Abstract: A cleaning method applied in semiconductor manufacturing is provided. The method includes: receiving a substrate having a surface; identifying a location of a particle on the surface of the substrate; moving a cleaning apparatus toward the location of the particle; performing a cleaning operation, thereby removing the particle by spraying a cleaning liquid from the cleaning apparatus flowing against gravity and toward the surface of the substrate; detecting the surface of the substrate; and performing a second cleaning operation when a cleaning result of the detection is not acceptable. A semiconductor manufacturing method and a system for cleaning a substrate are also provided.

Abstract: A surface equalization apparatus designed to be compatible with a wide variety of part technologies, composite materials and part geometries. The apparatus works with software, chemistry, abrasives and media and includes an oblong, elongated input tank for holding media and a part. The input tank is connected to a motor mount, which is connected to an eccentric motor. When the motor is activated, the input tank begins to move in a vibrational, sinusoidal manner. The motion of the tank on attached springs generates a rotational flow of media in the tank. This creates a low amplitude/high frequency movement of the part through the tank. Surface structures divert media to prevent the part from contacting the side of the tank. Spray nozzles are positioned above the input tank. Acoustic damping foam is positioned around the central components. A cooling fan allows airflow through the apparatus.

Abstract: A gas turbine engine system includes a compressor, gas turbine, and combustor including a plurality of late lean fuel injectors supplied with secondary fuel to its interior. The gas turbine engine system includes a wash system in communication with the late lean fuel injectors. The wash system includes a water source; water pump; anti-corrosion agent fluid source with an anti-corrosion agent including a polyamine corrosion inhibitor; anti-corrosion agent supply piping in fluid communication with the anti-corrosion agent fluid source; mixing chamber receiving water and anti-corrosion agent to produce an anti-corrosion mixture in fluid communication with the mixing chamber and the plurality of late lean fuel injectors. Fluid from the mixing chamber including the water, the anti-corrosion agent fluid source, or a mixture thereof is injected, while the gas turbine engine is off-line, into the combustor at at least one of the plurality of late lean fuel injectors.

Abstract: In a method for operating a system, a first vibration is imparted to a component of the system and the first vibration of the component is detected by a sensor. The sensor generates a sensor signal for transmission to a control device, which analyzes the sensor signal and determines whether a buildup is present on the component based upon the analysis of the sensor signal. A second vibration is imparted to the component to remove the buildup when the buildup has been detected.

Abstract: A cleaning method for removing a film deposited in a processing container includes: executing a cleaning of a processing container by supplying a cleaning gas to the processing container while increasing a pressure in the processing container in a stepwise manner at a plurality of time points, thereby removing a film deposited in the processing container; and detecting an end point of the cleaning based on time-dependent data of a concentration of a predetermined gas generated during the execution of the cleaning, for each pressure of the plurality of time points.

Abstract: A composition for cleaning a substrate is provided. According to an embodiment, the composition for cleaning the substrate includes an organic solvent having a Hansen solubility parameter of 5 or more to 12 or less for polystyrene latex to the substrate.

Abstract: A cleaning system for cleaning gas paths in an engine core of a gas turbine engine is provided. The cleaning system includes a source of an engine cleaning liquid; an engine cleaning mist forming unit that vapourises the engine cleaning liquid to form an engine cleaning mist and delivers the engine cleaning mist into the engine core of the gas turbine engine; at least one delivery device configured to deliver the engine cleaning liquid to the engine cleaning mist forming unit; a pump configured to draw the engine cleaning mist through the engine core to clean the gas paths within the engine core; and a mist collecting arrangement including a condensing chamber. The mist collecting arrangement is configured to collect the engine cleaning mist that has passed through the engine core and condense the collected engine cleaning mist in the condensing chamber.

Abstract: A cleaning method that removes contaminants adhering to a stage in a chamber, includes: setting a pressure in a chamber to a predetermined vacuum pressure; supplying a first gas that forms a shock wave toward the stage; and supplying a second gas that does not form the shock wave toward the stage.

Abstract: A substrate processing method includes forming a high surface tension liquid film by supplying high surface tension liquid on a substrate surface, replacing the high surface tension liquid film with low surface tension liquid by supplying the low surface tension liquid to a center area of a substrate so that the low surface tension liquid impinges on the high surface tension liquid film formed on the center area of the substrate, and supplying high surface tension liquid for a predetermined period of time during the supplying the low surface tension liquid.

