Patents by Inventor Anirban Basu

Anirban Basu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160149050
    Abstract: An approach to providing a barrier in a vertical field effect transistor with low effective mass channel materials wherein the forming of the barrier includes forming a first source/drain contact on a semiconductor substrate and forming a channel with a first channel layer on the first source/drain contact. The approach further includes forming the barrier on the first channel layer, and a second channel layer on the barrier followed by forming a second source/drain contact on the second channel layer.
    Type: Application
    Filed: November 4, 2015
    Publication date: May 26, 2016
    Inventors: Anirban Basu, Amlan Majumdar, Jeffrey W. Sleight
  • Publication number: 20160149054
    Abstract: An approach to forming a semiconductor structure for a vertical field effect transistor with a controlled gate overlap. The approach includes forming on a semiconductor substrate, a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, a fourth semiconductor layer, a fifth semiconductor layer, and a first dielectric layer. The etched first dielectric layer and a first drain contact are surrounded by a first spacer. The first drain contact is composed of the fifth semiconductor layer. A second drain contact composed of the fourth semiconductor layer, a channel composed of the third semiconductor layer, and a second source contact composed of the second semiconductor layer are formed. Additionally, first source contact composed of the first semiconductor is formed and a gate electrode is formed on a portion of the first source contact layer surrounding a portion of the first pillar and the second pillar.
    Type: Application
    Filed: November 12, 2015
    Publication date: May 26, 2016
    Inventors: Anirban Basu, Cheng-Wei Cheng, Wilfried E. Haensch, Amlan Majumdar, Kuen-Ting Shiu
  • Patent number: 9343569
    Abstract: Group IV semiconductor devices can be formed on a semiconductor-on-insulator substrate including a handle substrate containing a group IV semiconductor material. A cavity is formed to physically expose a top surface of the handle substrate through a stack, from bottom to top, of a buried insulator layer, a doped semiconductor material portion in a top semiconductor layer, and a dielectric material layer. A gate dielectric is formed around the cavity by a conformal deposition of a dielectric material layer and an anisotropic etch. A lower active region, a channel region, and an upper active region are formed by selective epitaxy processes in, and/or above, the trench and from the top surface of the handle substrate. The selective epitaxy processes deposit a compound semiconductor material. The doped semiconductor material portion functions as the gate of a vertical compound semiconductor field effect transistor.
    Type: Grant
    Filed: May 21, 2014
    Date of Patent: May 17, 2016
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Anirban Basu, Bahman Hekmatshoartabari, Davood Shahrjerdi
  • Publication number: 20160133750
    Abstract: A method for fabricating a multigate device includes forming a fin on a substrate of the multigate device, the fin being formed of a semiconductor material, growing a first conformal epitaxial layer directly on the fin and substrate, wherein the first conformal epitaxial layer is highly doped, growing a second conformal epitaxial layer directly on the first conformal epitaxial layer, wherein the second conformal epitaxial layer is highly doped, selectively removing a portion of second epitaxial layer to expose a portion of the first conformal epitaxial layer, selectively removing a portion of the first conformal epitaxial layer to expose a portion of the fin and thereby form a trench, and forming a gate within the trench.
    Type: Application
    Filed: December 29, 2015
    Publication date: May 12, 2016
    Inventors: ANIRBAN BASU, GUY COHEN, AMLAN MAJUMDAR
  • Patent number: 9337255
    Abstract: An approach to providing a barrier in a vertical field effect transistor with low effective mass channel materials wherein the forming of the barrier includes forming a first source/drain contact on a semiconductor substrate and forming a channel with a first channel layer on the first source/drain contact. The approach further includes forming the barrier on the first channel layer, and a second channel layer on the barrier followed by forming a second source/drain contact on the second channel layer.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: May 10, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Amlan Majumdar, Jeffrey W. Sleight
  • Patent number: 9337309
    Abstract: An approach to providing a barrier in a vertical field effect transistor with low effective mass channel materials wherein the forming of the barrier includes forming a first source/drain contact on a semiconductor substrate and forming a channel with a first channel layer on the first source/drain contact. The approach further includes forming the barrier on the first channel layer, and a second channel layer on the barrier followed by forming a second source/drain contact on the second channel layer.
    Type: Grant
    Filed: July 17, 2015
    Date of Patent: May 10, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Amlan Majumdar, Jeffrey W. Sleight
  • Patent number: 9324853
    Abstract: A method including forming a pair of inner spacers along a vertical sidewall of a gate trench, gate trench extending into a III-V compound semiconductor-containing heterostructure, forming a gate conductor within the gate trench, removing a portion of a first dielectric layer selective to the gate conductor and the pair of inner spacers, forming a pair of outer spacers adjacent to the pair of inner spacers, the outer spacers are in direct contact with and self-aligned to the inner spacers, and forming a pair of source-drain contacts within an uppermost layer of the III-V compound semiconductor-containing heterostructure, the pair of source-drain contacts are self-aligned to the pair of outer spacers such that an edge of each individual source-drain contact is aligned with an outside edge of each individual outer spacer.
