Lid for epitaxial growing device
Latest Epicrew Corporation Patents:
- Semiconductor wafer position display system, semiconductor wafer position display method, and semiconductor wafer position display program
- CONTINUOUS DISTILLATION-TYPE TRICHLOROSILANE VAPORIZATION SUPPLY APPARATUS, AND CONTINUOUS DISTILLATION-TYPE TRICHLOROSILANE GAS VAPORIZATION METHOD
- Imaging device, semiconductor manufacturing apparatus, and semiconductor manufacturing method
- EPITAXIAL GROWTH DEVICE
- Susceptor Device And Deposition Apparatus Having The Same
Description
Claims
The ornamental design for lid for epitaxial growing device, as shown and described.
Referenced Cited
U.S. Patent Documents
3635757 | January 1972 | Harris |
4882294 | November 21, 1989 | Christenson |
5018479 | May 28, 1991 | Markunas et al. |
5227330 | July 13, 1993 | Agnello et al. |
5948161 | September 7, 1999 | Kizuki |
6497801 | December 24, 2002 | Woodruff et al. |
6506667 | January 14, 2003 | Boydston et al. |
6541355 | April 1, 2003 | Joo et al. |
6638838 | October 28, 2003 | Eisenbeiser et al. |
6693298 | February 17, 2004 | Eisenbeiser et al. |
6985648 | January 10, 2006 | Kish et al. |
D552565 | October 9, 2007 | Nakamura et al. |
D559993 | January 15, 2008 | Nagakubo et al. |
7479304 | January 20, 2009 | Sun et al. |
D609652 | February 9, 2010 | Nagasaka et al. |
7687798 | March 30, 2010 | Shi |
D614593 | April 27, 2010 | Lee et al. |
7851365 | December 14, 2010 | Herbots et al. |
D648289 | November 8, 2011 | Mayer et al. |
20050193952 | September 8, 2005 | Goodman et al. |
20100176403 | July 15, 2010 | Sasaki et al. |
Patent History
Patent number: D693782
Type: Grant
Filed: Mar 15, 2013
Date of Patent: Nov 19, 2013
Assignee: Epicrew Corporation
Inventors: Yoshinobu Mori (Ohmura), Akira Okabe (Ohmura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/449,598
Type: Grant
Filed: Mar 15, 2013
Date of Patent: Nov 19, 2013
Assignee: Epicrew Corporation
Inventors: Yoshinobu Mori (Ohmura), Akira Okabe (Ohmura)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/449,598
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)