Patents Examined by Sophia Nguyen
  • Patent number: 9269603
    Abstract: An assembly including a liquid thermal interface material for surface tension adhesion and thermal control used during electrical/thermal test of a 3D wafer and methods of use. The method includes temporarily attaching a thinned wafer to a carrier wafer by applying a non-adhesive material therebetween and pressing the thinned wafer and the blank silicon-based carrier wafer together.
    Type: Grant
    Filed: May 9, 2013
    Date of Patent: February 23, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Luc Guerin, Marc D. Knox, George J. Lawson, Van T. Truong, Steve Whitehead
  • Patent number: 9263343
    Abstract: Silicon germanium regions are formed adjacent gates electrodes over both n-type and p-type regions in an integrated circuit. A hard mask patterned by lithography then protects structures over the p-type region while the silicon germanium is selectively removed from over the n-type region, even under remnants of the hard mask on sidewall spacers on the gate electrode. Silicon germanium carbon is epitaxially grown adjacent the gate electrode in place of the removed silicon germanium, and source/drain extension implants are performed prior to removal of the remaining hard mask over the p-type region structures.
    Type: Grant
    Filed: July 9, 2014
    Date of Patent: February 16, 2016
    Assignees: STMicroelectronics, Inc., International Business Machines Corporation
    Inventors: Nicolas Loubet, Balasubramanian Pranatharthiharan
  • Patent number: 9264832
    Abstract: A method to protect an acoustic port of a microelectromechanical system (MEMS) microphone is provided. The method includes: providing the MEMS microphone; and forming a protection film, on the acoustic port of the MEMS microphone. The protection film has a porous region over the acoustic port to receive an acoustic signal but resist at least an intruding material. The protection film can at least endure a processing temperature of solder flow.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: February 16, 2016
    Assignee: Solid State System Co., Ltd.
    Inventors: Cheng-Wei Tsai, Chien-Hsing Lee, Jhyy-Cheng Liou
  • Patent number: 9263375
    Abstract: A packaged semiconductor device may include a termination surface having terminations configured as leadless interconnects to be surface mounted to a printed circuit board. A first flange has a first surface and a second surface. The first surface provides a first one of the terminations, and the second surface is opposite to the first surface. A second flange also has a first surface and a second surface, with the first surface providing a second one of the terminations, and the second surface is opposite to the first surface. A die is mounted to the second surface of the first flange with a material having a melting point in excess of 240° C. An electrical interconnect extends between the die and the second surface of the second flange opposite the termination surface, such that the electrical interconnect, first flange and second flange are substantially housed within a body.
    Type: Grant
    Filed: July 25, 2014
    Date of Patent: February 16, 2016
    Assignee: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Lakshminarayan Viswanathan, Lakshmi N. Ramanathan, Audel A. Sanchez, Fernando A. Santos
  • Patent number: 9257299
    Abstract: According to one embodiment, a method of manufacturing a semiconductor device includes forming a resist and a layer to be etched on a substrate, forming a non-cured layer on the resist by supplying a metal compound containing Ru, forming a cured layer on a surface layer of the resist by using the non-cured layer, and etching the layer to be etched by reactive ion etching using the cured layer and the resist as a mask.
    Type: Grant
    Filed: February 27, 2014
    Date of Patent: February 9, 2016
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Tomonori Aoyama
  • Patent number: 9209046
    Abstract: A method of manufacturing a WLP semiconductor structure includes several operations. One of the operations is providing a carrier and the carrier includes a top surface. One of the operations is covering a portion of the top surface with a plurality of active dies. One of the operations is disposing a protrudent band on a periphery of the carrier, wherein the protrudent band includes a rim shaped along the contour of the carrier. One of the operations is forming a molding compound on the carrier to cover the plurality of active dies.
    Type: Grant
    Filed: October 2, 2013
    Date of Patent: December 8, 2015
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Yu-Chih Liu, Chang-Chia Huang, Shih-Yen Lin, Chin-Liang Chen, Kuan-Lin Ho, Wei-Ting Lin
  • Patent number: 9165878
    Abstract: Semiconductor packages and methods for forming a semiconductor package are presented. The method includes providing a package substrate having first and second major surfaces. The package substrate includes at least one substrate layer having at least one cavity. Interconnect structure is formed. At least one conductive stud is formed within the cavity and a conductive trace and a connection pad are formed over the first major surface of the package substrate and are coupled to top surface of the conductive stud. A package pad is formed and is directly coupled to the conductive stud. A die having conductive contacts on its first or second surface is provided. The conductive contacts of the die are electrically coupled to the interconnect structure. A cap is formed over the package substrate to encapsulate the die.
    Type: Grant
    Filed: December 2, 2013
    Date of Patent: October 20, 2015
    Assignee: UNITED TEST AND ASSEMBLY CENTER LTD.