Abstract: There is provided a method of cleaning a substrate processing apparatus in which a drying process of drying a substrate whose surface is wet with a liquid is performed by bring the substrate into contact with a supercritical fluid, the method including: diffusing a first cleaning fluid in an interior of the substrate processing apparatus, the first cleaning fluid being obtained by mixing the supercritical fluid with a solvent containing polar molecules and having a lower boiling point than a boiling point of the liquid; and discharging the first cleaning fluid from the interior of the substrate processing apparatus, that occurs after the diffusing the first cleaning fluid.

Abstract: An inflatable device equipped with a guiding mechanism and methods of installing the inflatable device to form a temporary barrier within a gas turbine engine are provided. In one aspect, an inflatable device includes a backbone and an inflatable bladder connected thereto. The backbone is formed of a flexible and inextensible material. The inflatable bladder is formed of an expandable material. To install the inflatable device within an annular chamber of a gas turbine engine, the backbone is inserted into a first access port of the engine and is moved circumferentially around the annulus of the chamber. The backbone is retrieved through a second access port. The inflatable bladder is moved into position within the chamber by pushing the backbone into the first access port and/or pulling the backbone out of the second access port. When positioned in place, the inflatable bladder is inflated to form an annular seal.

Abstract: A scarifying rig may be mounted on the surface of a floating roof to move about the perimeter of the roof. The rig comprises a trolley, one or more support rails fixed on the trolley, and a horizontal arm mounted on the support rails for controlled movement along the support rails. A vertical rail is attached substantially to the end of the horizontal arm for reciprocating vertical movement (up and down) about the end of the horizontal arm. A nozzle assembly is mounted to the vertical rail.

Abstract: Methods and systems are provided for capless refueling system of a vehicle. In one example, a method may include cleaning a capless unit of a capless refueling system by generating vacuum in the capless refueling system and delivering compressed air to the capless unit from an electrical booster of an engine. The compressed air may be delivered to the capless unit via a two-way valve configured to control a flow path of the compressed air.

Abstract: A method of cleaning residual resin from an additively manufactured object, includes: (a) enclosing an additively manufactured object in an inner chamber of a centrifugal separator, the additively manufactured object including a light polymerized resin with a surface coating of viscous, unpolymerized, residual resin; (b) flooding the chamber with a volatile organic solvent vapor without contacting liquid organic solvent to the object, the vapor present in an amount sufficient to reduce the viscosity of the residual resin; and (c) spinning the additively manufactured object in the chamber to centrifugally separate at least a first portion of the residual resin from the object.

Abstract: A system and method for cleaning a cart wheel includes an elongated body having a central channel having an entry end and an exit end. A shuttle slidably engages the elongated body and is engageable by a wheel entering the central channel from the entry end such that the wheel pushes the shuttle along the central channel and disengages the shuttle adjacent the exit end, wherein a sliding engagement between the wheel and the shuttle cleans the wheel.

Abstract: A self-cleaning food processor includes a body and a crushing assembly. The crushing assembly includes a cup body, a cup lid, a crushing electric motor and a crushing device, wherein the cup lid cooperates with the cup body to form a crushing cavity, an output shaft of the crushing electric motor extends into the crushing cavity, the crushing device is located in the crushing cavity and is connected to the output shaft of the crushing electric motor, and the volume of the crushing cavity is V1. A cleaning process is provided after the food processor completes food processing, and in the cleaning process, cleaning water, the volume of which is no less than V0, is injected into the cup body at least twice, and the crushing device is controlled to drive the cleaning water to move in the crushing cavity, wherein 0.2V1?V0?0.6V1.

Abstract: Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.

Abstract: Exemplary methods of semiconductor processing may include forming a plasma of a fluorine-containing precursor. The methods may include performing a chamber clean in a processing region of a semiconductor processing chamber. The processing region may be at least partially defined between a faceplate and a substrate support. The methods may include generating aluminum fluoride during the chamber clean. The methods may include contacting surfaces within the processing region with a carbon-containing precursor. The methods may include volatilizing aluminum fluoride from the surfaces of the processing region.

Abstract: Described are finishing solutions for removing support material and finishing 3D-printed objects. The finishing solution may contain a base (e.g., an aqueous base), an optional first caustic agent, an optional second caustic agent, an optional third caustic agent, an optional emulsifier, a polyol, a first antifoaming agent, an optional second antifoaming agent, and water. Also described are methods of using the finishing solution described herein.

Abstract: A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.