Patents by Inventor Armin Willmeroth

Armin Willmeroth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090085064
    Abstract: A semiconductor device includes a first semiconductor substrate of a first band-gap material and a second semiconductor substrate of a second band-gap material. The second band-gap material has a lower band-gap than the first band-gap material. A heterojunction is formed between the first semiconductor substrate and the second semiconductor substrate substantially in a first plane. The semiconductor device further includes, in a cross-section which is perpendicular to the first plane, a first semiconductor region of a first conductivity type and a second semiconductor region of the first conductivity type both of which extend from the second semiconductor substrate at least partially into the first semiconductor substrate.
    Type: Application
    Filed: September 27, 2007
    Publication date: April 2, 2009
    Applicant: Infineon Technologies Austria AG
    Inventors: Michael Rueb, Michael Treu, Armin Willmeroth, Franz Hirler
  • Patent number: 7459365
    Abstract: The fabrication of a semiconductor component having a semiconductor body in which is arranged a very thin dielectric layer having sections which run in the vertical direction and which extend very deeply into the semiconductor body is disclosed. In one method a trench is formed in a drift zone region proceeding from the front side of a semiconductor body, a sacrificial layer is produced on at least a portion of the sidewalls of the trench and at least a portion of the trench is filled with a semiconductor material which is chosen such that the quotient of the net dopant charge of the semiconductor material in the trench and the total area of the sacrificial layer on the sidewalls of the trench between the semiconductor material and the drift zone region is less than the breakdown charge of the semiconductor material, and the sacrificial layer is replaced with a dielectric.
    Type: Grant
    Filed: September 29, 2006
    Date of Patent: December 2, 2008
    Assignee: Infineon Technologies Austria AG
    Inventors: Michael Rüb, Herbert Schäfer, Armin Willmeroth, Anton Mauder, Stefan Sedlmaier, Roland Rupp, Manfred Pippan, Hans Weber, Frank Pfirsch, Franz Hirler, Hans-Joachim Schulze
  • Patent number: 7446373
    Abstract: A semiconductor component and also a method for producing it are disclosed. In one embodiment, the semiconductor component includes a surface region or a modified doping region is provided alternatively or simultaneously in the edge region of the cell array, in which surface region or modified doping region the doping concentration is lowered and/or in which surface region or modified doping region the conductivity type is formed such that it is opposite to the conductivity type of the actual semiconductor material region, or in which a field plate region is provided.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: November 4, 2008
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Rudolf Zelsacher, Franz Hirler, Dietmar Kotz, Hermann Peri, Armin Willmeroth
  • Publication number: 20080265318
    Abstract: A semiconductor component includes a surface region. A modified doping region is provided in the edge region of the cell array. In the surface region or modified doping region the doping concentration is lowered and/or in the surface region or modified doping region the conductivity type is formed such that it is opposite to the conductivity type of the actual semiconductor material region, or in which a field plate region is provided.
    Type: Application
    Filed: July 3, 2008
    Publication date: October 30, 2008
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Markus Zundel, Rudolf Zelsacher, Franz Hirler, Dietmar Kotz, Hermann Peri, Armin Willmeroth
  • Publication number: 20080265320
    Abstract: A component arrangement including a MOS transistor having a field electrode is disclosed. One embodiment includes a gate electrode, a drift zone and a field electrode, arranged adjacent to the drift zone and dielectrically insulated from the drift zone by a dielectric layer a charging circuit, having a rectifier element connected between the gate electrode and the field electrode.
    Type: Application
    Filed: January 24, 2008
    Publication date: October 30, 2008
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Anton Mauder, Stefan Sedlmaier, Franz Hirler, Armin Willmeroth, Gerhard Noebauer
  • Publication number: 20080246055
    Abstract: A semiconductor component comprising a monocrystalline semiconductor body, and to a method for producing the same is disclosed. In one embodiment, the semiconductor body has a semiconductor component structure with regions of a porous-mono crystalline semiconductor.
    Type: Application
    Filed: October 4, 2007
    Publication date: October 9, 2008
    Applicant: Infineon Technologies Austria AG
    Inventors: Hans-Joachim Schulze, Anton Mauder, Armin Willmeroth
  • Publication number: 20080237701
    Abstract: A semiconductor component includes a semiconductor body having an edge with an edge zone of a first conductivity type. Charge compensation regions of a second conductivity type are embedded into the edge zone, with the charge compensation regions extending from a top side of the semiconductor component vertically into the semiconductor body. For the number Ns of charge carriers present in a volume Vs between two charge compensation regions that are adjacent in a direction perpendicular to the edge, and for the number Np of charge carriers present in a volume Vp between two charge compensation regions that are adjacent in a direction parallel to the edge, Np>Ns holds true.
