Abstract: A metal gate fabrication method for nanoribbon-based transistors and associated transistor arrangements, IC structures, and devices are disclosed. An example IC structure fabricated using metal gate fabrication method described herein may include a first stack of N-type nanoribbons, a second stack of P-type nanoribbons, a first gate region enclosing portions of the nanoribbons of the first stack and including an NWF material between adjacent nanoribbons of the first stack, and a second gate region enclosing portions of the nanoribbons of the second stack and including a PWF material between adjacent nanoribbons of the second stack, where the second gate region includes the PWF material at sidewalls of the nanoribbons of the second stack and further includes the NWF material so that the PWF material is between the sidewalls of the nanoribbons of the second stack and the NWF material.

Abstract: Techniques are disclosed for achieving multiple fin dimensions on a single die or semiconductor substrate. In some cases, multiple fin dimensions are achieved by lithographically defining (e.g., hardmasking and patterning) areas to be trimmed using a trim etch process, leaving the remainder of the die unaffected. In some such cases, the trim etch is performed on only the channel regions of the fins, when such channel regions are re-exposed during a replacement gate process. The trim etch may narrow the width of the fins being trimmed (or just the channel region of such fins) by 2-6 nm, for example. Alternatively, or in addition, the trim may reduce the height of the fins. The techniques can include any number of patterning and trimming processes to enable a variety of fin dimensions and/or fin channel dimensions on a given die, which may be useful for integrated circuit and system-on-chip (SOC) applications.

Abstract: Fin smoothing, and integrated circuit structures resulting therefrom, are described. For example, an integrated circuit structure includes a semiconductor fin having a protruding fin portion above an isolation structure, the protruding fin portion having substantially vertical sidewalls. The semiconductor fin further includes a sub-fin portion within an opening in the isolation structure, the sub-fin portion having a different semiconductor material than the protruding fin portion. The sub-fin portion has a width greater than or less than a width of the protruding portion where the sub-fin portion meets the protruding portion. A gate stack is over and conformal with the protruding fin portion of the semiconductor fin. A first source or drain region at a first side of the gate stack, and a second source or drain region at a second side of the gate stack opposite the first side of the gate stack.

Abstract: Techniques are disclosed for achieving multiple fin dimensions on a single die or semiconductor substrate. In some cases, multiple fin dimensions are achieved by lithographically defining (e.g., hardmasking and patterning) areas to be trimmed using a trim etch process, leaving the remainder of the die unaffected. In some such cases, the trim etch is performed on only the channel regions of the fins, when such channel regions are re-exposed during a replacement gate process. The trim etch may narrow the width of the fins being trimmed (or just the channel region of such fins) by 2-6 nm, for example. Alternatively, or in addition, the trim may reduce the height of the fins. The techniques can include any number of patterning and trimming processes to enable a variety of fin dimensions and/or fin channel dimensions on a given die, which may be useful for integrated circuit and system-on-chip (SOC) applications.

Abstract: Approaches for fabricating an integrated circuit structure including a titanium silicide material, and the resulting structures, are described. In an example, an integrated circuit structure includes a semiconductor fin above a substrate, a gate electrode over the top and adjacent to the sidewalls of a portion of the semiconductor fin. A titanium silicide material is in direct contact with each of first and second epitaxial semiconductor source or drain structures at first and second sides of the gate electrode. The titanium silicide material is conformal with and hermetically sealing a non-flat topography of each of the first and second epitaxial semiconductor source or drain structures. The titanium silicide material has a total atomic composition including 95% or greater stoichiometric TiSi2.

Abstract: Techniques are disclosed for customization of fin-based transistor devices to provide a diverse range of channel configurations and/or material systems within the same integrated circuit die. In accordance with one example embodiment, sacrificial fins are removed and replaced with custom semiconductor material of arbitrary composition and strain suitable for a given application. In one such case, each of a first set of the sacrificial fins is recessed or otherwise removed and replaced with a p-type material, and each of a second set of the sacrificial fins is recessed or otherwise removed and replaced with an n-type material. The p-type material can be completely independent of the process for the n-type material, and vice-versa. Numerous other circuit configurations and device variations are enabled using the techniques provided herein.

Abstract: In vivo positionable filtration devices are provided that filter one or more therapeutic agents in blood flowing in a blood vessel. The filtration devices include an elongated member and a filtering component coupled to the elongated member. The elongated member and the filtering component are dimensioned for positioning within the blood vessel. Further, the filtering component includes a filtration material to filter the one or more therapeutic agents from the blood. Methods of in vivo filtration of the one or more therapeutic agents are also provided. The methods include positioning a filtration device of the filtration devices in the blood vessel, and administering a therapeutic agent of the one or more therapeutic agents upstream from a target tissue site to direct flow of the therapeutic agent to the target tissue site and then to the filtration device. The filtration device is positioned downstream from the target tissue site.

