Patents by Inventor Anand S

Anand S has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10211208
    Abstract: Monolithic FETs including a majority carrier channel in a first high carrier mobility semiconductor material disposed over a substrate. While a mask, such as a gate stack or sacrificial gate stack, is covering a lateral channel region, a spacer of a high carrier mobility semiconductor material is overgrown, for example wrapping around a dielectric lateral spacer, to increase effective spacing between the transistor source and drain without a concomitant increase in transistor footprint. Source/drain regions couple electrically to the lateral channel region through the high-mobility semiconductor spacer, which may be substantially undoped (i.e. intrinsic). With effective channel length for a given lateral gate dimension increased, the transistor footprint for a given off-state leakage may be reduced or off-state source/drain leakage for a given transistor footprint may be reduced, for example.
    Type: Grant
    Filed: June 26, 2015
    Date of Patent: February 19, 2019
    Assignee: Intel Corporation
    Inventors: Gilbert Dewey, Matthew V. Metz, Anand S. Murthy, Tahir Ghani, Willy Rachmady, Chandra S. Mohapatra, Jack T. Kavalieros, Glenn A. Glass
  • Publication number: 20190051725
    Abstract: A nanowire device having a plurality of internal spacers and a method for forming said internal spacers are disclosed. In an embodiment, a semiconductor device comprises a nanowire stack disposed above a substrate, the nanowire stack having a plurality of vertically-stacked nanowires, a gate structure wrapped around each of the plurality of nanowires, defining a channel region of the device, the gate structure having gate sidewalls, a pair of source/drain regions on opposite sides of the channel region; and an internal spacer on a portion of the gate sidewall between two adjacent nanowires, internal to the nanowire stack. In an embodiment, the internal spacers are formed by depositing spacer material in dimples etched adjacent to the channel region. In an embodiment, the dimples are etched through the channel region. In another embodiment, the dimples are etched through the source/drain region.
    Type: Application
    Filed: October 5, 2018
    Publication date: February 14, 2019
    Inventors: Seiyon KIM, Kelin J. KUHN, Tahir GHANI, Anand S. MURTHY, Mark ARMSTRONG, Rafael RIOS, Abhijit Jayant PETHE, Willy RACHMADY
  • Patent number: 10203888
    Abstract: Technologies for performing a data copy operation on a data storage device include storing a copy token in a power-fail-safe data structure that identifies the source address and destination address of the data copy operation, updating an address table to indicate that the source and destination addresses are involved in the data copy operation, and notifying a host requesting that data copy operation that the data copy operation has been completed prior to performing the data copy operation. The host may subsequently perform other tasks while the data storage device completes the data copy operation. During the data copy operation, data access requests to the source or destination addresses are blocked based on the address table. Additionally, should a power failure event occur, the power-fail-safe data structure is saved to non-volatile data storage so that the copy operation may be completed upon the next power-on event of the data storage device.
    Type: Grant
    Filed: December 18, 2015
    Date of Patent: February 12, 2019
    Assignee: Intel Corporation
    Inventors: Sanjeev N. Trika, Anand S. Ramalingam
  • Publication number: 20190043993
    Abstract: Techniques are disclosed for forming transistors including one or more group III-V semiconductor material nanowires using sacrificial group IV semiconductor material layers. In some cases, the transistors may include a gate-all-around (GAA) configuration. In some cases, the techniques may include forming a replacement fin stack that includes group III-V material layer (such as indium gallium arsenide, indium arsenide, or indium antimonide) formed on a group IV material buffer layer (such as silicon, germanium, or silicon germanium), such that the group IV buffer layer can be later removed using a selective etch process to leave the group III-V material for use as a nanowire in a transistor channel. In some such cases, the group III-V material layer may be grown pseudomorphically to the underlying group IV material, so as to not form misfit dislocations. The techniques may be used to form transistors including any number of nanowires.
    Type: Application
    Filed: March 11, 2016
    Publication date: February 7, 2019
    Applicant: INTEL CORPORATION
    Inventors: CHANDRA S. MOHAPATRA, GLENN A. GLASS, ANAND S. MURTHY, KARTHIK JAMBUNATHAN, WILLY RACHMADY, GILBERT DEWEY, TAHIR GHANI, JACK T. KAVALIEROS
  • Publication number: 20190042146
    Abstract: A storage system includes a NAND storage media and a nonvolatile storage media as a write buffer for the NAND storage media. The write buffer is partitioned, where the partitions are to buffer write data based on a classification of a received write request. Write requests are placed in the write buffer partition with other write requests of the same classification. The partitions have a size at least equal to the size of an erase unit of the NAND storage media. The write buffer flushes a partition once it has an amount of write data equal to the size of the erase unit.
