Abstract: An electron beam irradiation apparatus which exposes a wafer coated with an electron beam resist with an electron beam is equipped with: a stage that can be moved holding the wafer; an electron beam optical system that irradiates the wafer with an electron beam; and, an opening member, placed facing the wafer via a predetermined gap on the wafer side in the optical arrangement direction of the electron beam optical system, and having an opening through which the electron beam from the electron beam optical system passes.

Abstract: An acceleration voltage generator generates a high-voltage pulse applied to a push-out electrode, by operating a switch section to turn on and off a high direct-current voltage generated by a high-voltage power supply. A drive pulse signal is supplied from a controller to the switch section through a primary-side drive section, transformer, and secondary-side drive section. A primary-voltage controller receives a measurement result of ambient temperature of the acceleration voltage generator from a temperature sensor, and controls a primary-side power supply to change a primary-side voltage according to the temperature, thereby adjusting the voltage applied between the two ends of a primary winding of the transformer. The adjustment made on the primary-side voltage changes a slope angle of rise of a gate voltage in the MOSFET, and enables a correction to a discrepancy in the timing of the rise/fall of the high-voltage pulse caused by change in ambient temperature.

Abstract: The present disclosure relates to structural elucidation of isotopically labeled analytes using chromatography-MS and data-independent acquisition. The present disclosure can be used for rapid screening of analytes, such as the metabolome, including the simultaneous collection of both qualitative and quantitative information of known and unknown analytes.

Abstract: A method of determining a local electric field and/or a local magnetic field in a sample and/or the dielectric constant of a material and/or the angle between the input and output surfaces of the sample, comprising illumination of the sample by an electron beam in precession mode using an illumination device, generation of a diffraction pattern, determination of the offset of the disk corresponding to the transmitted beam due to the electric field and/or the magnetic field, by comparison of the diffraction pattern and a reference diffraction pattern, determination of a deflection angle of the transmitted beam, and determination of the value of the local electric field and/or the local magnetic field of the sample and/or determination of the dielectric constant of materials and/or determination of the angle between the input and output surfaces of the sample.

Abstract: A scanning probe system with a probe comprising a cantilever extending from a base to a free end, and a probe tip carried by the free end of the cantilever. A first driver is provided with a first driver input, the first driver arranged to drive the probe in accordance with a first drive signal at the first driver input. A second driver is provided with a second driver input, the second driver arranged to drive the probe in accordance with a second drive signal at the second driver input. A control system is arranged to control the first drive signal so that the first driver drives the base of the cantilever repeatedly towards and away from a surface of a sample in a series of cycles. A surface detector arranged to generate a surface signal for each cycle when it detects an interaction of the probe tip with the surface of the sample.

Abstract: A sample analysis system includes a Fluorescence Spectrophotometer, a liquid chromatography device, a mass spectrometer, a control device, and a sample introducer. The Fluorescence Spectrophotometer obtains a three-dimensional fluorescence spectrum including an excitation wavelength, a fluorescence wavelength, and a fluorescence intensity. The liquid chromatography device obtains a three-dimensional absorption spectrum including an elution time, an absorption wavelength, and an absorbance. The mass spectrometer obtains a three-dimensional mass spectrum including an elution time, mass information, and an ion intensity. The axes of respective spectra are set on the same scale, and the mass-charge ratio in the three-dimensional mass spectrum data obtained by the mass spectrometer is determined.

Abstract: In one embodiment, a method of obtaining a beam deflection shape includes using a plurality of beams to write a line pattern on a substrate by deflecting the plurality of beams, the plurality of beams being beams in the i-th row (i is an integer satisfying 1?i?m) among multiple charged-particle beams including beams of m rows and n columns (m and n are integers equal to or greater than two), the deflection being performed in such a manner that a writing area for a beam in the j-th column (j is an integer satisfying 1?j?n?1) is continuously adjacent to a writing area for a beam in the (j+1)th column, measuring a degree of unevenness of an edge of the line pattern, and obtaining a deflection shape of the beam based on the degree of unevenness.

Abstract: A treatment bed arranged in a tip direction of an irradiation nozzle and constructed movably, a treatment information system that manages prescription data, a treatment control system that receives a target position stored in the treatment information system to cause a main display system to display the target position, a pendant to input a movement command for the treatment bed, the main display system that receives the target position of the treatment bed from the treatment control system and displays an actual position of the treatment bed, and a patient positioning support system that calculates correction values for the target position thereof to provide the correction values to the treatment control system and the pendant are included, wherein the treatment control system sends the target position thereof to the treatment information system at a period shorter than an operation sequence thereof and stores initial values to be sent in advance.

Abstract: The invention generally relates to systems and methods for relay ionization of a sample. In certain aspects, the invention provides systems that include an ion source that generates ions, a sample emitter configured to hold a sample, and a mass spectrometer. The system is configured such that the ions generated by the ion source are directed to interact with the sample emitter, thereby causing the sample to be discharged from the sample emitter and into the mass spectrometer.

