Patents Examined by Sonya D. McCall-Shepard
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Patent number: 9373634Abstract: According to one embodiment, a method is disclosed for manufacturing a semiconductor device. The second insulating film seals the hole near an interface of the insulating layer and the select gate. The second insulating film is provided on a side wall of the channel body with a space left in the hole above the select gate. The method can include burying a semiconductor film in the space, in addition, forming a conductive film in contact with the channel body.Type: GrantFiled: May 8, 2015Date of Patent: June 21, 2016Assignee: Kabushiki Kaisha ToshibaInventors: Mitsuru Sato, Masaru Kito, Megumi Ishiduki, Ryota Katsumata
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Patent number: 9373706Abstract: Methods of forming a semiconductor device are provided. A method of forming a semiconductor device includes forming a semiconductor layer on a fin, where the fin and the semiconductor layer include first and second semiconductor materials, respectively. Moreover, the method includes defining first and second active fins that include the second semiconductor material, by removing at least a portion of the fin. Related semiconductor devices are also provided.Type: GrantFiled: January 20, 2015Date of Patent: June 21, 2016Assignee: Samsung Electronics Co., Ltd.Inventors: Shigenobu Maeda, Bo-Ram Kim
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Patent number: 9368402Abstract: A system and method for providing a conductive line is provided. In an embodiment the conductive line is formed by forming two passivation layers, wherein each passivation layer is independently patterned. Once formed, a seed layer is deposited into the two passivation layers, and a conductive material is deposited to fill and overfill the patterns within the two passivation layers. A planarization process such as a chemical mechanical polish may then be utilized in order to remove excess conductive material and form the conductive lines within the two passivation layers.Type: GrantFiled: August 24, 2015Date of Patent: June 14, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu Yi Huang, Hung-Jui Kuo, Chung-Shi Liu
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Patent number: 9368675Abstract: A method of manufacturing a light-emitting device includes flattening top portions of solder bumps disposed on a wiring substrate, disposing a light-emitting element on the solder bumps whose top portions are flattened, and heating the solder bumps to be melt and to be fused so as to provide an adhesive with which the light-emitting element is secured on the wiring substrate.Type: GrantFiled: February 27, 2015Date of Patent: June 14, 2016Assignee: NICHIA CORPORATIONInventors: Yoshikazu Takeuchi, Toshiaki Moriwaki, Atsushi Takeichi, Takahiro Tani
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Patent number: 9368548Abstract: The present invention relates to a light emitting device, including a plurality of light guide portions, a reflection prevention substance disposed on an inclined surface of each light guide portion of the plurality of light guide portions, and a plurality light emitting regions. Each light emitting region includes a first-type semiconductor layer, a second-type semiconductor layer, and an active layer disposed between the first-type semiconductor layer and the second-type semiconductor layer. Each light guide portion of the plurality of light guide portions is surrounded by light emitting regions of the plurality of light emitting regions.Type: GrantFiled: February 9, 2015Date of Patent: June 14, 2016Assignee: SEOUL VIOSYS CO., LTD.Inventor: Jae Ho Lee
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Patent number: 9368345Abstract: A step of preparing a silicon carbide substrate, a step of forming a first silicon carbide semiconductor layer on the silicon carbide substrate using a first source material gas, and a step of forming a second silicon carbide semiconductor layer on the first silicon carbide semiconductor layer using a second source material gas are provided. In the step of forming a first silicon carbide semiconductor layer and the step of forming a second silicon carbide semiconductor layer, ammonia gas is used as a dopant gas, and the first source material gas has a C/Si ratio of not less than 1.6 and not more than 2.2, the C/Si ratio being the number of carbon atoms to the number of silicon atoms.Type: GrantFiled: December 12, 2013Date of Patent: June 14, 2016Assignee: Sumitomo Electric Industries, Ltd.Inventor: Jun Genba
