Patents Examined by Tsz K. Chiu
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Patent number: 10546822Abstract: A seal ring structure of an integrated circuit including a first discontinuous seal wall circumscribing a first portion of the integrated circuit, the first seal wall forming a first pattern on a substrate, and a second discontinuous seal wall circumscribing a second portion of the integrated circuit, the second seal wall forming a second pattern on the substrate and the second portion being at least partially offset from the first portion, wherein the first pattern of the first seal wall interlocks with the second pattern of the second seal wall such that the patterns are interweaved without intersecting, wherein a space is formed between the seal walls, the space creating a non-linear path to the integrated circuit, and wherein the seal ring structure fully circumscribes the integrated circuit. A method of forming such a seal ring structure is also disclosed.Type: GrantFiled: August 30, 2017Date of Patent: January 28, 2020Assignee: GLOBALFOUNDRIES INC.Inventors: Nicholas A. Polomoff, Vincent J. McGahay
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Patent number: 10541248Abstract: A semiconductor memory device includes a stack of word lines and insulating patterns. Cell pillars extend vertically through the stack of word lines and insulating patterns with memory cells being formed at the junctions of the cell pillars and the word lines. A ratio of the thickness of the word lines to the thickness of immediately neighboring insulating patterns is different at different locations along one or more of the cell pillars. Related methods of manufacturing and systems are also disclosed.Type: GrantFiled: July 26, 2018Date of Patent: January 21, 2020Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Taekyung Kim, Kwang Soo Seol, Seong Soon Cho, Sunghoi Hur, Jintae Kang
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Patent number: 10535558Abstract: A method of forming a semiconductor device fabrication is described that includes forming a material layer over a substrate, forming a first trench in the material layer, forming a first dielectric capping layer along sidewalls of the first trench, forming a second trench in the material layer while the capping layer disposed along sidewalls of the first trench, forming a second dielectric capping layer along sidewalls of the second trench and along the sidewalls of the first trench and forming a conductive feature within the second trench and the first trench.Type: GrantFiled: February 9, 2016Date of Patent: January 14, 2020Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Che-Cheng Chang, Chih-Han Lin
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Patent number: 10529839Abstract: When formed to have a lattice pattern, trenches are deeper at the portions thereof corresponding to the vertices of the lattice pattern than at the portions thereof corresponding to the sides. Such variations in the depths of trenches may disadvantageously result in variations in the gate threshold voltages (Vth). A semiconductor device includes two first trenches extending in a first direction with a predetermined region being sandwiched therebetween, where the predetermined region is provided in a semiconductor substrate on a front surface side thereof, and a second trench provided in the predetermined region, the second trench being spatially spaced away from the first trenches and being shorter than any of the first trenches. Here, the first and second trenches each include a trench insulating film, and a trench electrode in contact with the trench insulating film.Type: GrantFiled: April 1, 2016Date of Patent: January 7, 2020Assignee: FUJI ELECTRIC CO., LTD.Inventor: Tatsuya Naito
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Patent number: 10522657Abstract: A semiconductor device includes a gate structure located on a substrate; and a raised source/drain region adjacent to the gate structure. An interface is between the gate structure and the substrate. The raised source/drain region includes a stressor layer providing strain to a channel under the gate structure; and a silicide layer in the stressor layer. The silicide layer extends from a top surface of the raised source/drain region and ends below the interface by a predetermined depth. The predetermined depth allows the stressor layer to maintain the strain of the channel.Type: GrantFiled: September 21, 2018Date of Patent: December 31, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shin-Jiun Kuang, Yi-Han Wang, Tsung-Hsing Yu, Yi-Ming Sheu