Abstract: Embodiments include devices and methods for desorbing molecules from a chamber wall. In an embodiment, a desorption device includes several light emitting diodes (LEDs) mounted on a substrate having a wafer form factor. The LEDs may emit ultraviolet (UV) radiation, such as UV radiation in a UV C range. In an embodiment, the LEDs are thermally coupled to a heat exchanger, such as a thermoelectric cooling device. The emitted radiation may uniformly irradiate a chamber wall to desorb water molecules from the chamber wall. Other embodiments are also described and claimed.

Abstract: Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

Abstract: The method is for quantification of sub-visible particles. A filter membrane is provided that has a plurality of pores defined therethrough. The pores are sealed with a sealant such as glycine or poly-vinyl alcohol (PVA). A sample droplet, containing liquid and sub-visible particles, is applied onto the filter membrane. The liquid dissolves the sealant in pores disposed directly below the sample droplet. The liquid flows through the pores in which the sealant has been dissolved and the sub-visible particles remain on top of the filter membrane. The particles are enumerated in an electron microscope.

Abstract: A charged particle buncher includes a series of spaced apart electrodes arranged to generate a shaped electric field. The series includes a first electrode, a last electrode and one or more intermediate electrodes. The charged particle buncher includes a waveform device attached to the electrodes and configured to apply a periodic potential waveform to each electrode independently in a manner so as to form a quasi-electrostatic time varying potential gradient between adjacent electrodes and to cause spatial distribution of charged particles that form a plurality of nodes and antinodes. The nodes have a charged particle density and the antinodes have substantially no charged particle density, and the nodes and the antinodes are formed from a charged particle beam with an energy less than or equal to 500 keV.

Abstract: The invention generally relates to mass spectrometry probes and systems for ionizing a sample. In certain embodiments, the invention provides a mass spectrometry probe including a substrate in which a portion of the substrate is coated with a material, a portion of which protrudes from the substrate.

Abstract: The present invention provides a marine cable device configured for preventing or reducing biofouling along its exterior surface, which during use is at least temporarily exposed to water. The marine cable device according to the present invention comprises at least one light source configured to generate an anti-fouling light and at least one optical medium configured to receive at least part of the anti-fouling light. The optical medium comprises at least one emission surface configured to provide at least part of said anti-fouling light on at least part of said exterior surface.

Abstract: Anti-fouling lighting system (1) for preventing or reducing bio fouling on a fouling surface (1201) of an object (1200), by providing an anti-fouling light (211) via an optical medium (220) to said fouling surface, the anti-fouling lighting (1) system comprising: (a) a lighting module (200) comprising (i) a light source (210) configured to generate an anti-fouling light (211), and (ii) said optical medium (220) configured to receive at least part of the anti-fouling light (211), the optical medium (220) comprising an emission surface (222) configured to provide at least part of said anti-fouling light (211); and (b) a control system (300) configured to control an intensity of the anti-fouling light (211) as function of one or more of (i) a feedback signal related to a biofouling risk and (ii) a timer for time-based varying the intensity of the anti-fouling light (211).

Abstract: A spray area in which a large number of droplets of a liquid sample sprayed from a spray nozzle is separated from the tip of a needle electrode for corona discharge by a sufficiently large distance, with a grid electrode facing the needle electrode placed in between. Ring electrodes for creating an electric field which drives primary ions that should react with the sample and generate sample-derived ions are provided within an ion chamber between the grid electrode and the spray area. Primary ions generated by corona discharge within the space between the needle electrode and the grid electrode pass through the opening of the grid electrode, reach the spray area under the effect of the electric field, and ionize sample components. Since the droplets are prevented from adhering to the needle electrode, the corona discharge is maintained in a stable state.

Abstract: A method of mass spectrometry is disclosed comprising isolating a group of different ions derived from chemical compounds in the same class, wherein the different ions have different mass to charge ratios and ion mobilities. The step of isolating comprises temporally separating the ions according to their ion mobility in an ion mobility separator; and mass filtering the ions according to mass to charge ratio with a mass filter. The mass to charge ratios transmitted by the mass filter are varied as a function of time such that said different ions derived from chemical compounds in the same class are transmitted by the mass filter and other ions are not transmitted by the mass filter.

Abstract: Determining a property of a layer of an integrated circuit (IC), the layer being formed over an underlayer, is implemented by performing the steps of: irradiating the IC to thereby eject electrons from the IC; collecting electrons emitted from the IC and determining the kinetic energy of the emitted electrons to thereby calculate emission intensity of electrons emitted from the layer and electrons emitted from the underlayer calculating a ratio of the emission intensity of electrons emitted from the layer and electrons emitted from the underlayer; and using the ratio to determine material composition or thickness of the layer. The steps of irradiating IC and collecting electrons may be performed using x-ray photoelectron spectroscopy (XPS) or x-ray fluorescence spectroscopy (XRF).

Abstract: An ion implantation system is provided having one or more conductive components comprised of one or more of lanthanated tungsten and a refractory metal alloyed with a predetermined percentage of a rare earth metal. The conductive component may be a component of an ion source, such as one or more of a cathode, cathode shield, a repeller, a liner, an aperture plate, an arc chamber body, and a strike plate. The aperture plate may be associated with one or more of an extraction aperture, a suppression aperture and a ground aperture.