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Patent number: 9368392Abstract: The present disclosure relates to a MIM (metal-insulator-metal) capacitor, and an associated method of formation. In some embodiments, the MIM capacitor includes a first electrode having a capacitor bottom metal layer disposed over a dielectric buffer layer located over an under-metal layer. A capacitor dielectric layer is disposed onto and in direct contact with the capacitor bottom metal layer. A second electrode having a top capacitor metal layer is disposed onto and in direct contact with the capacitor dielectric layer. A capacitor inter-level dielectric (ILD) layer is disposed over the top capacitor metal layer, and a substantially planar etch stop layer disposed over the capacitor ILD layer. The capacitor's simple stack provides for a small step size that prevents topography related issues, while the dielectric buffer layer removes design restrictions on the lower metal layer.Type: GrantFiled: April 10, 2014Date of Patent: June 14, 2016Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-Min Tseng, Shih-Guo Shen, Chien-Chung Wang, Huey-Chi Chu, Wen-Chuan Chiang
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Patent number: 9362248Abstract: A coreless package structure and a method for manufacturing same includes the steps of providing a supporting substrate comprising an etching resist layer and a copper foil. A groove is defined in the copper foil and a plurality of contact pads are formed on the surface of the copper foil. A chip including a plurality of electrode pads is received in the groove and a packaging layer is formed on a side of the copper foil. An insulating layer and a conductive pattern layer are formed on the packaging layer in that order, the conductive pattern layer being electrically connected to the contact pads and the electrode pads by a plurality of conductive bumps. Finally, the etching resist layer and the copper foil are removed to obtain a coreless package structure.Type: GrantFiled: July 15, 2014Date of Patent: June 7, 2016Assignee: Zhen Ding Technology Co., Ltd.Inventors: Yong Ha Woo, E-Tung Chou, Wen-Lun Lo
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Patent number: 9362198Abstract: An embodiment of a semiconductor device includes a semiconductor substrate that includes a host substrate and an upper surface, an active area, a substrate opening in the semiconductor substrate that is partially defined by a recessed surface, and a thermally conductive layer disposed over the semiconductor substrate that extends between the recessed surface and a portion of the semiconductor substrate within the active area. A method for fabricating the semiconductor device includes defining an active area, forming a gate electrode over a channel in the active area, forming a source electrode and a drain electrode in the active area on opposite sides of the gate electrode, etching a substrate opening in the semiconductor substrate that is partially defined by the recessed surface, and depositing a thermally conductive layer over the semiconductor substrate that extends between the recessed surface and a portion of the semiconductor substrate over the channel.Type: GrantFiled: April 10, 2014Date of Patent: June 7, 2016Assignee: FREESCALE SEMICONDUCTOR, INC.Inventors: Lakshminarayan Viswanathan, Bruce M. Green, Darrell G. Hill, L M Mahalingam
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Patent number: 9356139Abstract: Power Metal-Oxide-Semiconductor Field-Effect Transistors (MOSFETs) and methods of forming the same are provided. A power MOSFET may comprise a first drift region formed at a side of a gate electrode, and a second drift region beneath the gate electrode, adjacent to the first drift region, with a depth less than a depth of the first drift region so that the first drift region and the second drift region together form a stepwise shape. A sum of a depth of the second drift region, a depth of the gate dielectric, and a depth of the gate electrode may be of substantially a same value as a depth of the first drift region. The first drift region and the second drift region may be formed at the same time, using the gate electrode as a part of the implanting mask.Type: GrantFiled: February 19, 2015Date of Patent: May 31, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Fu-Yu Chu, Chih-Chang Cheng, Tung-Yang Lin, Ruey-Hsin Liu
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Patent number: 9356210Abstract: An optoelectronic module (202, 204, 206, 208, 210, 212, 214, 216, 218, 220, 222, 224, 226, 228, 230, 232, 234) comprises a carrier (102), at which and/or in which are arranged at least two semiconductor chips (104, 104a1, 104a2, 104b; 106, 106a1, 106a2, 106b, 106c) for emitting electromagnetic radiation (108a, 108b). An emission unit (110) for emitting electromagnetic radiation (109) from the optoelectronic module (202, 204, 206, 208, 210, 212, 214, 216, 218, 220, 222, 224, 226, 228, 230, 232, 234) is arranged on or in the carrier (102). At least one of the semiconductor chips (106, 106a1, 106a2, 106b, 106c) is spaced apart from the emission unit (110). A waveguide (112) guides the electromagnetic radiation (108a) of the at least one spaced-apart semiconductor chip (106, 106a1, 106a2, 106b, 106c) to the emission unit (110). The emission unit (110) has a coupling-out structure (114, 114a, 114b, 114c) for coupling out the electromagnetic radiation (108a) from the waveguide (112).Type: GrantFiled: January 11, 2013Date of Patent: May 31, 2016Assignee: OSRAM OPTO SEMICONDUCTORS GMBHInventors: Siegfried Herrmann, Stefan Illek
