Abstract: The present invention relates to a method for producing RNA. In particular, the present invention relates to a method for producing RNA, which is scalable and provides RNA at a high purity. The present invention provides a method for producing RNA under GMP and/or cGMP-compliant conditions. The invention further provides specific processes for use as a quality control in the manufacturing of a template DNA and/or in a method for producing RNA, in particular by in vitro transcription.

Abstract: A sensor signal processing unit (100) arranged to detect a configuration of parking slots (1a,1b,1c,1d) based on radar detections received from a radar-based sensor system (120). The unit includes a histogram unit arranged to generate a representation of a spatial distribution of a set of radar detection coordinates, and a detection unit arranged to detect the configuration of parking slots. The detection unit is arranged to detect the configuration of parking slots based on a Fourier transform of the representation of spatial distribution.

Abstract: Embodiments described herein relate to a substrate support assembly. The substrate support assembly includes an ESC base assembly having a base channel disposed therein, a facility plate, the facility plate coupled to the ESC base assembly with a vacuum region therebetween, and a seal assembly. The seal assembly includes an upper flange coupled to the base channel of the ESC base assembly, the upper flange disposed in the facility plate, a lower flange coupled to the upper flange, the lower flange disposed in the facility plate, a gasket disposed between the upper flange and the lower flange, and an insulator tube coupled to the lower flange. A passage is connected to the base channel, the passage is defined by connected openings of the upper flange, the gasket, the lower flange, the insulator tube, and the base assembly.

Abstract: Examples disclosed herein are directed to a method and apparatus for determining a position of a ring within a process kit. In one example, a sensor assembly for a substrate processing chamber is provided. The sensor assembly includes a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface. The housing also has a recess in the top surface, the recess forming an interior volume within the housing. The sensory assembly includes a bias member, and a contact member disposed on the bias member. The bias member and contact member are disposed within the recess. A sensor is configured to detect a displacement of the contact member. The displacement of the contact member corresponds to a relative position of an edge ring.

Abstract: A method of providing an assembled image using a digital microscope, the digital microscope having an optical system, an image sensor having a predefined number of image pixels, and a stage, the stage being movable in relation to the optical system and the image sensor, includes receiving a user selection regarding an area of interest of the sample, the user selection indicating the position and extension of the area of interest, selecting one of a full resolution mode or and a reduced resolution mode, wherein individual images with a reduced number of image pixels are generated, moving the stage with respect to the optical system and the image sensor, and generating individual images of the area of interest in accordance with the selected one of the full resolution mode or the reduced resolution mode, and combining the individual images into the assembled image, representing the area of interest.

Abstract: Embodiments may provide the realization of strong Dzyaloshinskii-Moriya Interaction (DMI) and perpendicular magnetic anisotropy (PMA) induced by chemisorbed species on a ferromagnetic layer. For example, in an embodiment, an apparatus for generating a Dzyaloshinskii-Moriya interaction may comprise a ferromagnet comprising a single layer or multi-layers of materials made of metal, oxide or other types of magnetic films, and a substance chemisorbed on a surface of the ferromagnet to induce the Dzyaloshinskii-Moriya interaction or the perpendicular magnetic anisotropy at the interface between chemisorbed species and ferromagnet. These induced effects may be used to manipulate spin textures such as switching of domain wall chirality and writing/deleting of magnetic skyrmions, which are relevant for spintronics, magneto-ionics as well as gas sensing.

Abstract: In a method for detecting a motor phase fault of a motor arrangement, the motor phases of which are connected to a drive circuit having a DC voltage intermediate circuit and an inverter. A motor phase voltage at at least one of the motor phases with respect to a reference potential is captured while the inverter is switched off; and a voltage profile of the captured motor phase voltage is used to determine whether there is a motor phase fault on one of the motor phases of the motor arrangement.

