M Luck
  • Patent number: 10388488
    Abstract: In one embodiment, a multi charged particle beam drawing apparatus includes an emitter emitting a charged particle beam, a shaping aperture array in which a plurality of first openings are formed, and which receives irradiation of the charged particle beam in an area including the plurality of first openings, and forms a multi-beam by allowing part of the charged particle beam to pass through a corresponding one of the plurality of first openings, a blanking aperture array in which a plurality of second openings are formed, through each of which a beam is passed, corresponding to part of the multi-beam which has passed through the plurality of first openings, the plurality of second openings each including a blanker that performs blanking deflection of a beam, and a movement controller moving the shaping aperture array or the blanking aperture array, and adjusting space between the shaping aperture array and the blanking aperture array.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: August 20, 2019
    Assignee: NuFlare Technology, Inc.
    Inventors: Hirofumi Morita, Osamu Iizuka, Tsubasa Nanao
  • Patent number: 10388487
    Abstract: A method includes: generating a multiplicity of particle beams such that the particle beams penetrate a predetermined plane side-by-side and have within a volume region around the predetermined plane in each case one beam focus; scanning a first region of the surface of an object with the particle beams and detecting first intensities of particles produced by the particle beams while setting an operating parameter of the multi-beam particle microscope; and determining first values of an object property based on the first intensities. The first values represent the object property within the first region, and the object property represents a physical property of the object. The method also includes determining a second value of the operating parameter for use for a second region of the surface based on the first values of the object property.
    Type: Grant
    Filed: October 20, 2016
    Date of Patent: August 20, 2019
    Assignee: Carl Zeiss Microscopy GmbH
    Inventor: Dirk Zeidler
  • Patent number: 10381194
    Abstract: A charged particle beam writing apparatus includes an area density calculation unit to calculate a pattern area density weighted using a dose modulation value, which has previously been input from an outside and in which an amount of correction of a dimension variation due to a proximity effect has been included, a fogging correction dose coefficient calculation unit to calculate a fogging correction dose coefficient for correcting a dimension variation due to a fogging effect by using the pattern area density weighted using the dose modulation value having been input from the outside, a dose calculation unit to calculates a dose of a charged particle beam by using the fogging correction dose coefficient and the dose modulation value, and a writing unit to write a pattern on a target object with the charged particle beam of the dose.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: August 13, 2019
    Assignee: NuFlare Technology, Inc.
    Inventors: Yasuo Kato, Hiroshi Matsumoto
  • Patent number: 10373817
    Abstract: A method of determining the structure of a macromolecular assembly (MMA) comprises the steps of (a) generating precursor ions of an MMA species to be investigated; (b) transporting the MMA precursor ions to a fragmentation zone; (c) carrying out pulsed fragmentation of the MMA precursor ions in the fragmentation zone; (d) for a first plurality of MMA precursor ions, detecting both a spatial distribution of the resultant MMA fragment ions, and an m/z distribution of the MMA fragment ions; (e) analyzing the spatial and m/z distributions of fragment ions formed from the said first plurality of precursor ions of the MMA species to be investigated, to determine the relative positions of those fragment ions within the structure of the precursor MMA; and (f) reconstructing the three dimensional (3D) structure of the MMA from the analysis of the spatial and m/z distributions of fragment ions.
    Type: Grant
    Filed: July 23, 2018
    Date of Patent: August 6, 2019
    Assignees: Thermo Fisher Scientific (Bremen) GmbH, Universiteit Maastricht, Universiteit Ultrecht Holding B.V.
    Inventors: Alexander Alekseevich Makarov, Ronald M. A. Heeren, Albert J. R. Heck
  • Patent number: 10372041
    Abstract: A target generation device according to one aspect of the present disclosure includes a tank for containing a target substance, a heater provided at the tank, a nozzle communicating with the inside of the tank, a lid having a gas inlet port communicating with the inside of the tank, and a plurality of shielding plates that are disposed inside the tank and suppress entry of the target substance to the gas inlet port. Each of the shielding plates includes at least one non-shielding region for allowing the gas to pass through. The non-shielding regions of at least two of the shielding plates are arranged at positions in which one of the non-shielding regions of the at least two of the shielding plates is not seen into the other of the non-shielding regions of the at least two of the shielding plates.