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for fabricating semiconductor packages that use a SiC layer that is coupled with another layer that includes another material. The SiC layer may be an active layer that includes devices, such as transistors, that are coupled with devices that may be in the other layer. The SiC layer may be coupled with the other layer using fusion bonding, hybrid bonding, layer transfer, and/or bump and island formation techniques. Other embodiments may be described and/or claimed.

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for fabricating semiconductor packages that use high voltage transistors within a SiC layer that are coupled with one or more transistors in one or more other layers in a cascode format in order to switch the high voltage transistors in the SiC layer using low voltages. Other embodiments may be described and/or claimed.

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for semiconductor packages that use devices within an SiC layer coupled with devices within a GaN layer proximate to the SiC to convert a high voltage source to the package, e.g. greater than 1 kV, to 1-1.8 V used by components within the package. The devices may be transistors. The voltage conversion will allow increased power to be supplied to the package. Other embodiments may be described and/or claimed.

Abstract: Structures having bit-cost scaling with relaxed transistor area are described. In an example, an integrated circuit structure includes a plurality of plate lines along a first direction. A transistor is beneath the plurality of plate lines, with a direction of a first source or drain to a gate to a second source or drain of the transistor being a second direction orthogonal to the first direction. A plurality of capacitor structures is over the plurality of plate lines, individual ones of the plurality of capacitor structures coupled to a corresponding one of the plurality of plate lines. The plurality of capacitor structures has a staggered arrangement from a plan view perspective.

Abstract: Structures having two-level memory are described. In an example, an integrated circuit structure includes an SRAM layer including transistors. A DRAM layer is vertically spaced apart from the transistors of the SRAM layer. A metallization structure is between the transistors of the SRAM layer and the DRAM layer.

Abstract: Structures having vertical shared gate high-drive thin film transistors are described. In an example, an integrated circuit structure includes a stack of alternating dielectric layers and metal layers. A trench is through the stack of alternating dielectric layers and metal layers. A semiconductor channel layer is along sides of the trench. A gate dielectric layer is along sides the semiconductor channel layer in the trench. A gate electrode is within sides of the gate dielectric layer.

Abstract: Structures having layer select transistors for shared peripherals in memory are described. In an example, an integrated circuit structure includes a memory structure layer including a capacitor array coupled to a plurality of plate lines. A memory transistor layer is beneath the memory structure layer, the memory transistor layer including front end transistors coupled to corresponding capacitors of the capacitor array of the memory structure layer. A select transistor layer is over the memory structure layer, the select transistor layer including backend transistors having a channel composition different than the front end transistors. One or more of the backend transistors is coupled to one or more of the plurality of plate lines of the memory structure layer.

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for fabricating semiconductor packages that include DRAM using wide band gap materials, such as SiC or GaN to reduce transistor leakage. In addition, transistors may be fabricated adding one or more extra layers between a source and a drain of a transistor and the contact of the source of the drain to increase the effective electrical gate length of the transistor to further reduce leakage. In addition, for these transistors, a thickness of the body below the gate may be made narrow to improve gate control. Other embodiments may be described and/or claimed.

Abstract: Structures having two-transistor gain cell are described. In an example, an integrated circuit structure includes a frontend device layer including a read transistor. A backend device layer is above the frontend device layer, the backend device layer including a write transistor. An intervening interconnect layer is between the backend device layer and the frontend device layer, the intervening interconnect layer coupling the write transistor of the backend device layer to the read transistor of the front-end device layer.

Abstract: Structures having routing across layers of channel structures are described. In an example, an integrated circuit structure includes a first stack of horizontal nanowires along a vertical direction. A second stack of horizontal nanowires is along the vertical direction, the second stack of horizontal nanowires beneath the first stack of horizontal nanowires. A conductive routing layer extends laterally between the first stack of horizontal nanowires and the second stack of horizontal nanowires.

Abstract: Stitched dies having double interconnects are described. For example, an integrated circuit structure includes a first die including a first device layer, a first plurality of metallization layers over the first device layer, and a first conductive interconnection over the first plurality of metallization layers. The integrated circuit structure also includes a second die separated from the first die by a scribe region, the second die including a second device layer, a second plurality of metallization layers over the second device layer, and a second conductive interconnection over the second plurality of metallization layers. The second conductive interconnection extends over the scribe region and is coupled to the first conductive interconnection.

Abstract: Embodiments described herein may be related to apparatuses, processes, systems, and/or techniques for designing and fabricating semiconductor packages that include transistors that include wide band gap materials, such as silicon carbide or gallium nitride. Other embodiments may be described and/or claimed.

Abstract: Structures having lookup table decoders for FPGAs with high DRAM transistor density are described. In an example, an integrated circuit structure includes a plurality of fins or nanowire stacks, individual ones of the plurality of fins or nanowire stacks having a longest dimension along a first direction. A plurality of gate structures is over the plurality of fins or nanowire stacks, individual ones of the plurality of gate structures having a longest dimension along a second direction, wherein the first direction is non-orthogonal to the second direction.