Abstract: Embodiments of the present disclosure provide a method and an apparatus for processing a substrate. The apparatus has a ring assembly. The ring assembly has an edge ring and a shadow ring. The edge ring has a ring shaped body. The edge ring body has a top surface and a bottom surface. Pin holes extend through the edge ring body from the top surface to the bottom surface. The shadow ring has a ring shaped body. The shadow ring body has an upper surface and a lower surface. Sockets are formed on the lower surface, wherein the sockets in the shadow ring body align with the pin holes in the edge ring body.

Abstract: A vehicle environmental detection system (3) in an ego vehicle (1) and having at least one detector arrangement (4, 7) and at least one control unit arrangement (15) configured to determine a slant angle of parking slots in a parking row. The detector arrangement (4, 7) is adapted to obtain a set of detections (d(k), k=1 . . . K). For each slant angle (?n) in a set of slant angles (?n, n=1 . . . N), the control unit arrangement (15) is adapted to calculate a set of slant rotated detections (dslant(k, ?n), k=1 . . . K) by rotating coordinates of each detection in the set of detections (d(k), k=1 . . . K)) by the present slant angle (?n), calculate a projection profile (Prow(?n)) for the set of slant rotated detections (dslant(k,?n), k=1 . . . K) by determining a histogram of slant rotated detection coordinates, and to calculate an entropy (Hrow(?n)) associated with the calculated projection profile (Prow(?n)).

Abstract: Disclosed is a work and recreation space module for a work environment, particularly for a production and/or presentation and/or outer environment, having an inner element which has at least one seat for a user, having a rolling device for rolling the inner element into different positions in the work environment; and an outer element which has two side walls and a roof wall connecting the side walls, wherein the inner element can be received in an inner space of the outer element delimited by side walls and roof wall; and a mechanical coupling device with which the inner element and the outer element can be coupled to one another, so that the outer element can also be rolled with the inner element into different positions in the work environment, in order to provide a work and/or recreation area that can be used flexibly in a work environment.

Abstract: The present invention relates to a method for producing RNA. In particular, the present invention relates to a method for producing RNA, which is scalable and provides RNA at a high purity. The present invention provides a method for producing RNA under GMP and/or cGMP-compliant conditions. The invention further provides specific processes for use as a quality control in the manufacturing of a template DNA and/or in a method for producing RNA, in particular by in vitro transcription.

Abstract: A composition of microorganisms, comprising photoautotrophic microorganisms (16) which produce oxygen by photosynthetic water oxidation chemoheterotrophic microorganisms (17) which respire oxygen, wherein the photoautotrophic microorganisms (16) and the chemoheterotrophic microorganisms (17) are comprised in a biofilm (13), the biofilm further comprising components (15) which were secreted by the photoautotrophic microorganisms (16) and/or the chemoheterotrophic microorganisms (17), and a reactor (1), a method for forming a biofilm, and a method for biocatalytic conversion employing such composition.

Abstract: A vehicle radar system (3) and related method including at least one transceiver arrangement (7) arranged to generate and transmit radar signals (4), and to receive reflected radar signals (5). The radar signals form a plurality of sensing sectors or sensing bins (8a-8g), that together form a transceiver coverage (9), For each sensing bin (8a-8g) the radar system (3) is arranged to obtain a target angle (?) and a target range (r) to possible target objects (10a-10j). The radar system (3) is further arranged to determine an unoccupied domain border (11) and a corresponding unoccupied domain (12) for the radar transceiver coverage (9).

Abstract: An electrical connector for a substrate support assembly is disclosed herein. The electrical connector includes a first interface body, and a second interface body coupled to the first interface body and to a third interface body. The second interface body is circumscribed by the third interface body. The first interface body and the second interface body each comprise a plurality of electrical terminals disposed in sockets formed in the respective first and second interface bodies, each electrical terminal disposed in sockets of the first interface body coupled to a respective one of the electrical terminals disposed in sockets of the second interface body to form a plurality of isolated conductive electrical unions, wherein the second interface body includes a plurality of protruding sidewalls that extend into the first interface body between each of the electrical terminals of the first interface body.

Abstract: A vehicle environmental detection system (3) in an ego vehicle (1) including at least one control unit arrangement (15) and at least one detector arrangement (4, 7) that is adapted to obtain a plurality of detections (14). The control unit arrangement (15) is adapted to form a cluster (40) of the plurality of detections (14), form a first border line (16) and a second border line (17), where these border lines (16, 17) have mutually longitudinal extensions, and are mutually parallel and define outer borders of the cluster (40) and determine whether the cluster (40) corresponds to a row (13) of corresponding parked vehicles (18a, 18b, 18c, 18d, 18e, 18f, 18g), by the length or longitudinal displacement of, or distance between, the border lines (16, 17).

Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

Abstract: A substrate support assembly is described herein that includes a facility plate, a ground plate coupled to the facility plate, a fluid conduit disposed within the substrate support assembly disposed through the facility plate and the ground plate, and a connector coupled to the ground plate that houses a portion of the fluid conduit. The connector includes a biasing assembly and a fastener disposed in a pocket formed in the ground plate.

