Abstract: Embodiments of the invention include a vertical field-effect transistor (VTFET) inverter. The VTFET inverter may include a p-channel field-effect transistor (P-FET) with a P-FET top source/drain and a P-FET bottom source/drain. The VTFET inverter may also include an n-channel field-effect transistor (N-FET) comprising an N-FET top source/drain and a N-FET bottom source/drain. The VTFET inverter may also include a buried contact located at a boundary between the P-FET bottom source/drain and the N-FET bottom source/drain. The VTFET inverter may also include a Vout contact electrically connected to one of the P-FET bottom source/drain and the N-FET bottom source/drain.

Abstract: A method of manufacturing a low program voltage flash memory cell with an embedded heater in the control gate creates, on a common device substrate, a conventional flash memory cell in a conventional flash memory area (CFMA), and a neuromorphic computing memory cell in a neuromorphic computing memory area (NCMA). The method comprises providing a flash memory stack in both the CFMA and the NCMA, depositing a heater on top of the flash memory stack in the NCMA without depositing a heater on top of the flash memory stack in the CFMA.

Abstract: A semiconductor device includes a semiconductor substrate and a field effect transistor disposed on the semiconductor substrate. The field effect transistor includes a vertical fin defining a longitudinal length along a first axis, a width along a second axis and a vertical height along a third axis. The vertical fin includes source and drain regions separated by a gate region and a gate structure over the gate region. The gate structure includes a dipole layer and a gate electrode layer over the dipole layer. A first longitudinal section of the gate structure includes the dipole layer and a second longitudinal section of the gate structure is devoid of the dipole layer.

Abstract: A method is presented for reducing parasitic capacitance. The method includes forming a p-type epitaxial region and an n-type epitaxial region over a substrate, depositing an epitaxial growth over the p-type epitaxial region and the n-type epitaxial region, depositing a first dielectric between the p-type epitaxial region and the n-type epitaxial region such that an airgap is defined therebetween, and selectively removing the epitaxial growth to expose top surfaces of the p-type and n-type epitaxial regions. The method further includes depositing a second dielectric in direct contact with the exposed top surfaces of the p-type and n-type epitaxial regions, selectively etching the first and second dielectrics to form a strapped contact, and applying a metallization layer over the strapped contact.

Abstract: Techniques for fabricating semiconductor structures and devices with stacked structures having embedded capacitors are disclosed. In one example, a semiconductor structure includes a substrate having a first region and a second region. The semiconductor structure further includes a capacitor structure disposed in the second region of the substrate. The capacitor structure includes a capacitor conductor and a dielectric insulator disposed between the capacitor conductor and the substrate. The semiconductor structure further includes a stacked device disposed on the first region of the substrate. The stacked device includes a first transistor and a second transistor. At least a portion of the second transistor is disposed under at least a portion of the first transistor. The first transistor and the second transistor are each coupled to the capacitor conductor.

Abstract: A method of forming a semiconductor structure includes forming a nanosheet stack on a substrate. The nanosheet stack includes an alternating sequence of sacrificial nanosheets and channel nanosheets. The sacrificial nanosheets include second nanosheets located between first nanosheets and third nanosheets. The first nanosheets and the third nanosheets have a first germanium concentration that is lower than a second germanium concentration of the second nanosheets. The sacrificial nanosheets are selectively etched and the lower first germanium concentration causes the first nanosheets and the third nanosheets to be etched slower than the second nanosheets creating an indentation region on opposing sides of the nanosheet stack. The indentation region has a narrowing shape towards remaining second nanosheets of the sacrificial nanosheets.

Abstract: An integrated circuit (IC) is provided that includes a plurality of physical unclonable function (PUF) structures located in a PUF area. Each PUF structure of the plurality of PUF structures includes at least a PUF top electrically conductive structure containing random sidewall voids and random line openings which can provide an encrypted security code to the IC. The IC further includes a plurality of memory structures located in a memory area that is located laterally adjacent to the PUF area. Each memory structure of the plurality of memory structures includes a memory element sandwiched between a bottom electrically conductive structure and a top electrically conductive structure. The top electrically conductive structures are devoid of sidewall voids and line openings.