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Patent number: 10515989Abstract: A photosensor device and the method of making the same are provided. In one embodiment, the device includes at least one pixel cell. The at least one pixel cell includes a substrate formed from a semiconductor material, and includes first and second photosensor regions. The first photosensor region is disposed in the substrate and includes a first dopant of a first conductivity type. The second photosensor region is disposed above the first photosensor region and includes a second dopant of a second conductivity type. The second photosensor region can have an increase in dopant concentration from an outer edge to a center portion therein.Type: GrantFiled: August 30, 2017Date of Patent: December 24, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chia-Chan Chen, Yueh-Chuan Lee, Ta-Hsin Chen, Shih-Hsien Huang, Chih-Huang Li
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Patent number: 10504797Abstract: A method for forming a semiconductor device includes steps of: forming at least one gate structure comprising a gate electrode over a substrate, and forming a first dielectric layer of a first dielectric material along a side wall of the at least one gate structure. The first dielectric layer of the first dielectric material includes fluorine doped silicon oxycarbonitride with a doping concentration of fluorine. The dielectric constant of the first dielectric layer is adjusted through the doping concentration of fluorine.Type: GrantFiled: August 30, 2017Date of Patent: December 10, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tong-Min Weng, Tsung-Han Wu
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Patent number: 10504924Abstract: In a transistor including an oxide semiconductor film, field-effect mobility and reliability are improved. A semiconductor device includes a gate electrode, an insulating film over the gate electrode, an oxide semiconductor film over the insulating film, and a pair of electrodes over the oxide semiconductor film. The oxide semiconductor film includes a first oxide semiconductor film and a second oxide semiconductor film over the first oxide semiconductor film. The first oxide semiconductor film is formed using In oxide or In—Zn oxide. The second oxide semiconductor film is formed using In-M-Zn oxide (M is Al, Ga, or Y) and includes a region where the number of In atoms is 40% or more and 50% or less and the number of M atoms is 5% or more and 30% or less of the total number of In, M, and Zn atoms.Type: GrantFiled: May 1, 2017Date of Patent: December 10, 2019Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Yasutaka Nakazawa, Yasuharu Hosaka, Kenichi Okazaki
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Patent number: 10500770Abstract: Methods and structures are provided for wafer-level packaging of light-emitting diodes (LEDs). An array of LED die are mounted on a packaging substrate. The substrate may include an array of patterned metal contacts on a front side. The metal contacts may be in electrical communication with control logic formed in the substrate. The LEDs mounted on the packaging substrate may also be encapsulated individually or in groups and then singulated, or the LEDs mounted on the packaging substrate may be integrated with a micro-mirror array or an array of lenses.Type: GrantFiled: March 1, 2011Date of Patent: December 10, 2019Assignee: SO-SEMI TECHNOLOGIES, LLCInventor: Steven D. Oliver
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Patent number: 10475808Abstract: A 3D memory device includes a substrate, a multi-layers stack and a dielectric material. The substrate has a concave portion extending along a first direction into the substrate from a surface thereof. The multi-layers stack includes a plurality of conductive layers and a plurality of insulating layers alternatively stacked along the first direction on a bottom of the concave portion. The multi-layers stack also has at least one recess passing through the conductive layers and the insulating layers along the first direction, wherein the recess has a cross-sectional bottom profile and a cross-sectional opening profile perpendicular to the first direction and the cross-sectional bottom profile has a size substantially greater than that of the cross-sectional opening profile. The dielectric material is at least partially filled in the recess.Type: GrantFiled: August 30, 2017Date of Patent: November 12, 2019Assignee: MACRONIX INTERNATIONAL CO., LTD.Inventors: Yu-Wei Jiang, Jia-Rong Chiou