    Type: Application
    Filed: August 3, 2018
    Publication date: February 7, 2019
    Inventors: Michal WYSOCZANSKI, Kapil KARKRA, Piotr WYSOCKI, Anand S. RAMALINGAM
  • Patent number: 10200148
    Abstract: An apparatus and related operating method of a mmWave WHMD, are provided. The apparatus utilizes beamforming information to determine direction information indicating a direction of a received signal from an external component that is connected to the apparatus via a VR data link. The apparatus selects and sets a current MCS that supports a data load of the VR data link. The apparatus, while maintaining the VR data link, determines a VR data link condition by a determination that a received signal is stronger or weaker than a predetermined signal strength level for the current MCS of the VR data link. When stronger, the processing circuitry is configured to signal a transceiver to widen a beam from a current beamwidth to a new wider beamwidth in a direction based on the direction information to maintain the current MCS and data load of the VR data link.
    Type: Grant
    Filed: September 28, 2017
    Date of Patent: February 5, 2019
    Assignee: Intel Corporation
    Inventors: Jie Gao, Yaniv Haim Frishman, Anand S. Konanur, Manish A. Hiranandani, Ulun Karacaoglu, Atsuo Kuwahara, Songnan Yang
  • Publication number: 20190035889
    Abstract: Transistor devices having an indium-containing ternary or greater III-V compound active channels, and processes for the fabrication of the same, may be formed that enables improved carrier mobility when fabricating fin shaped active channels, such as those used in tri-gate or gate all around (GAA) devices. In one embodiment, an indium-containing ternary or greater III-V compound may be deposited in narrow trenches on a reconstructed upper surface of a sub-structure, which may result in a fin that has indium rich side surfaces and an indium rich bottom surface. These indium rich surfaces will abut a gate oxide of a transistor and may result in high electron mobility and an improved switching speed relative to conventional homogeneous compositions of indium-containing ternary or greater III-V compound active channels.
    Type: Application
    Filed: February 22, 2016
    Publication date: January 31, 2019
    Applicant: Intel Corporation
    Inventors: Chandra S. Mohapatra, Anand S. Murthy, Glenn A. Glass, Matthew V. Metz, Willy Rachmady, Gilbert Dewey, Tahir Ghani, Jack T. Kavalieros
  • Publication number: 20190034868
    Abstract: Methods, apparatus, systems and articles of manufacture are disclosed relating to drones. An example drone includes a payload receiving area to receive a container, a payload retainer to secure the container relative to the payload receiving area, and a spectrometer positioned relative to the payload receiving area to measure a first spectrum of a payload within the container.
    Type: Application
    Filed: July 28, 2017
    Publication date: January 31, 2019
    Inventors: Anand S. Konanur, Gabriel C. Cox, Joshua Triska
  • Publication number: 20190035893
    Abstract: Techniques and methods related to strained NMOS and PMOS devices without relaxed substrates, systems incorporating such semiconductor devices, and methods therefor may include a semiconductor device that may have both n-type and p-type semiconductor bodies. Both types of semiconductor bodies may be formed from an initially strained semiconductor material such as silicon germanium. A silicon cladding layer may then be provided at least over or on the n-type semiconductor body. In one example, a lower portion of the semiconductor bodies is formed by a Si extension of the wafer or substrate. By one approach, an upper portion of the semiconductor bodies, formed of the strained SiGe, may be formed by blanket depositing the strained SiGe layer on the Si wafer, and then etching through the SiGe layer and into the Si wafer to form the semiconductor bodies or fins with the lower and upper portions.
    Type: Application
    Filed: October 1, 2018
    Publication date: January 31, 2019
    Inventors: Stephen M. Cea, Roza Kotlyar, Harold W. Kennel, Anand S. Murthy, Glenn A. Glass, Kelin J. Kuhn, Tahir Ghani
  • Publication number: 20190035897
    Abstract: An apparatus including a transistor device on a substrate including an intrinsic layer including a channel; a source and a drain on opposite sides of the channel; and a diffusion barrier between the intrinsic layer and each of the source and the drain, the diffusion barrier including a conduction band energy that is less than a conduction band energy of the channel and greater than a material of the source and drain. A method including defining an area of an intrinsic layer on a substrate for a channel of a transistor device; forming a diffusion barrier layer in an area defined for a source and a drain; and forming a source on the diffusion barrier layer in the area defined for the source and forming a drain in the area defined for the drain.