    Type: Grant
    Filed: January 29, 2019
    Date of Patent: August 6, 2019
    Assignee: Gigaphoton Inc.
    Inventors: Yutaka Shiraishi, Toshihiro Nishisaka
  • Patent number: 10366863
    Abstract: A detector supplement device for integration in a spectroscopy setup with the spectroscopy setup including a vacuum chamber, a light source, a sample irradiating a reflected photon beam and a charged particle beam in the same direction of propagation into a radiation detector which is able to detect ultrafast electric currents originating from charged particles. The detector supplement device includes a Rogowski coil placeable inside the vacuum chamber between the sample and radiation detector. The charged particle beam is guided through the hollow core of the Rogowski coil allowing synchronized measurements of electrical currents due to the charged particle beam correlated to the reflected photon beam, while irradiation of the reflected photon beam and the charged particle beam takes place in the same direction of propagation.
    Type: Grant
    Filed: November 25, 2016
    Date of Patent: July 30, 2019
    Inventors: Davide Bleiner, Yunieski Arbelo-Pena
  • Patent number: 10359318
    Abstract: A non-contact system and heating method includes a blackbody core heated according to Molecular Resonant Wavelength-Radio Frequency Heating method. Radio frequency waves of a resonant frequency travel in a hollow channel of a waveguide that contains an object, such as a blackbody core. The core is structurally secured within the waveguide by a spring system that supports the base of the core, yet the core does not touch the waveguide and does not conduct heat to the waveguide. The core absorbs the RF energy and generates heat by molecular friction within the material of the core moving in a resonating pendulumatic fashion. The core converts the RF energy to infrared (IR) energy and emits IR waves through an exit aperture disposed within a hood coupled to the waveguide. A non-contact temperature measurement system measures the temperature of the core, such as using a phosphor decay temperature measurement method.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: July 23, 2019
    Assignee: Raytheon Company
    Inventor: Clifford S. Burnes
  • Patent number: 10352702
    Abstract: A fully reciprocal atomic interferometric gyroscope is provided. The fully reciprocal atomic interferometric gyroscope includes an atomic chamber, a plurality of lasers, a controller and measurement sensor. The atomic chamber is used to hold an atom cloud. The plurality of lasers are selectively positioned to selectively direct laser beams into the atomic chamber. The controller is configured to control the plurality lasers to initially cool the atom cloud to a point where at least one optical lattice can be formed that is used to move wave function halves of atoms of the atom cloud along split wave function paths that form an interferometer cycle. The measurement sensor is configured to conduct a phase readout of a wave function upon the completion of at least one interferometer cycle around the split wave function paths.
    Type: Grant
    Filed: January 30, 2017
    Date of Patent: July 16, 2019
    Assignee: Honeywell International Inc.
    Inventor: Robert Compton
  • Patent number: 10352900
    Abstract: An apparatus is provided to separate ions temporally according to a physico-chemical property comprising an ion guide comprising a plurality of electrodes and a first device arranged and adapted to remove undesired ions remaining within the ion guide after ions of interest have exited the ion guide.
    Type: Grant
    Filed: February 16, 2015
    Date of Patent: July 16, 2019
    Inventors: Kevin Giles, Martin Raymond Green, Jason Lee Wildgoose
  • Patent number: 10354830
    Abstract: An ion source includes an external housing, an electrically conductive tip, a gas supply system, configured to supply an operating gas into the neighborhood of the tip, and a cooling system configured to cool the tip. The gas supply system includes a first tube with a hollow interior, and a chemical getter material is provided in the hollow interior of the tube.