Abstract: A vehicle environment detection system in an ego vehicle, including a sensor arrangement and a main control unit is arranged to detect and track at least one oncoming vehicle, and to determine whether the ego vehicle has entered a curve. The main control unit is arranged to determine a common curve with a radius, along which common curve the ego vehicle is assumed to travel, determine a measured oncome direction of the oncoming vehicle on the common curve, corresponding to an oncome angle, determine a difference angle between the measured oncome direction and an oncome direction corresponding to if the oncoming vehicle would be moving along the common curve, compare the difference angle with a threshold angle, and to determine that the oncoming vehicle is crossing if the difference angle exceeds the threshold angle.

Abstract: The invention provides a method of reducing interference in a mobile communication system caused by a first user equipment, UE, device operating in a cell at a significantly higher altitude than other UE devices in the cell so as to cause interference, the method comprising detecting that the first UE device is operating at an altitude considered by the mobile communication system to be an extraordinary altitude; and reducing interference caused by the first UE device operating at the extraordinary altitude by controlling the operation of the first UE device.

Abstract: A controller for controlling a bridge circuit in a vehicle power module, comprising an input interface for receiving an output current from the bridge circuit, an evaluation unit for determining an adaptive dead time based on the output current, wherein the adaptive dead time is coupled to a predetermined commutation time for the bridge circuit and limited by a predetermined minimum value, and a signal unit for generating a control signal for sending the adaptive dead time to the bridge circuit.

Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a refrigerant channel disposed therein, and a facility plate having a coolant channel disposed therein. The facility plate includes a plate portion and a flange portion. The plate portion is coupled to the ESC base assembly and the flange portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the flange portion of the facility plate, and the seal assembly.

Abstract: A vehicle environment detection system (40) in an ego vehicle (1), including a sensor arrangement (4) and a main control unit (8) is arranged to detect and track at least one oncoming vehicle (9), and to determine whether the ego vehicle (1) has entered a curve (17). When this is the case. The main control unit (8) is arranged to, determine an ego direction (21) along which the ego vehicle (1) travels with a corresponding ego direction angle (?ego) with respect to a predetermined axis (xglob), determine a measured oncoming direction (18) of the tracked oncoming vehicle (9) with a corresponding oncoming angle (?track, glob) with respect to the predetermined axis (xglob) during a plurality of radar cycles, determine a difference angle (?) between the measured oncoming direction (18) and the ego direction (21), and compare the difference angle (?) with a threshold angle (?max), and to determine that the oncoming vehicle (9) is crossing if the difference angle (?) exceeds the threshold angle (?max).

Abstract: A vehicle environment detection system (40) in an ego vehicle (1), including a sensor arrangement (4) and a main control unit (8) is arranged to detect and track at least one oncoming vehicle (9), and to determine whether the ego vehicle (1) has entered a curve (17). The main control unit (8) is arranged to determine a common curve (12) with a radius (R), along which common curve (12) the ego vehicle (1) is assumed to travel, determine a measured oncome direction (13, 13?) of the oncoming vehicle (9) on the common curve (16), corresponding to an outcome angle (?track), determine a difference angle (?) between the measured oncome direction (13, 13?) and an oncome direction (13) corresponding to if the oncoming vehicle (9) would be moving along the common curve (12), compare the difference angle (?) with a threshold angle (?max), and to determine that the oncoming vehicle (9) is crossing if the difference angle (?) exceeds the threshold angle (?max).

Abstract: Embodiments described herein relate to a substrate support assembly. The substrate support assembly includes an ESC base assembly having a base channel disposed therein, a facility plate, the facility plate coupled to the ESC base assembly with a vacuum region therebetween, and a seal assembly. The seal assembly includes an upper flange coupled to the base channel of the ESC base assembly, the upper flange disposed in the facility plate, a lower flange coupled to the upper flange, the lower flange disposed in the facility plate, a gasket disposed between the upper flange and the lower flange, and an insulator tube coupled to the lower flange. A passage is connected to the base channel, the passage is defined by connected openings of the upper flange, the gasket, the lower flange, the insulator tube, and the base assembly.