    Type: Application
    Filed: April 1, 2016
    Publication date: January 31, 2019
    Inventors: Chandra S. MOHAPATRA, Harold W. KENNEL, Glenn A. GLASS, Will RACHMADY, Gilbert DEWEY, Jack T. KAVALIEROS, Anand S. MURTHY, Tahir GHANI, Matthew V. METZ, Sean T. MA
  • Publication number: 20190035926
    Abstract: A replacement fin layer is deposited on a sub-fin layer in trenches isolated by an insulating layer on a substrate. The replacement fin layer has first component rich side portions and a second component rich core portion. The second component rich core portion is etched to generate a double fin structure comprising the first component rich fins.
    Type: Application
    Filed: March 30, 2016
    Publication date: January 31, 2019
    Applicant: Intel Corporation
    Inventors: Chandra S. MOHAPATRA, Glenn A. GLASS, Anand S. MURTHY, Karthik JAMBUNATHAN
  • Publication number: 20190019891
    Abstract: A trench is formed in an insulating layer to expose a native fin on a substrate. A replacement fin is deposited on the native fin in the trench. The replacement fin is trimmed laterally.
    Type: Application
    Filed: March 30, 2016
    Publication date: January 17, 2019
    Inventors: Glenn A. GLASS, Anand S. MURTHY, Karthik JAMBUNATHAN, Chandra S. MOHAPATRA, Hei KAM, Nabil G. MISTKAWI, Jun Sung KANG, Biswajeet GUHA
  • Publication number: 20190006508
    Abstract: Transistor fin elements (e.g., fin or tri gate) may be modified by radio frequency (RF) plasma and/or thermal processing for purpose of dimensional sculpting. The etched, thinned fins may be formed by first forming wider single crystal fins, and after depositing trench oxide material between the wider fins, etching the wider fins using a second etch to form narrower single crystal fins having undamaged top and sidewalls for epitaxially growing active channel material. The second etch may remove a thickness of between a 1 nm and 15 nm of the top surfaces and the sidewalls of the wider fins. It may remove the thickness using (1) chlorine or fluorine based chemistry using low ion energy plasma processing, or (2) low temperature thermal processing that does not damage fins via energetic ion bombardment, oxidation or by leaving behind etch residue that could disrupt the epitaxial growth quality of the second material.
    Type: Application
    Filed: May 30, 2018
    Publication date: January 3, 2019
    Inventors: Glenn A. GLASS, Anand S. MURTHY, Daniel B. AUBERTINE, Subhash M. JOSHI
  • Publication number: 20180374951
    Abstract: Tensile strain is applied to a channel region of a transistor by depositing an amorphous SixGe1-x-yCy alloy in at least one of a source and a drain (S/D) region of the transistors. The amorphous SixGe1-x-yCy alloy is crystallized, thus reducing the unit volume of the alloy. This volume reduction in at least one of the source and the drain region applies strain to a connected channel region. This strain improves electron mobility in the channel. Dopant activation in the source and drain locations is recovered during conversion from amorphous to crystalline structure. Presence of high carbon concentrations reduces dopant diffusion from the source and drain locations into the channel region. The techniques may be employed with respect to both planar and non-planar (e.g., FinFET and nanowire) transistors.
    Type: Application
    Filed: December 24, 2015
    Publication date: December 27, 2018
    Applicant: INTEL CORPORATION
    Inventors: KARTHIK JAMBUNATHAN, GLENN A. GLASS, ANAND S. MURTHY, JACOB M. JENSEN, DANIEL B. AUBERTINE, CHANDRA S. MOHAPATRA
  • Publication number: 20180358440
    Abstract: Techniques are disclosed for forming transistor structures including tensile-strained germanium (Ge) channel material. The transistor structures may be used for either or both of n-type and p-type transistor devices, as tensile-strained Ge has very high carrier mobility properties suitable for both types. Thus, a simplified CMOS integration scheme may be achieved by forming n-MOS and p-MOS devices included in the CMOS device using the techniques described herein. In some cases, the tensile-strained Ge may be achieved by epitaxially growing the Ge material on a group III-V material having a lattice constant that is higher than that of Ge and/or by applying a macroscopic 3-point bending to the die on which the transistor is formed. The techniques may be used to form transistors having planar or non-planar configurations, such as finned configurations (e.g., finFET or tri-gate) or gate-all-around (GAA) configurations (including at least one nanowire).