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Patent number: 9349836Abstract: After formation of gate structures over semiconductor fins and prior to formation of raised active regions, a directional ion beam is employed to form a dielectric material portion on end walls of semiconductor fins that are perpendicular to the lengthwise direction of the semiconductor fins. The angle of the directional ion beam is selected to be with a vertical plane including the lengthwise direction of the semiconductor fins, thereby avoiding formation of the dielectric material portion on lengthwise sidewalls of the semiconductor fins. Selective epitaxy of semiconductor material is performed to grow raised active regions from sidewall surfaces of the semiconductor fins. Optionally, horizontal portions of the dielectric material portion may be removed prior to the selective epitaxy process. Further, the dielectric material portion may optionally be removed after the selective epitaxy process.Type: GrantFiled: January 14, 2014Date of Patent: May 24, 2016Assignee: International Business Machines CorporationInventors: Emre Alptekin, Sameer H. Jain, Viraj Y. Sardesai, Cung D. Tran, Reinaldo A. Vega
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Patent number: 9344200Abstract: An electrical device that includes a first semiconductor device positioned on a first portion of a substrate and a second semiconductor device positioned on a third portion of the substrate, wherein the first and third portions of the substrate are separated by a second portion of the substrate. An interlevel dielectric layer is present on the first, second and third portions of the substrate. The interlevel dielectric layer is present over the first and second semiconductor devices. An optical interconnect is positioned over the second portion of the semiconductor substrate. At least one material layer of the optical interconnect includes an epitaxial material that is in direct contact with a seed surface within the second portion of the substrate through a via extending through the least one interlevel dielectric layer.Type: GrantFiled: October 8, 2014Date of Patent: May 17, 2016Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Cheng-Wei Cheng, Ning Li, Devendra K. Sadana, Kuen-Ting Shiu
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Patent number: 9343475Abstract: In a method of a vertical memory device, insulation layers and sacrificial layers are alternately and repeatedly formed on a substrate. A hole is formed through the insulation layers and the sacrificial layers that expose a top surface of the substrate. Then, an interior portion of the hole may be enlarged. A semiconductor pattern is formed to partially fill the enlarged portion of the hole. A blocking layer, a charge storage layer and a tunnel insulation layer may be formed on a sidewall of the hole and the semiconductor pattern. Then, the tunnel insulation layer, the charge storage layer and the blocking layer are partially removed to expose a top surface of the semiconductor pattern. A channel is formed on the exposed top surface of the semiconductor pattern and the tunnel insulation layer. The sacrificial layers are replaced with gate electrodes.Type: GrantFiled: January 15, 2014Date of Patent: May 17, 2016Assignee: Samsung Electronics Co., Ltd.Inventors: Kyung-Tae Jang, Sang-Hoon Lee, Ji-Youn Seo, Hyun-Yong Go, Koong-Hyun Nam, Ju-Wan Kim, Seung-Mok Shin, Myoung-Bum Lee, Ji-Woon Im, Tae-Jong Han
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Patent number: 9337347Abstract: A semiconductor element having high mobility, which includes an oxide semiconductor layer having crystallinity, is provided. The oxide semiconductor layer includes a stacked-layer structure of a first oxide semiconductor film and a second oxide semiconductor film having a wider band gap than the first oxide semiconductor film, which is in contact with the first oxide semiconductor film. Thus, a channel region is formed in part of the first oxide semiconductor film (that is, in an oxide semiconductor film having a smaller band gap) which is in the vicinity of an interface with the second oxide semiconductor film. Further, dangling bonds in the first oxide semiconductor film and the second oxide semiconductor film are bonded to each other at the interface therebetween. Accordingly, a decrease in mobility resulting from an electron trap or the like due to dangling bonds can be reduced in the channel region.Type: GrantFiled: December 18, 2014Date of Patent: May 10, 2016Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Junichi Koezuka