    Type: Application
    Filed: October 3, 2007
    Publication date: October 2, 2008
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Michael Rueb, Carolin Tolksdorf, Markus Schmitt
  • Publication number: 20080203470
    Abstract: A transistor is provided which includes a lateral compensation component. The lateral compensation component includes a plurality of n (or n?) layer/p (or p?) layer pairs, wherein adjacent ones of said pairs are separated by one of an insulator region and/or an intrinsic silicon region.
    Type: Application
    Filed: February 28, 2007
    Publication date: August 28, 2008
    Applicant: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Michael Rueb, Holger Kapels, Carolin Tolksdorf, Giulliano Rocco Aloise
  • Publication number: 20080197441
    Abstract: A semiconductor component with vertical structures having a high aspect ratio and method. In one embodiment, a drift zone is arranged between a first and a second component zone. A drift control zone is arranged adjacent to the drift zone in a first direction. A dielectric layer is arranged between the drift zone and the drift control zone wherein the drift zone has a varying doping and/or a varying material composition at least in sections proceeding from the dielectric.
    Type: Application
    Filed: January 29, 2008
    Publication date: August 21, 2008
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Anton Mauder, Helmut Strack, Armin Willmeroth, Hans-Joachim Schulze
  • Publication number: 20080197380
    Abstract: A semiconductor component is disclosed herein comprising a drift zone and a drift control zone. The drift control zone is arranged adjacent to the drift zone and is dielectrically insulated from the drift zone by a dielectric layer. The drift control zone includes at least one first semiconductor layer and one second semiconductor layer. The first semiconductor layer has a higher charge carrier mobility than the second semiconductor layer.
    Type: Application
    Filed: February 15, 2007
    Publication date: August 21, 2008
    Applicant: Infineon Technologies Austria AG
    Inventors: Stefan Sedlmaier, Anton Mauder, Armin Willmeroth, Franz Hirler
  • Publication number: 20080179670
    Abstract: A component arrangement including a MOS transistor having a field electrode is disclosed. One embodiment includes a gate electrode, a drift zone and a field electrode, arranged adjacent to the drift zone and dielectrically insulated from the drift zone by a dielectric layer a charging circuit, having a rectifier element connected between the gate electrode and the field electrode.
    Type: Application
    Filed: January 29, 2008
    Publication date: July 31, 2008
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Armin Willmeroth, Franz Hirler
  • Publication number: 20080179672
    Abstract: A semiconductor component is described. In one embodiment, the semiconductor component includes a semiconductor body with a first side and a second side. A drift zone is provided, which is arranged in the semiconductor body below the first side and extends in a first lateral direction of the semiconductor body between a first and a second doped terminal zone. At least one field electrode is provided, which is arranged in the drift zone, extends into the drift zone proceeding from the first side and is configured in a manner electrically insulated from the semiconductor body.
    Type: Application
    Filed: January 25, 2008
    Publication date: July 31, 2008
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Franz Hirler, Armin Willmeroth, Markus Schmitt, Carolin Tolksdorf, Gerald Deboy, Ralf Henninger
  • Publication number: 20080150073
    Abstract: A charge compensation component having a drift path between two electrodes, an electrode and a counterelectrode, and methods for producing the same. The drift path has drift zones of a first conduction type and charge compensation zones of a complementary conduction type with respect to the first conduction type. A drift path layer doping comprising the volume integral of the doping locations of a horizontal drift path layer of the vertically extending drift path including the drift zone regions and charge compensation zone regions arranged in the drift path layer is greater in the vicinity of the electrodes than in the direction of the centre of the drift path.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 26, 2008
    Applicant: Infineon Technologies Austria AG
    Inventors: Armin Willmeroth, Anton Mauder, Stefan Sedlmaier
  • Publication number: 20080135871
    Abstract: A semiconductor component is disclosed. One embodiment provides a semiconductor body having a cell region with at least one zone of a first conduction type and at least one zone of a second conduction type in a rear side. A drift zone of the first conduction type in the cell region is provided. The drift zone contains at least one region through which charge carriers flow in an operating mode of the semiconductor component in one polarity and charge carriers do not flow in an operating mode of the semiconductor component in an opposite polarity.
    Type: Application
    Filed: October 25, 2007
    Publication date: June 12, 2008
    Applicant: INFINEON TECHNOLOGIES AUSTRIA AG
    Inventors: Holger Ruething, Frank Pfirsch, Armin Willmeroth, Frank Hille, Hans-Joachim Schulze
  • Publication number: 20080067626
    Abstract: A semiconductor device, in which a first trench section is produced proceeding from a surface of a semiconductor body into the semiconductor body. A semiconductor layer is produced above the surface and above the first trench section. A further trench section is produced in the semiconductor layer in such a way that the first trench section and the further trench section form a continuous trench structure.