    Type: Grant
    Filed: March 27, 2017
    Date of Patent: July 16, 2019
    Assignee: Carl Zeiss Microscopy, LLC
    Inventors: Weijie Huang, John A. Notte
  • Patent number: 10354835
    Abstract: An ion implanter includes an ion source configured to generate an ion beam including an ion of a nonradioactive nuclide, a beamline configured to support an ion beam irradiated target, and a controller configured to calculate an estimated radiation dosage of a radioactive ray generated by a nuclear reaction between the ion of the nonradioactive nuclide incident into the ion beam irradiated target and the nonradioactive nuclide accumulated in the ion beam irradiated target as a result of ion beam irradiation performed previously.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: July 16, 2019
    Inventor: Hiroshi Matsushita
  • Patent number: 10345207
    Abstract: The method is for quantification of sub-visible particles. A filter membrane is provided that has a plurality of pores defined therethrough. The filter membrane is in operational engagement with a vacuum chamber. The pores are sealed with a sealant. A sample droplet, containing a liquid and sub-visible particles, is applied onto the filter membrane. The liquid dissolves the sealant in pores disposed directly below the sample droplet. The liquid flows through the pores in which the sealant has been dissolved and the sub-visible particles remain on top of the filter membrane. The particles are enumerated in an electron microscope.
    Type: Grant
    Filed: February 15, 2019
    Date of Patent: July 9, 2019
    Inventors: Rickard Nordstrom, Ida-Maria Sintorn, Lars Haag
  • Patent number: 10345336
    Abstract: A scanning probe microscope that includes a probe, a positioning unit configured to position a probe on a measurement sample, an excitation unit configured to excite the measurement sample at a predetermined frequency, a resonance unit configured to output a frequency modulation signal by converting a change of a capacitance of the measurement sample, a lock-in amplifier configured to output a differential capacitance signal obtained by extracting a predetermined frequency component and a harmonic component of the predetermined frequency of the demodulated signal, a conversion unit configured to output data indicative of a relationship between a voltage applied to the measurement sample and the capacitance, a detecting unit that detects a voltage value corresponding to a feature point of the relationship data, and a main measurement control unit that measures electrical characteristics of the measurement sample subjected to a DC bias voltage substantially equal to the feature point voltage.
    Type: Grant
    Filed: August 31, 2016
    Date of Patent: July 9, 2019
    Inventors: Jun Hirota, Tsukasa Nakai, Haruko Akutsu
  • Patent number: 10332722
    Abstract: To provide an ion gun of a penning discharge type capable of narrowing a beam with a low ion beam current at a low acceleration voltage, an ion milling device including the same, and an ion milling method. An ion milling device that controls half width of a beam profile of an ion beam with which a sample is irradiated from an ion gun to be in a range of 200 ?m to 350 ?m. The device includes: the ion gun that ionizes a gas supplied from the outside, and emits an ion beam; a gas-flow-rate varying unit that varies a flow rate of the gas supplied to the ion gun; and a current measurement unit that measures a current value of the ion beam emitted from the ion gun. The gas-flow-rate varying unit sets a gas flow rate to be higher than a gas flow rate at which the ion beam current has a maximum value based on the current value measured by the current measurement unit and the flow rate of the gas determined by the gas-flow-rate varying unit.
    Type: Grant
    Filed: July 29, 2015
    Date of Patent: June 25, 2019
    Inventors: Kengo Asai, Hiroyasu Shichi, Hisayuki Takasu, Toru Iwaya
  • Patent number: 10319556
    Abstract: An ElectroMagnetic-Mechanical Pulser (“EMMP”) generates electron pulses at a continuously tunable rate between 100 MHz and 20-50 GHz, with energies up to 0.5 MeV, duty cycles up to 20%, and pulse widths between 100 fs and 10 ps. A dielectric-filled Traveling Wave Transmission Stripline (“TWTS”) that is terminated by an impedance-matching load such as a 50 ohm load imposes a transverse modulation on a continuous electron beam. The dielectric is configured such that the phase velocity of RF propagated through the TWTS matches a desired electron energy, which can be between 100 and 500 keV, thereby transferring electromagnetic energy to the electrons. The beam is then chopped into pulses by an adjustable aperture. Pulse dispersion arising from the modulation is minimized by a suppressing section that includes a mirror demodulating TWTS, so that the spatial and temporal coherence of the pulses is substantially identical to the input beam.