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Patent number: 9324687Abstract: A device and fabrication techniques are described that employ wafer-level packaging techniques to fabricate semiconductor devices that include an embedded integrated circuit chip device and an embedded passive device on a semiconductor wafer device. In implementations, the wafer-level package device includes a semiconductor wafer device, an embedded integrated circuit chip, an embedded passive device, an encapsulation structure covering at least a portion of the semiconductor wafer device, the embedded integrated circuit chip, and the embedded passive device, at least one redistribution layer structure, and at least one solder bump for providing electrical interconnectivity to the devices. Once the wafer is singulated into semiconductor devices, the semiconductor devices may be mounted to a printed circuit board, and the solder bumps may provide electrical interconnectivity through the backside of the device that interface with pads of the printed circuit board.Type: GrantFiled: June 28, 2013Date of Patent: April 26, 2016Assignee: Maxim Integrated Products, Inc.Inventors: Amit S. Kelkar, Karthik Thambidurai, Peter R. Harper, Viren Khandekar
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Patent number: 9324833Abstract: Methods of forming semiconductor devices are disclosed. In some embodiments, a first trench and a second trench are formed in a substrate, and dopants of a first conductivity type are implanted along sidewalls and a bottom of the first trench and the second trench. The first and second trenches are filled with an insulating material, and a gate dielectric and a gate electrode over the substrate, the gate dielectric and the gate electrode extending over the first trench and the second trench. Source/drain regions are formed in the substrate on opposing sides of the gate dielectric and the gate electrode.Type: GrantFiled: March 6, 2015Date of Patent: April 26, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Feng-Chi Hung, Jhy-Jyi Sze, Shou-Gwo Wuu
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Patent number: 9324904Abstract: A semiconductor light emitting device includes a first conductive semiconductor layer, an active layer, a second conductive semiconductor layer, a first internal electrode, a second internal electrode, an insulating part, and first and second pad electrodes. The active layer is disposed on a first portion of the first conductive semiconductor layer, and has the second conductive layer disposed thereon. The first internal electrode is disposed on a second portion of the first conductive semiconductor layer separate from the first portion. The second internal electrode is disposed on the second conductive semiconductor layer. The insulating part is disposed between the first and second internal electrodes, and the first and second pad electrodes are disposed on the insulating part to connect to a respective one of the first and second internal electrodes.Type: GrantFiled: August 4, 2015Date of Patent: April 26, 2016Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jong In Yang, Yong Il Kim, Kwang Min Song, Wan Tae Lim, Se Jun Han, Hyun Kwon Hong
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Patent number: 9324785Abstract: A semiconductor device includes: a plurality of stacked semiconductor layers; a plurality of composite doped regions separately and parallelly disposed in a portion of the semiconductor layers along a first direction; a gate structure disposed over a portion of the semiconductor layers along a second direction, wherein the gate structure covers a portion of the composite doped regions; a first doped region formed in the most top semiconductor layer along the second direction and being adjacent to a first side of the gate structure; and a second doped region formed in the most top semiconductor layer along the second direction and being adjacent to a second side of the gate structure opposite to the first side thereof.Type: GrantFiled: April 10, 2014Date of Patent: April 26, 2016Assignee: Vanguard International Semiconductor CorporationInventors: Hsiung-Shih Chang, Jui-Chun Chang, Chih-Jen Huang
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Patent number: 9318528Abstract: A system and method for blocking heat from reaching an image sensor in a three dimensional stack with a semiconductor device. In an embodiment a heat sink is formed in a back end of line process either on the semiconductor device or else on the image sensor itself when the image sensor is in a backside illuminated configuration. The heat sink may be a grid in either a single layer or in two layers, a zig-zag pattern, or in an interleaved fingers configuration.Type: GrantFiled: October 12, 2015Date of Patent: April 19, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Kuo-Chin Huang, Tzu-Jui Wang, Szu-Ying Chen, Dun-Nian Yaung, Jen-Cheng Liu, Bruce C. S. Chou, Jung-Kuo Tu, Cheng-Chieh Hsieh