    Type: Application
    Filed: August 6, 2007
    Publication date: March 20, 2008
    Applicant: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Thoralf Kautzsch, Anton Mauder, Michael Rueb, Hans-Joachim Schulze, Helmut Strack, Armin Willmeroth
  • Patent number: 7332788
    Abstract: The invention relates to a semiconductor power device with charge compensation structure and monolithic integrated circuit, and method for fabricating it. In the case of this semiconductor power device, zones (6) in charge compensation cells (27) that are arranged vertically and doped complimentarily to the semiconductor chip volume (5) are arranged in the entire chip volume, the complimentarily doped zones (6) extending right into surface regions (11) of the semiconductor power elements (7) and not projecting into surface regions (12) of semiconductor surface elements (1).
    Type: Grant
    Filed: August 26, 2004
    Date of Patent: February 19, 2008
    Assignee: Infineon Technologies AG
    Inventors: Dirk Ahlers, Miguel Cuadron Marion, Uwe Wahl, Armin Willmeroth
  • Publication number: 20070176229
    Abstract: An integrated circuit and component is disclosed. In one embodiment, the component is a compensation component, configuring the compensation regions in the drift zone in V-shaped fashion in order to achieve a convergence of the space charge zones from the upper to the lower end of the compensation regions is disclosed.
    Type: Application
    Filed: January 16, 2007
    Publication date: August 2, 2007
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Armin Willmeroth, Holger Kapels
  • Publication number: 20070108513
    Abstract: The fabrication of a semiconductor component having a semiconductor body in which is arranged a very thin dielectric layer having sections which run in the vertical direction and which extend very deeply into the semiconductor body is disclosed. In one method a trench is formed in a drift zone region proceeding from the front side of a semiconductor body, a sacrificial layer is produced on at least a portion of the sidewalls of the trench and at least a portion of the trench is filled with a semiconductor material which is chosen such that the quotient of the net dopant charge of the semiconductor material in the trench and the total area of the sacrificial layer on the sidewalls of the trench between the semiconductor material and the drift zone region is less than the breakdown charge of the semiconductor material, and the sacrificial layer is replaced with a dielectric.
    Type: Application
    Filed: September 29, 2006
    Publication date: May 17, 2007
    Applicant: Infineon Technologies Austria AG
    Inventors: Michael Rub, Herbert Schafer, Armin Willmeroth, Anton Mauder, Stefan Sedlmaier, Roland Rupp, Manfred Pippan, Hans Weber, Frank Pfirsch, Franz Hirler, Hans-Joachim Schulze
  • Publication number: 20070108512
    Abstract: The invention relates to a power semiconductor component (1) with charge compensation structure (3) and a method for the fabrication thereof. For this purpose, the power semiconductor component (1) has a semiconductor body (4) having a drift path (5) between two electrodes (6, 7). The drift path (5) has drift zones of a first conduction type, which provide a current path between the electrodes (6, 7) in the drift path, while charge compensation zones (11) of a complementary conduction type constrict the current path of the drift path (5). For this purpose, the drift path (5) has two alternately arranged, epitaxially grown diffusion zone types (9, 10), the first drift zone type (9) having monocrystalline semiconductor material on a monocrystalline substrate (12), and a second drift zone type (10) having monocrystalline semiconductor material in a trench structure (13), with complementarily doped walls (14, 15), the complementarily doped walls (14, 15) forming the charge compensation zones (11).
    Type: Application
    Filed: October 25, 2006
    Publication date: May 17, 2007
    Inventors: Stefan Sedlmaier, Hans-Joachim Schulze, Anton Mauder, Helmut Strack, Armin Willmeroth, Frank Pfirsch
  • Publication number: 20070023830
    Abstract: A semiconductor component having a semiconductor body is disclosed. In one embodiment, the semiconductor component includes a drift zone of a first conductivity type, a drift control zone composed of a semiconductor material which is arranged adjacent to the drift zone at least in places, a dielectric which is arranged between the drift zone and the drift control zone at least in places. A quotient of the net dopant charge of the drift control zone, in an area adjacent to the accumulation dielectric and the drift zone, divided by the area of the dielectric arranged between the drift control zone and the drift zone is less than the breakdown charge of the semiconductor material in the drift control zone.
    Type: Application
    Filed: May 17, 2006
    Publication date: February 1, 2007
    Inventors: Frank Pfirsch, Armin Willmeroth, Anton Mauder, Stefan Sedlmaier