    Inventors: Yong Bo Yang, Chun Hong Wo
  • Patent number: 9159840
    Abstract: Provided is a semiconductor device including a transistor with large on-state current even when it is miniaturized. The transistor includes a pair of first conductive films over an insulating surface; a semiconductor film over the pair of first conductive films; a pair of second conductive films, with one of the pair of second conductive films and the other of the pair of second conductive films being connected to one of the pair of first conductive films and the other of the pair of first conductive films, respectively; an insulating film over the semiconductor film; and a third conductive film provided in a position overlapping with the semiconductor film over the insulating film. Further, over the semiconductor film, the third conductive film is interposed between the pair of second conductive films and away from the pair of second conductive films.
    Type: Grant
    Filed: August 11, 2014
    Date of Patent: October 13, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Atsuo Isobe, Toshinari Sasaki
  • Patent number: 9159583
    Abstract: Provided is a method of manufacturing a nitride semiconductor device. The method includes forming a plurality of electrodes on a growth substrate on which first and second nitride semiconductor layers are sequentially stacked, forming upper metal layers on the plurality of electrodes respectively, removing the growth substrate to expose a lower surface of the first nitride semiconductor layer, and forming a third nitride semiconductor layer and a lower metal layer sequentially on the exposed lower surface of the first nitride semiconductor layer.
    Type: Grant
    Filed: June 20, 2014
    Date of Patent: October 13, 2015
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Sang Choon Ko, Jae Kyoung Mun, Woojin Chang, Sung-Bum Bae, Young Rak Park, Chi Hoon Jun, Seok-Hwan Moon, Woo-Young Jang, Jeong-Jin Kim, Hyungyu Jang, Je Ho Na, Eun Soo Nam
  • Patent number: 9153483
    Abstract: A method of fabricating a semiconductor integrated circuit (IC) is disclosed. A first conductive feature and a second conductive feature are provided. A first hard mask (HM) is formed on the first conductive feature. A patterned dielectric layer is formed over the first and the second conductive features, with first openings to expose the second conductive features. A first metal plug is formed in the first opening to contact the second conductive features. A second HM is formed on the first metal plugs and another patterned dielectric layer is formed over the substrate, with second openings to expose a subset of the first metal plugs and the first conductive features. A second metal plug is formed in the second openings.
    Type: Grant
    Filed: October 30, 2013
    Date of Patent: October 6, 2015
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ming-Feng Shieh, Wen-Hung Tseng, Hung-Chang Hsieh
  • Patent number: 9123740
    Abstract: According to example embodiments, a high electron mobility transistor (HEMT) includes a channel supply layer and a channel layer. The channel layer may include an effective channel region and a high resistivity region. The effective channel region may be between the high resistivity region and the channel supply layer. The high resistivity region may be a region into which impurities are ion-implanted. According to example embodiments, a method of forming a HEMT includes forming a device unit, including a channel layer and a channel supply layer, on a first substrate; adhering a second substrate to the device unit; removing the first substrate; and forming a high resistivity region by ion-implanting impurities into at least a portion of the channel layer.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: September 1, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyuk-soon Choi, Jong-seob Kim, Jai-kwang Shin, Chang-yong Um, Jae-joon Oh, Jong-bong Ha, Ki-ha Hong, In-jun Hwang
  • Patent number: 9117749
    Abstract: A semiconductor device, including: a first transistor sharing a first diffusion with a second transistor; a third transistor sharing a second diffusion with the second transistor; and at least one programmable resistor; wherein the at least one programmable resistor is connected to the first diffusion and the second diffusion, wherein the at least one programmable resistor includes one of the following: memristor, transition metal oxides, polymeric memristor, ferroelectric memristor, spintronic memristor, spin transfer torque, phase-change structure, programmable metallization structure, conductive-bridging structure, magnetoresistive structure, chalcogenide structure.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: August 25, 2015
    Assignee: MONOLITHIC 3D INC.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Patent number: 9105798
    Abstract: A method of preparing Cu(In,Ga)SSe2 Cu(In,Ga) (S,Se)2 (CIGSS) absorber layers uses coated semiconductor nanoparticle and nanowire networks. The nanoparticles and nanowires containing one or more elements from group IB and/or IIIA and/or VIA are prepared from metal salts such as metal chloride and acetate at room temperature without inert gas protection. A uniform and non-aggregation CIGS precursor layer is fabricated with the formation of nanoparticle and nanowire networks utilizing ultrasonic spaying technique. High quality CIGSS film is obtained by cleaning the residue salts and carbon agents at an increased temperature and selenizing the pretreated precursor layer.