    Type: Grant
    Filed: December 2, 2016
    Date of Patent: June 11, 2019
    Assignee: Euclid Techlabs, LLC
    Inventors: Chunguang Jing, Jiaqi Qiu, Sergey V Baryshev, June W Lau, Yimei Zhu
  • Patent number: 10304656
    Abstract: In this invention, vibrations generated by a freezer from a cooling mechanism for cooling an ion source emitter tip are prevented from being transmitted to the emitter tip as much as possible, while the cooling capability of the cooling mechanism is improved widely. The ion beam device (10) is equipped with: an ion source housing (22) provided with an emitter tip (45) and defining an ion source chamber (27) supplied with an ionization gas or gas molecules; a gas pot (51) provided in the ion source chamber (27) so as to be thermally connected to the emitter tip (45) and accommodated so as to have no direct physical contact with a cooling stage (57) of a freezer (52); and a spacer (59) provided on the peripheral surface of the cooling stage (57) housed by the gas pot (51) and maintaining a given interval or greater between the peripheral surface of the cooling stage (57) and the internal peripheral surface of the gas pot (52).
    Type: Grant
    Filed: November 26, 2014
    Date of Patent: May 28, 2019
    Inventors: Hiroyuki Muto, Yoshimi Kawanami
  • Patent number: 10304672
    Abstract: The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
    Type: Grant
    Filed: December 14, 2015
    Date of Patent: May 28, 2019
    Assignees: Carl Zeiss SMT GmbH, Carl Zeiss Microscopy GmbH
    Inventors: Gennady Fedosenko, Michel Aliman, Hin Yiu Anthony Chung, Albrecht Ranck, Leonid Gorkhover
  • Patent number: 10283338
    Abstract: A mass spectrometer vacuum interface can include a skimmer apparatus having a skimmer aperture and an internal surface. A method of operating the mass spectrometer vacuum interface can include establishing an outwardly directed flow along the internal surface of the skimmer apparatus.
    Type: Grant
    Filed: July 17, 2017
    Date of Patent: May 7, 2019
    Assignee: Thermo Fisher Scientific (Bremen) GmbH
    Inventors: Alexander Alekseevich Makarov, Lothar Rottmann
  • Patent number: 10283342
    Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.
    Type: Grant
    Filed: November 23, 2016
    Date of Patent: May 7, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Ilya Bezel, Anatoly Shchemelinin, Kenneth P. Gross, Matthew Panzer, Anant Chimmalgi, Lauren Wilson, Joshua Wittenberg
  • Patent number: 10274513
    Abstract: A system for atomic force microscopy in which a sharp electrode tip of an flexing probe cantilever is positioned closely adjacent a sample being probed for its electrical characteristics. An optical beam irradiates a portion of the sample surrounding the probe tips and is modulated at a radio or lower modulation frequency. In one embodiment, a reference microwave signal is incident to the electrode tip. Microwave circuitry receives a microwave signal from the probe tip, which may be the reflection of the incident signal. Electronic circuitry processes the received signal with reference to the modulation frequency to produce one or more demodulated signals indicative of the electronic or atomic properties of the sample. Alternatively, the optical beam is pulsed and the demodulated signal is analyzed for its temporal characteristics. The beam may non-linearly produce the microwave signal. Two source lasers may have optical frequencies differing by the microwave frequency.
    Type: Grant
    Filed: January 31, 2017
    Date of Patent: April 30, 2019
    Assignee: Primenano, Inc.
    Inventors: Stuart L. Friedman, Michael M. Kelly