Abstract: A method and a system (100) for detecting parking spaces (32) suitable for a vehicle (1). In order to determine a parking space (32), radar signals (11) are directed to a plurality of vehicles (301, 302, . . . 30M) parked in a parking area (13) and also to surrounding elements (34). The radar signals (12) reflected by the parked vehicles (301, 302, . . . 30M) and also the surrounding elements (34) are processed in a computing unit (15). A gap (29) in a calculated periodicity (51) of a projection profile (24) is determined with an autoregressive prediction filter (53). A prediction error function (26) has the highest value (55) at the location of a parking space (32).

Abstract: Semiconductor chamber components are described herein that includes one or more conduits for carrying a fluid between powered and grounded portions of the chamber component, the conduit configure to be less prone to arcing as compared to conventional components. In one example, a semiconductor chamber component is provided that includes a powered region, a grounded region, and a fluid conduit. The fluid conduit is disposed within the semiconductor chamber component and passes through the powered and grounded regions. The fluid conduit has an end to end electrical resistance of between 0.1 to 100 M?.

Abstract: A carrier includes a rigid body forming a plurality of openings and a plurality of fasteners configured to removably attach to the rigid body via the plurality of openings. A first set of fingers is configured to be removably attached to the rigid body via the plurality of fasteners and the plurality of openings. The first set of fingers is configured to support first content during first transportation of the carrier within a substrate processing system. A second set of fingers is configured to be removably attached to the rigid body via the plurality of fasteners and the plurality of openings. The second set of fingers is configured to support second content during second transportation of the carrier within the substrate processing system.

Abstract: A method and apparatus for replacing process kits that include edge rings and/or support rings in processing chambers. In one implementation, a process kit comprises a multi-segment edge ring. The multi-segment edge ring comprises a first segment, a second segment, and a first annular body. The first annular body comprises a first upper surface, a first lower surface opposite the first upper surface, a first inner surface and a first outer surface. The first segment and the second segment are connectable to form the first annular body. The first lower surface is operable to be positioned over a substrate support disposed within a processing chamber, and at least a portion of the inner surface, which is positioned between the first upper surface and the first lower surface has a diameter greater than a diameter of a substrate to be processed in the processing chamber.

Abstract: Disclosed herein is a method and apparatus for controlling surface characteristics by measuring capacitance of a process kit ring. The method includes interfacing a ring with a jig assembly for measuring capacitance in at least a first location of the ring. The ring has that includes a top surface, a bottom surface, and an inner surface opposite an outer surface. At least the bottom surface has an external coating placed thereon. The method further includes contacting a measuring device to the first location on the outer surface proximate the bottom surface. The measuring device contacts an opening in the external coating to the body. The measuring device contacts a first conductive member that is electrically coupled to the ring. A capacitance is measured on the measuring device. The capacitance across the top surface is measured.

Abstract: A controller for controlling a bridge circuit in a vehicle power module, comprising an input interface for receiving an output current from the bridge circuit, an evaluation unit for determining an adaptive dead time based on the output current, wherein the adaptive dead time is coupled to a predetermined commutation time for the bridge circuit and limited by a predetermined minimum value, and a signal unit for generating a control signal for sending the adaptive dead time to the bridge circuit.

Abstract: Aspects of the present disclosure generally relate to apparatuses and methods for edge ring replacement in processing chambers. In one aspect, a carrier for supporting an edge ring is disclosed. In other aspects, robot blades for supporting a carrier are disclosed. In another aspect, a support structure for supporting a carrier in a degassing chamber is disclosed. In another aspect, a method of transferring an edge ring on a carrier is disclosed.

Abstract: A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the process kit ring is configured to be transported on the end effector within a processing system.

Abstract: A vehicle environmental detection system (3) in an ego vehicle (1) and having at least one detector arrangement (4, 7) and at least one control unit arrangement (15) configured to determine a slant angle of parking slots in a parking row. The detector arrangement (4, 7) is adapted to obtain a set of detections (d(k), k=1 . . . K). For each slant angle (an) in a set of slant angles (?n, n=1 . . . N), the control unit arrangement (15) is adapted to calculate a set of slant rotated detections (dslant(k, ?n), k=1 . . . K) by rotating coordinates of each detection in the set of detections (d(k), k=1 . . . K)) by the present slant angle (?n), calculate a projection profile (Prow(?n)) for the set of slant rotated detections (dslant(k,?n), k=1 . . . K) by determining a histogram of slant rotated detection coordinates, and to calculate an entropy (Hrow(?n)) associated with the calculated projection profile (Prow(?n)).

Abstract: Aspects of the present disclosure generally relate to methods and apparatuses for adjusting an edge ring position, and for removing or replacing one or more components of a process kit of a process chamber. The process kit includes one or more of an edge ring, a support ring, a sliding ring, and other consumable or degradable components.