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Patent number: 10475895Abstract: A semiconductor device includes a substrate, a first dielectric layer, a first device and a second device. The first dielectric layer is disposed on the substrate. The first device is disposed on the first dielectric layer on a first region of the substrate, and includes two first spacers, a second dielectric layer and a first gate structure. The first spacers are separated to form a first trench. The second dielectric layer is disposed on side surfaces and a bottom surface of the first trench. The first gate structure is disposed on the second dielectric layer. The second device is disposed on a second region of the substrate, and includes two second spacers and a second gate structure. The second spacers are disposed on the first dielectric layer and are separated to form a second trench. The second gate structure is disposed on the substrate within the second trench.Type: GrantFiled: June 21, 2017Date of Patent: November 12, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Hsin-Che Chiang, Ju-Yuan Tzeng, Chun-Sheng Liang, Shu-Hui Wang, Chih-Yang Yeh, Jeng-ya David Yeh
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Patent number: 10446569Abstract: An improvement is achieved in the performance of a semiconductor device having a nonvolatile memory. A first memory cell includes a first control gate electrode and a first memory gate electrode which are formed over a semiconductor substrate to be adjacent to each other. A second memory cell includes a second control gate electrode and a second memory gate electrode which are formed over the semiconductor substrate to be adjacent to each other. A width of a sidewall spacer formed on a side of the second memory gate electrode opposite to a side thereof where the second memory gate electrode is adjacent to the second control gate electrode is smaller than a width of another sidewall spacer formed on a side of the first memory gate electrode opposite to a side thereof where the first memory gate electrode is adjacent to the first control gate electrode.Type: GrantFiled: May 1, 2017Date of Patent: October 15, 2019Assignee: RENESAS ELECTRONICS CORPORATIONInventor: Tamotsu Ogata
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Patent number: 10418440Abstract: A memory structure including a substrate, stacked structures, at least one isolation structure, a second conductive layer, and a second dielectric layer is provided. The stacked structures are disposed on the substrate. Each of the stacked structures includes a first dielectric layer and a first conductive layer sequentially disposed on the substrate. A first opening is located between two adjacent stacked structures, and the first opening extends into the substrate. The isolation structure is disposed in the first opening and covers a sidewall of the first dielectric layer. The isolation structure has a recess, such that a top profile of the isolation structure is shaped as a funnel. The second conductive layer is disposed on the stacked structures and fills the first opening. The second dielectric layer is disposed between the second conductive layer and the first conductive layer.Type: GrantFiled: August 30, 2017Date of Patent: September 17, 2019Assignee: Winbond Electronics Corp.Inventors: Chung-Hsien Liu, Chun-Hsu Chen, Lu-Ping Chiang
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Patent number: 10411173Abstract: A light emitting device and light emitting module using the same are provided. The light emitting device includes a substrate, a light-emitting element provided on the substrate, and a light transmissive sealing member covering the light-emitting element on the substrate. The light transmissive sealing member includes a body portion and a lens portion that are sequentially disposed from a substrate side.Type: GrantFiled: March 31, 2016Date of Patent: September 10, 2019Assignee: NICHIA CORPORATIONInventors: Takanori Aruga, Yoshiki Endo, Takuya Yamanoi, Daisuke Kishikawa, Yoshitaka Tanaka
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Patent number: 10403791Abstract: A vertical light-emitting diode device and a method of fabricating the same are provided. The device may include a conductive substrate serving as a p electrode, a p-type GaN layer provided on the conductive substrate, an active layer provided on the p-type GaN layer, an n-type GaN layer provided on the active layer, an n electrode pattern provided on the n-type GaN layer, a metal oxide structure filling a plurality of holes formed in the n-type GaN layer, and a seed layer provided on bottom surfaces of the holes and used to as a seed in a crystal growth process of the metal oxide structure.Type: GrantFiled: June 21, 2017Date of Patent: September 3, 2019Assignee: Korea University Research and Business FoundationInventors: Tae Yeon Seong, Ki Seok Kim, Sung-joo Song