    Type: Grant
    Filed: July 8, 2015
    Date of Patent: April 26, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Amlan Majumdar, Kuen-Ting Shiu, Yanning Sun
  • Patent number: 9318561
    Abstract: Techniques for device isolation for III-V semiconductor substrates are provided. In one aspect, a method of fabricating a III-V semiconductor device is provided. The method includes the steps of: providing a substrate having an indium phosphide (InP)-ready layer; forming an iron (Fe)-doped InP layer on the InP-ready layer; forming an epitaxial III-V semiconductor material layer on the Fe-doped InP layer; and patterning the epitaxial III-V semiconductor material layer to form one or more active areas of the device. A III-V semiconductor device is also provided.
    Type: Grant
    Filed: June 6, 2014
    Date of Patent: April 19, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Guy M. Cohen
  • Publication number: 20160099370
    Abstract: A multi-junction solar cell comprising a high-crystalline silicon solar cell and a high-crystalline germanium solar cell. The high-crystalline silicon solar including a first p-doped layer and a n+ layer and the high-crystalline germanium solar cell including a second p layer and a heavily doped layer. The multi-junction solar cell can also be comprised of a heavily doped silicon layer on a non-light receiving back surface of the high-crystalline germanium solar cell and a tunnel junction between the high-crystalline silicon solar cell and the high-crystalline germanium solar cell.
    Type: Application
    Filed: October 2, 2014
    Publication date: April 7, 2016
    Inventors: Anirban Basu, Bahman Hekmatshoartabari, Davood Shahrjerdi
  • Publication number: 20160099329
    Abstract: A semiconductor fin including a vertical stack, from bottom to top, of a second semiconductor material and a first semiconductor material is formed on a substrate. A disposable gate structure straddling the semiconductor fin is formed. A source region and a drain region are formed employing the disposable gate structure as an implantation mask, At least one semiconductor shell layer or a semiconductor cap layer can be formed as an etch stop structure. A planarization dielectric layer is subsequently formed. A gate cavity is formed by removing the disposable gate structure. A portion of the second semiconductor material is removed selective to the first semiconductor material within the gate cavity so that a middle portion of the semiconductor fin becomes suspended over the substrate. A gate dielectric layer and a gate electrode are sequentially formed. The gate electrode laterally surrounds a body region of a fin field effect transistor.
    Type: Application
    Filed: December 14, 2015
    Publication date: April 7, 2016
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Anirban Basu, Guy Cohen, Amlan Majumdar, Jeffrey W. Sleight
  • Publication number: 20160079421
    Abstract: Fin mask structures are formed over a semiconductor material portion on a crystalline insulator layer. A disposable gate structure and a gate spacer are formed over the fin mask structures. Employing the disposable gate structure and the gate spacer as an etch mask, physically exposed portions of the fin mask structures and the semiconductor material portion are removed by an etch. A source region and a drain region are formed by selective epitaxy of a semiconductor material from physically exposed surfaces of the crystalline insulator layer. The disposable gate structure is removed selective to the source region and the drain region. Semiconductor fins are formed by anisotropically etching portions of the semiconductor material portion, employing the gate spacer and the fin mask structures as etch masks. A gate dielectric and a gate electrode are formed within the gate cavity.
    Type: Application
    Filed: November 19, 2015
    Publication date: March 17, 2016
    Inventors: Anirban Basu, Guy M. Cohen, Amlan Majumdar
  • Patent number: 9287362
    Abstract: An approach to forming a semiconductor structure for a vertical field effect transistor with a controlled gate overlap. The approach includes forming on a semiconductor substrate, a first semiconductor layer, a second semiconductor layer, a third semiconductor layer, a fourth semiconductor layer, a fifth semiconductor layer, and a first dielectric layer. The etched first dielectric layer and a first drain contact are surrounded by a first spacer. The first drain contact is composed of the fifth semiconductor layer. A second drain contact composed of the fourth semiconductor layer, a channel composed of the third semiconductor layer, and a second source contact composed of the second semiconductor layer are formed. Additionally, first source contact composed of the first semiconductor is formed and a gate electrode is formed on a portion of the first source contact layer surrounding a portion of the first pillar and the second pillar.
    Type: Grant
    Filed: November 21, 2014
    Date of Patent: March 15, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Cheng-Wei Cheng, Wilfried E. Haensch, Amlan Majumdar, Kuen-Ting Shiu
  • Patent number: 9287360
    Abstract: A method for fabricating a III-V nanowire. The method may include providing a semiconductor substrate, which includes an insulator, with a wide-bandgap layer on the top surface of the semiconductor substrate; etching the insulator to suspend the wide-bandgap layer; growing a compositionally-graded channel shell over the wide-bandgap layer; forming a gate structure forming spacers on the sidewalls of the gate structure; and forming a doped raised source drain region adjacent to the spacers.