    Type: Grant
    Filed: May 14, 2013
    Date of Patent: August 11, 2015
    Assignee: SUN HARMONICS, LTD
    Inventors: Yuhang Ren, Paifeng Luo, Bo Gao
  • Patent number: 9093387
    Abstract: A stack of a dielectric material layer and a metallic material layer are formed on a substrate. A first organic planarization layer, a non-metallic hard mask layer, and a photoresist layer are sequentially deposited over the metallic material layer. The photoresist layer is lithographically patterned, and the pattern in the photoresist layer is transferred through the non-metallic hard mask layer, the first organic planarization layer, and the metallic material layer to form a cavity. A second organic planarization layer is deposited within the cavity and over remaining portions of the photoresist layer. The second organic planarization layer and the photoresist layer are recessed, and the non-metallic hard mask layer is subsequently removed. Remaining portions of the first and second organic planarization layers are simultaneously removed to provide physically exposed surfaces of the patterned metallic material layer and a top surface of the dielectric material layer.
    Type: Grant
    Filed: January 8, 2014
    Date of Patent: July 28, 2015
    Assignee: International Business Machines Corporation
    Inventors: Scott D. Allen, Kuang-Jung Chen, Huihang Dong, Wai-Kin Li
  • Patent number: 9087777
    Abstract: Semiconductor packages and methods for forming a semiconductor package are disclosed. The method includes providing a package substrate having first and second major surfaces. The package substrate includes a base substrate having a mold material and a plurality of interconnect structures including via contacts extending through the first to the second major surface of the package substrate. A die having conductive contacts on its first or second surface is provided. The conductive contacts of the die are electrically coupled to the interconnect structures. A cap is formed over the package substrate to encapsulate the die.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: July 21, 2015
    Assignee: UNITED TEST AND ASSEMBLY CENTER LTD.
    Inventors: Yongbo Yang, Antonio Jr. Bambalan Dimaano, Chun Hong Wo
  • Patent number: 9064947
    Abstract: A gallium nitride (GaN) device that has greatly superior current handling ability per unit area than previously described GaN devices. The improvement is due to improved layout topology. The layout scheme, which uses island electrodes rather than finger electrodes, is shown to increase the active area density over that of conventional interdigitated structures. Ultra low on resistance transistors can be built using the island topology. Specifically, the present invention, which uses conventional GaN lateral technology and electrode spacing, provides a means to enhance cost/effective performance of all lateral GaN structures.
    Type: Grant
    Filed: August 4, 2010
    Date of Patent: June 23, 2015
    Assignee: GAN SYSTEMS INC.
    Inventors: John Roberts, Ahmad Mizan, Girvan Patterson, Greg Klowak
  • Patent number: 9058974
    Abstract: Improving wafer-to-wafer bonding alignment. Determining planar distortions of the bonding surface of a host wafer. Mounting a donor wafer on a bonding chuck by a plurality of fixation points, the bonding chuck including multiple zones capable of movement relative to each other. Distorting the bonding surface of the donor wafer by moving the zones of the bonding chuck relative to each other to cause distortions of the bonding surface of the donor wafer such that the distortions of the donor wafer bonding surface correspond to the determined planar distortions of the host wafer bonding surface.
    Type: Grant
    Filed: June 3, 2013
    Date of Patent: June 16, 2015
    Assignee: International Business Machines Corporation
    Inventors: Wei Lin, Spyridon Skordas, Tuan A. Vo
  • Patent number: 9054021
    Abstract: A method is provided for fabricating a transistor. The method includes providing a semiconductor substrate, and forming a metal layer on the semiconductor substrate. The method also includes forming a silicon layer having at least one layer of graphene-like silicon on the metal layer, and forming a metal oxide layer by oxidizing a portion of the metal layer underneath the silicon layer. Further, the method includes forming a source region and a drain region connecting with the silicon layer.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: June 9, 2015
    Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL CORP
    Inventors: Deyuan Xiao, Emily Shu
  • Patent number: 9048141
    Abstract: A method of aligning a semiconductor chip includes forming a semiconductor chip with a light-activated circuit including at least one photosite, positioning the semiconductor chip relative to a device, and illuminating the positioned semiconductor chip. The method further includes generating an RF signal with an RF circuit based upon illumination of the at least one photosite, and determining the position of the photosite with respect to the device based upon the generated RF signal.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: June 2, 2015
    Assignee: Robert Bosch GmbH
    Inventors: Christoph Lang, Arjang Hassibi, Sam Kavusi
  • Patent number: 8999806
    Abstract: A thermal transfer method includes a step of forming a donor member having a base layer, a light-to-heat conversion layer disposed on the base layer, an intermediate layer disposed on the light-to-heat conversion layer, an organic transfer layer disposed on the intermediate layer, and a first protecting film disposed over the base layer and contacting at least one edge of the base layer, irradiating a first laser onto the donor member to form a preliminary organic layer on the display substrate, forming a pressing member having a second protecting film and a third protecting film disposed over the second protecting film and contacting at least one edge of the second protecting film, disposing the display substrate within a space formed by the second protecting film and the third protecting film, and irradiating a second laser onto the pressing member to change the preliminary organic layer to an organic layer.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: April 7, 2015
    Assignee: Samsung Display Co., Ltd.
    Inventor: Dong-Sul Kim