Abstract: A substrate support pedestal comprises an electrostatic chuck, a cooling base, a gas flow passage, a porous plug, and a sealing member. The electrostatic chuck comprises body having a cavity. The cooling base is coupled to the electrostatic chuck via a bond layer. The gas flow passage is formed between a top surface of the electrostatic chuck and a bottom surface of the cooling base. The gas flow passage further comprises the cavity. The porous plug is positioned within the cavity to control the flow of gas through the gas flow passage. The sealing member is positioned adjacent to the porous plug and is configured to form one or more of a radial seal between the porous plug and the cavity and an axial seal between the porous plug and the cooling base.

Abstract: Embodiments described herein relate to a substrate support assembly which enables a cryogenic temperature operation of an electrostatic chuck (ESC) so that a substrate disposed thereon is maintained at a cryogenic processing temperature suitable for processing while other surfaces of a processing chamber are maintained at a different temperature. The substrate support assembly includes an electrostatic chuck (ESC), an ESC base assembly coupled to the ESC having a base channel disposed therein, and a facility plate having a facility channel disposed therein. The facility plate includes a plate portion and a wall portion. The plate portion is coupled to the ESC base assembly and the wall portion coupled to the ESC with a seal assembly. A vacuum region is defined by the ESC, the ESC base assembly, the plate portion of the facility plate, the wall portion of the facility plate, and the seal assembly.

Abstract: A drive circuit for driving an electronically commutated motor contains a DC voltage intermediate circuit, and an inverter which is connected to the latter and has a bridge circuit containing a plurality of transistors, to which the motor phases of a motor configuration containing the motor can be connected. For detecting an insulation fault in the motor configuration, a positive or negative transistor of the inverter is switched on, while all other transistors of the inverter are switched off before all transistors of the inverter are switched off. A motor phase voltage of a selected motor phase of the motor phases with respect to a reference potential is then captured, while all transistors of the inverter remain switched off in order to determine whether there is an insulation fault on the motor phase on a basis of a voltage profile of the motor phase voltage.

Abstract: Embodiments may provide a realization of strong Dzyaloshinskii-Moriya interaction (DMI) and perpendicular magnetic anisotropy (PMA) induced by chemisorbed species on a ferromagnetic layer. For example, in an embodiment, an apparatus for generating DMI may comprise a ferromagnet comprising a single-layer or multi-layers of materials made of metal, oxide or other types of magnetic films, and a substance chemisorbed on a surface of the ferromagnet to induce the DMI or the PMA at the interface between the chemisorbed species and the ferromagnet. These induced effects may be used to maniupulate spin textures such as switching of domain wall chirality and writing/deleting of magnetic skyrmions, which are relevant for spintronics and magneto-ionics as well as for gas sensing.

Abstract: A substrate support pedestal comprises an electrostatic chuck, a cooling base, a gas flow passage, a porous plug, and a sealing member. The electrostatic chuck comprises body having a cavity. The cooling base is coupled to the electrostatic chuck via a bond layer. The gas flow passage is formed between a top surface of the electrostatic chuck and a bottom surface of the cooling base. The gas flow passage further comprises the cavity. The porous plug is positioned within the cavity to control the flow of gas through the gas flow passage. The sealing member is positioned in a groove formed in the cooling base and configured to form a seal between the cooling base and one or both of the porous plug and the body of the electrostatic chuck.

Abstract: The present invention relates to a method for producing RNA. In particular, the present invention relates to a method for producing RNA, which is scalable and provides RNA at a high purity. The present invention provides a method for producing RNA under GMP and/or cGMP-compliant conditions. The invention further provides specific processes for use as a quality control in the manufacturing of a template DNA and/or in a method for producing RNA, in particular by in vitro transcription.