Abstract: A semiconductor structure includes a gate cut isolation region composed of a top portion and a bottom portion. The top portion of the gate cut isolation region being at a first taper angle and the second portion being at a second taper angle different from the first taper angle. A change from the first taper angle to the second taper angle occurs at an intersection between the top portion of the gate cut isolation region and the bottom portion of the gate cut isolation region. The semiconductor structure further includes a plurality of semiconductor channel layers adjacent to the gate cut isolation region, the plurality of semiconductor channel layers being surrounded by a metal gate stack. A top surface of an uppermost semiconductor channel layer being coplanar with the intersection between the top portion and the bottom portion of the gate cut isolation region.

Abstract: A structure including a bottom electrode, a phase change material layer vertically aligned and an ovonic threshold switching layer vertically aligned above the phase change material layer. A structure including a bottom electrode, a phase change material layer and an ovonic threshold switching layer vertically aligned above the phase change material layer, and a first barrier layer physically separating the ovonic threshold switching layer from a top electrode. A method including forming a structure including a liner vertically aligned above a first barrier layer, the first barrier layer vertically aligned above a phase change material layer, the phase change material layer vertically aligned above a bottom electrode, forming a dielectric surrounding the structure, and forming an ovonic threshold switching layer on the first barrier layer, vertical side surfaces of the first buffer layer are vertically aligned with the first buffer layer, the phase change material layer and the bottom electrode.

Abstract: A memory structure comprises a ReRAM module embedded in a substrate. An insulative layer is formed on the substrate. A first electrode is located on the insulative layer. The first electrode is proximately connected to a first end of the ReRAM module and comprises a first surface area. A second electrode is located on the insulative layer. The second electrode is proximately connected to a second end of the ReRAM module. The second electrode comprises a second surface area, a plasma-interacting component, and a resistive component. The resistive component is located between the plasma-interacting component and the ReRAM module. A ratio of the first surface area to the second surface area creates a voltage between the first electrode and second electrode when the first surface area and second surfaces area are exposed to an application of plasma. The voltage forms a conductive filament in the ReRAM module.

Abstract: A stacked field-effect transistors (FETs) layout and a method for fabrication are provided. The stacked FETs include a buried interconnect within the stacked devices which provides power to buried components without requiring a wired connection from a top of the stacked FET to the buried components. The buried interconnect allows for efficient scaling of the stacked devices without extraneous wiring from a top of the device to each epitaxial region/device within the overall device.

Abstract: A semiconductor including a first sacrificial layer located directly between a first substrate layer and a second substrate layer, where the first sacrificial layer has a first thickness. The second substrate layer has a second thickness and where the second thickness is larger than the first thickness. A source/drain located on top of the second substrate layer and a dielectric landing pad located within the first sacrificial layer. A frontside contact comprised of a first section and a second section. The first section of the frontside contact is located on top of the source/drain. The second section of the frontside contact is a via that extends downwards past and through the dielectric landing pad.

Abstract: A uniform moon-shaped bottom spacer for a VTFET device is provided utilizing a replacement bottom spacer that is epitaxially grown above a bottom source/drain region. After filling a trench that is formed into a substrate with a dielectric fill material that also covers the replacement bottom spacer, the replacement bottom spacer is accessed, removed and then replaced with a moon-shaped bottom spacer.

Abstract: A semiconductor device includes a substrate material with a semiconductor material with a predetermined crystal orientation, a gate stack having a plurality of nanosheet channel layers, each nanosheet channel layer being controlled by metal gate layers located above and below the nanosheet channel layer, each nanosheet channel layer having the same semiconductor material and crystal orientation as that of the substrate, and a source/drain region on opposite sides of the gate stack. Each source/drain region includes bridging structures respectively connected to each nanosheet channel layer.