    Type: Grant
    Filed: January 7, 2015
    Date of Patent: March 15, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Guy M. Cohen, Amlan Majumdar, Jeffrey W. Sleight
  • Patent number: 9275546
    Abstract: Systems and methods for providing a user with information on spaces in which to park a vehicle are provided. A method for providing a user with information on spaces in which to park a vehicle, comprises identifying one or more spaces in which to park the vehicle, selecting valid spaces from the identified one or more spaces based on a validation criteria, and ranking the valid spaces and providing a ranked list of the valid spaces to the user, wherein the identifying, selecting, ranking and providing steps are performed by a computer system comprising a memory and at least one processor coupled to the memory.
    Type: Grant
    Filed: February 28, 2014
    Date of Patent: March 1, 2016
    Assignee: International Business Machines Corporation
    Inventors: Aleksandr Y. Aravkin, Anirban Basu, Dimitri Kanevsky, Tara N. Sainath, Premal Y. Shah
  • Patent number: 9276077
    Abstract: A metallization scheme employing a first refractory metal barrier layer, a Group IIIA element layer, a second refractory metal barrier layer, and an oxidation-resistant metallic layer is employed to form a source region and a drain region that provide electrical contacts to a compound semiconductor material layer. The first and second refractory metal barrier layer are free of nitrogen, and thus, do not introduce additional nitrogen into the compound semiconductor layer, while allowing diffusion of the Group IIIA element to form locally doped regions underneath the source region and the drain region. Ohmic contacts may be formed at a temperature as low as about 500° C. This enables fabrication of FET whose source and drain are self-aligned to the gate.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: March 1, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventor: Anirban Basu
  • Patent number: 9270940
    Abstract: A method comprises obtaining an input comprising audio and visual data for display on a first device, receiving data associated with one or more sensory properties of one or more objects in the input, and reconstructing the one or more sensory properties at the first device based on the data received.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: February 23, 2016
    Assignee: International Business Machines Corporation
    Inventors: Aleksandr Y. Aravkin, Anirban Basu, Dimitri Kanevsky, Tara N. Sainath
  • Publication number: 20160048997
    Abstract: Systems and methods for generating a tactile representation of an object are provided. A method for generating a tactile representation of an object, comprises obtaining a microscopic image of a surface of the object, processing data corresponding to the image to generate a roughness pattern for the object based on the image, calibrating the roughness pattern with a predetermined material, and simulating the roughness pattern on an electronic device.
    Type: Application
    Filed: August 18, 2014
    Publication date: February 18, 2016
    Inventors: Aleksandr Y. Aravkin, Anirban Basu, Dimitri Kanevsky, Tara N. Sainath
  • Patent number: 9263260
    Abstract: A semiconductor device comprising a suspended semiconductor nanowire inner gate and outer gate. A first epitaxial dielectric layer surrounds a nanowire inner gate. The first epitaxial dielectric layer is surrounded by an epitaxial semiconductor channel. The epitaxial semiconductor channel surrounds a second dielectric layer. A gate conductor surrounds the second dielectric layer. The gate conductor is patterned into a gate line and defines a channel region overlapping the gate line. The semiconductor device contains source and drain regions adjacent to the gate line.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: February 16, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Guy M. Cohen, Amlan Majumdar, Jeffrey W. Sleight
  • Patent number: 9263464
    Abstract: Disposable gate structures and a planarization dielectric layer are formed over doped semiconductor material portions on a crystalline insulator layer. Gate cavities are formed by removing the disposable gate structures selective to the planarization dielectric layer. Doped semiconductor material portions are removed from underneath the gate cavities to provide pairs of source and drain regions separated by a gate cavity. Within a first gate cavity, a faceted crystalline dielectric material portion is grown from a physically exposed surface of the crystalline insulator layer, while a second gate is temporarily coated with an amorphous material layer. A contoured semiconductor region is epitaxially grown on the faceted crystalline dielectric material portion in the first gate cavity, while a planar semiconductor region is epitaxially grown in the second gate cavity. The semiconductor regions can provide at least one contoured channel region and at least one planar channel region.
    Type: Grant
    Filed: May 5, 2014
    Date of Patent: February 16, 2016
    Assignee: International Business Machines Corporation
    Inventors: Anirban Basu, Pouya Hashemi
  • Patent number: 9231094
    Abstract: Portions of a top compound semiconductor layer are recessed employing a gate electrode as an etch mask to form a source trench and a drain trench. A low temperature epitaxy process is employed to deposit a semiconductor material including at least one elemental semiconductor material in the source trench and the drain trench. Metallization is performed on physically exposed surfaces of the elemental semiconductor material portions in the source trench and the drain trench by depositing a metal and inducing interaction with the metal and the at least one elemental semiconductor material. A metal semiconductor alloy of the metal and the at least one elemental semiconductor material can be performed at a temperature lower than 600° C. to provide a high electron mobility transistor with a well-defined device profile and reliable metallization contacts.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: January 5, 2016
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Anirban Basu, Bahman Hekmatshoartabari, Davood Shahrjerdi