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Patent number: 10403761Abstract: An array substrate and a manufacturing method thereof, and a display device are provided. The manufacturing method comprises: forming a first gate metal pattern on a base substrate; forming a gate insulating layer, a first active layer pattern and a source-drain metal pattern on the base substrate on which the first gate metal pattern is formed; forming a first protective layer pattern and a through hole pattern on the base substrate on which the source-drain metal pattern is formed; and forming a second active layer pattern and a pixel electrode pattern on the base substrate on which the first protective layer pattern is formed. Embodiments of the present disclosure solve problems of poor display performance and high cost of the array substrate and achieve effects of improving the display performance and reducing the cost.Type: GrantFiled: March 31, 2016Date of Patent: September 3, 2019Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventors: Ce Ning, Wei Yang, Xiaohu Li
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Patent number: 10388911Abstract: A display device includes a display region including light emitting elements; a first inorganic insulating layer covering the light emitting elements; a first organic insulating layer on the first inorganic insulating layer; a second organic insulating layer on the first organic insulating layer; a third organic insulating layer on the second organic insulating layer; and a second inorganic insulating layer on the third organic insulating layer. Edges of the first to third organic insulating layers are between edges of the first and second inorganic insulating layers and an edge of the display region; the edge of the second organic insulating layer is between the edge of the first organic insulating layer and the edge of the display region; and the edge of the third organic insulating layer is between the edges of the first and second inorganic insulating layers and the edge of the second organic insulating layer.Type: GrantFiled: June 21, 2017Date of Patent: August 20, 2019Assignee: Japan Display Inc.Inventors: Yuki Hamada, Hajime Akimoto
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Patent number: 10388626Abstract: A semiconductor device has a semiconductor die with a plurality of bumps or interconnect structures formed over an active surface of the die. The bumps can have a fusible portion and non-fusible portion, such as a conductive pillar and bump formed over the conductive pillar. A plurality of conductive traces with interconnect sites is formed over a substrate. The bumps are wider than the interconnect sites. A masking layer is formed over an area of the substrate away from the interconnect sites. The bumps are bonded to the interconnect sites under pressure or reflow temperature so that the bumps cover a top surface and side surfaces of the interconnect sites. An encapsulant is deposited around the bumps between the die and substrate. The masking layer can form a dam to block the encapsulant from extending beyond the semiconductor die. Asperities can be formed over the interconnect sites or bumps.Type: GrantFiled: November 16, 2010Date of Patent: August 20, 2019Assignee: STATS ChipPAC Pte. Ltd.Inventor: Rajendra D. Pendse
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Patent number: 10381478Abstract: A substrate of the silicon on insulator type includes a semi-conducting film disposed on a buried insulating layer which is disposed on an unstressed silicon support substrate. The semi-conducting film includes a first film zone of tensile-stressed silicon and a second film zone of tensile-relaxed silicon. Openings through the buried insulating layer permit access to the unstressed silicon support substrate under the first and second film zones. An N channel transistor is formed from the first film zone and a P channel transistor is formed from the second film zone. The second film zone may comprise germanium enriched silicon forming a compressive-stressed region.Type: GrantFiled: April 10, 2017Date of Patent: August 13, 2019Assignees: STMicroelectronics (Crolles 2) SAS, Commissariat A L'Energie Atomique et aux Energies AlternativesInventors: Frederic Boeuf, Olivier Weber
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Patent number: 10361301Abstract: A vertical fin field effect transistor including a doped region in a substrate, wherein the doped region has the same crystal orientation as the substrate, a first portion of a vertical fin on the doped region, wherein the first portion of the vertical fin has the same crystal orientation as the substrate and a first portion width, a second portion of the vertical fin on the first portion of the vertical fin, wherein the second portion of the vertical fin has the same crystal orientation as the first portion of the vertical fin, and the second portion of the vertical fin has a second portion width less than the first portion width, a gate structure on the second portion of the vertical fin, and a source/drain region on the top of the second portion of the vertical fin.Type: GrantFiled: October 13, 2017Date of Patent: July 23, 2019Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Karthik Balakrishnan, Kangguo Cheng, Pouya Hashemi, Alexander Reznicek