Abstract: A semiconductor device includes a semiconductor substrate and a field effect transistor disposed on the semiconductor substrate. The field effect transistor includes a vertical fin defining a longitudinal length along a first axis, a width along a second axis and a vertical height along a third axis. The vertical fin includes source and drain regions separated by a gate region and a gate structure over the gate region. The gate structure includes a dipole layer and a gate electrode layer over the dipole layer. A first longitudinal section of the gate structure includes the dipole layer and a second longitudinal section of the gate structure is devoid of the dipole layer.

Abstract: A semiconductor device includes first and second vertical transport field-effect transistor (VTFET) devices. Each of the first and second VTFET devices includes a bottom epitaxial layer, a plurality of channel fins formed on the bottom epitaxial layer, a first interlayer dielectric (ILD) layer formed between the channel fins, a high-? metal gate formed between the channel fins and the first ILD layer, a top epitaxial layer formed discretely on each of the channel fins, and a trench epitaxial layer formed continuously across the top epitaxial layer, a portion of the first ILD layer also being formed between the first and second VTFET device. The semiconductor device also includes a second ILD layer formed on the portion of the first ILD layer that is between the first and second VTFET devices, the second ILD layer separating the top epitaxial layers of the first and second VTFET devices.

Abstract: A vertical field effect transistor structure and method for fabricating the same. The structure includes a source/drain layer in contact with at least one semiconductor fin. An edge portion of the source/drain layer includes a notched region filled with a dielectric material. A spacer layer includes a first portion in contact with the source/drain layer and a second portion in contact with the dielectric material. A gate structure contacts the spacer layer and the dielectric material. The method includes forming a source/drain layer in contact with at least one semiconductor fin. A spacer layer is formed in contact with the source/drain layer. A portion of the spacer layer is removed to expose an end portion of the source/drain layer. The exposed end portion of the source/drain layer is recessed to form a notched region within the source/drain layer. A dielectric layer is formed within the notched region.

Abstract: Fabrication method for forming a resistance tunable fuse stack structure includes forming on a substrate layer a first fuse conductive layer, directly on, and contacting a top surface of, the substrate layer, followed by forming a first inter-layer dielectric (ILD) layer, directly on, and contacting a top surface of, the first fuse conductive layer, a second fuse conductive layer, directly on, and contacting a top surface of, the first ILD layer, followed by forming a second ILD layer, directly on, and contacting a top surface of, the second fuse conductive layer. First and second fuse contacts are formed in the fuse stack structure vertically extending through the layers and contacting at least one of the first and second fuse conductive layers. Selection of various attributes of the fuse stack structure tunes a resistance of a fuse formed between the first and second fuse contacts.

Abstract: Provided is a stacked field-effect transistor (FET). The stacked FET comprises a top active region. The width of the top of the top active region is smaller than the width of bottom of the top active region. The stacked FET further comprises a top contact in direct contact with a top surface of the top active region. The stacked FET further comprises a bottom active region located substantially below the top active region. The stacked FET further comprises a bottom contact in direct contact with a top surface of the bottom active region. The bottom contact is wider at a top end than at a bottom end.

Abstract: A cross-bar ReRAM comprising a substrate, a plurality of first columns extending parallel to each other on the top surface of the substrate, wherein each of the plurality of the first columns includes a resistive random-access memory (ReRAM) stack comprised of a plurality of layers. A plurality of second columns extending parallel to each other and the plurality of second columns extending perpendicular to the plurality of first columns, wherein the plurality of second columns is located on top of the plurality of first columns, such that the plurality of second columns crosses over the plurality of first columns. A dielectric layer filling in the space between the plurality of first columns and the plurality of second columns, wherein the dielectric layer is in direct contact with a sidewall of each of the plurality layers of the ReRAM stack.