    Type: Application
    Filed: December 24, 2015
    Publication date: December 13, 2018
    Applicant: INTEL CORPORATION
    Inventors: CHANDRA S. MOHAPATRA, GLENN A. GLASS, ANAND S. MURTHY, KARTHIK JAMBUNATHAN, WILLY RACHMADY, GILBERT DEWEY, TAHIR GHANI, JACK T. KAVALIEROS
  • Patent number: 10153372
    Abstract: Techniques are disclosed for incorporating high mobility strained channels into fin-based NMOS transistors (e.g., FinFETs such as double-gate, trigate, etc), wherein a stress material is cladded onto the channel area of the fin. In one example embodiment, a germanium or silicon germanium film is cladded onto silicon fins in order to provide a desired tensile strain in the core of the fin, although other fin and cladding materials can be used. The techniques are compatible with typical process flows, and cladding deposition can occur at a plurality of locations within typical process flow. In various embodiments, fins may be formed with a minimum width (or later thinned) so as to improve transistor performance. In some embodiments, a thinned fin also increases tensile strain across the core of a cladded fin. In some cases, strain in the core may be further enhanced by adding an embedded silicon epitaxial source and drain.
    Type: Grant
    Filed: March 27, 2014
    Date of Patent: December 11, 2018
    Assignee: INTEL CORPORATION
    Inventors: Stephen M. Cea, Roza Kotlyar, Harold W. Kennel, Glenn A. Glass, Anand S. Murthy, Willy Rachmady, Tahir Ghani
  • Publication number: 20180348825
    Abstract: Particular embodiments described herein provide for device that includes a first housing, a second housing, and a hinge, configured as an antenna, to rotatably couple the first housing and the second housing.
    Type: Application
    Filed: December 10, 2015
    Publication date: December 6, 2018
    Applicant: Intel Corporation
    Inventors: David A. Rittenhouse, Manish A. Hiranandani, Denica N. Larsen, Anand S. Konanur, Hong W. Wong, Ulun Karacaoglu
  • Publication number: 20180350798
    Abstract: Monolithic FETs including a channel region in a first semiconductor material disposed over a substrate. While a mask, such as a gate stack or sacrificial gate stack, is covering a channel region, a semiconductor spacer of a semiconductor material with a band offset relative to the channel material is grown, for example on at least a drain end of the channel region to introduce at least one charge carrier-blocking band offset between the channel semiconductor and a drain region of a third III-V semiconductor material. In some N-type transistor embodiments, the carrier-blocking band offset is a conduction band offset of at least 0.1 eV. A wider band gap and/or a blocking conduction band offset may contribute to reduced gate induced drain leakage (GIDL). Source/drain regions couple electrically to the channel region through the semiconductor spacer, which may be substantially undoped (i.e. intrinsic) or doped.
    Type: Application
    Filed: September 25, 2015
    Publication date: December 6, 2018
    Applicant: Intel Corporation
    Inventors: Gilbert Dewey, Willy Rachmady, Matthew V. Metz, Chandra S. Mohapatra, Sean T. Ma, Jack T. Kavalieros, Anand S. Murthy, Tahir Ghani
  • Patent number: 10146440
    Abstract: Provided are an apparatus, system and method for offloading collision check operations in a memory storage device to a collision check unit. A collision check unit includes a collision table including logical addresses for pending Input/Output (I/O) requests. An I/O request is received to a target logical address addressing a block of data in the non-volatile memory. The logical address is sent to the collision check unit. Resources to transfer data with respect to the transfer buffer to data for the I/O request are allocated in parallel while the collision check unit is determining whether the collision table includes the target logical address. The collision check unit determines whether the collision table includes the target logical address and returns indication of whether the collision table includes the target logical address indicating that current data for the target logical address is already in the transfer buffer.
    Type: Grant
    Filed: December 20, 2016
    Date of Patent: December 4, 2018
    Assignee: INTEL CORPORATION
    Inventors: Peng Li, Anand S. Ramalingam, Jawad B. Khan, William K. Lui, Divya Narayanan, Sanjeev N. Trika
  • Patent number: 10147817
    Abstract: Techniques are disclosed for improved integration of germanium (Ge)-rich p-MOS source/drain contacts to, for example, reduce contact resistance. The techniques include depositing the p-type Ge-rich layer directly on a silicon (Si) surface in the contact trench location, because Si surfaces are favorable for deposition of high quality conductive Ge-rich materials. In one example method, the Ge-rich layer is deposited on a surface of the Si substrate in the source/drain contact trench locations, after removing a sacrificial silicon germanium (SiGe) layer previously deposited in the source/drain locations. In another example method, the Ge-rich layer is deposited on a Si cladding layer in the contact trench locations, where the Si cladding layer is deposited on a functional p-type SiGe layer. In some cases, the Ge-rich layer comprises at least 50% Ge (and may contain tin (Sn) and/or Si) and is boron (B) doped at levels above 1E20 cm?3.
    Type: Grant
    Filed: January 2, 2018
    Date of Patent: December 4, 2018
    Assignee: INTEL CORPORATION
    Inventors: Glenn A. Glass, Anand S. Murthy, Tahir Ghani, Ying Pang, Nabil G. Mistkawi